JP2003131022A - Manufacturing method of color filter, color filter, liquid crystal device and electronic equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a color filter which can be manufactured in a simple process, in which position accuracy for a substrate of an alignment mark is high and which can enhance alignment mark pattern formation accuracy when ink is ejected. SOLUTION: The manufacturing method of the color filter is characterized in that it is provided with a partition wall layer formation process for forming a partition wall layer 4 on a reflection layer 3 formed on a substrate 2; an exposure treatment process for exposing the partition wall layer 4 by using a mask, making a part corresponding to an alignment pattern an ink-acceptable alignment area 4a, and making its circumference an ink repelling area 4c by the partition wall layer 4; an alignment mark formation process for discharging a colored ink droplet 15R from a discharge nozzle 16 to an alignment area 4a, and making a colored alignment mark 5; and a color filter formation process for positioning the substrate 2 by using the alignment mark 5, discharging the ink from a discharge nozzle, and forming a plurality of colored layers on the substrate 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a color filter, a color filter, a liquid crystal device, and an electronic device. In particular, the alignment mark is manufactured by manufacturing a colored alignment mark by an inkjet method. The present invention relates to a technique capable of improving the pattern forming accuracy in this case.

[0002]

2. Description of the Related Art In recent years, liquid crystal display devices, which are excellent in downsizing, thickness reduction, energy saving, etc., have been widely used as means for displaying information in electronic devices such as notebook computers, mobile phones, and electronic notebooks. . Recently, along with the colorization of the display section of these electronic devices, a liquid crystal device in which a color filter is arranged on one substrate to enable full-color display has become mainstream. The color filter is glass,
For example, R (red), G (green), and B (blue) colored layers are arranged on the surface of a transparent substrate made of plastic or the like by using various arrangement methods such as a stripe arrangement, a delta arrangement, or a mosaic arrangement. The method of manufacturing this color filter is classified into several methods depending on the material of the colored layer and the manufacturing process, but recently, by ejecting the ink for the colored layer from the nozzle by the inkjet method, An ink jet method for forming a large number of colored layers has been proposed.

Here, a conventional method of manufacturing a color filter by an ink jet method will be described with reference to FIGS. First, as shown in FIG. 12, a reflective layer 1001 and an alignment mark 1002 made of a metal such as an Al alloy or an Ag alloy are formed on a substrate 1000,
A resist layer 1003 is formed to cover the substrate 1000, the reflective layer 1001 and the alignment mark 1002 as a whole. The reflective layer 1001 and the alignment mark 10
02 is obtained by simultaneously patterning a metal thin film such as an Al-based alloy or an Ag-based alloy, and more specifically,
For example, forming a metal thin film of an Al-based alloy or an Ag-based alloy by a sputtering method or a vacuum deposition method, coating a resist layer,
It is manufactured through each process of exposure treatment, etching treatment, and resist layer peeling.

Next, as shown in FIG. 13, a resist layer 10 is formed.
03 is subjected to an exposure process and an etching process to remove a part of the resist layer 1003 to remove the recess 1
004 ... are formed. The concave portions 1004 ...
001 and the bank portion 1005 which is the remaining portion of the resist layer 1003. Next, as shown in FIG. 14, the substrate 1000 for ejecting ink is positioned on the basis of the alignment mark 1002, and then a colored layer is formed from the inkjet head (not shown) to the recesses 1004 at predetermined positions. The ink that is the material for forming the ink is ejected and the ink is dried to form, for example, R in the recesses 1004 at predetermined positions.
A (red) colored layer 1006 is formed.

Next, as shown in FIG. 15, the G (green) colored layer 1007 is processed in the same manner as the R (red) colored layer 1006.
... and the B (blue) colored layer 1008 ...
Are sequentially formed. Each of these colored layers 1006, ...
1007 ..., 1008 ... are separated from other adjacent coloring layers by the bank portion 1005, and therefore the coloring layers do not mix with each other to mix colors. Finally, as shown in FIG. 16, each of these colored layers 1006 ..., 1007 ..., 10
08, and the substrate 1 including the alignment mark 1002
By forming an overcoat layer 1009 made of an acrylic resin, an epoxy resin, or the like on 000, a color filter having predetermined characteristics can be obtained.

[0006]

In the conventional method of manufacturing a color filter, the alignment mark 100 is used.
In order to form 2 and the bank portion 1005, it is necessary to perform the exposure process and the etching process at least twice each, which causes a problem that the manufacturing process tends to be complicated.
In this color filter, the alignment mark needs to be separately formed before the partition layer is patterned. In order to form this alignment mark, it is necessary to pattern only the alignment mark with a metal thin film formed of a metal such as an Al-based alloy or an Ag-based alloy. For that purpose, resist layer coating, exposure treatment, Since steps such as etching treatment and resist layer peeling are required, the number of steps only for forming the alignment mark is increased, which is a factor of increasing the manufacturing cost. Further, since this alignment mark is formed separately from the patterning of the barrier layer, it is unavoidable that the position accuracy has some error with respect to the barrier layer. It was difficult to further improve the alignment mark pattern formation accuracy of the above.

The present invention has been made in view of the above circumstances, and it can be manufactured by a simple process, and the alignment mark has a high positional accuracy with respect to the substrate. As a result, the alignment at the time of ejecting ink is performed. An object of the present invention is to provide a method for manufacturing a color filter that can improve the mark pattern forming accuracy. It is another object of the present invention to provide a color filter having a high positional accuracy of a colored layer and, as a result, high brightness and high visibility in a relatively simple process and at a low cost.

[0008]

In order to achieve the above object, the present invention has the following constitutions. That is, the method for producing a color filter of the present invention is a method for producing a color filter including a plurality of colored layers on a substrate, and a partition wall for forming a partition layer for partitioning the colored layer on one main surface of the substrate. A layer forming step and exposing the partition wall layer using a mask having an alignment pattern to form a portion corresponding to the alignment pattern as an ink-philic alignment area and its periphery as an ink repellent area by the partition layer. And an exposure processing step of dividing the ink into a colored alignment mark by ejecting ink from an ejection nozzle to form an ink droplet on the alignment area, and positioning the substrate using the alignment mark. And a color filter for discharging the ink from the discharge nozzle to form the plurality of colored layers on the substrate. Characterized by comprising a data forming process.

According to this color filter manufacturing method,
After forming the partition wall layer, the partition wall layer is exposed by using a mask having an alignment pattern, and a portion corresponding to the alignment pattern is an ink-philic alignment area and its periphery is an ink-repellent area, and then, Since ink is ejected from the ejection nozzle to form an ink droplet on the alignment area to form a colored alignment mark, it is possible to suppress the spread of the ink droplet by forming the ink droplet only on the alignment area,
A colored alignment pattern can be accurately formed on the partition layer.

Further, when the substrate is positioned, a colored alignment mark is used as a reference for positioning, and then a plurality of colored layers are formed, so that the positional accuracy of the discharge nozzle is increased and the position of the obtained colored layer is increased. The accuracy increases.

The method of manufacturing a color filter according to the present invention is characterized in that the spread of the ink droplet outside the alignment region is suppressed by the adhesion tension between the partition layer and the ink droplet. In the partition wall layer, a region corresponding to each of the plurality of colored layers is an ink-philic region, and a region other than the region is an ink-repellent region.

Since the surface of the ink repellent area has excellent ink repellency, the ink droplets attached to the ink repellent area are sucked into the pixel forming area which is the ink repellent area.
Therefore, there is no possibility that ink droplets will wet the ink repellent area and mix into the adjacent pixel formation area. As a result, it is possible to form the alignment mark that requires higher accuracy than the positional accuracy of the ink droplet.

Further, after ejecting ink of a predetermined color from the ejection nozzle to form the alignment mark,
The substrate is positioned using the alignment mark, and then at least one selected from a plurality of inks is selected.
It is characterized in that the operation of ejecting the kind of ink from the ejection nozzle to form the colored layer of the color is repeated.

A reflective layer is formed on one main surface of the substrate. According to this method for manufacturing a color filter, by forming a reflective layer on the one main surface of the substrate, the shape of the ink droplets and the intervals between the ink droplets are made uniform, and the contrast ratio and visibility of the colored layer are improved. To do. As a result, a highly accurate color filter can be manufactured.

Next, in the color filter of the present invention, a partition layer having alignment marks made of ink is formed on one main surface of the substrate, and a colored layer is formed in a pixel formation region partitioned by the partition layer. It is characterized by According to this color filter, since the colored layer is formed in the pixel formation region partitioned by the partition wall layer with reference to the colored alignment mark formed on the one main surface of the substrate, the positional accuracy of the colored layer is improved. improves.

The alignment mark is formed by ejecting ink from an ejection nozzle to form an ink droplet on an ink-philic alignment region defined by the partition layer. The alignment mark is characterized in that the adhesion tension between the partition layer and the ink droplet suppresses the spread of the ink droplet and spreads the ink droplet only in the alignment region. A reflective layer is formed on one main surface of the substrate.

According to this color filter, the transparent and ink-repellent partition layer suppresses the ink droplets from spreading to the peripheral portion of the alignment mark, so that the accuracy of pattern formation of the alignment mark can be improved. become.

That is, as described above, since the surface of the ink-repellent partition layer has excellent ink repellency, the ink droplets attached to the ink-repellent area are sucked into the pixel forming area which is the ink-philic area. It Therefore, there is no possibility that ink droplets will wet the ink repellent area and mix into the adjacent pixel formation area, and it becomes possible to form an alignment mark that requires higher accuracy than the ink droplet position accuracy.

The liquid crystal device of the present invention is characterized in that the liquid crystal is sandwiched between a pair of opposed substrates, and the color filter of the present invention is formed on either one of these substrates. According to this liquid crystal device, since the color filter in which the positional accuracy of the colored layer is improved is used, it is possible to enhance the contrast ratio and the visibility of the liquid crystal device.

The electronic equipment of the present invention is characterized by including the liquid crystal device of the present invention. According to this electronic device, since the liquid crystal device having an excellent contrast ratio and visibility is provided as the display unit, the visibility of the display unit can be improved.

[0021]

DETAILED DESCRIPTION OF THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 to 11, the scale of each layer and each member is shown differently from the actual one in order to make each layer and each member recognizable in the drawings.

A color filter according to an embodiment of the present invention and a method for manufacturing the same will be described with reference to the drawings.
1 is a plan view showing a color filter according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA of FIG. As shown in FIGS. 1 and 2, the color filter 1 according to the present invention
Are the substrate 2, the reflective layer 3 formed on the entire surface (one main surface) 2a of the substrate 2, the ink-philic alignment region 4a, the ink-philic region 4b, and the repellant layer formed on the reflective layer 3. The partition layer 4 divided into the ink regions 4c, the colored alignment mark 5 formed in the alignment region 4a, and the plurality of colored layers 6 formed in the ink affinity region 4b.
, And a partition layer 4, a colored alignment mark 5, and a plurality of colored layers 6 ... An overcoat layer 7 that covers the entire surface.

The substrate 2 is made of a light transmissive material such as glass or a transparent plastic film, and the reflective layer 3 is formed on the surface 2a of the substrate 2.
The reflective layer 3 is a metal film such as an Al-based alloy or an Ag-based alloy, and its thickness is optional, but preferably 0.1 to 10.
It is in the range of 0.5 μm. The partition layer 4 is made of an ultraviolet (UV) photosensitive resin or the like, and preferably has a contact angle of 30 ° or more with respect to the ink ejected from the inkjet head.

The alignment mark 5 serves as a reference for positioning the substrate 2 when the colored layers 6 ... Are formed by the ink jet method. For example, the surface 2 of the substrate 2 is used.
It is a colored cross formed in the four corners of a and in the center of both sides. This alignment mark 5 is
For example, it is formed by dropping an ink droplet made of acrylic resin or the like colored with a pigment onto the alignment area 4a having a cross shape in plan view and having an affinity for ink, and for example, a red colored layer 6R. It is obtained by dropping and drying the ink droplets used when forming. Note that ink droplets for forming the green colored layer 6G ... or the blue colored layer 6B ... may be used, or ink of a color tone other than this may be used, for example, ink droplets such as magenta.

The colored layer 6 is formed by, for example, dropping an ink droplet made of an acrylic resin or the like colored with a pigment on the ink-affinitive area 4b having a rectangular shape in plan view and drying the ink.
A red colored layer 6R ..., a green colored layer 6G ..., and a blue colored layer 6B ... that respectively correspond to the three primary colors of R (red), G (green), and B (blue) are provided. Here, each colored layer 6R,
6G and 6B are arranged vertically and horizontally. The overcoat layer 7 protects the colored layers 6, ... And also the color filter 1
Is made of a transparent resin such as an acrylic resin or an epoxy resin.

Next, a method of manufacturing the color filter of this embodiment will be described with reference to FIGS. First, FIG.
As shown in FIG. 3, a reflective layer 3 is formed on the substrate 2 by, for example, a sputtering method, a vacuum deposition method, or the like, and the reflective layer 3 is formed on the reflective layer 3.
An ink repellent partition layer 11 made of a fluororesin polymer film or the like is formed. The ink-repellent partition layer 11 is formed so that the surface roughness is preferably 0.3 μm or less. In order to secure this flatness, a flattening treatment such as polishing may be performed separately depending on the case.

Further, a treatment for improving the ink repellency may be performed if necessary. For example, the following method by plasma polymerization is preferably used. First, the ink repellent treatment by the plasma polymerization will be described. In this process, a raw material liquid for the ink repellent process is prepared. As the raw material liquid, a liquid organic compound composed of linear polyfluorocarbon (PFC) such as C ₄ F ₁₀ and C ₈ F ₁₆ is preferably used.

When such a raw material liquid, for example, linear PFC is prepared, the vapor of the linear PFC is introduced into the plasma processing apparatus, and the vapor is converted into plasma. Then, since the linear PFC vapor was turned into plasma,
The bond of the linear PFC is partially cleaved and activated. In this way, some of the bonds were activated and the activated PFC
When the PFC reaches the surface of the reflective film 3,
Are polymerized with each other on the surface of the to form a fluororesin polymer film having ink repellency.

As the raw material liquid for the ink repellent treatment, for example, decatriene can be used. In this case, ink repellency can be imparted to the obtained polymer film by adding CF ₄ or oxygen activated by the plasma treatment, whereby an ink repellent polymer film can be formed. .

Fluorocarbon can also be used as the raw material liquid for the ink repellent treatment. In this case, by adding CF ₄ activated by the plasma treatment, even if a part of the fluorine in the fluorocarbon as the raw material liquid is released by the plasma treatment, the above-mentioned polymerized film capable of obtaining the activated fluorine is obtained. Since it is taken into the inside, the ink repellency of the fluororesin polymer film to be formed can be enhanced.

Next, as shown in FIG. 4, a mask 12 on which a desired pattern is formed in advance, that is, an ink-philic alignment region 4a to be formed and an ink-philic property is formed on the ink-repellent partition layer 11. Ultraviolet (UV) irradiation 13 is performed using a mask 12 having an opening 12a provided at a position corresponding to the region 4b, and the ink repellent partition layer 11 is formed.
The ink-affinitive alignment area 4a and the ink-philic area 4b are formed at desired positions.

In the ink-repellent partition layer 11, the irradiated portion is made to be ink-philic because the fluororesin polymer film is decomposed by the ultraviolet (UV) irradiation 13 and is removed from the surface of the reflective film 3. it can. Therefore, by such an ultraviolet treatment, as shown in FIG. 5, the exposed portion is removed by irradiation with ultraviolet rays to become the ink-philic alignment area 4a and the ink-philic area 4b,
Ink repellent area 4c where a portion not exposed to ultraviolet rays remains
Becomes

From the above, the UV irradiation 13
By using the mask 12 on which the desired patterning is performed in advance, a desired ink-philic pattern can be easily formed at a desired position of the partition wall layer 11 having ink repellency. Therefore, it is possible to form the partition wall layer 4 divided into the ink-philic alignment area 4a, the ink-philic area 4b, and the ink-repellent area 4c.

Next, as shown in FIG. 6, the ink jet head 15 is filled with a red ink prepared by, for example, dissolving a red pigment in an organic solvent together with an acrylic resin, and the ejection nozzle 16 of the ink jet head 15 is closed. The red ink is ejected from the ejection nozzle 16 as an ink droplet 15R having a controlled liquid amount per droplet, facing the ink alignment area 4a, and the ink droplet 15R is predetermined in the ink affinity alignment area 4a. To the position of.

The ink jet head 15 may be of a piezo element type, a thermal type utilizing heat energy, or the like. In addition, any type other than these can be used. This arbitrary method only needs to satisfy the condition that a liquid having a volume of 50 pl or less can be discharged with a landing position accuracy within ± 30 μm.

Next, the substrate 2 is carried into a drying furnace and dried at, for example, 60 ° C. for 3 minutes to volatilize the organic solvent. The drying temperature may be a temperature sufficient to volatilize the organic solvent, and is preferably in the range of 40 to 200 ° C, for example.
The drying time may be about 1 minute or longer. In this way, a red alignment mark having a predetermined shape is formed. As described above, the substrate 2 with the partition layer 4 on which the red alignment mark 5 is formed can be manufactured.

Then, the colored layer 6 is formed on the substrate 2. First, as shown in FIG. 7, the substrate 2 is positioned using the alignment mark 5 on the substrate 2, and then,
For example, while the inkjet head 15 filled with the red ink is relatively moved with respect to the substrate 2, the red ink is ejected from the ejection nozzle 16 as an ink droplet 15R having a controlled liquid amount per droplet. Ink drop 15R
Is attached to the ink-philic area 4b at a desired position.

Then, the substrate 2 is carried into a drying furnace and dried at, for example, 60 ° C. for 3 minutes to volatilize the organic solvent. The drying temperature and time may be a temperature sufficient to volatilize the organic solvent contained in the used ink. For example, in the case of red ink, the same drying temperature and time as the above-mentioned red alignment mark 5 is used. Is applied.
In this way, the red colored layer 5R having a predetermined shape is formed.

Then, as shown in FIG. 8, another ink jet head was filled with a green ink prepared by dissolving a green pigment together with an acrylic resin in an organic solvent, and the same procedure as in the case of the red ink was performed. The ejection nozzle of another ink jet head is made to face the desired ink affinity region 4b of the ink affinity region 4b in which the colored layer 5R is not formed, and while the ink jet head is moved relative to the substrate 2, The green ink is ejected as an ink droplet whose liquid amount per droplet is controlled, and this ink droplet is attached to a predetermined position of the ink-philic area 4b.

Then, the substrate 2 is carried into a drying furnace and dried at 60 ° C. for 3 minutes to volatilize the organic solvent. The drying temperature and time may be a temperature sufficient to volatilize the organic solvent contained in the green ink used, as in the above-described red ink. In this way
The red colored layer 5R having a predetermined shape is formed. The blue colored layer 5B can also be formed by the same method. Finally, as shown in FIG. 9, an overcoat layer 7 made of acrylic resin or the like is formed so as to cover the entire coloring layer 6, partition layer 4 and alignment mark 5, and the color filter shown in FIGS. Get one.

Specific materials for forming the ink-repellent partition wall layer 11 include, in addition to the above-mentioned ink-repellent fluororesin, (i) a binder made of an organic compound, a polyfunctional monomer, and the like. A radiation-sensitive resin composition containing a photopolymerization initiator or the like which is cured by irradiation of radiation, or (ii) a binder made of an organic compound, a compound which generates an acid by irradiation of radiation, or an acid generated by irradiation of radiation. Examples thereof include radiation-sensitive resin compositions containing a crosslinkable compound that can be crosslinked by the action and cured by irradiation with radiation.

Specifically, (a) a copolymer of hexafluoropropylene, an unsaturated carboxylic acid (anhydride) and another copolymerizable ethylenically unsaturated monomer, and (b) irradiation with radiation. A compound that generates an acid, (c) a crosslinkable compound that can be crosslinked by the action of an acid generated by irradiation with radiation,
(D) Those containing a fluorine-containing organic compound other than the component (a) are preferable.

Further, the ink contains a pigment, a binder resin and a high boiling point solvent (organic solvent) as essential components, and optionally further contains a polyfunctional monomer, a photopolymerization initiator or other additives. preferable. The color tone of the pigment is not particularly limited and may be appropriately selected depending on the intended use of the color filter to be obtained. Either a pigment, a dye or a natural pigment may be used, but an organic pigment or an inorganic pigment is particularly used.

As the organic pigment, for example, color index (CI; The Society of Dyers and Coloris
Compounds classified as Pigment (published by ts) are preferably used. Specifically, C.I.
I. Pigment Yellow 1, 3, 12, etc., C.I. I. Pigment Orange 1, 5, 13, etc., C.I. I. Pigment Red 1, 2, 3, etc., C.I. I. Pigment Blue 15, 1
5: 3, 15: 4 and the like are preferable. These organic pigments can be used alone or in admixture of two or more.

Examples of the inorganic pigments include titanium oxide, barium sulfate, calcium carbonate, zinc white, lead sulfate, yellow lead, zinc yellow, red iron oxide (red iron oxide (III)),
Cadmium red, ultramarine blue, navy blue, chromium oxide green, cobalt green, amber, titanium black, synthetic iron black, carbon black and the like can be mentioned.

Further, the binder is a polymer containing a carboxyl group, and in particular, an ethylenic unsaturated monomer having one or more carboxyl groups (hereinafter, simply referred to as "carboxyl group-containing unsaturated monomer"). And other copolymerizable ethylenically unsaturated monomer (hereinafter referred to as "other unsaturated monomer (b1)") (hereinafter referred to as "carboxyl group-containing copolymer"). (B1) ”) is preferable.

Examples of the carboxyl group-containing unsaturated monomer include acrylic acid, methacrylic acid, crotonic acid and the like. Furthermore, examples of the other unsaturated monomer (b1) include aromatic vinyl compounds such as styrene, vinyltoluene, methoxystyrene, and vinylbenzyl methyl ether, or unsaturated carboxylic acid esters such as methyl acrylate and methyl methacrylate. Etc. can be mentioned.

Further, the carboxyl group-containing copolymer (B
1) as a group of acrylic acid and / or methacrylic acid and styrene, methyl acrylate, methyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate, polystyrene macromonomer and polymethylmethacrylate macromonomer A copolymer with at least one selected from is preferable.

As the organic solvent for the ink, a solvent having a boiling point of 250 ° C. or higher at 1 atm (hereinafter referred to as a high boiling point solvent) is suitable. Examples of the high boiling point solvent include R
^{_{1 -O (CH 2 CH 2 O}} ) 2 -R 2 ( where, R ¹ and R ² represents. Alkyl group having 4 to 10 carbon atoms independently of one another) diethylene glycol dialkyl ether-based solvents represented by or, ^{_{R 3 -O (CH 2 CH 2}} O) 3 -R 4 ( where, R ³
And R ⁴ each independently represent an alkyl group having 1 to 10 carbon atoms. The triethylene glycol dialkyl ether solvent represented by

R ⁵ --O (CH ₂ CH ₂ O) _i --R
⁶ (provided that R ⁵ and R ⁶ independently have one to 10 carbon atoms
And an i is an integer of 4 to 30. ) Polyethylene glycol dialkyl ether solvent represented by or R ⁷ —OCH (CH ₃ ) CH ₂ O) —R ⁸ (wherein R ⁷ and R ⁸ are independently of each other an alkyl group having 4 to 10 carbon atoms). ), A propylene glycol dialkyl ether solvent represented by the formula), or glycerin triacetate, di-n-butyl maleate, di-n-fumarate.
Ester solvents such as butyl, n-butyl benzoate, dimethyl phthalate, diethyl phthalate, di-n-propyl phthalate, di-i-propyl phthalate, di-n-butyl phthalate, i-amyl salicylate, etc. Can be mentioned.

Further, in the present invention, an organic solvent having a boiling point of less than 250 ° C. (hereinafter referred to as a low boiling point solvent) may be used in combination with a high boiling point solvent. Examples of the low boiling point solvent include ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether, and ethylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate.

Other diethylene glycol monoalkyl ethers such as diethylene glycol monomethyl ether, diethylene glycol monoalkyl ether acetates such as diethylene glycol monomethyl ether acetate, propylene glycol monoalkyl ether acetates such as propylene glycol monomethyl ether acetate, and diethylene glycol dimethyl ether are also included. Examples thereof include ethers and alcohols such as 1-octanol.

Further, ketones such as methyl ethyl ketone,
Carboxylic acids such as caproic acid, alkyl lactic acid esters of methyl 2-hydroxypropionate; other esters such as ethyl 2-hydroxy-2-methylpropionate,
Examples thereof include aromatic hydrocarbons such as toluene and xylene. The proportion of the low boiling point solvent used is usually 20% by weight or less, preferably 5% by weight or less, based on the total amount of the high boiling point solvent and the low boiling point solvent.

As described above, according to the color filter 1 of the present embodiment, the colored alignment marks 5 for positioning the substrate 2 are formed at the four corners of the surface 4a of the partition layer 4 and the center portions on both sides. Therefore, when the colored layer 6 is formed, the substrate 2 can be easily positioned using the alignment mark 5 as a reference, and the accuracy is high.
Therefore, the positional accuracy of the colored layer 6 can be improved.

Further, according to the method of manufacturing the color filter of the present embodiment, the partition layer 4 is exposed to light, the portion corresponding to the alignment pattern of the mask 12 is set as the new ink alignment region 4a, and the ink is ejected from the ejection nozzle 16. Since the colored alignment mark 5 is formed on the alignment region 4a by ejecting the ink, the ink droplet 15R is formed only on the alignment region 4a, thereby suppressing the spread of the ink droplet 15R to the peripheral portion of the alignment region 4a. Therefore, the colored alignment mark 5 can be accurately formed on the partition layer 4.

The color filter according to the present invention is not limited to that shown in this embodiment, and may have any form as long as it does not change the gist of the present invention. For example, the color filter 1 of the present embodiment is one in which the colored layers 6 are arranged in a so-called lattice shape, but the arrangement is not limited to this, and for example, a mosaic arrangement or a delta arrangement may be used. Good. Further, although the color filter 1 of the present embodiment has been described by taking a single-piece arrangement as an example, the same can be applied to a case where a large number of pieces are formed. Further, in the case of taking one piece, the alignment mark 5 may be left as it is as a final product, or a product without the alignment mark 5 may be made as a final product by cutting off the portion of the alignment mark 5 or the like.

FIG. 10 is a cross-sectional view showing a schematic structure of a reflection type liquid crystal device provided with the color filter 1 described in this embodiment. The liquid crystal device 100 is provided with auxiliary elements such as a liquid crystal driving IC and a support. The reflective liquid crystal display device as a final product is configured by mounting the.

This liquid crystal device 100 includes a color filter 1
Is disposed on the lower side (reflection surface side), and an STN (Super Twisted Nemati) is provided between the color filter 1 and a transparent substrate 101 such as a glass substrate or a transparent plastic substrate.
c) A liquid crystal layer 103 made of liquid crystal or the like is sandwiched between the layers to form a schematic structure. A sealing material 110 is arranged between the color filter 1 and the substrate 101, and a liquid crystal layer 103 is sealed in a portion defined by the color filter 1, the substrate 101 and the sealing material 110. A plurality of electrodes 106 are formed in stripes below the overcoat layer 7 of the color filter 1, and an alignment film 109 is further formed below the electrodes 106.

Similarly, a plurality of electrodes 105 extending in a direction orthogonal to the color filter side electrodes 106 are formed in stripes on the surface of the substrate 101 facing the color filter 1, and an alignment film 107 is formed thereon. Has been formed. The colored layers 6 of the color filter 1 are arranged at positions corresponding to the intersecting positions of the electrodes 105 and 106. Further, polarizing plates (not shown) are provided on the outer surfaces of the substrate 101 and the color filter 1, respectively. Further, reference numeral 104 is a spacer for keeping the distance between the substrates (called a cell gap) constant within the substrate surface. The electrodes 105 and 106 were formed of indium-tin oxide (ITO: In).
It is a transparent conductive material such as dium tin oxide) formed in a stripe shape in plan view.

According to this liquid crystal device 100, since the color filter 1 of this embodiment is provided on the substrate 2, the light transmittance of the color filter 1 is higher than that of the conventional one in which the bank portion is formed around the colored layer. The liquid crystal device 100 has a high contrast ratio and a high contrast ratio. Here, an example in which the color filter 1 described in the present embodiment is applied to a reflective liquid crystal device has been described, but the color filter 1 is not limited to the reflective liquid crystal device, but a transmissive liquid crystal device or a transflective liquid crystal device. It can also be applied to liquid crystal devices. In the case of this transmissive liquid crystal device or semi-transmissive liquid crystal device, it is necessary to provide a light transmissive portion on the substrate and add auxiliary components such as a backlight as a light source.

FIG. 11 is a perspective view showing various examples of electronic equipment using the liquid crystal device 100 of this embodiment. Figure 11
(A) is a perspective view showing an example of a mobile phone. Figure 1
In FIG. 1A, reference numeral 600 indicates a mobile phone, and reference numeral 601 indicates a liquid crystal display unit of the mobile phone 600. The liquid crystal display unit 601 uses the liquid crystal device 100 described above. FIG. 11B is a perspective view showing an example of a portable information processing device such as a word processor and a personal computer. FIG. 11 (b)
In the above, reference numeral 700 is an information processing apparatus, and reference numeral 70
Reference numeral 1 denotes an information processing apparatus main body, reference numeral 702 denotes an input unit such as a keyboard provided on the upper surface of the information processing apparatus main body 701, and reference numeral 703 denotes a liquid crystal display unit using the liquid crystal device 100.

FIG. 11C is a perspective view showing an example of a wrist watch type electronic device. In FIG. 11C, reference numeral 80
Reference numeral 0 denotes a timepiece body, and reference numeral 801 denotes a liquid crystal display unit provided on the upper surface of the timepiece body 800 and using the liquid crystal device 100. Each of the electronic devices shown in FIGS. 11A to 11C is provided with a liquid crystal display unit using the liquid crystal device 100, and thus is thin, small and lightweight, and has high brightness. The electronic device has an excellent effect on display quality.

[0063]

As described above in detail, according to the method of manufacturing a color filter of the present invention, a partition layer forming step of forming a partition layer for partitioning a colored layer on one main surface of a substrate, and an alignment pattern. An exposure treatment step of exposing the partition wall layer using a mask having a mask, and partitioning a portion corresponding to the alignment pattern into an ink-philic alignment area and surrounding the partition wall layer into an ink-repellent area. An alignment mark forming step of forming ink droplets on the alignment area by ejecting ink from the ejection nozzle to form a colored alignment mark; positioning the substrate using the alignment mark; and ejecting ink from the ejection nozzle. And a color filter forming step of forming the plurality of colored layers on the substrate by discharging It is possible to suppress the spreading of the ink droplets by forming ink droplets only Raimento region. Therefore, a colored alignment pattern can be accurately formed on the partition layer.

When the substrate is positioned, a colored alignment mark is used as a reference for positioning, and a plurality of colored layers are formed thereafter, so that the positional accuracy of the discharge nozzle can be improved and the obtained coloring can be obtained. Layer position accuracy can be increased

According to the color filter of the present invention, the partition layer having the alignment mark made of ink is formed on one main surface of the substrate, and the coloring layer is formed in the pixel forming region partitioned by the partition layer. Therefore, by positioning the substrate with the alignment mark as a reference, it is possible to improve the positional accuracy of the colored layer formed in the pixel formation region partitioned by the partition layer.

According to the liquid crystal device of the present invention, the liquid crystal is sandwiched between a pair of substrates facing each other, and the color filter of the present invention is formed on either one of these substrates. By using the improved color filter, the contrast ratio and visibility of the liquid crystal device can be increased.

According to the electronic apparatus of the present invention, since the liquid crystal device of the present invention is provided, the visibility of the display unit is improved by providing the liquid crystal device excellent in contrast ratio and visibility as the display unit. be able to.

[Brief description of drawings]

FIG. 1 is a plan view showing a color filter according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG.

FIG. 3 is a process drawing showing the method of manufacturing the color filter of the embodiment of the present invention.

FIG. 4 is a process chart showing a method of manufacturing a color filter according to an embodiment of the present invention.

FIG. 5 is a process drawing showing the method of manufacturing the color filter according to the embodiment of the present invention.

FIG. 6 is a process drawing showing the method of manufacturing the color filter of the embodiment of the present invention.

FIG. 7 is a process chart showing a method of manufacturing a color filter according to an embodiment of the present invention.

FIG. 8 is a process chart showing a method of manufacturing a color filter according to an embodiment of the present invention.

FIG. 9 is a process drawing showing the method of manufacturing the color filter according to the embodiment of the present invention.

FIG. 10 is a cross-sectional view showing a reflective liquid crystal device including a color filter according to an embodiment of the present invention.

FIG. 11 is a perspective view showing an electronic device in which a liquid crystal device including a color filter according to an embodiment of the present invention is applied to a display unit.

FIG. 12 is a process diagram showing a conventional method for manufacturing a color filter.

FIG. 13 is a process diagram showing a conventional method of manufacturing a color filter.

FIG. 14 is a process diagram showing a conventional method of manufacturing a color filter.

FIG. 15 is a process chart showing a conventional method of manufacturing a color filter.

FIG. 16 is a process diagram showing a conventional method of manufacturing a color filter.

[Explanation of symbols]

1 color filter 2 substrates 3 reflective layer 4 partition layers 5 alignment marks 6 colored layers 7 Overcoat layer 15 inkjet head 15R ink drop 16 discharge nozzles 15R ink drop 20 inkjet head 21 discharge nozzle 100 LCD device 600, 700, 800 Electronic equipment

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2C056 EA24 FB01                 2H048 BA64 BA66 BB08 BB10 BB24                       BB42                 2H091 FA02Y FA14Y FB02 FB06                       FC01 FC02 FC10 FC15 FC22                       FC23 FC24 FC26 GA01 GA02                       GA06 GA08 GA09 GA11 HA10                       LA11 LA15 LA16 LA17 LA18                 2H097 AA20 KA01 KA13 KA15 KA26

Claims (11)

[Claims] 1. A method of manufacturing a color filter having a plurality of colored layers on a substrate, comprising: a partition layer forming step of forming a partition layer for partitioning the colored layers on one main surface of the substrate; and an alignment pattern. An exposure treatment step of exposing the partition wall layer using a mask having a mask, and partitioning a portion corresponding to the alignment pattern into an ink-philic alignment area and surrounding the partition wall layer into an ink-repellent area. An alignment mark forming step of ejecting ink from an ejection nozzle to form an ink droplet on the alignment area to form a colored alignment mark; positioning the substrate using the alignment mark; and ejecting ink from the ejection nozzle. And a color filter forming step of forming the plurality of colored layers on the substrate. Method of manufacturing a color filter according to claim. 2. The method of manufacturing a color filter according to claim 1, wherein spreading of the ink droplet outside the alignment region is suppressed by an adhesion tension between the partition layer and the ink droplet. 3. The partition wall layer according to claim 1, wherein a region corresponding to each of the plurality of colored layers is an ink-philic region and a region excluding the region is an ink-repellent region. Color filter manufacturing method. 4. An ink of a predetermined color is ejected from the ejection nozzle to form the alignment mark, the substrate is positioned using the alignment mark, and then at least one selected from a plurality of inks is selected. The method for producing a color filter according to claim 1, 2 or 3, wherein an operation of ejecting a kind of ink from the ejection nozzle to form a colored layer of the color is repeated. 5. The method of manufacturing a color filter according to claim 1, wherein a reflective layer is formed on one main surface of the substrate. 6. A color is characterized in that a partition layer having an alignment mark made of ink is formed on one main surface of a substrate, and a coloring layer is formed in a pixel formation region partitioned by the partition layer. filter. 7. The alignment mark is formed by ejecting ink from an ejection nozzle to form an ink droplet on an ink-philic alignment region defined by the partition layer. Color filters. 8. The alignment mark suppresses the spread of the ink drop due to the adhesion tension between the partition layer and the ink drop, and spreads the ink drop only in the alignment region. Item 7. The color filter according to Item 7. 9. The color filter according to claim 6, wherein a reflective layer is formed on one main surface of the substrate. 10. A liquid crystal comprising a pair of opposed substrates sandwiching a liquid crystal, and the color filter according to claim 6 is formed on one of the substrates. apparatus. 11. An electronic apparatus comprising the liquid crystal device according to claim 10.