JP2003086637A - Method for correcting deformation of meandered tape and device for correcting deformation of meandered tape - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for correcting the deformation of a meandered tape and a device for correcting the deformation of the meandered tape in which it is possible to prevent an increase in an inspection time, and further to prevent wrong inspected results of failure of an external view in the case where meandering deformation occurs in an electronic part mounting film carrier tape at the time of an inspection of external view after formation of a wiring pattern. SOLUTION: An optical type external view inspector 30 is disposed between a back tension device 32 and a drive device 34, and urging members 76, 78, 80 and 82 are arranged. When a tape is fed to the optical type external view inspector 30, the urging member 76, 78, 80 and 82 urge the electronic part mounting film carrier tape T from one side toward the other side so as to come into contact with a side in a longitudinal direction to which the electronic part mounting film carrier tape T is fed. A side plane of the electronic part mounting film carrier tape T abuts on the urging member, whereby the meandered deformation occurring in the electronic part mounting film carrier tape T is corrected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film carrier tape (TAB (Tape Automated Bondin) for mounting electronic parts.
g) Tape, T-BGA (Tape Ball Grid Array) tape,
CSP (Chip Size Package) tape, COF (Chip On)
Film) tape and the like) (hereinafter, simply referred to as a "film carrier tape"). More specifically, in order to perform a visual inspection of the film carrier tape on which the wiring pattern is formed,
The present invention relates to a deformation correcting method and a deformation correcting device for preventing the deformation of a film carrier tape fed from a feeding device to a visual inspection device.

[0002]

BACKGROUND OF THE INVENTION With the development of the electronics industry, the demand for printed wiring boards for mounting electronic components such as ICs (integrated circuits) and LSIs (large-scale integrated circuits) has rapidly increased, and electronic devices have been downsized. There is a demand for lighter weight and higher functionality. Recently, as a mounting method of these electronic components, T
A mounting method using AB tape is adopted, and in particular,
The importance is increasing in the electronic industry that uses a liquid crystal display element (LCD), such as a personal computer, in which high definition, thinning, and narrowing of a frame area of a liquid crystal screen are demanded.

Conventionally, a method of manufacturing such a TAB tape has been manufactured through the following steps. That is, first, an insulating film serving as a base material such as a polyimide film is pattern punched by a press machine, and then a copper foil is attached to the insulating film by thermocompression bonding with an adhesive. Next, a photoresist is applied over the entire surface of this copper foil, and this photoresist is exposed to ultraviolet light in a desired wiring pattern shape using a photoresist mask, and the exposed photoresist portion is developed with a developing solution. Dissolve and remove by. Then, the copper foil portion which is not covered with the photoresist is chemically dissolved (etched) with an acid to be removed, and the photoresist is dissolved and removed with an alkaline solution so that the copper foil remaining on the insulating film is removed. Thus, a desired wiring pattern is formed.

Then, a solder resist layer is formed.
That is, in order to prevent dust, whiskers, and a short circuit due to migration at the time of mounting, and to protect and insulate wiring, inner leads and liquid crystal display elements connected to devices (electronic parts) such as ICs in wiring patterns The solder resist, which is an insulating resin, is applied through a screen on which an application pattern is formed using a squeegee by a screen printing method, except for the lead parts such as outer leads connected to the A resist coating layer is formed.

After that, in order to prevent the exposed lead portion from being oxidized and discolored and to secure the adhesive strength to the connecting portion such as the bump of the device connected to the lead portion, the lead portion is tin-plated or gold-plated, for example. , Tin-lead eutectic alloy plating, etc.
Tapes are manufactured. Further, recently, as an electronic component mounting method for realizing the above-mentioned characteristics, a BGA in which minute solder balls arranged in a matrix in a semiconductor mounting package are formed and these solder balls are connected to an external wiring board. The (Ball Grid Array) method is becoming widespread, and the number of package materials using the film carrier tape is also increasing among the package materials according to the BGA method.

[0006] Further, the size of the semiconductor mounting package itself is reduced to the size of a semiconductor chip.
ize Package) is being adopted, but for this CSP, the size of the package itself of the film carrier tape called tape type CSP is reduced to the size of the IC (semiconductor chip), and the connection method is the same as the BGA method. Film carrier tapes that are also used.

As a method of manufacturing a film carrier tape by the BGA method such as the tape type CSP, first, an adhesive layer is formed on the surface of an insulating resin film such as a polyimide film to prepare a base film tape, and this base film is prepared. In addition to the solder ball connection holes on the tape,
Required holes such as sprocket holes for tape transport and positioning holes are punched. After that, a metal foil such as a copper foil is attached to the base film tape, a desired circuit is formed from the metal foil, and then a necessary surface treatment is performed to manufacture.

That is, such a film carrier tape of the BGA system can be manufactured by substantially the same steps and materials as those of the conventional TAB tape except that it has solder ball connecting holes. In each manufacturing process of such a film carrier tape, an electronic component mounting film carrier tape is generally wound around an unwind reel, and the electronic component mounting film carrier tape unwound from the unwind reel is It has been introduced into a processing device that performs various kinds of processing. After performing various kinds of processing in this processing device, it is wound on a winding reel.

By the way, recently, even in a stage after a desired wiring pattern is formed on an insulating film as a base material and before a solder resist layer is formed, appearance inspection, particularly, wiring pattern defects (thin conductor thinning, It is usual to inspect for cracks, short conductor gaps such as conductor gaps, short circuits, etc.). In this way, it is possible to improve the quality of the production line and prevent defects in the film carrier tape by not only detecting defects in the final inspection but also performing visual inspection in each process in the previous process. Become. In addition, by performing visual inspection for each process, it is possible to detect the cause of defects and detect them early. Especially, visual inspection in the previous process is not limited to defect inspection, and the deviation amount,
It is also possible to maintain and improve the process capability by collecting and analyzing numerical information such as area and volume.

Conventionally, such visual inspection is performed by visual inspection, or AOI (Automatic Optical Inspection:
Optical appearance inspection device) was used, but with the lighter, thinner, shorter and smaller film carrier tapes, it is becoming very difficult to perform visual appearance inspection. for that reason,
In recent years, automatic visual inspection using AOI has become mainstream.

In the appearance inspection using the AOI, as described above, the film carrier tape is generally unwound from the unwind reel, and the master pattern of the film carrier tape is compared with the formed object pattern by a predetermined device. The visual inspection is performed. The film carrier tape after the inspection is sequentially wound on the winding reel.

Recently, the base tape of the film carrier tape tends to be thin, and accordingly, the wiring pattern formed on the film carrier tape has a fine pitch, and the inner lead having the narrowest wiring pattern width is used. Is also manufactured with a very fine pitch lead width of less than ten and several μm. Further, the thickness of the film carrier tape for mounting electronic parts such as the flexible insulating film and the conductive metal foil used is gradually decreasing. For example, the tape width used is
35 to 70 mm is common, and the tape thickness is
The insulating resin film has a thickness of 38 to 75 μm, and the metal foil has a thickness of 8 to 35 μm.

As described above, as the base tape and other members become thinner, especially as the thickness of the base tape becomes thinner than 50 μm, and as the pitch becomes finer, wavy deformation such as waviness of the film carrier tape becomes conspicuous. It became so. Therefore, when inspecting the difference in the object pattern with the master pattern as the reference by the AOI, as shown in FIG.
The center line T1 of the film carrier tape T often deviates from the center line L1 of the transfer line L during the transportation up to the inspection by the OI, and as a result, the conventional method cannot cope with a close inspection. It was

That is, 25 due to variations in equipment used.
A slight deviation of about 6 μm can be automatically adjusted by the AOI. However, if the deviation is 257 μm or more, the AOI cannot perform the automatic adjustment. However, in recent years, thinned film carrier tapes often have a deviation of 257 μm or more in the course of conveyance from unwinding from the reel to visual inspection due to meandering deformation, and as a result, the inspection time is considerably long. A or even if it has a normal wiring pattern
There is a problem that the OI is identified as a poor appearance.

[0015]

SUMMARY OF THE INVENTION In view of the above situation, it is an object of the present invention to prevent an increase in the inspection time even when the film carrier tape undergoes a meandering deformation during the appearance inspection after the wiring pattern is formed, and the appearance is erroneously observed. An object of the present invention is to provide a meandering tape deformation correcting method and a meandering tape deformation correcting device capable of preventing a defective inspection result from being output.

[0016]

SUMMARY OF THE INVENTION A method of straightening a meandering tape according to the present invention comprises:
The film carrier tape for mounting electronic parts on which the wiring pattern is formed by etching the metal foil on the flexible insulating film is fed out to the optical appearance inspection device between the back tension device and the drive device. An urging member for urging the electronic component mounting film carrier tape from one side of the electronic component mounting film carrier tape to the other side is disposed so as to contact the lateral side of the electronic component mounting film carrier tape. The side surface of the carrier tape is brought into contact with the biasing member to correct the meandering deformation occurring in the electronic component mounting film carrier tape.

Further, the meandering tape deformation correcting apparatus of the present invention is an appearance of an electronic parts mounting film carrier tape having a wiring pattern formed by etching a metal foil on a flexible insulating film by an optical appearance inspection apparatus. A device for correcting the deformation of a meandering tape used at the time of inspection, wherein the electronic component is directed from one side of the electronic component mounting film carrier tape to the other side so as to be in contact with the lateral side in the longitudinal direction of the electronic component mounting film carrier tape. A biasing member for biasing the mounting film carrier tape is provided, and the meandering deformation occurring in the electronic component mounting film carrier tape is configured to be corrected by the biasing means.

In the present invention, the urging member is arranged in the moving direction of the electronic component mounting film carrier tape.
It is also possible to provide a plurality of them at a predetermined interval. Also,
The urging member is made up of two urging members which are arranged so as to face each other and have different directions, and one set is composed of another symmetric member which is different from this one set. It is also possible to arrange these one set and the other one set at a predetermined distance in the traveling direction of the electronic component mounting film carrier tape.

The urging members may be arranged in a staggered direction at predetermined intervals in the traveling direction of the electronic component mounting film carrier tape. Furthermore, it is preferable that the biasing member is fixed to the aperture gate. According to the present invention having such a configuration, it is possible to correct the meandering deformation of the electronic component mounting film carrier tape which cannot be corrected even when the electronic component mounting film carrier tape is tensioned by the back tension device.

As a result, it is possible to prevent an increase in the inspection time and prevent an erroneous appearance result from being inspected.

[0021]

DETAILED DESCRIPTION OF THE INVENTION The meandering tape deformation correcting method and the meandering tape deformation correcting device according to the present invention will be specifically described below with reference to the drawings. FIG. 1 shows an appearance inspection apparatus to which a meandering tape deformation correcting method and a meandering tape deformation correcting apparatus according to the present invention are applied.

As shown in FIG. 1, the appearance inspection apparatus 10
Is a tape feeding device 20, an optical appearance inspection device 30 (AOI 30), and a meandering tape deformation correcting device 40.
And a tape winding device 50. In the delivery device 20, for example, a film carrier tape such as CSP or BGA is wound around the delivery reel 60 via the spacer S, and the delivery reel 60 is mounted on the delivery drive shaft 22.

Then, the delivery drive shaft 22 is rotated by the drive of a drive motor (not shown), the film carrier tape T is delivered from the delivery reel 60 together with the spacer S, and the AOI 30 is passed through the guide roller 21.
Is being supplied to. It should be noted that, for example, as shown in FIG.
When the lower position sensor detects the lower end T ′ of the slack portion of the film carrier tape T, the drive motor of the feeding device 20 is stopped to drive the film. Carrier tape T
Is designed to prevent it from coming loose and coming into contact with the floor and getting damaged. Further, when the lower position T ′ of the slack portion of the film carrier tape T is detected by the upper position sensor, the driving motor of the feeding device 20 is started to maintain a certain slack of the film carrier tape T. It is like this.

The film carrier tape T supplied to the AOI 30 is guided by the AOI 30 through the guide roller 31.
When passing between the back tension device 32 and the drive device 34, the drive of the drive device 34 is temporarily stopped, the feeding of the film carrier tape T is stopped, and the back tension device 32 is stopped. By reversing, the film carrier tape T is given a constant back tension, and the film carrier tape T is accurately positioned at a predetermined position. From this state, the appearance inspection of the film carrier tape T is performed by the AOI 30.

The film carrier tape T, which has been subjected to the visual inspection by the AOI 30, subsequently passes through the guide roller 33 and is supplied to the next winding device 50.
The winding drive shaft 5 is driven by a drive motor (not shown).
It is configured such that when 2 rotates, it is wound around the winding reel 70 mounted on the winding drive shaft 52.

At this time, the spacer S unwound from the unwind reel 60 of the unwinding device 20 is moved by the guide roller 5
It is supplied to the take-up reel 70 of the take-up device 50 through 7, 56 and the winding slack preventive device 59 and is interposed between the film carrier tapes T so that the film carrier tapes T come into contact with each other. It protects the wiring pattern from damage and the film carrier tape T from damage.

The winding device 50 is provided with, for example, three position sensors 51 in the up-down direction similarly to the feeding device 20, and the slack portion of the film carrier tape T is caused by the lower position sensor 51. Bottom of T '
When it is detected, the drive motor of the winding device 50 is stopped to prevent the film carrier tape T from being too loose and coming into contact with the floor and being damaged. When the lower position T ′ of the slack portion of the film carrier tape T is detected by the upper position sensor 51, the drive motor of the winding device 50 is started to keep the slack of the film carrier tape T constant. It is supposed to be maintained.

Further, in this embodiment, in order to prevent the meandering deformation of the film carrier tape T caused by making the film carrier tape T lighter, thinner, shorter, smaller and finer, the following deformation correcting device 40 is a back tension device. Three
2 and the drive device 34. As shown in FIG. 2, the deformation correcting device 40 utilizes two aperture gates 72, 74 arranged between the back tension device 32 and the drive device 34, and the entrances of these aperture gates 72, 74 are used. 4 on each side
The two biasing members 76, 78, 80, 82 are arranged so that their positions can be adjusted. The interval h between the two aperture gates 72 and 74 can be changed according to the product length formed on the film carrier tape T to be inspected, and the movable range is 120 mm or less.

The aperture gates 72 and 74 are provided on the top plate 92 in the direction transverse to the width of the film carrier tape T.
As shown in FIG. 3, a pair of guide members 94, 94 are attached to both ends of the top plate 92 so as to hang down. The two guide members 94 are used for the top plate 9
It is attached so that its position can be adjusted with respect to the length direction of 2 as shown by the arrow. Thereby, the protruding length of the biasing members 76, 78, 80, 82 can be adjusted according to the width of the tape T.

This guide member 94 is shown in FIG.
As shown in (B), the opening 86 is formed in the leg portion, and the laterally columnar urging member 76 is vertically and horizontally disposed via the bracket 96 on one of the two forked legs. The position is adjustable. The guide member 94 has two modes, one for the right side and the other for the left side, depending on the convenience of use, and one biasing member 76, 78, 80, 82 is provided on each of the guide member on either the right side or the left side. It is attached to the crab and used.

The substantially S-shaped bracket 96 is fixed to the leg portion of the guide member 94 by inserting the two bolts 33, 33 into the stopper plate 31 that is horizontally extended. The screwing bolt 35 is vertically inserted into the bracket 96, and the biasing member 76 is attached to the tip thereof. In addition, the biasing member 76 is configured such that the horizontal projection length can be adjusted by rotating the horizontal adjustment screw 37.
This adjustable range is 0 to 5 mm.

By attaching the biasing members 76, 78, 80, 82 to the guide member 94 as described above,
The four urging members 76, 78, 80, 82 move toward the flow direction B of the film carrier tape T shown in FIG.
The left, right, right and left are arranged on the side of the film carrier tape T. Therefore, the inner biasing member 7 is sandwiched between the two outermost biasing members 76 and 82.
8 and 80 are installed.

As described above, the two biasing members 76 and 78 that sandwich the first aperture gate 72 constitute one set, and the two biasing members 76 and 78 that sandwich the next aperture gate 74. The members 80 and 82 also constitute another set of the two. Then, these two sets are arranged so as to be symmetric with respect to a straight line 41 that crosses the width direction of the film carrier tape T.

Therefore, these biasing members 76, 7
When the film carrier tape T travels between 8, 80 and 82, the urging members 76 and 82 move toward the left side in the direction B on the drive device 34 side.
Similarly, the movement to the right is restricted by the biasing members 78 and 80. Therefore, while being tensioned by the back tension device 32, the drive device 3
Even if the tape T tries to meander when the film carrier tape T is fed by 4, the meandering deformation of the thin film carrier tape T is caused by the biasing members 76, 78, 80, 82 corresponding to the positions. By contacting with, it is possible to prevent the meandering. When adjusting the positions of the biasing members 76, 78, 80, 82,
In addition to adjusting the mounting position of the guide member 94 with respect to the top plate 92, the bolt 35 and the screw 37 may be rotated. In particular, if the screw 37 is adjusted, the biasing member 7 may be adjusted.
The protruding length of 6, 78, 80, 82 can be finely adjusted.

Such biasing members 76, 78, 80, 8
The material of No. 2 is not particularly limited as long as it does not damage the film carrier tape T. In addition, when the reel wound with the film carrier tape T to be inspected is replaced, including the case where the film carrier tape T of the same width wound on another reel is continuously inspected, before the appearance inspection is started. For each film carrier tape T having inspection symmetry, the biasing member 7 is provided in accordance with the meandering condition.
The positions of 6, 78, 80 and 82 may be finely adjusted.

Such biasing members 76, 78, 80, 8
As shown in FIG. 1, the installation position of 2 is the camera 39 for object pattern recognition attached to the AOI 30.
It is preferable to be in the vicinity of. Further, the urging member is not limited to four, and may be a single member or other plural members.
It is preferable that two biasing members be attached to the one camera attached to the AOI.

In this way, when two biasing members are attached to one camera, the positions thereof may be on the same side of the film carrier tape T in the longitudinal direction or on different sides. Good, but preferably on the different side. that's all,
Although one embodiment of the present invention has been described, the present invention is not limited to this, and various modifications can be made without departing from the object of the present invention.

For example, in the above embodiment, the biasing member 76,
78, 80, 82 are installed on the inlet side and the outlet side of the gate using the aperture gate.
78, 80 and 82 can be installed regardless of the aperture gate. Further, in the above embodiment, the biasing member 7
6, 78, 80, and 82 form one set with the two biasing members 76 and 78, and the other two biasing members 80 and 82 form the other set, and are directed in the flow direction of the film carrier tape T. I arranged them to be left, right, right, left, but of course,
You can also arrange right, left, left, right. Further, it is also possible to arrange them alternately on the left and the right without providing a set. Therefore, in this case, the number of biasing members can be odd.

Further, in the above embodiment, the biasing members 76,
Although 78, 80, and 82 are attached to the guide member 94 shown in FIG. 4, they may be attached to other members, and the object of attachment is not limited to this guide member 94.

[0040]

As described above, according to the meandering tape deformation correcting method and the meandering tape deformation correcting device according to the present invention, the meandering deformation occurring in the film carrier tape is
Since it is configured to correct with a biasing member, it is possible to correct even meandering deformation that cannot be corrected only by pulling with the back tension device, prevent increase in inspection time, and erroneously produce inspection results of defective appearance. Can be prevented.

[Brief description of drawings]

FIG. 1 is a front view of an appearance inspection apparatus including a meandering tape deformation correcting method and a meandering tape deformation correcting apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic plan view of the deformation correcting device shown in FIG.

FIG. 3 is a side view of the aperture gate unit shown in FIG.

FIG. 4 (A) and FIG. 4 (B) are a side view and a front view of a guide member used for mounting a biasing member adopted in an embodiment of the present invention.

FIG. 5 is a diagram illustrating a meandering deformation that may occur in a film carrier tape for mounting electronic components.

[Explanation of symbols]

10 Visual inspection device 20 Sending device 30 AOI (optical visual inspection device) 32 Back tension device 34 Drive device 40 Deformation correction device 50 Winding device 76, 78, 80, 82 urging member 92 Top plate Film carrier tape for mounting electronic components

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Takeshi Nishihira             1-1 Hikoshima Nishiyama-cho, Shimonoseki City, Yamaguchi Prefecture F-term (reference) 5F044 MM00

Claims (9)

[Claims] 1. A film carrier tape for mounting an electronic component, wherein a wiring pattern is formed by etching a metal foil on a flexible insulating film, is applied to an optical appearance inspection device between a back tension device and a drive device. When feeding out, the electronic component mounting film carrier tape is attached from one side to the other side of the electronic component mounting film carrier tape so as to be in contact with the lateral side of the rolled out lengthwise direction. A biasing member for biasing is provided, and a side surface of the carrier tape is brought into contact with the biasing member to correct meandering deformation occurring in the electronic component mounting film carrier tape. Deformation correction method for meandering tape. 2. A meandering tape deformation correction according to claim 1, wherein a plurality of the urging members are provided at predetermined intervals in the traveling direction of the electronic component mounting film carrier tape. Method. 3. The urging member comprises a set of two urging members arranged so as to face each other and having different directions, and a symmetric shape which is different from the one set. Another set is prepared, and the one set and the other set are arranged at a predetermined interval in the traveling direction of the electronic component mounting film carrier tape. The method for correcting deformation of a meandering tape according to 1 or 2. 4. The urging member is arranged in a staggered direction at predetermined intervals in a traveling direction of the film carrier tape for mounting electronic parts, according to claim 1 or 2. Deformation correction method for meandering tape. 5. Deformation correction of a meandering tape used at the time of appearance inspection by an optical appearance inspection device of a film carrier tape for mounting electronic parts in which a wiring pattern is formed by etching a metal foil on a flexible insulating film. A device,
The electronic component mounting film carrier tape is provided with a biasing member that biases the electronic component mounting film carrier tape from one side to the other side so as to come into contact with the lateral side in the longitudinal direction. A meandering tape deformation correcting device, characterized in that the meandering deformation occurring in the electronic component mounting film carrier tape is corrected by the biasing member. 6. The meandering tape deformation correction according to claim 5, wherein a plurality of the biasing members are provided at a predetermined interval in a traveling direction of the electronic component mounting film carrier tape. apparatus. 7. The urging member comprises a set of two urging members which are arranged so as to face each other and have different directions, and a symmetric shape which is different from the one set. Another set is prepared, and the one set and the other set are arranged at a predetermined interval in the traveling direction of the electronic component mounting film carrier tape. 5. The meandering tape deformation correcting device according to 5 or 6. 8. The urging member is arranged in a staggered direction at predetermined intervals in a traveling direction of the electronic component mounting film carrier tape, according to claim 5 or 6. Deformation correction device for meandering tape. 9. The meandering tape deformation correcting device according to claim 5, wherein the urging members are fixed to an entrance and an exit of the aperture gate, respectively.