JP2003084420A - Display device for photo mask data - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a display device capable of displaying graphic information of photo mask data for a plotting device within time at a practical level independent of a size even in the case that a file size of the photo mask data for the plotting device is increased. SOLUTION: The display device is provided with the photo mask data for the plotting device, a storage means, a cache file presence confirming means, a cache file preparing means, a display method determining means, a graphic acquiring means, an simplified graphic generating means, graphic data obtained by the graphic acquiring means, a graphic display control means, a display means, an input part for inputting a name of the photo mask data to be displayed and a display position, etc., and a control part for controlling each of the parts.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photomask data display device for a drawing device, and more particularly to a target drawing device based on information in a cache file corresponding to the photomask data for the drawing device. The present invention relates to a display device for displaying the photomask data.

[0002]

2. Description of the Related Art In recent years, due to the trend toward higher functionality, lightness, thinness, shortness, and smallness of electronic equipment, various LS1s represented by ASICs are required to have higher integration and higher functionality. The LSI such as the ASIC described above undergoes functions, logic design, circuit design, layout design, etc. to prepare graphic data for producing a photomask pattern, and after producing a photomask using this, the photomask pattern is produced on a wafer. It is manufactured through a number of steps in which a semiconductor element is manufactured by transferring it by reduction projection exposure or the like.

Under such circumstances, generally in the LSI industry, the file format of the LSI layout data in the LSI design process and the photomask manufacturing process is used as a stream format (Stream Form).
(at) is used, the LSI layout data having the stream format is further converted into a data format and provided as photomask data for the drawing apparatus to each drawing apparatus. Examples of photomask data for drawing devices include MEBES format (for drawing devices manufactured by Perkin Elmer Co.) and EBM format (for drawing devices manufactured by Toshiba) for raster type electron beam drawing devices, and vector type electronic devices. For a line drawing device, there is a Jeol format (for a drawing device manufactured by JEOL Ltd.) and the like, but there are various others.

Then, the photomask data for this drawing device is displayed on the display device, and while the image is enlarged or reduced, the pattern arrangement is confirmed before the photomask is manufactured, the dimension inspection location is specified, and the data when a defect occurs. Work such as defect analysis may be performed. However, in recent years, the scale of photomask data, especially photomask data for drawing devices, is rapidly increasing, and along with this, the time spent for viewing the photomask data for drawing devices has been increased. Has been increasing and has become a problem in terms of workability. Incidentally, conventionally, even when enlarging or reducing an arbitrary display area, the corresponding graphic information is displayed from the result of searching all the data from the beginning to the end of the photomask data for the drawing device. .

[0005]

As mentioned above, in recent years,
As the scale of photomask data for drawing devices continues to increase, the time required for displaying the graphic information of photomask data for drawing devices, or each time the display area is enlarged or reduced is displayed. Takes more than practical level,
The correspondence was demanded. The present invention corresponds to this, and even when the file size of the photomask data for the drawing apparatus is increased, the graphic information of the photomask data for the drawing apparatus is displayed independently of the size, or An object of the present invention is to provide a display device capable of enlarging and reducing the display area within a practical level of time. Specifically, an object of the present invention is to provide a photomask data display device capable of shortening the file open time and viewing time for viewing the photomask data for a drawing device.

[0006]

A photomask data display device according to the present invention determines a target photomask data for a drawing device based on information in a cache file corresponding to the photomask data for the drawing device. A display device for displaying, and whether or not there is a storage unit for storing and accumulating photomask data, a cache file, etc. for the drawing device, and whether or not a cache file of the photomask data for the target drawing device exists in the storage unit. A cache file existence confirmation means for confirming whether or not, a cache file generation means for generating a cache file corresponding to the photomask data for the drawing device, and a display for obtaining information from the cache file and determining the display method The cache file file is specified by the method determining method and the display method determining means. Of the abbreviated figure data from the abbreviated information of the cache file according to the instructions of the figure acquisition means for searching the memory means for the figure information and obtaining the corresponding figure data of the photomask data for the drawing device and the display method determination means. The abbreviated figure generating means to be generated, the figure data obtained by the figure obtaining means, the figure display control means for controlling the display of the abbreviated figure obtained by the abbreviated figure generating means, and the display for displaying these figures Means, a photomask data name to be displayed, an input unit for inputting a position to be displayed, and a control unit for controlling each unit are provided. Then, in the above, the cache file is divided into a plurality of figure group data consisting of a predetermined number of figures corresponding to the photomask data for the drawing apparatus, and is a series of the plurality of figure group data. Figure group data includes the number of figures, figure area,
Figure zone, file seek address start and end in the photomask data for the drawing device, when the figure area is divided by a predetermined mesh, a bit map expressing whether or not there is a figure at each of the divided points The file seek address start and end of each figure group are used as file seek information when acquiring the figure of the photomask data, and a bitmap is used as omission information when generating the omission figure data. It is characterized by being used. Further, in the above, the photomask data for the drawing apparatus is the photomask data for a large-scale LSI.

Incidentally, the photomask data for large-scale LSI means here a generally known logic LSI and memory LS equipped with several million or more transistors.
I and ASIC photomask data, which means that the file size is also on the order of gigabytes.

[0008]

The photomask data display device according to the present invention has the above-described structure, and thus, even when the file size of the photomask data for the drawing device is increased,
It is possible to provide a display device capable of displaying graphic information of photomask data or enlarging or reducing a display area within a practical level of time without depending on the size. Specifically, in order to confirm whether or not there is a storage unit for storing and accumulating photomask data for the drawing apparatus, a cache file, etc., and a cache file for the target photomask data for the drawing apparatus in the storage unit. A cache file existence confirming means, a cache file creating means for creating a cache file corresponding to photomask data for a drawing device, a display method determining means for obtaining information from the cache file and determining a display method, According to the instruction of the display method determining means, the storage means is searched by the file seek information of the cache file, and the figure acquiring means for acquiring the corresponding figure data of the photomask data for the drawing device, and the instruction of the display method determining means, From the omission information in the cache file, save the omission graphic data. Figure generation means, figure data obtained by the figure acquisition means, figure display control means for controlling the display of the omitted figures obtained by the omitted figure generation means, and display means for displaying these figures; This is achieved by providing an input unit for inputting a photomask data name to be displayed, a display position, etc., and a control unit for controlling each unit. For more information,
In the photomask data display device of the present invention, the cache file is used when displaying the photomask data for the target drawing device, the photomask data for the drawing device is searched, and the graphic data is displayed. The file seek information to obtain and the abbreviated figure data of the photomask data for the drawing device are provided in this cache file, and the display of the photomask data for the drawing device is performed as much as possible. By using the display, it is possible to display the designated area of the photomask data for the drawing apparatus within the range of a predetermined time of a practical level.

The photomask data cache file for the drawing apparatus is divided into a plurality of figure group data consisting of a predetermined number of figures corresponding to the photomask data for the drawing apparatus, and the plurality of figure group data are linked. The ones are summarized below. As each figure group data, the number of figures, figure area, figure zone, file seek address start and end in the photomask data for the drawing device,
In the case where the graphic area is divided by a predetermined mesh, a bitmap having a graphic indicating whether or not a graphic exists at each of the divided areas can be cited. In this case, the start and end of the file seek address of each figure group are omitted as file seek information when acquiring the figure of the photomask data for the drawing device, and the bitmap is omitted when generating the figure data. It can be used as information. That is, the map information of the graphic group is prepared in advance in the cache file, and at the time of actual display, the graphic search can be performed from a specific location in the photomask data for the drawing apparatus based on the map information and the graphic information can be displayed. In some cases, the abbreviated figure can be displayed using the abbreviated figure data in the cache file. According to the present invention, basically, it is not necessary to search the entire area of the photomask data for the drawing device as is conventionally seen, so that the display time does not depend on the data size and the predetermined time of the practical level is used. It is possible to keep it within the range. This is especially effective when the photomask data for the drawing device is large-scale photomask data.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram for explaining the configuration and operation of an example of an embodiment of a photomask data display device of the present invention, and FIG. 2A is a diagram showing the structure of a cache file. FIG. 2B is a diagram for explaining the relationship between the graphic arrangement on the photomask, the graphic group, and the graphic. FIG. 2C is a diagram showing the seek end position and seek end position of the cache file and corresponding photomask data storage. FIG. 3 is a diagram for explaining the relationship with the position, FIG. 3 is a diagram for explaining the bit map display, and FIGS. 4 (a), 4 (b), and 4 (c) show the state of the bit map. Figure 4 (a
1), FIG. 4 (b1), and FIG. 4 (c1) are shown in FIG.
FIG. 5A is a diagram showing abbreviated graphics generated corresponding to FIGS. 4A and 4B, and FIG. 5A shows graphics of a graphic group, and FIG. FIG. 6 is a diagram showing a state in which the graphic group of FIG. Note that FIG. 3A is a diagram illustrating a state in which the mesh is divided by a predetermined mesh, and FIG.
Is the bit state corresponding to each divided area A (m, n) arranged in accordance with the arrangement of the divided areas. In FIG. 1, S1
1 to S29 indicate processing steps. In FIGS. 1, 2, and 3, 110 is a storage unit (magnetic disk), 120 is a cache file existence confirmation unit, 130 is a cache file creation unit, 140 is a display method determination unit, and 150.
Is an abbreviated figure generation means, 160 is a figure acquisition means, 170 is a figure display control means, 180 is a display means (display), 190 is a control section, 200 is an input means, 210 is photomask data for a drawing apparatus, and 211 is a figure. Information, 22
0 is a cache file, 221 is cache information, 2
30 is input information (display position, data name, etc.), 240 is omission information (bitmap information), 250 is file seek information, 260 is display graphic data, 270 is cache file presence / absence information, 311 is graphic groups 1 and 312. Is a figure group 2, 320 is a figure, 330 is a zone, A (m, n) is a divided area, and Me is a mesh.

An example of an embodiment of the photomask data display device of the present invention will be described with reference to FIG. In this example,
Cache file 2 corresponding to photomask data for raster type or vector type electron beam drawing apparatus
A display device for displaying the photomask data 210 for a target drawing device based on the information of 20, and as shown in FIG. 1, a storage unit 110, a cache file existence confirmation unit 120, and a cache file. Creating means 13
0, display method determination means 140, and omitted figure generation means 1
50, graphic acquisition means 160, graphic display control means 17
0, display means 180, input means 200, and control unit 1
90 and. The storage unit 110 stores photomask data 210 and a cache file 220 for the drawing device.
Etc. for storing and accumulating. The cache file existence confirmation means 120 is for confirming whether or not the cache file of the photomask data for the target drawing device exists in the storage means 110. The cache file creating means 130 is for creating a cache file corresponding to the photomask data for the drawing apparatus. The display method determining means 140 acquires information from the cache file 220 and determines the display method, and determines whether to display in an abbreviated figure or a figure of photomask data for the drawing apparatus. . The figure acquisition unit 160 searches the file seek information 250 of the cache file 220 according to the instruction of the display method determination unit 140, and acquires the corresponding figure data of the photomask data for the drawing apparatus. The abbreviated figure generation means 150 is instructed by the display method determination means 140 and the abbreviated information 240 of the cache file 220.
To generate abbreviated graphic data. The figure display control means 170 controls the display of the figure data obtained by the figure acquisition means 160 and the omitted figure obtained by the omitted figure generating means 150. Display means 180
Is for displaying these figures. The input unit 200 is for inputting a photomask data name for a drawing device to be displayed, a display position, and the like. The control unit 190 is for controlling each unit.

The cache file is divided into a plurality of figure group data consisting of a predetermined number of figures corresponding to the photomask data 210 for the drawing apparatus, and a plurality of the divided figure group data are put together and collected. For example, a cache file corresponding to FIG. 2B in which a graphic group is an arrangement on two photomasks is represented as shown in FIG. Here, in order to make the explanation easy to understand, the cache file corresponding to FIG. 2B in which the graphic groups are arranged on two photomasks is taken as an example, and the relationship between the format and the graphic groups and the graphic is simplified. As will be described, the figure group is not limited to two. The data of figure group 1 and the data of figure group 2 are shown in FIG.
As shown in (a), the number of figures, figure area, zone (figure zone), seek head position which is the head of file seek address in the photomask data for the drawing apparatus, photomask for the drawing apparatus, respectively. It has a seek end position which is the end of the file seek address in the data, and a bitmap that expresses whether or not a figure exists at each of the divided points when the figure area is divided by a predetermined mesh.

The seek start position and seek end position of each figure group indicate the address of the storage means 110 and are used as file seek information when acquiring the figure of the photomask data for the drawing apparatus. For the photomask data for the drawing device on the storage unit 110, see FIG.
As shown in (c), the data of the graphic group 1 is at the address (0000 to 0004) of the storage means 110, and the data of the graphic group 2 is at the address (0
005 to 0016), so based on the seek start position and seek end position of the cache file,
The data of each figure group can be easily obtained.

The bitmap is used as omission information when generating omission graphic data, and each divided area A (m, m, which is obtained by dividing the area of the graphic group by a predetermined mesh).
n) (m and n are integers), bit 1 for the area with the graphic, bit 0 for the area without the graphic.
Are allotted and mapped. For example, in FIG.
As shown in (a), the figure group is divided into divided areas A (i,
j) to A (i + 8, j + 4), the corresponding bitmap becomes as shown in FIG. 3 (b).

4 (a), 4 (b) and 4
In the case of the bitmaps mapped as in (c), corresponding figures are generated as shown in FIGS. 4 (a1), 4 (b1), and 4 (c1), respectively.
Further, the same figure as shown in FIG.
When a plurality of pixels are arranged at 0 times, only one figure may be displayed at a display magnification of 1 as shown in FIG.

Next, an example of the processing operation of the photomask data display device of the present invention will be briefly described with reference to FIG. First, the input means 200 is used to input a photomask data name for a drawing device to be displayed, a display position, and the like. (S11) Through the control unit 190 (S12), the cache file existence confirmation unit 120 confirms whether or not there is a cache file corresponding to the photomask data for the drawing apparatus to be displayed in the storage unit 110 (S13). ), And sends the cache file presence / absence information 270 to the control unit 190. (S1
4)

When the cache file existence confirmation means 120 confirms that there is no cache file corresponding to the photomask data for the drawing apparatus to be displayed, and the information indicating that there is no cache file is sent to the control unit 190,
The control unit 190 instructs the cache file creation means 130 to create a cache file corresponding to the photomask data for the drawing device to be displayed. (S12) The cache file creation means 130 (S15) obtains the graphic information 211 from the photomask data 210 (S16) for the drawing device to be displayed in the storage means 110 (S1).
7), corresponding to the photomask data 210 for the drawing apparatus, divided into a plurality of figure group data consisting of a predetermined number of figures,
For each figure group data, the cache information 221 which becomes each information of the cache file is extracted (S1
8) From this, a cache file 220 in which the plurality of graphic group data are linked and collected is created. (S19) The cache information 221 is information such as the number of figures, figure area, figure zone, file seek address head and tail in the photomask data for the drawing apparatus, and bit map. When the cache file existence confirmation means 120 confirms that there is a cache file corresponding to the photomask data for the drawing apparatus to be displayed, and the information indicating that the cache file exists is sent to the control unit 190, the cache file creation means At 130, cache file creation processing is not performed.

The display method determining means 140 includes a control unit 190.
Under the instruction, the cache file information (S21) corresponding to the input information that has been sent is acquired and displayed in abbreviated form for each figure group, or the photomask data for the drawing device is displayed without abbreviated display. Decide whether to display the graphic group as it is. (S22) In the display method determining means 140, first, the information of the graphic group corresponding to the display position is read from the cache file 220, and the dot size on the display is compared with the size of the display area determined from the zone information of the cache file 220. By doing so, it is determined based on the graphic group information stored in the cache file 220 whether or not to omit display. If one dot on the display is αμm converted to the displayed photomask data, 1 in the figure group
When the bit is smaller than α μm, the omitted display is performed. Further, when it is determined that the omitted figure is not generated, the number of figures in the figure group and the figure area of the figure group as the target are determined, and the figure group to be omitted is displayed by this determination. The determination is performed as follows, for example. When one dot on the display is converted to the photomask data displayed by αμm, the length per bit of the bitmap of the graphic group is 1 μm or more of αμm, which is a predetermined multiple or less, and If the number of figures is a predetermined number or more and the figure area ratio (%) is a predetermined number or more, it is to be omitted. Here, [figure area / figure zone area] × 100
Is the area ratio. For the graphic group determined to be omitted, the omission information 240 including the bitmap is displayed.
(S23) is sent to the omitted figure generating means 150 to generate a corresponding omitted figure. (S24) Then, the graphic generated by the omitted graphic generating means 150 is used as the display graphic data 260 (S28), and the display graphic data 2 is displayed under the control of the graphic display control means 170 (S27).
The display means 180 displays 60 (S28). (S2
9) On the other hand, with respect to graphic groups other than the graphic groups determined to be omitted in this way, it is determined that the graphic groups of the photomask data for the drawing apparatus are displayed as they are, and the file seek of the cache file 220 is performed. Information 250
(S25) is sent to the figure acquisition means 160. (S2
6) The figure acquisition unit 160 seeks based on the sent file seek information 250 and acquires the data of the corresponding figure group of the photomask data for the drawing device in the storage unit 110. Then, the graphic acquired by the graphic acquisition means 160 is used as display graphic data 260 (S28), and the display graphic data 260 (S28) is displayed on the display means 180 under the control of the graphic display control means 170 (S27). Let (S29) In this way, the display of the predetermined position of the target photomask data for the drawing apparatus is performed.

[0019]

As described above, according to the present invention, even if the file size of the photomask data for the drawing apparatus is increased, the graphic information of the photomask data for the drawing apparatus is displayed independently of the size. , Or enlarge the display area,
It has become possible to provide a display device that can perform reduced display within a practical level of time. As a result, it has become possible to provide a photomask data display device capable of shortening the file opening time and viewing time for viewing the photomask data for the drawing device.

[Brief description of drawings]

FIG. 1 is a schematic diagram for explaining the configuration and operation of an example of an embodiment of a photomask data display device of the present invention.

2A is a diagram showing a structure of a cache file, and FIG. 2B is a diagram for explaining a relationship between a graphic arrangement on a photomask, a graphic group, and a graphic. FIG. 3C is a diagram for explaining the relationship between the seek tip position and the seek tail position of the cache file and the corresponding photomask data storage position.

FIG. 3 is a diagram for explaining a bitmap display.

4 (a), FIG. 4 (b), and FIG. 4 (c) are diagrams showing a state of a bitmap, and FIG. 4 (a1) and FIG. 4 (b).
1) and FIG. 4 (c1) are respectively FIG. 4 (a) and FIG.
It is the figure which showed the abbreviated figure generated corresponding to (b) and FIG.4 (c).

FIG. 5 (a) is a diagram showing a figure of a figure group,
FIG. 5B is a view showing a state in which the graphic group of FIG. 5A is omitted and displayed.

[Explanation of symbols]

110 Storage Means (Magnetic Disk) 120 Cache File Existence Confirming Means 130 Cache File Creating Means 140 Display Method Determining Means 150 Omitted Graphic Generation Means 160 Graphic Acquisition Means 170 Graphic Display Control Means 180 Display Devices (Displays) 190 Control Unit 200 Input Means 210 drawing device photomask data 211 graphic information 220 cache file 221 cache information 230 input information (display position, data name, etc.) 240 omission information (bitmap information) 250 file seek information 260 display graphic data 270 cache file presence / absence information 311 Figure group 1 312 Figure group 2 320 Figure 330 Zone A (m, n) Division area Me Mesh

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[Procedure amendment]

[Submission date] September 14, 2001 (2001.9.1)
4)

[Procedure Amendment 1]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 2

[Correction method] Change

[Correction content]

[Fig. 2]

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Claims (3)

[Claims] 1. A display device for displaying photomask data for a target drawing device based on information in a cache file corresponding to photomask data for the drawing device, wherein Storage means for storing and accumulating mask data, cache file, etc., cache file existence confirmation means for confirming whether or not the cache file of the photomask data for the intended drawing apparatus exists in the storage means, and the drawing apparatus Cache file creating means for creating a cache file corresponding to photo mask data for display, a display method determining means for obtaining information from the cache file and determining a display method, and a cache file by an instruction of the display method determining means. The storage means is searched by the file seek information of the Figure acquisition means for acquiring the figure data corresponding to the screen data, and an abbreviated figure generation means for generating abbreviated figure data from the abbreviated information of the cache file according to an instruction from the display method determination means, and a figure obtained by the figure acquisition means. Input data, graphic display control means for controlling the display of the abbreviated figures obtained by the abbreviated figure generation means, display means for displaying these figures, photomask data name to be displayed, display position, etc. 2. A photomask data display device, comprising: an input unit for controlling each unit; and a control unit for controlling each unit. 2. The cache file according to claim 1, wherein the cache file is divided into a plurality of figure group data consisting of a predetermined number of figures corresponding to the photomask data for the drawing apparatus, and the plurality of figure group data are grouped together. Each figure group data is divided when the figure number, figure area, figure zone, file seek address start and end in the photomask data for the drawing device, and figure area are divided by a predetermined mesh. With a bitmap expressing whether or not a figure exists at each location, the file seek address beginning and end of each figure group, as the file seek information when acquiring the figure of the photomask data, A display device for photomask data, characterized in that a bitmap is used as omission information when generating omission graphic data. . 3. The display device for photomask data according to claim 1, wherein the photomask data for the drawing device is photomask data for a large-scale LSI.