DE10238562A1 - Submikrometergenauigkeits-Kantendetektor - Google Patents
Submikrometergenauigkeits-KantendetektorInfo
- Publication number
- DE10238562A1 DE10238562A1 DE2002138562 DE10238562A DE10238562A1 DE 10238562 A1 DE10238562 A1 DE 10238562A1 DE 2002138562 DE2002138562 DE 2002138562 DE 10238562 A DE10238562 A DE 10238562A DE 10238562 A1 DE10238562 A1 DE 10238562A1
- Authority
- DE
- Germany
- Prior art keywords
- optical
- optical power
- light beam
- optical fiber
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 97
- 239000013307 optical fiber Substances 0.000 claims abstract description 53
- 238000000034 method Methods 0.000 claims description 18
- 230000008859 change Effects 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims 2
- 239000000835 fiber Substances 0.000 abstract description 54
- 238000013459 approach Methods 0.000 description 11
- 238000003708 edge detection Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000011217 control strategy Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 229920004943 Delrin® Polymers 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
- G01V8/10—Detecting, e.g. by using light barriers
- G01V8/12—Detecting, e.g. by using light barriers using one transmitter and one receiver
- G01V8/16—Detecting, e.g. by using light barriers using one transmitter and one receiver using optical fibres
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/935,018 US6806484B2 (en) | 2001-08-22 | 2001-08-22 | Sub-micron accuracy edge detector |
| US09/967,448 US6765223B2 (en) | 2001-08-22 | 2001-09-28 | Sub-micron accuracy edge detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10238562A1 true DE10238562A1 (de) | 2003-03-27 |
Family
ID=27130067
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2002138562 Withdrawn DE10238562A1 (de) | 2001-08-22 | 2002-08-22 | Submikrometergenauigkeits-Kantendetektor |
| DE2002138599 Withdrawn DE10238599A1 (de) | 2001-08-22 | 2002-08-22 | Submikrometergenauigkeits-Kantendetektor |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2002138599 Withdrawn DE10238599A1 (de) | 2001-08-22 | 2002-08-22 | Submikrometergenauigkeits-Kantendetektor |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2003075111A (enExample) |
| DE (2) | DE10238562A1 (enExample) |
-
2002
- 2002-08-09 JP JP2002233200A patent/JP2003075111A/ja not_active Withdrawn
- 2002-08-22 DE DE2002138562 patent/DE10238562A1/de not_active Withdrawn
- 2002-08-22 DE DE2002138599 patent/DE10238599A1/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE10238599A1 (de) | 2003-03-13 |
| JP2003075111A (ja) | 2003-03-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8130 | Withdrawal |