JP2003134733A - 磁気軸受モータ及び該モータを使用したエキシマレーザ装置 - Google Patents

磁気軸受モータ及び該モータを使用したエキシマレーザ装置

Info

Publication number
JP2003134733A
JP2003134733A JP2001318218A JP2001318218A JP2003134733A JP 2003134733 A JP2003134733 A JP 2003134733A JP 2001318218 A JP2001318218 A JP 2001318218A JP 2001318218 A JP2001318218 A JP 2001318218A JP 2003134733 A JP2003134733 A JP 2003134733A
Authority
JP
Japan
Prior art keywords
motor
magnetic bearing
electromagnet
magnetic
rotating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001318218A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003134733A5 (enExample
Inventor
Shinichi Sekiguchi
信一 関口
Hiroyasu Kawashima
浩康 河嶌
Kazuki Sato
一樹 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2001318218A priority Critical patent/JP2003134733A/ja
Publication of JP2003134733A publication Critical patent/JP2003134733A/ja
Publication of JP2003134733A5 publication Critical patent/JP2003134733A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Lasers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP2001318218A 2001-10-16 2001-10-16 磁気軸受モータ及び該モータを使用したエキシマレーザ装置 Pending JP2003134733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001318218A JP2003134733A (ja) 2001-10-16 2001-10-16 磁気軸受モータ及び該モータを使用したエキシマレーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001318218A JP2003134733A (ja) 2001-10-16 2001-10-16 磁気軸受モータ及び該モータを使用したエキシマレーザ装置

Publications (2)

Publication Number Publication Date
JP2003134733A true JP2003134733A (ja) 2003-05-09
JP2003134733A5 JP2003134733A5 (enExample) 2004-12-02

Family

ID=19135965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001318218A Pending JP2003134733A (ja) 2001-10-16 2001-10-16 磁気軸受モータ及び該モータを使用したエキシマレーザ装置

Country Status (1)

Country Link
JP (1) JP2003134733A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3235934A1 (de) * 2016-04-19 2017-10-25 Saurer Germany GmbH & Co. KG Spinnrotorschaft, lageranordnung zum aktiven magnetischen lagern eines solchen spinnrotorschafts und spinnrotorantriebseinrichtung
CN115664106A (zh) * 2022-10-25 2023-01-31 江苏远东电机制造有限公司 一种磁悬浮直线旋转电机

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3235934A1 (de) * 2016-04-19 2017-10-25 Saurer Germany GmbH & Co. KG Spinnrotorschaft, lageranordnung zum aktiven magnetischen lagern eines solchen spinnrotorschafts und spinnrotorantriebseinrichtung
CN107304785A (zh) * 2016-04-19 2017-10-31 索若德国两合股份有限公司 纺纱杯轴、用于主动磁支承的轴承装置和纺纱杯驱动装置
CN115664106A (zh) * 2022-10-25 2023-01-31 江苏远东电机制造有限公司 一种磁悬浮直线旋转电机

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