JPH1121677A - Method and equipment for film formation and forming of superfine grain - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent peeling of film, deterioration in properties, and reduction in film growing velocity by blowing aerosol against a shield plate disposed in a manner to confront the flow of the aerosol, depositing superfine grains of specific grain size or above in the aerosol onto the shield plate, and removing them. SOLUTION: A nozzle 2, disposed inside the main body 1 of a classifier for superfine grains, has a function of blowing superfine-grained aerosol contained in the main body 1 of equipment against a shield plate 3 from the front. As a result, large and heavy coarse grains B are deposited on the shield plate 3, and the aerosol containing fine grains alone is taken out through a fine grain takeoff hole 4 of the main body 1 of equipment. Moreover, because the grain size of the coarse grains B to be deposited can be properly selected by regulating the velocity of the aerosol blown out via the nozzle 2, only fine grains A having grain size not larger than the set value can be taken out through the fine grain takeoff hole 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming and forming ultrafine particles used in the field of ultraprecision.

[0002]

2. Description of the Related Art Conventionally, for example, in the technique disclosed in Japanese Patent Application Laid-Open No. Hei 8-81774, which has already been filed by the present applicant, ultrafine particles having a small particle size are required as a three-dimensional solid material. .

[0003]

However, in the above technique, it is very difficult to stably secure ultrafine particles of a metal or an organic material having a uniform particle size in a low vacuum inert gas. . This is because, when heating or evaporating a metal or organic material as a raw material, or when transporting as an aerosolized ultrafine particle flow containing ultrafine particles with an inert gas such as argon gas, the fine particles are recombined with each other and the particle size is reduced. This is because large fine particles are also generated at the same time.

In the case where ultrafine particles of metal or ceramics are agitated with a gas, formed into an aerosol and sprayed and deposited from a nozzle, the fine particles having a size of 1 to 2 μm or more contained in the aerosol have a large mass to be accelerated by the gas. It is not possible to obtain a sufficient velocity because it is too high, so that when it collides with the surface of the substrate or the deposit and the kinetic energy of the fine particles is converted into thermal energy, it is not possible to obtain a high enough temperature to cause sintering.

[0005] For this reason, unsintered portions remain in the deposited film, which may cause peeling of the film, deterioration of the characteristics of the film function, deterioration of the shape accuracy of the molded product, or particles having a larger particle size. In some cases, a film that has been sintered / deposited is etched, and the growth rate of the film is significantly reduced.

[0006]

SUMMARY OF THE INVENTION The present invention is directed to a method of depositing ultra-fine particles obtained by classifying ultra-fine particles in an aerosol according to a particle size, which solves the above-mentioned drawbacks. By providing a shielding plate such that the aerosol is sprayed on the shielding plate, ultra-fine particles having a specific particle size or more in the aerosol are deposited on the shielding plate and removed, whereby the specific particle is removed. An object of the present invention is to provide a method for forming ultrafine particles by classifying only ultrafine particles having a diameter smaller than the diameter.

The present invention relates to a method for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to the particle diameter, wherein a shielding plate is provided so as to face the flow of the aerosol, and the aerosol is provided on the shielding plate. By spraying, by removing the ultra-fine particles of a specific particle size or more in the aerosol is deposited on the shielding plate and removed, the ultra-fine particles of only the ultra-fine particles less than the specific particle size are classified and molded. A molding method is provided.

The present invention provides a method for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a specific particle size,
It is an object of the present invention to provide a method for forming ultrafine particles by classifying only ultrafine particles after separating heavy ultrafine particles having a specific particle size or more by changing the flow direction of the aerosol.

The present invention provides a method for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a specific particle size,
It is an object of the present invention to provide a method for forming ultrafine particles by classifying only ultrafine particles after separating heavy ultrafine particles having a specific particle size or more by changing the direction of aerosol flow.

The present invention relates to a method for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, wherein at least one pair of electrodes facing each other in a flow direction of the aerosol is provided, and the electrodes are provided. While applying high voltage DC voltage,
An object of the present invention is to provide a method for forming ultrafine particles by classifying only ultrafine particles having a particle diameter in a specific range by supplying a clean gas flow flowing at a predetermined speed in the same direction as the aerosol.

The present invention relates to a method for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to the particle diameter, wherein at least one pair of electrodes facing each other in the direction of the flow of the aerosol is provided, and the electrodes are provided. While applying high voltage DC voltage,
An object of the present invention is to provide a method for forming ultrafine particles, which classifies only ultrafine particles having a particle diameter in a specific range and forms them by supplying a clean gas flow flowing at a predetermined speed in the same direction as the aerosol.

The present invention relates to an apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, wherein a nozzle for forming the flow of the aerosol and a shielding plate are provided so as to face the nozzle. By spraying the aerosol on the shielding plate through the nozzle, by removing ultra-fine particles having a specific particle size or more in the aerosol by depositing on the shielding plate and removing the ultra-fine particles, the particles having a particle size less than the specific particle size are removed. An object of the present invention is to provide an ultrafine particle deposition apparatus for classifying only ultrafine particles to form a film.

The present invention relates to an apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, wherein a nozzle for forming the flow of the aerosol and a shielding plate are provided so as to face the nozzle. By spraying the aerosol on the shielding plate through the nozzle, by removing ultra-fine particles having a specific particle size or more in the aerosol by depositing on the shielding plate and removing the ultra-fine particles, the particles having a particle size less than the specific particle size are removed. An object of the present invention is to provide an ultrafine particle molding apparatus for classifying only ultrafine particles and molding.

[0014] The present invention relates to an apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a specific particle size,
Provided is a device for forming ultrafine particles that is provided with a pressure reducing means for changing the direction of aerosol flow and classifies only ultrafine particles after separating heavy ultrafine particles having a specific particle size or more and forms a film. It is.

The present invention relates to an apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a specific particle size,
It is an object of the present invention to provide an ultrafine particle molding apparatus which is provided with a pressure reducing means for changing the direction of aerosol flow and classifies and molds only the ultrafine particles after separating heavy ultrafine particles having a specific particle size or more. .

The present invention relates to an apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol in accordance with the particle diameter, wherein at least one pair of electrodes facing each other in the direction of the flow of the aerosol is provided. By providing a high-voltage DC power supply for applying a high-voltage DC voltage and supplying a clean gas flow flowing at a predetermined speed in the same direction as the aerosol, only ultrafine particles having a specific range of particle size are classified and formed. It is intended to provide an apparatus for forming ultrafine particles.

The present invention relates to an apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, wherein at least one pair of electrodes facing each other along the direction of the flow of the aerosol is provided, and the electrodes are provided. A high-voltage direct-current power supply for applying a high-voltage direct-current voltage is provided, and a clean gas flow that flows at a predetermined speed in the same direction as the aerosol is supplied to classify and mold only ultrafine particles having a particle diameter in a specific range. An object of the present invention is to provide an apparatus for forming ultrafine particles.

[0018]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a principle view showing a first embodiment of an ultrafine particle classification apparatus used in a method for forming and forming ultrafine particles according to claims 1 and 2 of the present invention.

In FIG. 1, reference numeral 1 denotes a main body of an ultrafine particle classifier, and 2 denotes a nozzle provided in the main body 1 of the apparatus. It works like spraying from the front.

As a result, the large and heavy coarse particles B accumulate on the shielding plate 3, and the aerosol containing only the fine particles is taken out from the fine particle outlet 4 of the apparatus main body 1.

The particle size of the coarse particles B to be deposited can be appropriately selected according to the speed of the aerosol blown out from the nozzle 2. Can be taken out.

FIG. 2 is a principle diagram showing a second embodiment of an ultra-fine particle classification apparatus used in a method for forming and forming ultra-fine particles according to claims 3 and 4 of the present invention.

In the figure, reference numeral 1 denotes a main body of a classifying apparatus for ultrafine particles, and 2 denotes a nozzle. It functions to blow into the outlet 5.

On the other hand, an aerosol containing only the fine particles A is discharged from the fine particle outlet 6 by applying a pressure from the fine particle outlet 6 provided on the side surface of the apparatus main body 1 to the outside of the apparatus main body 1. Taken out.

The particle size of the fine particles A to be taken out from the fine particle outlet 6 can be appropriately selected depending on the speed of the aerosol blown from the nozzle 2 and the degree of the above-mentioned pressure.

FIG. 3 is a principle view showing a third embodiment of an ultra-fine particle classifying apparatus used in a method for forming and molding ultra-fine particles according to claims 5 and 6 of the present invention.

In the figure, reference numeral 1 'denotes an ultrafine particle classifier main body, 7 denotes a first electrode provided at the center of the main body 1',
Reference numeral 8 denotes a second electrode provided outside the first electrode 7, and 9
Is a high-voltage power supply for generating a high voltage between the first electrode 7 and the second electrode 8.

First, between the first electrode 7 and the second electrode 8, a clean gas flow is caused to flow in a portion close to the first electrode 7, and the ultrafine aerosol flows outside the clean gas flow.

The fine particles in the ultra-fine particle aerosol are charged by the second electrode 8 and drawn toward the first electrode 7, but are washed away by the clean gas flow, and only the fine particles A are deposited on the first electrode 7. Reachable and deposited.

Further, the fine particles B having a large particle diameter are washed away by a clean gas and discharged to the outside of the apparatus main body 1 '. Further, it functions so that only the fine particles having a specific particle diameter among the fine particles having an intermediate particle diameter are taken out from the specific particle particle outlet 10. Then, the speed of the clean gas flow and the first electrode 7 and the second
The particle diameter can be easily changed by arbitrarily setting the potential difference of the electrode 8.

FIG. 4 shows the overall structure of an ultrafine particle forming and forming apparatus according to an embodiment of the present invention. In the figure, reference numerals 11 and 12 denote any one of the first to third ultrafine particle classification apparatuses. It is. The other components are the same as those in the conventional example, and therefore will not be described.

In the present invention, the ultrafine particle classifiers 11 and 12 are used.
Is disposed at the position shown in the drawing, so that particles can be conveyed when transported as an aerosolized ultrafine particle stream containing ultrafine particles with an inert gas such as argon gas, or when heating or evaporating a metal or organic material as a raw material. Can be prevented from recombining into fine particles having a large particle diameter.

As described above, the present invention has been described based on the embodiments described in the drawings. However, the present invention is not limited to the above-described embodiments, but may be changed in any manner unless the structure described in the claims is changed. But it can be implemented. For example, it is possible to deposit only fine particles of a specific particle size by using multiple stages of ultrafine particle classifiers with different separation particle sizes in combination, and it is also possible to manufacture piezoelectric elements etc. that require a uniform particle size. It can be used. In particular, in the case of a PZT material, using a particle size of about 0.7 μm greatly improves the piezoelectricity, which is a very effective method.

[0034]

In summary, according to the present invention, it is possible to remove fine particles having a large particle diameter contained in the aerosol with a relatively simple structure, to separate the film, to deteriorate the characteristics, and to increase the growth rate of the film. In addition, it is possible to prevent the deterioration of the material, and to make it easier to manufacture parts and thin films in the field of micro-forming, using ultra-fine particles of 1μm or less that are difficult to control, and to manufacture more accurate parts. It is.

[Brief description of the drawings]

FIG. 1 is a principle diagram of an ultrafine particle classification device according to a first embodiment of the present invention.

FIG. 2 is a principle diagram of an ultrafine particle classification device according to a second embodiment of the present invention.

FIG. 3 is a principle diagram of an ultrafine particle classification device according to a third embodiment of the present invention.

FIG. 4 is a configuration diagram showing one embodiment of the present invention.

[Explanation of symbols]

 1,1 'Ultrafine particle classifier main body 2 Nozzle 3 Shielding plate 4,6 Fine particle outlet 5 Coarse particle outlet 7 First electrode 8 Second electrode 9 High voltage power supply 10 Specific particle particle outlet 11,12 Ultra fine particle classifier A Fine particle B Coarse particle C Specific particle

Claims (16)

[Claims] 1. A method of depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, wherein a shielding plate is provided so as to face the flow of the aerosol, and the aerosol is sprayed on the shielding plate. By depositing and removing ultrafine particles having a specific particle size or more in the aerosol on the shielding plate, only ultrafine particles having a particle size smaller than the specific particle size are classified and formed into a film. Method for forming ultrafine particles. 2. A method of depositing ultra-fine particles in which ultra-fine particles in an aerosol are classified according to a particle diameter, wherein a shielding plate is provided so as to face the flow of the aerosol, and the aerosol is sprayed on the shielding plate. By depositing and removing ultrafine particles having a specific particle size or more in the aerosol on the shielding plate, only the ultrafine particles having a particle size smaller than the specific particle size are classified and molded. Ultra fine particle molding method. 3. A method for depositing ultrafine particles in which ultrafine particles in an aerosol are classified according to a specific particle size, wherein the heavy ultrafine particles having a specific particle size or more are changed by changing the direction of the flow of the aerosol. A method for forming a film by classifying only the ultrafine particles after separating the particles. 4. A method for depositing ultra-fine particles in which ultra-fine particles in an aerosol are classified according to a specific particle size, wherein by changing the direction of the flow of the aerosol, large heavy ultra-fine particles having the specific particle size or more. A method for forming ultrafine particles, comprising classifying only the ultrafine particles after separation of the particles and molding. 5. A method of depositing ultra-fine particles in which ultra-fine particles in an aerosol are classified according to the particle size, wherein at least one pair of electrodes facing each other in the direction of the flow of the aerosol is provided, By applying a DC voltage and supplying a clean gas flow flowing at a predetermined speed in the same direction as the aerosol, ultrafine particles having a particle diameter in a specific range are classified and formed into a film. Film formation method. 6. A method for depositing ultrafine particles in which ultrafine particles in an aerosol are classified according to the particle size, comprising: providing at least one pair of electrodes facing each other along the direction of flow of the aerosol; By applying a DC voltage and supplying a clean gas flow flowing at a predetermined speed in the same direction as the aerosol, the ultrafine particles having a particle size within a specific range are classified and formed. Molding method. 7. The method according to claim 1, wherein the ultrafine particles are formed by spraying the classified ultrafine particles from a nozzle onto a substrate and depositing the classified ultrafine particles. The method for forming ultrafine particles according to the above. 8. The method for forming ultrafine particles according to claim 2, wherein the classified ultrafine particles are sprayed from a nozzle onto a substrate and deposited thereon. Of ultrafine particles. 9. An apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle diameter, comprising: a nozzle for forming a flow of the aerosol; and a shielding plate facing the nozzle. By spraying the aerosol on the shielding plate through the nozzle, ultra-fine particles having a specific particle size or more in the aerosol are removed by depositing on the shielding plate, thereby obtaining ultra-fine particles having a particle size smaller than the specific particle size. An ultra-fine particle forming apparatus characterized by classifying only a film to form a film. 10. An apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, comprising: a nozzle for forming a flow of the aerosol; and a shielding plate facing the nozzle. By spraying the aerosol on the shielding plate through the nozzle, ultra-fine particles having a specific particle size or more in the aerosol are removed by depositing on the shielding plate, thereby obtaining ultra-fine particles having a particle size smaller than the specific particle size. An ultra-fine particle molding apparatus characterized by classifying only and molding. 11. An apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a specific particle size, wherein a pressure reducing means for changing a flow direction of the aerosol is provided, and An ultra-fine particle forming apparatus characterized in that only ultra-fine particles after separation of large heavy ultra-fine particles are classified and formed into a film. 12. An apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a specific particle diameter, wherein a pressure reducing means for changing a direction of a flow of the aerosol is provided, and An ultra-fine particle molding apparatus characterized in that only ultra-fine particles after separation of large heavy ultra-fine particles are classified and molded. 13. An apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, comprising: at least one pair of electrodes facing each other along the direction of flow of the aerosol; By providing a high-voltage DC power supply for applying a DC voltage and supplying a clean gas flow flowing at a predetermined speed in the same direction as the aerosol, only ultra-fine particles having a particle diameter in a specific range are classified and formed into a film. An ultra-fine particle deposition apparatus characterized by the following. 14. An apparatus for depositing ultrafine particles obtained by classifying ultrafine particles in an aerosol according to a particle size, wherein at least one pair of electrodes facing each other along a flow direction of the aerosol is provided, By providing a high-voltage DC power supply for applying a DC voltage and supplying a clean gas flow flowing at a predetermined speed in the same direction as the aerosol, it is possible to classify and mold only ultrafine particles having a particle diameter in a specific range. Ultra-fine particle molding equipment. 15. The apparatus for forming ultra-fine particles according to claim 9, wherein the classified ultra-fine particles are sprayed from a nozzle onto a substrate and deposited thereon.
14. The apparatus for forming ultrafine particles according to any one of 13. 16. The apparatus for forming ultra-fine particles according to claim 10, wherein the classified ultra-fine particles are sprayed from a nozzle onto a substrate and deposited thereon.
15. The apparatus for forming ultrafine particles according to any one of items 2 and 14.