JP2003104323A - Device for filling test gas into electronic part - Google Patents

Abstract

PROBLEM TO BE SOLVED: To automate the process of filling a test gas into an electronic parts and transferring them to a check device, thereby filling the test gas and transferring the electronic parts quickly. SOLUTION: A transfer means 9 supported by a uniaxial robot 1 is transferred below a stacking position P1. The table 15 of the transfer means 9 is raised to receive an empty pallet 13, then lowered, and transferred below an arranging position P2. The table 15 is raised for arranging electronic parts onto the pallet 13, then lowered, and transferred below an inserting/extracting position P3. The table 15 is raised for storing the pallet 13 into a filling device 19 by an inserting/extracting means 17. An inactive gas is fed by the filling device 19 to fill the gas into the electronic parts. The pallet 13 is extracted from the filling device 19, then placed on the table 15, lowered, and stopped below the transfer position P4. The table 15 is raised for transferring the electronic parts from the pallet 13 to a check device 23.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test gas filling device for an electronic component, and more particularly to a test gas filling device for filling a test gas into an electronic component to test the airtight state of the electronic component. .

[0002]

2. Description of the Related Art Electronic parts, such as high-frequency vibrators, may be corroded by dust or moisture inside, which may corrode the electrodes or the vibrating body or make the whole operation unstable. Airtight construction is used to prevent ingress of moisture.

In the manufacturing process of the high frequency oscillator, a leak is measured using an inert gas, and a test for removing the leaking component is performed.

Conventionally, in order to inspect the airtight state of electronic parts such as a high-frequency oscillator, many high-frequency oscillators are randomly placed in a large container and hermetically sealed. After forcibly pressurizing active gas for about 1 hour, take out the high-frequency vibrator from the container,
For example, an operator moves the high-frequency oscillator to an inspection device and inspects it, and selects a product having no leakage as a good product and a product in which a leakage is detected as a defective product.

It should be noted that, for example, a high-frequency oscillator forcibly pressurized with an inert gas is taken out from the container and then inspected within, for example, 5 minutes or 10 minutes with a high-frequency oscillator having a size of several mm, although it depends on the product. If it is not applied to the device, the high-frequency oscillator, which is inferior in hermeticity, loses the inactive gas that has penetrated into the interior and cannot be inspected.

[0006]

However, in the conventional method, although a large number of high-frequency vibrators can be forcibly pressurized with an inert gas, a worker manually inspects the high-frequency vibrators taken out from the container. Since it is transferred to the apparatus and the discrimination work is performed, the workability is poor, and a situation in which a large number of high-frequency vibrators cannot be applied to the inspection apparatus within 5 minutes or 10 minutes is likely to occur, and the inspection efficiency is poor.

Moreover, many high-frequency oscillators that cannot be subjected to the inspection device within 5 or 10 minutes need to be put in the container again and filled with the inert gas, which also deteriorates the inspection efficiency. It was a factor that raised the cost.

The present invention has been made to solve such a problem, and automates the process of filling a test gas into an electronic component and transferring the test gas to an inspection device, thereby promptly filling and inspecting the test gas. An object of the present invention is to provide a test gas filling device capable of ensuring transfer to the device.

[0009]

In order to solve such a problem, an electronic component test gas filling apparatus according to the present invention comprises a holding means, a transfer means, a component supply means, and a first means.
And a second arranging means, a filling device, a loading / unloading means and a control means.

The holding means has a first position where a plate-shaped empty pallet is placed on which a plurality of electronic components filled with the test gas are placed, and the test of the electronic component filled with the test gas. In the first, second and fourth positions of the second, third and fourth positions which are linearly set at a predetermined interval in the direction of the inspection device for inspecting the leakage of the working gas. A plurality of pallets formed so as to hold and release the pallets transferred from below.

The transfer means are the first, second and third of them.
Or, receiving the pallet at the fourth position, linearly moving the lower side of each position to the lower side of the other first, second, third, or fourth position, and then moving the pallet from the lower side of the other position. Is held by the holding means.

The component supply means supplies the electronic components in an aligned state.

The first arranging means is for arranging the electronic components from the component supplying means on the pallet when the empty pallet is held by the holding means at the second position.

The filling device has a plurality of storage portions in the vertical direction in which the individual pallets are stored from the side of the third position and a lid is formed so as to be hermetically sealed. It is arranged so that it can be displaced in the vertical direction,
When the pallet is stored and sealed, the storage space is filled with the test gas for a predetermined period.

The loading and unloading means inserts the pallet located at the third position into the storage section with the lid opened, and opens the lid from the storage section after the test gas has been filled. At this time, the pallet is taken out to the third position.

The second arranging means transfers electronic components from the pallet to the inspection device side when the pallet is held by the holding means at the third to fourth positions.

The control means controls the transfer means so as to transfer the pallet from at least the first position to the second, third and fourth positions thereof, and electronically transfers the pallet to the second position. The first arranging means is controlled so as to arrange the parts, and when the electronic parts arranged pallet is transferred to the third position, the lid thereof is opened to position the storage portion at a position corresponding to the third position. As described above, the filling device is displacement-controlled, the pallet is inserted into the storage unit by the loading / unloading means, the lid is closed and sealed, and the test gas is controlled to be filled in the storage unit, and when a predetermined filling period elapses, The lid is opened to control the displacement of the filling device to a position corresponding to the third position, and the pallet in the storage part is pulled out to the third position by the loading / unloading means. Is for controlling the second arrangement means so as to transfer from the third transport pallet from the position to the fourth position the electronic component to the inspection apparatus.

Further, the present invention has the above-mentioned structure.
The control means records the transferred position information of the electronic components transferred from the pallet to the inspection device by the second arranging means and the cumulative time required for the transfer for each pallet,
When the accumulated time exceeds a predetermined transfer period, the transfer operation of the second arranging means is stopped and controlled, and the pallet with the remaining electronic components is transferred from the fourth position to the second position. When the remaining pallet of electronic parts is held by the holding means at the second position, the electronic parts are transferred from the parts supply means to the transfer trace position of the electronic parts based on the transferred position information. It is preferred that the first arranging means be controllably formed to replenish the components.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. First, the outline of the test gas filling apparatus according to the present invention will be described.

FIG. 1 is a schematic front view for explaining a test gas filling apparatus according to the present invention. In FIG. 1, an elongated uniaxial robot 1 having a columnar body placed horizontally has a motor M1 arranged inside the right end in the figure, a pulley 3 connected to this rotating shaft, and a pulley arranged inside the left end in the figure. 5 and a belt 7 wound around the pulleys 3 and 5.

The transfer means 9 is slidably supported on the side surface in the longitudinal direction (left and right direction in the drawing) of the uniaxial robot 1, and is connected to the belt 7.

The transfer means 9 is capable of reciprocating at a predetermined speed and pitch between the left end side and the right end side of the uniaxial robot 1 by the forward and reverse rotations of the motor M1 and can be stopped at a predetermined position described later. It has become. The details will be described later.

The transfer means 9 has an elevating shaft 11 supported so as to be accommodated in the main body.
Is lifted and stopped by a predetermined length from the upper end of the transfer means 9 by a cylinder (not shown) arranged in the transfer means 9, and then lowered and stopped. A plate-shaped table 15 on which 13 is placed is fixed.

Under a predetermined control, the transfer means 9 raises and stops the elevating shaft 11 in a state where it is stopped near the left end of the uniaxial robot 1, and the lowermost position of the pallets 13 stacked on each other. After the pallet 13 is placed on the table 15, the elevating shaft 11 is lowered and stopped, and the uniaxial robot 1 is transferred and controlled in the right end side direction in the drawing.

The position where the elevating shaft 11 stops rising and receives the pallet 13 is referred to as a stacking position (first position) P1 for convenience.

For example, the transfer means 9 is lifted and stopped when the pallet 13 has been transferred to the right for several sheets and stopped, and the lifting shaft 11 is lifted and stopped. The shaft 11 is lowered and stopped, or the pallet 13 is moved by the first arrangement means described later.
When the electronic components are arranged on the top, the pallet 13 is placed and the elevating shaft 11 is lowered to stop, so that the uniaxial robot 1 is transfer-controlled to the right end side or the left end side in the drawing.

The position where the elevating shaft 11 stops rising and the pallet 13 is held and the electronic components are arranged is referred to as an arrangement position (second position) P2 for convenience.

The transfer means 9 is also stopped at the position where the pallet 13 has been transferred to the right by several sheets, and then the lifting shaft 11 is lifted and stopped, and the pallet 13 is stored in the filling device 19 by the loading / unloading means 17. Filling or filling device 19
After the pallet 13 is taken out from the pallet and placed on the table 15, the elevating shaft 11 is lowered and stopped to control the transfer of the uniaxial robot 1 toward the right end side or the left end side in the drawing.

The filling device 19 is formed by stacking a plurality of storage portions 21 for storing the individual pallets 13.
Details will be described later.

After the pallet 13 is stored in the filling device 19, the transfer means 9 is controlled to move to the left end side or the right side in the drawing, and after receiving the pallet 13, the transfer control is performed to the right end side.

The position where the elevating shaft 11 stops moving up and the pallet 13 is taken in and out of the filling device 19 will be referred to as a taking-out position (third position) P3 for convenience.

When the transfer means 9 is controlled to move to the right end side in the figure, the transfer means 9 is stopped at the position where one or several sheets of pallets 13 have been transferred, and then the elevator shaft 11 is lifted and stopped, which will be described later. After the pallet 13 is positioned and held by the holding means, the elevating shaft 11 is lowered and stopped, and the uniaxial robot 1 is transferred and controlled in the leftward direction in the drawing.

The position where the lifting shaft 11 stops rising and the pallet 13 is positioned and held is referred to as a transfer position (fourth position) P4 for convenience.

At the transfer position (fourth position), the pallet 13 is positioned and held at two positions with a slight interval in the longitudinal direction of the uniaxial robot 1.

When the pallet 13 is positioned at one transfer position, the transfer means 9 positions the pallet 13 at the remaining transfer position.

Electronic components are transferred from the pallet 13 positioned at the transfer position (fourth position) to the inspection device 23 (not shown in FIG. 1).

As can be seen from FIG. 1, the stacking position (first
Position) P1, array position (second position) P2, loading / unloading position (third position) P3, and transfer position (fourth position) P
4 is located approximately on the same plane, but this is not essential.

A test gas filling apparatus according to the present invention will be described in detail below with reference to FIGS. 1 and 2.

FIG. 2 is a schematic plan view of the test gas filling apparatus according to the present invention. In FIG. 2, a guide portion 25 as a holding unit that holds the pallets 13 in a stackable manner and holds and releases the pallets 13 is arranged at the left end of the uniaxial robot 1 placed horizontally.

As shown in FIG. 3, the pallet 13 is made of a hard material having good corrosion resistance, such as a rectangular plate made of stainless steel, and is an electronic component (simply abbreviated as component in the figure) 27 filled with an inert gas. It has a large number of small recesses 29 that fit in a matrix at predetermined intervals.

The recess 29 is for positioning the electronic component 27 in a vertically and horizontally aligned state, and is a blind hole slightly larger than the outer shape of the electronic component 27. It is formed by a known method so that the surface is exposed.

At both ends of the pallet 13 in the longitudinal direction, step portions are formed on the back surfaces (opposite sides of the recesses 27) of both short sides to form locking portions 31, and one short side. An engaging portion 33 is formed to penetrate in the vicinity of the portion.

The guide portion 25 shown in FIG. 2 has a pair of U-shapes or a box shape. As shown in FIG. 4, a plurality of pallets 13 are laminated inside, and a pedestal not shown is provided. It is arranged.

On the bottom side of the guide portion 25, the pallet 13
Thin claws 35 that engage with the locking portion 31 are arranged so as to be movable back and forth from the facing position.

The pawl 35 is supported by an opening / closing cylinder 37 arranged so as to face the bottom surface of the guide portion 25, and is engaged with the engaging portion 31 of the lowest pallet 13 by the forward movement of the cylinder 37. The pallet 13 is supported from the lower side, and the pallet 13 is taken out from below by releasing the lock with the lock portion 31 by the backward movement. In addition, in FIG. 4, the cylinder 37 is not shown except for FIG.

In the guide portion 25, as shown in FIG. 4A,
Normally, the pallet 1 at the bottom of the stacked pallets 13
The pawl 35 is locked to the locking portion 31 of the table 3 and the pallet 13 of the table 15 of the transfer means 9 is placed, and the table 15 is lifted as shown in FIG. When 13 is brought into contact with the pallet 13 at the lowest position, the claw 35 is released from the engagement with the engagement part 31 by the backward movement of the cylinder 37 as shown in FIG. 4C.

Then, as shown in FIG. 4D, table 1
5 moves up by one pallet and pushes up the pallet 13 at the lowermost position, the movement of the table 15 is stopped, and the pawl 35 projects by the forward movement of the cylinder 37, as shown in FIG. The table 15 is lowered as shown in FIG. F by the locking portion 31 of FIG. 1 and the empty pallet 13 is supplied to the guide portion 25.

The position of the lowermost pallet 13 in the guide portion 25 corresponds to the above-mentioned first position P1.

The pallet 13 in the guide portion 25 can be manually supplied to the guide portion 25 from above.

To receive and lower the pallet 13 from the guide portion 25 onto the table 15, the procedure shown in FIGS.
That is, steps F to A may be performed.

The operation of the transfer means 9 described above, the vertical movement of the table 15 by the operation of the lifting shaft 11, and the cylinder 37.
This operation is performed by the control function of the control means 39 described later.

A rectangular support plate 41 as a holding means for holding and releasing the pallet 13 is provided on the uniaxial robot 1 on the right side for several sheets from the guide part 25 to the pallet 13. It is arranged on a base (not shown).

The support plate 41 has a frame shape, and as shown in FIG. 5A, an opening 43 slightly smaller than the pallet 13.
And a positioning step portion 45 formed at a position on the back surface side desired in the opening 43, and a pair or a plurality of pairs of restraining levers 47 arranged to face each other in the vicinity of the step portion 45. .

The step portion 45 has a size and shape in which the pallet 13 is housed and does not project much from the back surface of the support plate 41. The restraining lever 47 has one end (tip) side rotatably in an arc shape at the other end. The side is supported by the support plate 41.

As shown in FIG. 5A, the restraining lever 47 is normally placed at a position such that the tip side thereof hangs down.
When the table 15 is raised and the pallet 13 placed on the table 15 is stored in the stepped portion 45, the pallet 1 is rotated in an arc shape so that the tips are narrowed as shown in FIG.
3 is controlled to be suppressed.

The table 15 is controlled to descend as shown in FIG. 5D after the pallet 13 is held by the lever 47 and supported by the support plate 41.

When the pallet 13 supported by the support plate 41 is received by the table 15, it is performed in the order of D to A in FIG.

Operation of such transfer means 9, table 1
The vertical movement of 5 and the operation of the suppressing lever 47 are performed by the control function of the control means 39.

Returning to FIG. 2, 1 is provided near the support plate 41.
First arranging means (XY robot) 53 consisting of an X-axis 49 along the axis robot 1 and a Y-axis 51 traversing the uniaxial robot 1.
Is arranged, and the Y-axis 5 against the fixed X-axis 49
1 can be displaced along the uniaxial robot 1 by a predetermined movement amount.

A head 55 projects from the side surface of the Y-axis 51 and can be displaced on the pallet 13 across the uniaxial robot 1 along the Y-axis 51 by a predetermined amount of movement.

The head 55 has a component chuck portion (not shown) for adsorbing and picking up the electronic component 27 and lowering it to release the adsorption of the electronic component 27.

The first arranging means 53 controls the movement of the Y-axis 51 and the head 55 to position the head 55 at the pickup position 59 at the tip of the linear feeder 57, which will be described later.
The electronic components 27 are picked up and picked up by the head 55 one by one from the pick-up position 59, the head 55 is displaced to the upper side of the pallet 13 and lowered, and the electronic components 27 are released from the suction on the pallet 13 into the recess 29. The electronic component 27 is housed and the head 55 is controlled to be lifted.

Although the pickup position 59 is fixed, the first arranging means 53, that is, Y, is controlled through the control of the control means 39 so that the pick-up positions 59 can be accommodated in the concave portions 29 of the pallet 13 one by one in a predetermined order. The movement of the shaft 51 and the head 55 is controlled.

The control means 39 can control the first arranging means 53 so that the electronic components 27 can be stored in any of the concave portions 29 of the pallet 13.

At the tip of the Y-axis 51 of the first arranging means 53 (downward in FIG. 2), a known bowl feeder 61 for arranging and sending out the electronic components 27 in an aligned state is arranged. A known linear feeder 57 for linearly arranging the heads of the arranged electronic components is connected to the linear feeder 57. The electronic component 27 is not shown in the bowl feeder 61 and the linear feeder 57.

On the right side of several sheets from the support plate 41 to the pallet 13, there is a rectangular auxiliary plate 63 as a holding means.
It is arranged on a base (not shown) so as to pass it over the axis robot 1.

The auxiliary plate 63 has a frame shape similar to that of the support plate 41, but has a frame shape larger than the pallet 13 and extends to the vicinity of the filling device 19.

When the table 15 of the transfer means 9 rises and the pallet 13 placed on the table 15 is set in the frame, the elevating shaft 11 is arranged so that the upper surface of the auxiliary plate 63 and the upper surface of the pallet 13 are flush with each other. Are controlled by the control means 39.

Auxiliary plate 63 or pallet 1 fitted therein
The position of 3 corresponds to the above-mentioned third position P3.

The filling device 19 arranged near the auxiliary plate 63 on the same side as the X-axis 49 has a storage part 2 having a space 65 for storing each pallet 13 as shown in FIG.
1 has a shape in which a rectangular parallelepiped is vertically placed by vertically stacking and integrating it, and is vertically held by a holding plate 67 that is vertically placed along the side surface.

That is, the filling device 19 is shown in FIGS.
As shown in FIG. 5, the pair of rails 69 provided in the longitudinal direction of the holding plate 67 is gripped and supported slidably in the vertical direction, and is arranged below the holding plate 67 and between the rails 69. The side surface portion is screwed into the feed screw 71 extending from the stepping motor M2 along the holding plate 67 between the rails 69, and one or more of the storage portions 21 is operated by the operation of the motor M2 via the control function of the control means 39. The displacement is controlled in the vertical direction by a distance of minutes.

In each of the storage portions 21 of the filling device 19, the opening on the front side (the side of the auxiliary plate 63) can be opened and closed by the lid 73, and the pipe 75 is connected to the inside on the back side, and in the middle of this. The valve 77 is inserted in.

As shown in FIG. 6, the lid 73 of each storage portion 21 includes a cylinder 79 arranged above or below the number of storage portions 21 from the take-in / out means 17 and an opening / closing operation portion protruding therefrom. Opening / closing means 83 formed with 81
It is opened and closed by.

That is, the opening / closing operation portion 81 is brought into contact with the lid 73 by the forward movement of the cylinder 79, and the opening / closing operation portion 81 is moved.
While holding the lid 73 by an appropriate opening operation of the
The opening / closing operation portion 81 is retracted while holding the lid 73 by the retracting operation of the cylinder 79, and the opening portion is opened.

By the forward movement of the cylinder 79, the lid 73 held by the opening / closing operation portion 81 is applied to the opening portion of the storage portion 21,
By appropriately closing the opening / closing operation portion 81, the lid 73 is brought into close contact with the opening of the storage portion 21 to seal the inside of the storage portion 21.

The above-mentioned auxiliary plate 63 is located at a position corresponding to one middle storage part 21 of the plurality of storage parts 21 forming the filling device 19, and the upper surface of the auxiliary plate 63 is the one storage part 21. Are located in the same plane as the inner bottom surface of the empty space 65.

On the opposite side of the auxiliary plate 63 from the filling device 19, the above-mentioned loading / unloading means 17 is arranged.

The loading / unloading means 17 is formed of a cylinder 85 and a loading / unloading shaft 87 whose tip projects from the auxiliary plate 63 into an L-shape.

With the upper surface of the pallet 13 aligned with the upper surface of the auxiliary plate 63, the forward / backward movement of the cylinder 85 pushes the tip of the take-in / take-out shaft 87 to the engaging portion 33 of the pallet 13 and engages with the engaging portion 33. After the engagement is controlled, the pallet 13 is further controlled to be pushed into the empty space 65 of the storage part 21 of the filling device 19 which is opened, and the tip of the loading / unloading shaft 87 and the engaging part 33 of the pallet 13 are controlled. The operation is controlled so as to be disengaged from and to retract to the original position.

The take-in / take-out shaft 87 protrudes into the accommodating part 21 by the forward movement of the cylinder 85 with respect to the accommodating part 21 in which the lid 73 is opened by the opening / closing means 83 and is displaced to the position of the auxiliary plate 63. After the tip is engaged with the engaging portion 33 of the pallet 13, it is pulled out to the opening of the auxiliary plate 63, the engagement with the engaging portion 33 of the pallet 13 is released, and the original position is restored. The movement is controlled to move backward.

Cylinder 85 of these loading / unloading means 17,
The operation of the loading / unloading shaft 87, the cylinder 79 of the opening / closing means 83, and the opening / closing operation section 81, and the cylinder 8 of the loading / unloading means 17
5 and the operation of the loading / unloading shaft 87 are performed under the control function of the control means 39.

The storage portion 21 in which the pallet 13 is stored is
As described above, the lid 73 is at the position where the opening / closing means 83 is opened, and the pallet 13 is stored in the storage section 2.
1, the lid 73 is closed by the opening / closing means 83, and then the storage part 21 is filled with an inert gas.

In each storage portion 21 of the filling device 19, when the pallet 13 is stored and the lid 73 is closed and the inside is sealed, the valve 77 is opened to evacuate the space 65. Therefore, an inert gas such as helium gas is pressurized at a predetermined high pressure, for example, for about 1 hour.

The opening / closing control of the valve 77 and the filling time control of the inert gas are also performed under the control function of the control means 39.

After the press-in period of the inert gas has elapsed, the lid 73 is opened by the opening / closing means 83 and the pallet 13 is taken out by the take-in / out means 17.

On the right side of several sheets from the auxiliary plate 63 to the pallet 13, a support plate 89 as a holding means for holding and releasing the pallet 13 similar to the above-mentioned support plate 41 is supported by a base not shown. Has been done.

The support plate 89 has a shape in which two frame-like shapes are connected, and if explained with reference to the reference numerals in FIG. 5, the opening 43 slightly smaller than the pallet 13 as shown in FIG.
And a positioning step portion 45 formed at a position on the back surface side desired in the opening 43, and a pair of restraining levers 47 arranged to face each other in the vicinity of the step portion 45.

In FIG. 5, the opening 43 and the positioning step 4 are shown.
5, only one set of restraining lever 47 is shown, but of course,
Two sets of them are formed on the support plate 89 along the uniaxial robot 1, that is, along the direction of the inspection device 23 from the third position P3, and operate under the control function of the control means 39. ing.

As shown in FIG. 5A, the restraining lever 47 is placed at a position such that the tip side thereof hangs down, and the table 15 is lifted as shown in FIG. 5B and the pallet 1 placed on the table 15 is raised.
When 3 is housed in the step portion 45, the pallet 13 is pressed by rotating in an arc shape so that the tips are narrowed as shown in FIG.
After the pallet 13 is supported by the table 1 shown in FIG.
Descent like D.

When the pallet 13 supported by the support plate 89 is received by the table 15, it is carried out in the order shown in FIGS. 5A to 5A, which is the reverse order of FIGS.

The control of the support of the pallet 13 on the support plate 89 is based on the storage information of the support of the pallet 13 on the support plate 89 by the control means 39, and the movement control of the table 15 to the opening side where the pallet 13 is not supported. Made by
When the pallet 13 is received, the pallet 13 is controlled to move to the supported opening side of the pallet 13 or the opening side to which the electronic component 27 has been transferred quickly to receive the pallet 13.

That is, the control means 39 holds the support storage information and the transfer progress information indicating which opening of the support plate 89 the pallet 13 is supported by.

Returning to FIG. 2, 1 is provided near the support plate 89.
The above-mentioned second arranging means (XY robot) 95 consisting of an X axis 91 along the axis robot 1 and a Y axis 93 traversing the uniaxial robot 1 is arranged, and the Y axis 93 is fixed with respect to the fixed X axis 91. Can be displaced along the uniaxial robot 1 by a predetermined amount of movement.

A head 97 projects from the side surface of the Y-axis 93 and can be displaced on the pallet 13 across the uniaxial robot 1 along the Y-axis 93 by a predetermined amount of movement.

The head 97 has a component chuck portion (not shown) that descends to adsorb and pick up the electronic component 27, and also descends to release the adsorption of the electronic component 27.

The second arranging means 95 controls the movement of the Y-axis 93 and the head 97 so that the electronic components 2 on the pallet 13 are moved.
7 is adsorbed and picked up, the head 97 is moved to a predetermined position on the rotary table 99 of the inspection device 23, and the head 97 is lowered to move the electronic component 27 to the rotary table 99.
Transfer control is performed on the top. The movement of the Y-axis 93 and the head 97 is controlled under the control of the control means 39.

The operation of the transfer means 9 described above, the vertical movement of the table 15 by the operation of the elevating shaft 11, the cylinder 37
And the operation of the second arrangement means 95 are performed by the control function of the control means 39.

The control means 39 counts the number of electronic components 27 transferred by the second arranging means 95, and the transferred position information of the transferred electronic parts 27, the positional information of the electronic parts 27 not transferred, and the pallets 13 for each. The electronic component 27 has a function of recording the accumulated transfer time from the start of transfer.
When the remaining pallet 13 is returned to and held by the support plate 41, the pallet 13 also has a control function of instructing the first arranging means 53 of the arranging start position of the new electronic component 27.

That is, the control means 39 controls the operation of the second arranging means 95 to stop when the accumulated time exceeds a predetermined transfer period, for example, 5 minutes or 10 minutes, and the pallets where the electronic parts 27 remain. The transfer means 9 is controlled so as to transfer 13 to the second position P2, and the first arranging means 53 is controlled so as to replenish the electronic parts 27 to the transfer trace position based on the transferred position information. It also has a function.

Strictly speaking, the cumulative transfer time for each pallet 13 is the filling device 19 for each pallet 13.
The time (period) starts from the time when the pallet 13 is transferred from the storage section 21 of the above, but it can be started when the pallet 13 is transferred to substantially the fourth position P4.

The inspection device 23 is, for example, 90 ° clockwise.
It has a rotary table 99 that rotates by 1 and a known inspection unit 101 that detects a leak of an inert gas from the electronic component 27 at a position rotated by 90 ° when three electronic components 27 are arranged at predetermined positions. ing.

The control means 39 of FIG. 2 is formed to have an electronic circuit and a mechanism section for operating the above-mentioned components by the electronic circuit, and other functions of the control function described above will be clarified by the following explanation of operation. Be converted.

Next, the operation of the above-described test gas filling apparatus of the present invention will be described. Initially, in the guide portion 25 of FIG. 2, the claw 35 moves forward by the operation of the cylinder 37 of FIG. 4 and is engaged with the engaging portion 31 of the lowest pallet 13, and a plurality of pallets 13 are stacked. There is.

In this state, when the transfer means 9 moves the uniaxial robot 1 to below the guide portion 25 under the control of the control means 39, the table 15 of the transfer means 9 rises as shown in FIGS. 4F and 4E. Abutting the pallet 13 at the lowest position,
As in C, the operation of the cylinder 37 causes the pawl 35 to retract and the engagement with the engagement portion 31 of the pallet 13 is released.

Then, as shown in FIG. 4D, table 1
After descending by one with the pallet 13 on 5,
As shown in FIGS. 6A to 6C, the pawl 35 moves forward and is engaged with the engaging portion 31 to hold the pallet 13, while the table 15 on which one pallet 13 is placed descends and stops.

The transfer means 9 moves the uniaxial robot 1 and stops below the support plate 41 (second position P2), the table 15 of the transfer means 9 rises, and as shown in FIGS. , The pallet 13 is supported by the support plate 41, and the pallet 1
The table 15 that has transferred 3 to the support plate 41 descends and stops, the uniaxial robot 1 moves to the right or left, and another operation described below is performed.

For the pallet 13 supported by the support plate 41, the Y-axis 51 and the head 55 of the first arrangement means 53.
The electronic components 27 are picked up one by one from the pickup position 59 of the linear feeder 57 and moved to the upper side of the pallet 13 by the movement of, and the electronic components 27 are housed in the concave portions 29 of the pallet 13.

The movements of the Y-axis 51 and the head 55 are carried out in order that the electronic parts 2 are moved to the recesses 29 formed on the pallet 13 in a matrix form in the recesses 29 adjacent to each other on the left and right or above and below.
The number of electronic components 27 arranged is controlled so as to be stored, and the number of arranged electronic components 27 is counted by the control means, and this is repeated until the predetermined number or the number of arranged electronic components is full.

When the number of the electronic components 27 housed and arranged on the pallet 13 reaches a predetermined value or becomes full, the operation of the first arranging means 53 is stopped and the transferring means 9 is transferred to the lower side of the support plate 41. The table 15 is raised, the pallet 13 on which the electronic components 27 are placed is received on the table 15 in the order shown in FIGS. 5D to 5A and lowered, and the uniaxial robot 1 is moved to the right to move the support plate 65 ( 3 is stopped below the position P3).

As shown in FIG. 6, the filling device 19 is vertically displaced by the operation of the motor M2 under the control of the control means 39, and is a vacant storage part 21 in which the pallet 13 is to be stored. Opening / closing means 83 for storing section 21
It is displaced to the same position as the opening / closing operation section 81.

When the pallets 13 are not stored in all the storage parts 21, the upper or lower storage parts 21 are sequentially displaced downward or upward to the same position as the opening / closing operation part 81 of the opening / closing means 83. To be done. After that, the arbitrary storage section 21 is displaced.

In the filling device 19, the opening / closing operation portion 81 is covered with the lid 73.
After opening the opening of the storage portion 21 by holding the lid 73 by holding the lid 73 and opening the opening of the storage portion 21, the movement of the storage portion 21 is controlled downward by the operation of the motor M2, and the same position as the support plate 65 is obtained. Is displaced.

In parallel with the displacement operation of the filling device 19, the table 15 of the transfer means 9 rises and the pallet 13 rises to the same position as the support plate 65.

When the pallet 13 is lifted to the same position as the support plate 65 and the opened storage portion 21 is also displaced to that position, the cylinder 85 of the loading / unloading means 17 operates and the loading / unloading shaft 87 engages the pallet 13. The pallet 13 is engaged with the mating portion 33 and further the push-out shaft 87 is pushed out.
Is stored in the storage portion 21, and when the distal end of the loading / unloading shaft 87 and the engagement portion 33 of the pallet 13 are released, the loading / unloading shaft 87 retracts to the original position.

The storage portion 21 for storing the pallet 13 is
The displacement of the motor M2 is controlled in the upward direction, and the lid 73 is brought into contact with the opening of the storage portion 21 by the opening / closing operation portion 81 and is sealed.

Then, the storage portion 21 in which the pallet 13 is stored is degassed through the opening operation of the valve 77, and then the inert gas is pressed into the storage portion 21. The injecting of the inert gas is continued at a predetermined pressure for about 1 hour.

After the pallet 13 is stored in the storage section 21, the table 15 of the transfer means 9 descends to move the uniaxial robot 1 to the right or left to perform another operation, or into the electronic component 27. Then, the operation shifts to the operation of receiving another pallet 13 for which the inert gas has been filled.

When the pallet 13 is received after the press-in time of the inert gas has elapsed, the storage section 21 in the filling device 19 after the press-in time has passed is displaced to the same position as the opening / closing operation section 81 by the operation of the motor M2. The opening / closing operation section 81 is used to cover 73
After the opening is opened, the opened storage portion 21 is displaced to the position of the support plate 65.

The table 15 of the transfer means 9 is positioned at the same position as the support plate 65, and the cylinder 85 of the loading / unloading means 17 is operated to move the loading / unloading shaft 87 forward into the storage portion 21 to engage the pallet 13 with the engaging portion. 33, the pallet 13 is moved onto the table 15 by moving the pallet 13 back and forth, and the pallet 13 is released from the pallet 13.

Then, the table 15 of the transfer means 9 is lowered and the uniaxial robot 1 is moved to the right to move the support plate 89 (fourth
The position P4) is set to a position below and stopped.

When no pallet 13 is held on the support plate 89, below the opening on the predetermined side,
If the pallet 13 is already held, it is positioned below the remaining opening.

When the table 15 rises and is held by the support plate 89, the table 15 descends as shown in FIG. 5D, and the uniaxial robot 1 moves to the left to move to another operation.

With respect to the pallet 13 held by the support plate 89, the Y-axis 93 and the head 97 of the second arranging means 95 are displaced and picked up from a predetermined electronic component 27 on the pallet 13, and the Y-axis 93 and the head. The electronic component 27 is transferred to a predetermined position on the rotary table 99 of the inspection device 23 through the displacement of 97, and the electronic component 27 is transferred on the rotary table 99, and then the pallet
It returns to the next electronic component 27 on 3 and repeats until three electronic components 27 are arranged in the predetermined position of the turntable 99.

When the three electronic components 27 are arranged at the predetermined positions, the inspection device 23 rotates 90 ° clockwise, for example, to newly arrange the three electronic components 27 at the predetermined positions.

In the inspection device 23, the electronic part 27 is wrapped by the inspection part 101 after being rotated by 90 °, and the presence or absence of the filling gas is measured by a known method. The presence or absence of the filling gas corresponds to whether or not the inspection unit 101 can measure.

The electronic component 27, in which the filling gas is detected, has a problem of airtightness, and is 180 ° from the inspection unit 101.
At the rotated position, the three electronic components 27 are mounted on the rotary table 9
When transferred from 9, it is classified as a defective product.

On the other hand, the electronic component 27 for which the filling gas is not detected is classified as a non-defective product when it is moved from the rotary table 99.

With respect to the pallet 13 to which all the electronic parts 27 have been moved, the table 15 of the transfer means 9 that has moved downwardly moves up to receive the empty pallet 13 and moves down to guide the uniaxial robot 1. Then, the table 15 is moved up to the lower part of the section 25 and the table 15 is raised to move the empty pallet 13 to the guide section
Laminate under 5.

During the time for arranging the electronic parts 27 on the pallet 13 held by the support plate 41, the storage unit 2 is filled with the filling device 19.
1 is filled with an inert gas, and further, the time for transferring the electronic component 27 from the pallet 13 held by the support plate 89 to the inspection device 23 is the stacking position (first position) P1,
It is longer than the time for moving the transfer means 9 between the array position (second position) P2, the loading / unloading position (third position) P3, and the transfer position (fourth position) P4 to move the table 15 up. . In particular, the filling time of the inert gas is long.

Therefore, the electronic component 2 on the pallet 13
Pallet 1 during the sequence time of 7, during the filling time of the inert gas
While the electronic component 27 is placed on the inspection device 23 from above 3, the first position (stacking position) P1, the second position (arrangement position) P2, the third position (insertion / removal position) P3, and the fourth position The transfer means 9 is moved between the positions (transfer position) P4 and another movement operation of the pallet 13 is performed in parallel under the control of the control means 39.

However, in the present invention, the pallet 13
The object of the present invention can be achieved if the transfer means 9 is controlled by the control means 39 so that the transfer means 9 is sequentially transferred from at least the first position P1 to the second, third and fourth positions P2 to P4. Is.

When all the electronic parts 27 on the pallet 13 held by the support plate 89 remain without being transferred within a predetermined transfer time (period) due to some unexpected cause, the above-mentioned operation is performed. As described above, by the count recording function of the control means 39, the transfer means 9 receives the pallet 13 on the table 15 and descends, moves the uniaxial robot 1 to below the support plate 41, and again holds the support plate 41 to hold the electronic data. Part 2
7 is replenished.

In this case, the count recording function of the control means 39 causes the first arranging means 53 to replenish and arrange the electronic components 27 at the transfer trace position where the electronic components 27 have been transferred.

In carrying out the present invention, the uniaxial robot 1,
Transfer means 9, take-in / out means 17, filling device 19, storage unit 21, inspection device 23, guide unit 25, first arrangement unit 5
3, opening / closing means 83, second arranging means 95, inspection section 101
The configuration is arbitrary and is not limited to the above-mentioned configuration.

Further, in the above-mentioned structure, the arrangement position (second position) P2 and the withdrawal position (third position) P3.
The order of may be changed, and the control means 3 may be changed accordingly.
9 should be changed.

Further, in the present invention, the above-mentioned opening / closing means 83 is not limited to the structure arranged above the take-in / out means 17. For example, when the lid 73 is formed in the storage portion 21 with a hinge structure, the opening / closing means 83 is attached to the loading / unloading means 17.
Alternatively, the opening / closing means 83 may be disposed on the same plane as the loading / unloading means 17.

[0137]

As described above, in the test gas filling apparatus according to the present invention, since the process of filling the electronic device with the test gas and transferring the electronic component to the inspection apparatus is automated, the test gas filling apparatus after the test gas filling is completed. The time management and labor saving can be performed, the reliability of the inspection can be improved, and the manufacturing cost of the electronic component can be reduced. When the cumulative time required to transfer the electronic components to the inspection device exceeds a predetermined transfer period, the transfer operation of the second arranging means is stopped and controlled, and the pallet with the remaining electronic components is moved to the second position. With the configuration that controls the return so that the electronic parts are replenished and arranged at the transfer trace position of the electronic parts based on the transferred position information on the pallet, the electronic parts that have not been transferred are tested. It becomes possible to reliably and automatically return to the process for filling the working gas and refill it. In particular, the time management efficiency and labor saving after filling the test gas are greatly improved, and the reliability of the inspection is further improved.

[Brief description of drawings]

FIG. 1 is a schematic front view illustrating an embodiment of a test gas filling device for an electronic component according to the present invention.

2 is a schematic plan view illustrating a test gas filling device for the electronic component of FIG. 1. FIG.

FIG. 3 is a diagram showing a pallet used in the test gas filling apparatus of the present invention.

FIG. 4 is a view showing a guide portion used in the test gas filling apparatus of the present invention.

FIG. 5 is a view showing a support plate used in the test gas filling apparatus of the present invention.

FIG. 6 is a diagram showing a loading / unloading device, a charging device, and an opening / closing device used in the test gas filling device of the present invention.

[Explanation of symbols]

1 1-axis robot 3, 5 pulley 7 belt 9 Transfer means (transfer means) 11 Lifting axis 13 pallets 15 tables 17 Means of taking in and out 19 Filling device 21 Storage 23 Inspection device 25 Guide part (holding means) 27 Electronic components 29 recess 31 Locking part 33 Engagement part 35 nails 37, 79, 85 cylinders 39 Control means 41, 89 support plate (holding means) 43 opening 45 Positioning step 47 Squeeze Lever 49, 91 X axis 51, 93 Y axis 53 First Arrangement Means 55, 97 heads 57 Linear feeder (parts supply means) 59 Pickup position 61 Bowl feeder (parts supply means) 63 Auxiliary plate 65 vacant place 67 holding plate 69 rail 71 lead screw 73 Lid 75 pipes 77 valves 81 Open / close operation unit 83 Opening / closing means 87 In / out axis 95 Second Arrangement Means 99 rotating table 101 Inspection Department M1, M2 motor P1 1st position (stacking position) P2 Second position (array position) P3 Third position (withdrawal position) P4 4th position (transfer position)

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3E053 AA10 BA10 DA02 EA10 JA10                 3E054 AA16 AA20 BA02 BA04 BA09                       CA03 CA06 CA08 CA10 DB05                       DB06 DC20 DE08 EA03 FA02                       FB07 FB08 GA01 GA04 GB01                       GC05

Claims (2)

[Claims] 1. A first position in which a plate-shaped empty pallet is placed on which a plurality of electronic components filled with a test gas are placed, and the test gas of the electronic component filled with the test gas. From the bottom at the first, second and fourth positions of the second, third and fourth positions which are linearly set at predetermined intervals in the direction of the inspection device for inspecting leakage of Retaining means formed so as to retain and retain the transferred pallet, and to receive the pallet at the first, second, third or fourth position to linearly move the lower side of each position. A plurality of electronic parts are aligned with a transfer means that moves below the other first, second, third, or fourth position and holds the pallet by the holding means from below the other position. Parts supply means for supplying the First arranging means for arranging the electronic components on the pallet from the component supplying means when the ret is held by the holding means at the second position; and each pallet is stored from the third position side. And a plurality of vertically accommodating storage units that are formed so as to be hermetically sealed by a lid, and are arranged in the vicinity of the third position so as to be vertically displaceable, and the pallets are accommodated. A filling device that fills the storage unit with the test gas for a predetermined period when sealed, and the pallet located at the third position is inserted into the storage unit with the lid opened to store the test gas. Loading / unloading means for taking out the pallet to the third position when the lid is opened from the storage unit which has been filled, and the pallet is provided from the third position to the fourth position. Second arranging means for transferring the electronic components from the pallet to the inspection device side when the pallet is held by the holding means, and the pallet from at least the first position to the second, third and fourth arranging means. The emptying pallet is transferred to the third position by controlling the transfer means to transfer to the position, controlling the first arranging means to arrange the electronic component to the pallet in the second position. When the lid is opened, the filling device is displacement-controlled to open the lid and position the storage portion at a position corresponding to the third position, and the pallet is inserted into the storage portion by the loading / unloading means, and then the lid is opened. Is closed and sealed, and the test gas is controlled to be filled in the storage part, and when the predetermined filling period has elapsed, the lid is opened and the storage part is filled at a position corresponding to the third position. The pallet in the storage portion is controlled to be pulled out to the third position by the loading / unloading means, and the electronic component is inspected from the pallet transferred from the third position to the fourth position. And a control means for controlling the second arranging means so as to be transferred to the apparatus, and a test gas filling apparatus for an electronic component, comprising: 2. The control means records the transferred position information of the electronic components transferred from the pallet to the inspection device by the second arranging means and the cumulative time required for the transfer for each pallet. Then, when the accumulated time exceeds a predetermined transfer period, the transfer operation of the second arranging means is stopped and controlled.
The transfer means is controlled to transfer the remaining pallet of the electronic component from the fourth position to the second position, and the remaining pallet of the electronic component is transferred to the holding means at the second position. When held, the first arranging means is controllably formed so as to replenish and arrange the electronic components from the component supplying means with respect to the transfer trace position of the electronic component based on the transferred position information. A gas filling device for testing electronic components according to claim 1,