JP2003084566A - Electrostatic conveyance device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic conveyance device capable of classifying powders or grains into grades and separating positively charge powders or gains and negatively charged powders or gains and, moreover, capable of selecting desired powders or grains while performing classification and conveyance of the powders or grains and capable of conveying them. SOLUTION: In an electrostatic conveyance device conveying powders or grains by electrostatic force, since a first conveyance electrode group 2 is formed on the surface of the substrate 1, an array-type groove group 3 is formed by being made to have angles with respect to the first conveyance electrode group 2 on the electrode group 2 and a second conveyance electrode group 4 is formed on top surfaces of the array-type groove group 3, this device can convey selected powders or grains while selecting them by dropping powders of grains whose sizes are smaller than the pattern width of the groove group 3 and whose electrification quantities are small and whose conveyance flying are small into gaps of grooves while conveying them by the second conveyance electrode group 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic transport device for transporting powder or particles by electrostatic force, and it is possible to transfer powder or particles such as toner, ferroelectric powder, alumina particles, and charged powder,
The present invention relates to an electrostatic transport device that performs electrostatic separation / classification and transport.

[0002]

2. Description of the Related Art Electrostatic transfer technology for transferring powder or particles by electrostatic force is known, for example, "IS &TsNIP".
16: 2000Int, Conf, On Digit, Print, Tech p740-
742, p736-739 ”, some of the basic technologies for electrostatic transport have been announced. Further, this electrostatic carrying technique is applied to a developing device of an image forming apparatus, and is used, for example, for carrying and developing toner in the developing device (Japanese Patent Publication No. 5-31).
147, JP-A-59-181374, JP-A-59-181375, JP-A-59-18136.
No. 9, Japanese Patent Laid-Open No. 59-181371, Japanese Patent No. 2
836537, JP-A-63-13059, etc.).

[0003]

The aggregate of powder such as powder, particles, granules and flakes has a distribution in size. There are also positively and negatively charged ones. The present invention can classify these powders or particles to classify positively and negatively charged powders or particles, and further classify and convey powders or particles such as toner to obtain a desired powder. An object of the present invention is to provide an electrostatic transfer device capable of selecting and transferring particles.

[0004]

In order to achieve the above object, the invention according to claim 1 is an electrostatic carrying device for carrying powder or particles by electrostatic force, wherein a first layer carrying electrode group is provided on a substrate surface. And forming an array-shaped groove group on the first-layer transport electrode group with the first-layer transport electrode group having an angle,
A second transport electrode group is formed on the top surface of this array of groove groups. That is, claim 1
In the electrostatic transport device, the first layer transport electrode group is formed on the surface of the substrate, and the array-shaped groove group is formed on the first layer transport electrode group so that the first layer transport electrode group has an angle. Since the second carrier electrode group was formed on the top surface of the array-shaped groove group, the powder or particles smaller than the pattern width of the groove group while carrying the powder or particles by the second carrier electrode group. Or
It is possible to drop powders or particles having a small charge amount and a small amount of transportation flight between the grooves, and carry them while sorting the powders or particles. Further, the powder or particles dropped in the groove can be separated because the first and second electrode groups have an angle of 30 ° to 90 ° and the conveying directions are different.

According to a second aspect of the present invention, in an electrostatic carrying device for carrying powder or particles by electrostatic force, a first layer carrying electrode group is formed on the surface of a substrate, and the first layer carrying electrode group is formed on the first layer carrying electrode group. An array-shaped groove group is formed with an angle to the first-layer carrier electrode group, a second carrier electrode group is formed on the top surface of the array-shaped groove group, and a plurality of layers are formed. It is what That is, in the electrostatic transport device according to the second aspect, the first-layer transport electrode group is formed on the surface of the substrate, and the first transport electrode group is formed.
An array-shaped groove group is formed on the layer-carried electrode group with the first layer-carried electrode group having an angle, and a second carrier electrode group is formed on the top surface of this array-shaped groove group. Since a plurality of layers are formed, the powder or particles can be conveyed while being selected and separated, as in the first aspect. Further, it is possible to separate and classify powders or particles having a large particle size distribution, and it is possible to separate and classify many kinds of powders or particles corresponding to multiple layers.

According to a third aspect of the invention, in an electrostatic carrying device for carrying powder or particles by electrostatic force, a first layer carrying electrode group is formed on the surface of a substrate, and the first layer carrying electrode group is formed on the first layer carrying electrode group. An array-shaped groove group is formed at an angle to the first-layer carrier electrode group, a second carrier electrode group is formed on the top surface of the array-shaped groove group, and the array-shaped groove group is formed. In this case, unevenness of 1/3 or less of the carrier particles is formed on the side surface and the bottom of the groove, and the contact with the particles is used as a contact point. That is, in the electrostatic carrying device according to claim 3, a first layer carrying electrode group is formed on the surface of the substrate, and an array of groove groups are provided on the first layer carrying electrode group as the first layer carrying electrode group. The second carrier electrode group is formed on the top surface of the array-shaped groove group at an angle, and when the array-shaped groove group is formed, 1 of carrier particles is formed on the side surface and the bottom of the groove. Since the uneven portion of / 3 or less is formed and the contact with the particles is used as the contact point,
Similar to the first aspect, it is possible to carry the powder or particles while selecting and separating them. In addition, Coulomb force or image force is usually generated between the powder or particles and the substrate,
The force is 20 to 300 nN (N: Newton), but unevenness of 1/3 or less of the carrier particles is formed on the side and bottom of the groove, and the contact point with the particle is used as a contact point to minimize the point of attachment to the groove. By doing so, most of the contacts interpose air, and the force thereof becomes very small, about 5 to 30 nN, so the electric field during electrostatic transfer is not in the KV order, but 10 V to 200 V.
It will be possible to some extent.

According to a fourth aspect of the present invention, in an electrostatic carrying device for carrying powder or particles by electrostatic force, a first layer carrying electrode group is formed on a substrate surface, and the first layer carrying electrode group is formed on the first layer carrying electrode group. An array-shaped groove group is formed with an angle to the first-layer carrier electrode group, a second carrier electrode group is formed on the top surface of this array-shaped groove group, and the array-shaped groove group is a groove. It is characterized in that the formation is an overhang (inverse taper). That is, in the electrostatic carrier device according to claim 4,
A first-layer transport electrode group is formed on the substrate surface, and an array-shaped groove group is formed on the first-layer transport electrode group with the first-layer transport electrode group having an angle. Since the second transport electrode group is formed on the top surface of the, the transport can be performed while the powder or particles are selected and separated as in the case of claim 1, and further, the array shape can be used. Since the groove group has an overhang (reverse taper) in the groove formation, even when a multi-layered transport electrode group configuration is used, the powder or particles falling from each groove will have a reverse taper in the groove formation. No clogging inside, good electrostatic transfer and separation
Classification can be performed.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the configuration, operation and operation of the present invention will be described in detail with reference to the illustrated embodiments.

(Embodiment 1) FIG. 1 is a view showing an embodiment of the invention according to claim 1, and is a view showing a schematic structure and a manufacturing process of an electrostatic carrying device. In this electrostatic transport device, a first layer transport electrode group 2 is formed on the surface of a substrate 1, and an array of groove groups 3 are formed on the first layer transport electrode group 2 in the first layer transport electrode group 2. The second transport electrode group 4 is formed on the top surface of the array-shaped groove group 3 at an angle, and the groove group is formed while the powder or particles are transported by the second-layer transport electrode group 4. Powder or particles smaller than the pattern width of
It is possible to convey powder or particles by electrostatic force while dropping powder or particles having a small charge amount and small conveyance flight between the grooves to select the powder or particles. Also, the powder or particles that have fallen into the groove,
The first layer transport electrode group 2 and the second layer transport electrode group form an angle of 30.
Since it is from 90 ° to 90 ° and the conveying direction is different, separation is possible. As the electrostatic transport device, a drive circuit having a phase of 3 to 6 phases is connected to the first and second transport electrode groups 2 and 4, and each electrode of the first and second transport electrode groups 2 and 4 is connected. Although the polarity and magnitude of the voltage applied to the device are controlled, these are not shown.

Next, a process of manufacturing the electrostatic carrying device shown in FIG. 1 will be described. First, as the substrate 1, a flat substrate made of a hard material such as glass or ceramics is prepared, and a first layer carrying electrode group 2 made of a metal film having a thickness of 0.1 to 2.0 μm is provided on the flat substrate 1. To form. As the method of forming the first layer carrying electrode group 2, a method of forming the electrode group 2 on the substrate 1 by vapor deposition, sputtering, printing or the like using a mask on which a pattern of the electrode group is formed, or a metal on the substrate 1 is used. There is a method of forming the electrode group 2 by pattern-etching the metal film by a photolithography method or the like after forming the film.

Next, an organic material (for example, dry film, resist, polyimide, aramid, etc.) having a thickness of 1 to 10 times the particle diameter of the powder or particles to be conveyed is formed on the first layer conveying electrode group 2. The array-shaped groove group 3 is formed with an angle to the first-layer transport electrode group 2 (FIGS. 1A and 1B).
As the method of forming the array-shaped groove group 3, a layer made of an organic material having a thickness of 1 to 10 times the carrier particle diameter is formed on the first layer carrier electrode group 2 of the substrate 1 by vapor deposition, sputtering or the like. After that, a method of forming by etching or the like using a mask having a groove group pattern, or a carrier particle size of 1 to 10
After forming the groove group 3 by a photolithography method or a punching process using an organic material film having a double thickness,
There is a method of adhering onto the layer transfer electrode group 2. The width of each groove 3b of the arrayed groove group 3 is 1 to 5 times the particle diameter of the powder or particles to be conveyed, and the depth is 1 to 10 times the particle diameter.

Next, a second carrier electrode group 4 made of a metal film having a thickness of 0.1 to 2.0 μm is formed on the top surface of the array-shaped groove group 3 (FIG. 1 (b)). As a method of forming the second transport electrode group 4, there is a method of forming the electrode group 2 on the top surface of the array-shaped groove group 3 by vapor deposition or sputtering using a mask.

Next, an inorganic material (for example, S having a thickness of 0.1 to 2.0 μm) is formed on the bottom of the groove and the second carrier electrode group 4.
Insulating protective film (protective layer) 3 made of iO ₂ , TiN, etc.
a and 5 are formed (FIGS. 1B and 1C). The protective film 3a on the bottom of the groove 3b of the array-shaped groove group 3 may be formed of a part of the organic material forming the array-shaped groove group 3.

(Embodiment 2) FIG. 2 is a view showing an embodiment of the invention according to claim 2, and is a cross-sectional view of a main part showing a schematic structure of an electrostatic carrying device. In this electrostatic transport device, a first layer transport electrode group 2 is formed on the surface of a substrate 1, and an array of groove groups 3 are formed on the first layer transport electrode group 2 to form a first layer transport electrode group 2.
Is formed with an angle, the second carrier electrode group 4 is formed on the top surface of the array-shaped groove group 3, and a plurality of layers are formed. Thus, the carrier electrode groups 2, 4, 7, 1
0 or 13 and a plurality of groove groups 3, 6, 9 and 12 in the form of an array are formed, powder or particles 1 having a large particle size distribution
It is possible to separate and classify 5, 16, 17, and 18. In addition, there are many types (particle size) due to the multilayer structure.
The powder or particles can be separated and classified.
Note that the example of FIG. 2 shows a pattern in which the transport electrode groups 2, 7, 13 and the transport electrode groups 4, 10 are orthogonal (intersecting at an angle of 90 °). Further, in the example of FIG. 2, the groove width and depth of the array-shaped groove groups 3, 6, 9, 12 are larger in the upper layer, and the particle size of the powder or particles to be conveyed is larger in the upper layer. . Therefore, in this example, it is possible to perform separation / classification of powder or particles having four particle sizes.

Next, a process of manufacturing the electrostatic carrying device shown in FIG. 2 will be described. The steps of forming the first-layer transport electrode group 2, the array-shaped groove group 3, the second transport electrode group 4, and the insulating protective film 5 on the substrate 1 are the same as those in the manufacturing process (FIG. 1) described in the first embodiment. Is. A second array-shaped groove group 6 made of an organic material is formed on the insulating protective film 5, and a third transport electrode group 7 made of a metal film is formed on the second array-shaped groove group 6. Then
Further, an insulating protective film 8 made of an inorganic material is formed on it. Then, a third array-shaped groove group 9 made of an organic material is formed on the insulating protective film 8, and a fourth transport electrode group made of a metal film is formed on the third array-shaped groove group 9. 10 is formed, and an insulating protective film 1 made of an inorganic material is further formed thereon.
1 is formed. Then, on the insulating protective film 11,
A fourth array-shaped groove group 12 made of an organic material is formed, a fifth transport electrode group 13 made of a metal film is formed on the fourth array-shaped groove group 12, and an inorganic material is further formed thereon. The insulating protection film 14 is formed. In this way, it is possible to create a multi-layered electrostatic transport device.

(Embodiment 3) FIG. 3 is a view showing an embodiment of the invention according to claim 3, and is a cross-sectional view of a main part showing a schematic structure of an electrostatic carrying device. In this electrostatic transport device, a first layer transport electrode group 2 is formed on the surface of a substrate 1, and an array of groove groups 3 are formed on the first layer transport electrode group 2 to form a first layer transport electrode group 2.
At an angle, a second carrier electrode group 4 is formed on the top surface of the array-shaped groove group 3, and an insulating protective film 5 is formed on the second carrier electrode group 4. Insulation protection film 5
A second array-shaped groove group 6 is formed on the above, a third carrier electrode group 7 is formed on the second array-shaped groove group 6, and an insulating protective film 8 is further formed thereon. In addition, when forming the array-shaped groove groups 3 and 6, the concave and convex portions 19 of 1/3 or less of the carrier particles are formed on the side surfaces and the bottom portions of the grooves to prevent contact with powder or particles. It is a contact point.

The structure of this embodiment is a two-layer structure of an array-shaped groove group and an electrode group, and like the first and second embodiments,
The powder or particles can be conveyed while being sorted and separated. Coulomb force or image force is usually generated between the powder or particles and the substrate, and the force is 20 to 300 n.
N (N: Newton), but by forming the uneven portion 19 of 1/3 or less of the carrier particles on the side surface and the bottom portion of the groove, the contact point with the particle is used as a contact point, and the adhesion point with the groove is minimized. , The majority of the contacts have air, and the force becomes very small.
Since it is about 30 nN, the electric field at the time of electrostatic transfer is not on the KV order, but can be about 10 V to 200 V.

The process for producing the electrostatic transport device shown in FIG. 3 is substantially the same as that of the first and second embodiments, but in this embodiment, 1 / th of carrier particles are provided on the side and bottom of each groove group 3, 6. The uneven portion 19 of 3 or less is formed. As a method for forming the array-shaped groove groups 3 and 6, as described above, a film made of an organic material is used to form groove groups by a photolithography method or a punching process, and the first layer carrying electrode group 2 or The second transport electrode 4 is adhered directly or through a protective film. As a result, the array-shaped groove groups 3 and 6 can be formed, but the bottoms and side surfaces of the grooves are sharp and smooth as they are. Therefore, the concave-convex portion 19 is formed by performing physical etching with argon (Ar), helium (He), or the like on the bottom and side surfaces of the groove by a dry etching method. Further, by mixing fine particles in a film made of an organic material, the uneven portion 19 can be formed.
Can be formed.

(Embodiment 4) FIG. 4 is a view showing an embodiment of the invention according to claim 4, and is a cross-sectional view of the main part showing the schematic construction of an electrostatic carrying device. This electrostatic transport device is a substrate 21
The first layer transport electrode group 22 is formed on the surface of the first layer transport electrode group 22, and the array-shaped groove group 24 is formed on the first layer transport electrode group 22 at an angle to the first layer transport electrode group 22. The second carrier electrode group 25 is formed on the top surface of the array-shaped groove group 24, and the insulating protective films 23, 2 are formed on the lower part of the groove and the second carrier electrode group 25.
6 is formed, and the array-like groove group 24 is formed.
The groove has an overhang (reverse taper).

In the electrostatic carrying device of the present embodiment, as in the first embodiment, the carrying can be carried out while selecting or separating the powder or particles, but the arrayed groove group 24 is over-grooved. Since it is a hang (reverse taper), even when a multi-layered transport electrode group configuration is used, the powder or particles that have fallen from each groove do not become clogged in the groove because the groove formation is a reverse taper. Good electrostatic transfer and separation / classification can be performed. That is, since each groove 24a of the groove group 24 has an inverse taper shape, the groove width is larger than the particle diameter of the powder or particles 28 dropped into the groove from the opening of the groove 24a. Alternatively, the particles 28 are transported without clogging.

A first layer carrying electrode group 22, an array of groove groups 24, a second carrying electrode group 25 of the electrostatic carrying device shown in FIG.
The process of forming the insulating protection films 23 and 26 is the same as that of the first embodiment, but in this embodiment, the groove formation of the array-like groove group 24 is formed as an overhang (inverse taper). As a method of forming an overhang (reverse taper) in each groove 24a of the groove group 24, there is a method of wet overetching, for example. When performing dry etching, if etching is performed at a high pressure of 2 to 0.5 Torr,
It becomes isotropic etching, and side etching progresses to form grooves 24a having an inverse taper shape.

[0022]

As described above, in the electrostatic carrier device according to the first aspect, the first layer carrier electrode group is formed on the surface of the substrate, and the array-shaped grooves are formed on the first layer carrier electrode group. Since the group was formed with an angle to the first layer carrier electrode group, and the second carrier electrode group was formed on the top surface of this array-shaped groove group,
While transporting the powder or particles by the second transport electrode group, the powder or particles smaller than the pattern width of the groove group or the powder or particles having a small charge amount and small transport flight are dropped between the grooves, Conveyance can be performed while selecting powder or particles. Further, the powder or particles dropped in the groove can be separated because the first and second electrode groups have an angle of 30 ° to 90 ° and the conveying directions are different. Therefore, according to the present invention, it is possible to realize an electrostatic carrying device that separates and classifies powder or particles depending on the particle size and the amount of charge while carrying the powder or particles by electrostatic force.

In the electrostatic carrying device according to the second aspect, a first layer carrying electrode group is formed on the surface of the substrate, and an array of groove groups are provided on the first layer carrying electrode group. The second carrier electrode group is formed on the top surface of the array-shaped groove group and a plurality of layers are formed. It is possible to carry while carrying out separation. It is also possible to separate and classify powders or particles with a large particle size distribution, and to separate and classify as many types of powders or particles as there are multiple layers.
Can be classified. Therefore, according to the present invention, a large particle size distribution, while conveying powder or particles by electrostatic force,
It is possible to realize an electrostatic carrying device capable of classifying and classifying powder or particles having a charge distribution into a large number.

In the electrostatic carrying device according to the third aspect, a first layer carrying electrode group is formed on the surface of the substrate, and an array of groove groups are provided on the first layer carrying electrode group. At an angle to form a second carrier electrode group on the top surface of the array-shaped groove group, and when the array-shaped groove group is formed, carrier particles are formed on the side surface and the bottom of the groove. Since the uneven portion of 1/3 or less is formed and the contact with the particles is used as the contact point,
Similarly to the above, the powder or the particles can be conveyed while being selected and separated. In addition, by forming irregularities of 1/3 or less of the carrier particles on the side and bottom of the groove and using the contact with the particle as a contact point to minimize the point of attachment to the groove, most of the contact point interposes air. However, the force becomes very small, 5-30
Since it is about nN, the electric field at the time of electrostatic transport can be about 10 V to 200 V instead of the KV order. Therefore,
According to the present invention, powder or particles are conveyed by an electrostatic force, and the powder or particles are separated or separated depending on the particle size or the charge amount.
It is possible to realize an electrostatic transfer device that can perform classification and can be driven at a low voltage.

According to another aspect of the electrostatic transport device of the present invention, a first layer transport electrode group is formed on the surface of the substrate, and an array of groove groups is provided on the first layer transport electrode group. Since the second carrier electrode group is formed on the top surface of this array-shaped groove group, the powder or particles are selected and separated in the same manner as in claim 1. Since it is possible to carry, and the groove formation of the array-like groove group is an overhang (inverse taper), even if a multi-layered transport electrode group configuration is adopted, powder or particles falling from each groove will not Since the groove is formed in the reverse taper, clogging does not occur in the groove, and good electrostatic conveyance and separation / classification can be performed. Therefore, according to the present invention, it is possible to separate and classify powder or particles depending on the particle size and the charge amount while conveying the powder or particles by electrostatic force, and to prevent clogging during conveyance between grooves. It is possible to realize an electrostatic transport device that can prevent the above.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of the invention according to claim 1, and is a diagram showing a schematic configuration and a manufacturing process of an electrostatic carrying device.

FIG. 2 is a diagram showing an embodiment of the invention according to claim 2, and is a cross-sectional view of a main part showing a schematic configuration of an electrostatic transport device.

FIG. 3 is a diagram showing an embodiment of the invention according to claim 3, and is a cross-sectional view of a main part showing a schematic configuration of an electrostatic transport device.

FIG. 4 is a diagram showing an embodiment of the invention according to claim 4, and is a cross-sectional view of a main part showing a schematic configuration of an electrostatic transport device.

[Explanation of symbols]

1: substrate 2: First layer transport electrode group 3: Array groove group 3a: Insulating protective film (protective layer) 3b: groove 4: Second carrier electrode group 5: Insulation protection film 6: Second array groove group 7: Third carrier electrode group 8: Insulation protection film 9: Third array groove group 10: Fourth carrier electrode group 11: Insulation protection film 12: Fourth array groove group 13: Fifth transport electrode group 14: Insulation protection film 15,16,17,18,27,28: powder or particles 19: uneven portion 21: substrate 22: First-layer transport electrode group 23: Insulating protective film (protective layer) 24: Array groove group 24a: Reverse taper groove 25: Second carrier electrode group 26: Insulation protection film

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Takemoto Takeshi             1-3-3 Nakamagome, Ota-ku, Tokyo, stock             Company Ricoh F term (reference) 2H077 AC13 AD07 FA14

Claims (4)

[Claims] 1. An electrostatic carrying device for carrying powder or particles by electrostatic force, wherein a first layer carrying electrode group is formed on a substrate surface, and an array of groove groups is formed on the first layer carrying electrode group. Is formed with an angle formed on the first-layer transport electrode group, and the second transport electrode group is formed on the top surface of the array-shaped groove group. 2. An electrostatic carrying device for carrying powders or particles by electrostatic force, wherein a first layer carrying electrode group is formed on a substrate surface, and an array of groove groups is formed on the first layer carrying electrode group. Is formed with an angle formed on the first-layer transport electrode group, the second transport electrode group is formed on the top surface of the array-shaped groove group, and a plurality of layers are formed. . 3. An electrostatic carrying device for carrying powder or particles by electrostatic force, wherein a first layer carrying electrode group is formed on a substrate surface, and an array of groove groups is formed on the first layer carrying electrode group. Is formed with an angle formed on the first-layer transport electrode group, the second transport electrode group is formed on the top surface of the array-like groove group, and when the array-like groove group is formed, An electrostatic carrying device, characterized in that concave and convex portions of 1/3 or less of the carried particles are formed on the side surface and the bottom, and the contact with the particles is used as a contact point. 4. An electrostatic carrying device for carrying powder or particles by electrostatic force, wherein a first layer carrying electrode group is formed on a substrate surface, and an array of groove groups is formed on the first layer carrying electrode group. Are formed with an angle to the first layer transport electrode group, a second transport electrode group is formed on the top surface of this array-shaped groove group, and the array-shaped groove group overhangs (reverse An electrostatic transfer device characterized by being a taper.