JP2003075111A - サブミクロン精度のエッジ検出器 - Google Patents

サブミクロン精度のエッジ検出器

Info

Publication number
JP2003075111A
JP2003075111A JP2002233200A JP2002233200A JP2003075111A JP 2003075111 A JP2003075111 A JP 2003075111A JP 2002233200 A JP2002233200 A JP 2002233200A JP 2002233200 A JP2002233200 A JP 2002233200A JP 2003075111 A JP2003075111 A JP 2003075111A
Authority
JP
Japan
Prior art keywords
light
detector
edge
optical
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002233200A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003075111A5 (enExample
Inventor
Edward Steketee
エドワード・ステケティー
John Bernard Medberry
ジョン・バーナード・メドベリー
Benno Guggenheimer
ベンノ・グゲンハイマー
James D Adames
ジェイムス・ディー・アダムス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/935,018 external-priority patent/US6806484B2/en
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2003075111A publication Critical patent/JP2003075111A/ja
Publication of JP2003075111A5 publication Critical patent/JP2003075111A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00—Prospecting or detecting by optical means
    • G01V8/10—Detecting, e.g. by using light barriers
    • G01V8/12—Detecting, e.g. by using light barriers using one transmitter and one receiver
    • G01V8/16—Detecting, e.g. by using light barriers using one transmitter and one receiver using optical fibres

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2002233200A 2001-08-22 2002-08-09 サブミクロン精度のエッジ検出器 Withdrawn JP2003075111A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/935018 2001-08-22
US09/935,018 US6806484B2 (en) 2001-08-22 2001-08-22 Sub-micron accuracy edge detector
US09/967448 2001-09-28
US09/967,448 US6765223B2 (en) 2001-08-22 2001-09-28 Sub-micron accuracy edge detector

Publications (2)

Publication Number Publication Date
JP2003075111A true JP2003075111A (ja) 2003-03-12
JP2003075111A5 JP2003075111A5 (enExample) 2005-11-04

Family

ID=27130067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002233200A Withdrawn JP2003075111A (ja) 2001-08-22 2002-08-09 サブミクロン精度のエッジ検出器

Country Status (2)

Country Link
JP (1) JP2003075111A (enExample)
DE (2) DE10238562A1 (enExample)

Also Published As

Publication number Publication date
DE10238599A1 (de) 2003-03-13
DE10238562A1 (de) 2003-03-27

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