JP2003131403A - Device for fixing translucent plate for mask and method for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for fixing light translucent plate for a mask which does not give rise to dents or warpage, etc., in the light translucent plate for the mask, makes a fixing operation easy and does not take labor for adjustment work and a method for the same. SOLUTION: The device 1 for fixing the light translucent plate MK for the mask arranged to face a substrate of an exposure device is provided with a light translucent plate guide frame 2 for supporting the light translucent plate for the mask, an expansion and contraction member 10 disposed in a position opposite to this light translucent plate guide frame 2 and the light translucent plate MK for the mask and air feeding and discharging means 20 for expanding and contracting this expansion and contraction member.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mask translucent plate fixing device and a method for fixing a mask translucent plate used in an exposure operation to a work such as a printed wiring board. .

[Prior art]

Generally, when performing an exposure operation using an exposure device to form a predetermined pattern on a work such as a printed wiring board, a mask having the predetermined pattern is faced with the work, and the mask and the work are brought close to each other or The pattern of the mask is exposed and formed on the work by bringing them into close contact with each other and irradiating ultraviolet rays of a predetermined wavelength.

The mask used in this exposure apparatus is formed in a film shape and held by a light-transmitting plate, or is held by the light-transmitting plate as a glass dry plate in which a predetermined pattern is directly formed on the light-transmitting plate such as glass. Then, in the state of the mask translucent plate, the mask translucent plate fixing device is set to the exposure processing position facing the work.

The mask light-transmitting plate fixing device includes a light-transmitting plate guide frame for supporting the mask light-transmitting plate, and fixing means arranged on each side of the light-transmitting plate guide frame. As an example of the fixing means of the transparent plate fixing device for a mask, a pressing portion locally presses the transparent plate for a mask by operating a handle (a toggle clamp or the like) installed on each side of the transparent plate guide frame. It is configured to be pressed against the transparent plate guide frame side.

Further, the fixing means of the transparent plate fixing device for the mask has another structure, for example, the pressing frame provided on each side of the transparent plate guide frame is tightened with a screw to fix the transparent plate for the mask. There are known ones that are pressed, and ones that fix the transparent plate for a mask with several lock cylinders provided on each side of the transparent plate guide frame.

[0006]

However, there is room for further improvement in the structure of the conventional transparent plate fixing device for a mask. (1) In the conventional mask light-transmitting plate fixing device, the mask light-transmitting plate is pressed and fixed by the fixing means arranged on each side of the light-transmitting plate guide frame, so that the mask is in a point-like fixed state. The pressing force on the mask translucent plate is large at the portion pressed by each fixing means, and the pressing force is small at the part without the fixing means, and the pressing state applied to the entire mask translucent plate varies. Will end up. As a result, the mask translucent plate was indented or warped.

(2) The conventional transparent plate fixing device for a mask is
Since it is necessary to operate each fixing means of the light-transmitting plate guide frame, the operability of fixing the mask light-transmitting plate is poor, and the structure of the fixing means is complicated and the wear state of each fixing means varies. Therefore, it takes a lot of time and effort to adjust the mask translucent plate evenly.

The present invention was devised in view of the above-mentioned problems. It does not cause depressions or warps in the mask translucent plate, and the fixing operation is easy and the adjustment work is performed. It is an object of the present invention to provide a transparent plate fixing device for a mask and a method thereof, which does not require much labor.

[0009]

The present invention has the following structure in order to solve the above problems. That is, a mask light-transmitting plate fixing device for fixing a mask light-transmitting plate arranged facing a substrate in an exposure device, the light-transmitting plate guide frame supporting the mask light-transmitting plate, and the light-transmitting plate guide frame. The optical plate guide frame and the stretchable member provided at a position facing the mask translucent plate, and the air supply / discharge means for stretching and shrinking the stretchable member are provided.

With this structure, the mask translucent plate fixing device arranges the mask translucent plate in the translucent plate guide frame, and the translucent plate guide facing the mask translucent plate. Air is supplied to the elastic member provided between the frame and the frame by the air supply / discharge means. Therefore, the light-transmitting plate for a mask is pressed and fixed to the light-transmitting plate guide frame by the expansion and contraction member of the mask expanding from the contracted state to the expanded state. The light-transmitting plate for a mask has a structure in which a mask film is held on the light-transmitting plate, or a structure in which a predetermined pattern of a mask is directly provided on the light-transmitting plate. As a mode in which the elastic member is provided, it is placed in contact with the translucent plate guide frame by being inflated to some extent and not particularly fixed, or alternatively, the translucent plate guide frame is provided with an adhesive or the like. Or when fixing to either one of the transparent plate for mask,
In some cases, the installation position is maintained by locking via a locking portion formed on the transparent plate guide frame or the mask transparent plate.

A mask light-transmitting plate fixing device for fixing the mask light-transmitting plate disposed facing the substrate in the exposure device, and a light-transmitting plate guide frame for supporting the mask light-transmitting plate. An attaching portion provided along the facing portion of the light transmitting plate guide frame facing the light transmitting plate for the mask; an elastic member installed on the attaching portion; and an air supply for expanding and contracting the elastic member. And a discharging means.

With such a structure, the mask translucent plate fixing device has the mask translucent plate arranged on the translucent plate guide frame and mounted on the facing portion of the translucent plate guide frame. The stretchable member installed in the section is expanded by the air supply and discharge means, and the mask translucent plate is fixed. Since the elastic member is installed on the mounting portion provided on the translucent plate guide frame, the installation position can be maintained even when the air is completely discharged and contracted.

Further, in the mask translucent plate fixing device, the mounting portion is formed in a groove shape, and the elastic member is installed in the groove and expands from the groove when expanded. It was configured so that it was taken out and pressed against the transparent plate.

With such a structure, the mask translucent plate fixing device has the elastic member installed in the groove-shaped mounting portion provided on the facing portion of the translucent plate guide frame, and the elastic member is in a contracted state. In this case, the mask is housed in the groove, and in the expanded state, it swells out of the groove to press and fix the mask translucent plate to the translucent plate guide frame.

Further, in the mask translucent plate fixing device, the elastic member has a fixing portion for fixing to the mounting portion, and an air storage portion provided in the fixing portion. With this structure, the elastic member of the mask translucent plate fixing device supplies or discharges air to or from the accommodating unit by the air supply / exhaust unit in a state where the fixing unit is fixed to the translucent plate guide frame. .

In the mask light-transmitting plate fixing device, the elastic member is provided on the facing portion on the light supply side which is incident on the light-transmitting plate. With such a configuration, the mask translucent plate fixed to the translucent plate guide frame by the mask translucent plate fixing device is arranged on the side of the work, and is vacuumed with the work during the exposure operation and the alignment recognition operation. It is convenient for close contact.

Further, there is provided a mask fixing method for fixing a transparent plate for a mask to a transparent plate guide frame arranged facing a holding portion of a substrate in an exposure apparatus, wherein the transparent plate for a mask is In the first step of arranging on the transparent plate guide frame, the elastic member provided in advance on the transparent plate guide frame is stretched through the air supply / discharge means at the periphery of the arranged transparent plate for mask, A second step of pressing the light-transmitting plate for the mask against the light-transmitting guide is adopted.

With this structure, in the mask fixing method, the mask translucent plate is arranged on the translucent plate guide frame, and the mask translucent plate is fixed to the translucent plate guide frame through the elastic member. Since it is pressed, the elastic member presses the translucent plate with uniform pressure.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an exploded perspective view schematically showing the entire transparent plate fixing device for a mask, and FIG. 2 is a front elevation sectional view showing a state in which a transparent plate guide frame of the transparent plate fixing device for a mask is partially sectioned. FIG. 3 is a side sectional view showing a transparent plate guide frame of the mask transparent plate fixing device. The mask light-transmitting plate may be installed horizontally or vertically at the exposure position. Here, the case where the mask light-transmitting plate is installed vertically will be described as an example.

As shown in FIGS. 1 to 3, the mask translucent plate fixing device 1 includes a translucent plate guide frame 2 for supporting the mask translucent plate Mk, the translucent plate guide frame 2 and the mask. A tube-shaped silicone rubber 10 as an elastic member provided between the transparent plate Mk and an air supply / discharge means 20 for supplying and discharging air to the silicone rubber 10.
And a vacuum pump 21A.

The light-transmitting plate guide frame 2 is formed in a frame shape having a large center penetrating on the front side, and has an insertion opening 7 for the light-transmitting plate Mk for a mask on the side surface and a mask inserted from this insertion opening 7. The installation storage part 8 for disposing the transparent plate Mk for use. Further, the light-transmitting plate guide frame 2 includes facing portions 3 and 4 facing the peripheral edges of the front and back surfaces of the mask light-transmitting plate Mk housed in the installation housing unit 8, and the peripheral side surfaces of the mask light-transmitting plate Mk. The peripheral side part 5 facing each other, a groove 6 as an attachment part formed along the facing part 3, and a silicone rubber 10 installed in the groove 6 are provided.

As shown in FIG. 3, the transmissive plate guide frame 2 is installed and accommodated in the accommodating portion 8 such that the accommodating portion has a lateral width accommodating distance such that a gap d is provided with respect to the thickness width of the mask translucent plate Mk. D is set. The storage lateral width D of the installation storage portion 8 is set so that when the silicone rubber 10 in the groove 6 is swelled by supplying air, the silicone rubber 10 can press and fix the mask translucent plate Mk. There is. The gap d can be accommodated in the groove 6 without protruding toward the facing portion 3 side when the silicone rubber 10 installed in the groove 6 is in the contracted state, and the mask light-transmitting plate Mk is inserted into the insertion opening 7.
From the above, it is not necessary to form the gap d as long as it is smoothly stored.

Further, the groove 6 of the transparent plate guide frame 2 is formed on the light supply side when performing the exposure process and along the periphery of the transparent plate guide frame. The cross-sectional shape of the groove 6 is formed corresponding to the shape of the silicone rubber 10, and is shown here as a quadrangle, but the cross-sectional shape of the silicone rubber 10 has a curved surface such as a circular shape or an elliptical shape. If it is formed as a thing, it may have a semicircular shape that matches the curved surface.

The depth dimension of the groove 6 is such that when the silicone rubber 10 is in a contracted state, the depth of the silicone rubber 1 is reduced.
0 can be stored in the groove, and the silicone rubber 10 is formed so as to bulge out from the groove 10 when air is supplied to the silicone rubber 10 and the silicone rubber 10 is in an expanded state.

As shown in FIG. 3, the positional relationship between the groove 6 and the facing portion 4 is such that the position of the groove 6 is inside the edge portion where the facing portion 4 is formed in the drawing. If the mask translucent plate Mk can be evenly pressed when the rubber 10 is supplied with air and is in an expanded state, the groove 6 may be at a position facing the facing portion 4, etc.
It is not particularly limited.

The translucent plate guide frame 2 is provided with a flap 9 which can be opened and closed with respect to the insertion opening 7 on the side surface thereof. The flap 9 is disposed on the side surface of the translucent plate guide frame 2 so as to be engageable and disengageable by an engagement mechanism (not shown).
The transparent plate guide frame 2 may be used as an exposure frame for a mask during an exposure operation, or may be used as an exposure frame for a mask when combined with another configuration not shown.

As shown in FIGS. 1 and 3, the silicone rubber 10 includes a fixing portion 11 formed in a band shape for fixing in the groove 6, and an air formed in a tube shape continuously from the fixing portion 11. The storage portion 12 and the air storage portion 1 penetrates through the fixed portion 11 to supply air into the air storage portion 12.
2 and a continuous supply connection (not shown).

The silicone rubber 10 is installed along the groove 6 by the adhesive member 13 adhered to the bottom surface of the fixing portion 11. The shape of the silicone rubber 10 is not particularly limited, and is not particularly limited such that the cross-sectional shape is circular. Although the elastic member is made of silicone rubber as the elastic member here, the elastic member does not deteriorate even if the air is repeatedly supplied and discharged to some extent, and the transparent mask plate Mk can be pressed uniformly. If there is, it is not particularly limited.

As shown in FIGS. 1 and 3, the air supply / discharge means 20 includes a vacuum pump 21A and a compressor 21.
, The switching valves 22 and 22, a connection hose 23, etc. are provided, and the connection hose 23 and the supply connection part of the silicone rubber 10 are connected via the hose connection part 15. In addition, it is convenient to configure the hose connection portion 15 to include a check valve (not shown). Further, the compressor 21 and the vacuum pump 21A are equipped with a leak valve (not shown).
The position of the switching valve 22 is not particularly limited.

The transparent plate Mk for a mask shown in FIGS. 1 and 3 comprises a mask film M on which a predetermined pattern is formed,
A transparent plate k, such as quartz glass, soda-lime glass, or acrylic plate, for transmitting ultraviolet rays having a predetermined wavelength is provided for attaching the mask film. The mask light-transmitting plate Mk may have a structure in which a mask having a predetermined pattern is directly formed on the light-transmitting plate k.

Next, a procedure for fixing the mask translucent plate Mk to the mask translucent plate fixing device 1 will be described. Figure 4
(A), (b), (c) is side sectional drawing which shows the procedure of fixing the transparent plate for masks to the transparent plate fixing device for masks.

First, as shown in FIGS. 1 and 4 (a), the flap 9 of the translucent plate guide frame 2 is opened and the mask translucent plate Mk is slid into the installation / accommodation section 8 through the insertion opening 7. Deploy. At this time, it is convenient to set the mask light-transmitting plate Mk so as to be in contact with the facing portion 4 as much as possible. As shown in FIG. 4B, the mask light-transmitting plate M is used.
When k is placed in the installation storage unit 8, the silicone rubber 10 installed in the groove 6 has its air discharged from the air storage unit 12 via the vacuum pump 21A (see FIG. 3). It is in a state of being stored in 6.

As shown in FIGS. 4B and 4C, the mask translucent plate fixing device 1 includes the flap 9 when the mask translucent plate Mk is placed at a predetermined position in the installation / accommodation section 8. When closed, the switching valve 22 is switched and air is supplied from the compressor 20 to the air storage portion 12 of the silicone rubber 10. At this time,
When the mask translucent plate Mk is disposed on the facing portion 4 side, the silicone rubber 10 moves from the groove 6 to the air storage portion 12 thereof.
When bulging out and being pressed, the impact of being pressed by the facing portion 4 is mitigated.

In the mask translucent plate fixing device 1, when air is supplied to the air accommodating part 12 of the silicone rubber 10, the air accommodating part 12 of the silicone rubber 10 bulges out from the groove 6 and the mask translucent plate Mk. Press. At this time, in the air storage portion 12 of the silicone rubber 10, the pressure is constant at any portion where the air pressure presses the mask translucent plate Mk, and the mask translucent plate is in a line contact state instead of a point contact. M
k will be pressed.

Further, in the mask translucent plate fixing device 1, when a predetermined air is supplied from the compressor 21 to the air storage portion 12, the air supply from the compressor 21 is performed by an unloader, a pressure switch (not shown), or the like. It is stopped by the function. The silicone rubber 10 is installed in the groove 6 and in the facing portion 3 on the light supply side, so that the influence of ultraviolet rays irradiated during the exposure operation can be minimized.

When the mask light-transmitting plate Mk is taken out from the light-transmitting plate guide 2 of the mask light-transmitting plate fixing device 1, the changeover valve 22 is changed over and the vacuum pump 21A is changed over to operate the silicone rubber 10. Air storage part 12
The air is extracted from the air, and the air storage portion 12 is contracted and stored in the groove 6. Then, the flap 9 is opened and the mask translucent plate Mk is pulled out from the insertion port 7 of the translucent plate guide 2. As described above, the mask translucent plate fixing device 1 can evenly press and fix the peripheral edge of the mask translucent plate Mk by the silicone rubber (expandable member) 10.

As shown in FIGS. 5 (a) and 5 (b),
The light-transmitting plate for mask Mk2 may have the following configuration. FIGS. 5A and 5B are a side sectional view and a front view showing the mask translucent plate. That is, the transparent plate M for the mask
For k2, the center of the transparent plate k1 is cut off, and the glass dry plate M1 on which the predetermined pattern is formed is fixed at the cut position (for example, adhesive tape and backing plate) T.
It is configured to be fixed by. The fixing means T is a back plate peripheral edge of the mask light-transmitting plate Mk2, and a backing plate (light-transmitting plate) k2 for maintaining the bonding strength so as to cover the bonding position of the light-transmitting plate k1 and the mask plate M1. It has a suction groove S formed in the peripheral edge on the contact surface side between the backing plate k2 and the glass dry plate M1, and an adhesive tape t provided at the joining portion on the front surface side between the glass dry plate M1 and the light transmitting plate k1. ing.

Further, as shown in FIGS. 6 (a) and 6 (b),
The silicone rubber 10A may have the following configuration. That is, the silicone rubber 10 includes a tube-shaped air storage portion 12A and a fixed portion 11A provided at a predetermined interval on the rear side of the air storage portion 12A (the facing portion 3A side). The fixed portion 11A is composed of an engagement portion formed on the tip side and a backbone portion having a diameter smaller than that of the engagement portion. And the transparent plate guide frame 2A
Has a mounting portion 6A of the silicone rubber 10A formed in a hole shape at a predetermined interval on the facing portion 3A.

Therefore, when the silicone rubber 10A is provided between the translucent plate guide frame 2A and the mask translucent plate Mk (Mk2), the engaging portion of the fixed portion 11A of the silicone rubber 10A is forcibly translucent. It is inserted into the mounting portion 6A of the plate guide frame 2A and pushed in.

When the mask is used in a flat state, the silicone rubber is formed as an annular tube so that the mounting portion is not provided between the transparent plate guide and the transparent plate for the mask. Can be provided. Further, the silicone rubber may be attached to the light-transmitting plate for the mask with an adhesive or the like. Further, the silicone rubber may be arranged on the peripheral side portion excluding the flap and fixed by closing the flap portion. Further, although the vacuum pump is also used as the air supply / discharge means, the air may be discharged by rotating the compressor in the reverse direction. In that case, the vacuum pump is not required.

[0041]

Since the present invention is constructed as described above, it has the following excellent effects. (1) The translucent plate fixing device for a mask is configured by fixing the translucent plate for a mask with an elastic member such as silicone rubber.
Since the stretchable member uniformly presses the mask light-transmitting plate in a line contact state, the mask light-transmitting plate can be fixed without indentation or warpage. Furthermore, by holding the mask translucent plate with the line contact, the concentration overload on the mask translucent plate becomes linear when vacuum-contacting the work side, and deformation and damage of the mask translucent plate can be eliminated. . Further, even if the exposure work performed in cooperation with the work side is continuously performed, the mask translucent plate is not deformed or damaged. Further, since the mask light-transmitting plate is pressed by the entire elastic member, the mask light-transmitting plate can be easily fixed, and no adjustment work is required, so that the fixing operation does not take time. The mask translucent plate is evenly pressed and fixed even in the vertical state or the horizontal state.

(2) In the transparent plate fixing device for a mask, the elastic member is installed via the mounting part of the transparent plate guide and the transparent plate for the mask is pressed, so that the position of the elastic member is stable. Thus, it becomes possible to evenly fix the transparent plate for a mask in a state of linear contact.

(3) Since the mask light-transmitting plate fixing device has a groove-shaped mounting portion, the fixing state of the elastic member is stable, and the mask light-transmitting plate is fixed to the light-transmitting plate guide. It is possible to smoothly perform the insertion / removal operation. Further, the thickness of the transparent plate guide can be reduced.
Also, by providing the mounting part on the facing part of the light guide plate on the light supply side, it is possible to minimize the effect of light rays such as ultraviolet rays used during exposure, thus extending the service life of the elastic member. Is possible.

(4) In the method of fixing the transparent plate for mask, the transparent plate for mask is arranged on the transparent plate guide and air is supplied to the expansion / contraction member to uniformly press the transparent plate for mask. Since it can be fixed, the mask translucent plate replacement operation is simple and quick, and does not require any labor.

(5) Since the mask light-transmitting plate fixing device can fix the mask light-transmitting plate in line contact with the mask light-transmitting plate, in particular, when the mask is a glass dry plate, vacuum adhesion to the mask side is ensured. At this time, the concentration overload is reduced, so that the causes for deformation, damage, scratches, and defects can be remarkably eliminated. Also, since the mask translucent plate can be fixed as a line contact, no partial distortion or warpage occurs,
When vacuum-contacting the work side, the mask side and the work side can be vacuum-contacted in a short time without a poor adhesion due to air accumulation and extension of the vacuum time.

(6) Since the mask translucent plate fixing device presses the mask translucent plate with the elastic member, whether the mask translucent plate is installed vertically or horizontally, It becomes possible to press and fix evenly in the state of line contact.

[Brief description of drawings]

FIG. 1 is an exploded perspective view schematically showing the entire transparent plate fixing device for a mask according to the present invention.

FIG. 2 is a front elevational sectional view showing a state in which the translucent plate guide frame of the translucent plate fixing device for a mask according to the present invention is partially sectioned.

FIG. 3 is a side sectional view showing a transparent plate guide frame of the transparent plate fixing device for a mask according to the present invention.

4 (a), (b) and (c) are side sectional views showing a procedure for fixing a mask translucent plate to the mask translucent plate fixing device according to the present invention.

5A and 5B are a side sectional view and a front view showing a mask translucent plate representing another embodiment used in the mask translucent plate fixing device according to the present invention.

6 (a) and 6 (b) are schematic views showing an elastic member and an attachment portion representing another embodiment used in the mask translucent plate fixing device according to the present invention.

[Explanation of symbols]

Translucent plate for Mk mask M mask film k transparent plate d gap D storage width interval 1 Translucent plate fixing device for mask 2 Light guide plate frame 3 Face-to-face 4 Face-to-face 5 lap side 6 groove (mounting part) 7 insertion slot 8 installation storage 9 flaps 10 Silicone rubber (elastic member) 11 Fixed part 12 Air storage 13 Adhesive members 15 Hose connection 20 Compressor (air supply and discharge means) 21 Compressor body 21A Vacuum pump (Air supply and discharge means) 22 Switching valve 23 Connection hose

Claims (6)

[Claims] 1. A mask light-transmitting plate fixing device for fixing a mask light-transmitting plate, which is arranged to face a substrate in an exposure apparatus, and a light-transmitting plate guide frame for supporting the mask light-transmitting plate. A mask light-transmitting member, comprising: the light-transmitting plate guide frame; an elastic member provided at a position facing the mask light-transmitting plate; and an air supply / discharge unit for expanding and contracting the elastic member. Plate fixing device. 2. A mask light-transmitting plate fixing device for fixing a mask light-transmitting plate, which is arranged to face a substrate in an exposure apparatus, and a light-transmitting plate guide frame for supporting the mask light-transmitting plate. An attaching portion provided along the facing portion of the light transmitting plate guide frame facing the light transmitting plate for the mask; an elastic member installed on the attaching portion; and an air supply for expanding and contracting the elastic member. A transparent plate fixing device for a mask, comprising: an ejecting unit. 3. The mounting portion is formed in a groove shape, and the elastic member is installed in the groove, and when expanded, bulges out of the groove and presses the mask translucent plate. The transparent plate fixing device for a mask according to claim 2, wherein the transparent plate fixing device for a mask is formed. 4. The expanding / contracting member includes a fixing portion for fixing to the mounting portion, and an air storage portion provided in the fixing portion, according to claim 2 or 3. A transparent plate fixing device for masks. 5. The stretchable member is provided on the facing portion on the light supply side that is incident on the mask translucent plate, according to any one of claims 1 to 3. Device for fixing transparent plate for mask. 6. A mask fixing method for fixing a mask light-transmitting plate to a light-transmitting plate guide frame arranged facing a substrate holding portion in an exposure apparatus, wherein the mask light-transmitting plate is The first step of arranging on the translucent plate guide frame, and at the peripheral edge of the arranged translucent plate for the mask, the elastic member previously provided on the translucent plate guide frame is expanded through the air supply / discharge means. And a second step of pressing the transparent plate for mask against the transparent guide.