JP2003053665A - Dresser - Google Patents
DresserInfo
- Publication number
- JP2003053665A JP2003053665A JP2001244583A JP2001244583A JP2003053665A JP 2003053665 A JP2003053665 A JP 2003053665A JP 2001244583 A JP2001244583 A JP 2001244583A JP 2001244583 A JP2001244583 A JP 2001244583A JP 2003053665 A JP2003053665 A JP 2003053665A
- Authority
- JP
- Japan
- Prior art keywords
- dresser
- protrusions
- polishing pad
- protrusion
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ＣＭＰ（ｃｈｅｍ
ｉｃａｌ ｍｅｃｈａｎｉｃａｌ ｐｏｌｉｓｈｉｎ
ｇ）、ポリシング装置、ラッピング装置等の研磨装置に
用いられる研磨パッド（研磨布、以下同じ。）の目立て
作業に用いられるドレッサーに関するものである。TECHNICAL FIELD The present invention relates to a CMP (chem).
ical mechanical polishin
g), a dresser used for dressing a polishing pad (polishing cloth, the same applies hereinafter) used in a polishing device such as a polishing device and a lapping device.
【０００２】[0002]
【従来の技術】一般に、ＣＭＰ（ｃｈｅｍｉｃａｌ ｍ
ｅｃｈａｎｉｃａｌ ｐｏｌｉｓｈｉｎｇ）、ポリシン
グ装置、ラッピング装置等の研磨装置には、発泡ウレタ
ン樹脂等の合成樹脂等かなる布状の研磨パッドが用いら
れている。2. Description of the Related Art Generally, CMP (chemical m
2. Description of the Related Art A cloth-like polishing pad made of synthetic resin such as urethane foam resin is used for a polishing device such as an electronic polishing device, a polishing device, and a lapping device.
【０００３】このような構成の研磨パッドにあっては、
被加工物を研磨することによって表面の穴内にスラリー
状の研磨剤、被加工物の削り粉、研磨パッドの削り屑等
が詰まってしまったり、表面の毛羽立った刷毛状の部分
が寝てしまったりする。そして、このような状態で被加
工物の研磨を続けると、被加工物の研磨精度が大幅に低
下してしまうため、定期的にドレッサーを用いて表面の
穴内に詰まった研磨剤等を掻き出したり、表面の寝てし
まった刷毛状の部分を元の毛羽立った状態に再現する目
立て作業が必要となる。In the polishing pad having such a structure,
By polishing the work piece, slurry-like abrasives, shavings of the work piece, shavings of the polishing pad, etc. may become clogged in the holes on the surface, or the fluffy brush-like part of the surface may lie down. To do. Then, if the polishing of the work piece is continued in such a state, the polishing accuracy of the work piece will be significantly reduced.Therefore, a dresser may be used to periodically scrape out the polishing agent clogged in the holes in the surface. , It is necessary to perform a dressing work to reproduce the sleeping brush-like part of the surface in the original fluffy state.
【０００４】[0004]
【発明が解決しようとする課題】上記のような研磨パッ
ドの目立て作業に用いられるドレッサーには種々のタイ
プのものがあり、例えば、基板の表面に先細状の突起を
設けたセラミック製のドレッサーが一般に知られてい
る。There are various types of dressers used for dressing the polishing pad as described above. For example, a dresser made of ceramics having tapered projections on the surface of the substrate is known. Is generally known.
【０００５】しかしながら、このような構成のドレッサ
ーにあっては、突起が先細状となっているために、研磨
パッドの表面を必要以上に多く削りとってしまうため、
研磨パッドの寿命が非常に短くなってしまう。However, in the dresser having such a structure, since the projections are tapered, the surface of the polishing pad is scraped off more than necessary.
The life of the polishing pad is very short.
【０００６】また、先細状の突起が研磨パッドの表面の
穴内に充満されてしまうため、突起の表面と穴の内面と
の間に殆ど隙間がなくなってしまい、穴内に詰まってい
る研磨剤等を掻き出すことが困難となる。Further, since the tapered projection fills the hole in the surface of the polishing pad, there is almost no gap between the surface of the projection and the inner surface of the hole, and the polishing agent clogged in the hole is removed. It will be difficult to scrape.
【０００７】本発明は、前記のような従来の問題に鑑み
なされたものであって、研磨パッドの表面を必要以上に
多く削りとることなく研磨パッドの表面の刷毛状の部分
を元の毛羽立った状態に再現できて、研磨パッドの寿命
を大幅に長くすることができるとともに、研磨パッドの
表面の穴内に詰まっている研磨剤等を容易に確実に掻き
出すことができるドレッサーを提供することを目的とす
るものである。The present invention has been made in view of the above-mentioned conventional problems, and the brush-like portion on the surface of the polishing pad is fluffed to the original without shaving the surface of the polishing pad more than necessary. The purpose of the present invention is to provide a dresser that can be reproduced in a state that can significantly extend the life of the polishing pad and that can easily and reliably scrape off the polishing agent or the like clogged in the holes on the surface of the polishing pad. To do.
【０００８】[0008]
【課題を解決するための手段】本発明は、上記のような
課題を解決するために以下のような手段を採用してい
る。すなわち、請求項１に係る発明は、セラミックスか
らなる基板の表面に複数の突起を備えてなるドレッサー
において、前記突起が柱状に形成されてなり、該突起の
先端部の断面積Ｓ１と基端部の断面積Ｓ２とが、Ｓ１≧
Ｓ２とされていることを特徴とする。この発明に係るド
レッサーによれば、ドレッサーと研磨パッドとを接触さ
せて、両者を相対的に回転させることにより、ドレッサ
ーの複数の突起により研磨パッドの表面の刷毛状の部分
を毛羽立たせることができるとともに、研磨パッドの表
面の穴内に詰まっている研磨剤等を掻き出すことができ
ることになる。The present invention employs the following means in order to solve the above problems. That is, the invention according to claim 1 is a dresser having a plurality of protrusions on the surface of a substrate made of ceramics, wherein the protrusions are formed in a columnar shape, and the cross-sectional area S1 and the base end portion of the tip end portion of the protrusions are formed. Cross-sectional area S2 and S1 ≧
It is characterized by being S2. According to the dresser of the present invention, by bringing the dresser and the polishing pad into contact with each other and rotating the both relatively, the brush-like portion on the surface of the polishing pad can be fluffed by the plurality of protrusions of the dresser. At the same time, it is possible to scrape out the polishing agent or the like clogged in the holes on the surface of the polishing pad.
【０００９】請求項２に係る発明は、請求項１記載のド
レッサーであって、前記複数の突起は、複数の長尺突起
とこの長尺突起より長さ寸法が小とされた複数の短尺突
起とからなり、かつ、長尺突起の先端部の断面積が短尺
突起の先端部の端面積より大とされていることを特徴と
する。この発明に係るドレッサーによれば、長尺突起と
短尺突起との協働により、研磨パッドの表面の穴内に詰
まっている研磨剤等が効果的に掻き出されることにな
る。The invention according to claim 2 is the dresser according to claim 1, wherein the plurality of projections are a plurality of long projections and a plurality of short projections having a length dimension smaller than that of the long projections. And the cross-sectional area of the tip portion of the long protrusion is larger than the end area of the tip portion of the short protrusion. According to the dresser of the present invention, the long protrusions and the short protrusions cooperate with each other to effectively scrape out the abrasive or the like clogged in the holes on the surface of the polishing pad.
【００１０】請求項３に係る発明は、請求項１又は２記
載のドレッサーであって、前記基板の表面に排出溝が設
けられてなることを特徴とする。この発明に係るドレッ
サーによれば、研磨パッドの穴から掻き出された研磨剤
等は、基板の表面の排出溝を介して排出されることにな
る。The invention according to claim 3 is the dresser according to claim 1 or 2, characterized in that a discharge groove is provided on the surface of the substrate. According to the dresser of the present invention, the abrasive and the like scraped out from the hole of the polishing pad is discharged through the discharge groove on the surface of the substrate.
【００１１】請求項４に係る発明は、請求項１から３の
何れかに記載のドレッサーであって、前記複数の突起が
設けられる領域を環状としたことを特徴とする。この発
明に係るドレッサーによれば、複数の突起が設けられて
いる環状の領域により、研磨パッドの表面の目立てが行
われることになる。The invention according to claim 4 is the dresser according to any one of claims 1 to 3, characterized in that the region where the plurality of protrusions is provided is annular. According to the dresser of the present invention, the surface of the polishing pad is sharpened by the annular region provided with the plurality of protrusions.
【００１２】請求項５に係る発明は、請求項４記載のド
レッサーであって、請求項４記載のドレッサーであっ
て、前記環状の領域が内側環状部と外側環状部とに区画
され、前記突起が、前記内側環状部により外側環状部が
密となるように設けられていることを特徴とする。この
発明に係るドレッサーによれば、研磨パッドは、内側環
状部の複数の突起と内側環状部よりも密の外側環状部の
複数の突起との協働により、表面の目立てが行われるこ
とになる。The invention according to claim 5 is the dresser according to claim 4, wherein the annular region is divided into an inner annular portion and an outer annular portion, and the projection is formed. However, the outer annular portion is densely provided by the inner annular portion. According to the dresser according to the present invention, the polishing pad has its surface sharpened by the cooperation of the plurality of protrusions of the inner annular portion and the plurality of protrusions of the outer annular portion that are denser than the inner annular portion. .
【００１３】請求項６に係る発明は、請求項１から３の
何れかに記載のドレッサーであって、前記複数の突起が
設けられる領域が等間隔環状配置されていることを特徴
とする。この発明に係るドレッサーによれば、研磨パッ
ドの穴から掻き出された研磨剤等は、複数の突起が設け
られる領域と、それに隣接する複数の突起が設けられる
領域との間を介して排出されることになる。The invention according to claim 6 is the dresser according to any one of claims 1 to 3, characterized in that the regions where the plurality of protrusions are provided are annularly arranged at equal intervals. According to the dresser according to the present invention, the abrasive or the like scraped out from the hole of the polishing pad is discharged through a region where a plurality of protrusions are provided and a region where a plurality of protrusions adjacent to the protrusion are provided. Will be.
【００１４】[0014]
【発明の実施の形態】以下、図面を参照しつつ本発明の
実施の形態について説明する。図１から図４には、本発
明によるドレッサーの第１の実施の形態が示されてい
る。図１、図２において、ドレッサー１は、アルミナ
系、ジルコニア系、窒化珪素系、炭化珪素系等の焼結セ
ラミックスからなるものであって、円板状の基板２と、
基板２の表面に一体に設けられる複数の突起３とから構
成されている。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 show a first embodiment of a dresser according to the present invention. 1 and 2, a dresser 1 is made of a sintered ceramic such as an alumina-based, zirconia-based, silicon nitride-based, or silicon carbide-based, and has a disk-shaped substrate 2,
It is composed of a plurality of protrusions 3 integrally provided on the surface of the substrate 2.
【００１５】基板２は、円板状に限らず、三角板状、四
角板状、六角板状、八角板状等としても良い。突起３の
断面形状は、円形、楕円形、長円形、三角形、四角形、
六角形、八角形状等とすることができるが、それ以外の
断面形状としても良い。The substrate 2 is not limited to a disc shape, but may be a triangular plate shape, a square plate shape, a hexagonal plate shape, an octagonal plate shape, or the like. The cross-sectional shape of the protrusion 3 is circular, elliptical, oval, triangular, quadrangular,
The shape may be hexagonal, octagonal, or the like, but other cross-sectional shapes may be used.
【００１６】突起３は、柱状をなすものであって、この
実施の形態においては、その横断面輪郭が円形である。
この場合、突起３の先端部３ａの断面積Ｓ１と基端部３
ｂの断面積Ｓ２とが、Ｓ１≧Ｓ２の条件を満たすように
設定されている。また、突起３の先端面３ｃは平坦面と
なっている。突起３の長さ、ピッチ等は適宜選択できる
が、特に突起３の長さは０．１〜５ｍｍの範囲内、突起
３のピッチは０．２〜５ｍｍの範囲内とするのが好まし
い。突起３の直径は、断面形状が円形状の場合には０．
０１〜２ｍｍの範囲内とするのが好ましい。他の断面形
状の場合にもこれに準ずるものとする。なお、突起３の
長さ、ピッチ、及び直径は、使用する研磨剤、研磨パッ
ドの種類に応じて上記の範囲以外に設定することもでき
る。The protrusion 3 has a columnar shape, and in this embodiment, the cross-sectional contour thereof is circular.
In this case, the cross-sectional area S1 of the tip 3a of the protrusion 3 and the base 3
The cross-sectional area S2 of b is set so as to satisfy the condition of S1 ≧ S2. The tip surface 3c of the protrusion 3 is a flat surface. The length, pitch, etc. of the protrusions 3 can be appropriately selected, but it is particularly preferable that the length of the protrusions 3 is in the range of 0.1 to 5 mm and the pitch of the protrusions 3 is in the range of 0.2 to 5 mm. The diameter of the protrusion 3 is 0.
It is preferably within the range of 01 to 2 mm. The same applies to other cross-sectional shapes. The length, pitch, and diameter of the protrusions 3 can be set outside the above range depending on the type of polishing agent and polishing pad used.
【００１７】そして、上記のように構成したドレッサー
１を使用する場合には、ドレッサー１を、ＣＭＰ、ポリ
シング装置、ラッピング装置等の研磨装置に取り付け、
研磨装置に取り付けられている発泡ウレタン等の合成樹
脂からなる布状の研磨パッド１１の方向に押圧し、複数
の突起３の先端部を研磨パッド１１の表面に当接させ
る。When the dresser 1 constructed as described above is used, the dresser 1 is attached to a polishing device such as CMP, a polishing device and a lapping device.
By pressing in the direction of the cloth-shaped polishing pad 11 made of synthetic resin such as urethane foam attached to the polishing apparatus, the tips of the plurality of protrusions 3 are brought into contact with the surface of the polishing pad 11.
【００１８】そして、この状態でドレッサー１と研磨パ
ッド１１との間に純水等の洗浄液を供給しつつ、ドレッ
サー１と研磨パッド１１とを相対的に回転させる。この
ようにすると、ドレッサー１の複数の突起３によって研
磨パッド１１の表面の刷毛状の部分１３が掻き起こされ
て毛羽立つとともに、研磨パッド１１の表面の穴１２内
に詰まっていたスラリー状の研磨剤、被加工物の研磨
粉、研磨パッドの削り屑等が穴１２内から純水とともに
掻き出され、突起３、３間の隙間を介してドレッサー１
の外周側に排出されることになる。Then, in this state, while supplying a cleaning liquid such as pure water between the dresser 1 and the polishing pad 11, the dresser 1 and the polishing pad 11 are relatively rotated. In this way, the brush-like portions 13 on the surface of the polishing pad 11 are scratched and fluffed by the plurality of protrusions 3 of the dresser 1, and the slurry-like polishing agent clogged in the holes 12 on the surface of the polishing pad 11 is used. Polishing powder of the work piece, shavings of the polishing pad, and the like are scraped out from the hole 12 together with the pure water, and the dresser 1 passes through the gap between the protrusions 3 and 3.
Will be discharged to the outer peripheral side.
【００１９】上記のように構成したこの実施の形態によ
るドレッサー１にあっては、目立ての際に、図３に示す
ように突起３が移動した際に、突起３が寝ていた刷毛状
の部分１３を掻き起こして毛羽立たせるように作用す
る。この場合、突起３の先端面３ｃが平坦面となってい
るので、研磨パッド１１の表面を削るようなことはな
く、研磨パッド１１の寿命を著しく長くすることができ
る。In the dresser 1 according to this embodiment configured as described above, the brush-like portion in which the protrusion 3 lay down when the protrusion 3 moved as shown in FIG. 3 during dressing. It acts to scratch 13 and make it fluffy. In this case, since the tip end surface 3c of the protrusion 3 is a flat surface, the surface of the polishing pad 11 is not shaved and the life of the polishing pad 11 can be remarkably extended.
【００２０】また、各突起３は、柱状に形成されている
ので、研磨パッド１１の表面の穴１２内に位置させた場
合に、突起３の表面と穴１２の内面との間に隙間が形成
されることになるので、この隙間を介して穴１２内に詰
まっていた研磨剤等を研磨液とともに効果的に掻き出す
ことができることになる。この場合、図４に示すよう
に、従来のドレッサーでは、先細状に形成されていた突
起１５が穴１２内に目一杯に挿入されるために研磨剤等
の排出が困難となるが、この実施の形態によるドレッサ
ー１では、突起３と穴１２との間に適当な間隙が存在す
るために研磨剤等の排出が良好になされることになる。Further, since each protrusion 3 is formed in a columnar shape, when it is positioned in the hole 12 on the surface of the polishing pad 11, a gap is formed between the surface of the protrusion 3 and the inner surface of the hole 12. As a result, the polishing agent and the like clogged in the hole 12 can be effectively scraped out together with the polishing liquid through this gap. In this case, as shown in FIG. 4, in the conventional dresser, since the projection 15 formed in a tapered shape is fully inserted into the hole 12, it is difficult to discharge the abrasive or the like. In the dresser 1 having the above-described configuration, since an appropriate gap exists between the protrusion 3 and the hole 12, the abrasives and the like can be discharged well.
【００２１】図５及び図６には、本発明によるドレッサ
ーの第２の実施の形態が示されていて、このドレッサー
１は、複数の突起３を、複数の長尺突起４とこの長尺突
起４よりも長さ寸法が小とされた複数の短尺突起５とに
よって構成するとともに、長尺突起４の先端部の断面積
を短尺突起５の先端部の断面積よりも大としたものであ
って、その他の構成は前記第１の実施の形態に示すもの
と同様である。FIGS. 5 and 6 show a second embodiment of the dresser according to the present invention. The dresser 1 includes a plurality of protrusions 3, a plurality of elongated protrusions 4 and the elongated protrusions. And a plurality of short protrusions 5 each having a length dimension smaller than that of 4, and the cross-sectional area of the tip of the long protrusion 4 is larger than the cross-sectional area of the tip of the short protrusion 5. Other configurations are the same as those shown in the first embodiment.
【００２２】そして、この実施の形態に示すドレッサー
１にあっても、前記第１の実施の形態に示すものと同様
の作用効果を奏する他、図６に示すように、長尺突起４
によって研磨パッド１１の表面の部分を凹ませ、長尺突
起４、４間に位置する研磨パッド１１の表面の部分を浮
き上がらせ、その浮き上がらせた部分に位置する穴１２
内に詰まっている研磨剤等を短尺突起５によって効果的
に掻き出すことができることになる。The dresser 1 shown in this embodiment has the same effects as those shown in the first embodiment, and as shown in FIG.
The surface portion of the polishing pad 11 is dented by the above, the surface portion of the polishing pad 11 located between the long protrusions 4 and 4 is raised, and the hole 12 located in the raised portion 12 is formed.
It is possible to effectively scrape out the abrasives and the like that are clogged inside by the short projections 5.
【００２３】図７には、本発明によるドレッサーの第３
の実施の形態が示されていて、このドレッサー１は、基
板２の表面（突起３が設けられていない部分）に、基板
２の外周面側に貫通する排出溝６を設けたものであっ
て、その他の構成は前記第１及び第２の実施の形態に示
すものと同様である。この場合、排出溝６の断面形状
は、三角、四角、半円形状等とすることができるが、こ
れに限定することなく他の断面形状であっても良い。排
出溝６は、基板２の表面の突起３が設けられていない部
分の全てに設けても良いし、一部に設けても良い。FIG. 7 shows a third dresser according to the present invention.
In this dresser 1, a discharge groove 6 penetrating to the outer peripheral surface side of the substrate 2 is provided on the surface of the substrate 2 (the portion where the protrusion 3 is not provided). The other configurations are the same as those shown in the first and second embodiments. In this case, the cross-sectional shape of the discharge groove 6 can be triangular, quadrangular, semicircular, or the like, but is not limited to this and may be another cross-sectional shape. The discharge groove 6 may be provided in all or a part of the surface of the substrate 2 where the protrusion 3 is not provided.
【００２４】そして、この実施の形態に示すドレッサー
１にあっても、前記第１及び第２の実施の形態に示すも
のと同様の作用効果を奏する他、排出溝６によって研磨
パッド１１の穴２内から掻き出した研磨剤等をドレッサ
ー１の外周側に効果的に排出することができることにな
る。Also, the dresser 1 shown in this embodiment has the same function and effect as those shown in the first and second embodiments, and the discharge groove 6 allows the hole 2 of the polishing pad 11 to be formed. It is possible to effectively discharge the abrasive or the like scraped out from the inside to the outer peripheral side of the dresser 1.
【００２５】図８には、本発明によるドレッサーの第４
の実施の形態が示されていて、このドレッサー１は、基
板２の表面の外周縁部に複数の突起３を環状に設けて外
側環状部７を形成したものであって、その他の構成は前
記第１、第２、及び第３の実施の形態に示すものと同様
である。FIG. 8 shows a fourth dresser according to the present invention.
In the dresser 1, a plurality of protrusions 3 are annularly provided on the outer peripheral edge of the surface of the substrate 2 to form an outer annular portion 7, and the other configurations are the same as those described above. It is similar to that shown in the first, second, and third embodiments.
【００２６】そして、この実施の形態に示すドレッサー
にあっても、前記第１、第２、及び第３の実施の形態に
示すものと同様の作用効果を奏する他、外側環状部７の
複数の突起３によって研磨パッド１１の穴１２から洗浄
液とともに掻き出した研磨剤等をドレッサー１の中心部
に一旦溜めた後に、突起３、３間の隙間を介してドレッ
サー１の外周側に排出することができることになる。The dresser shown in this embodiment has the same effects as those shown in the first, second, and third embodiments, and also has a plurality of outer annular portions 7. It is possible to temporarily store the polishing agent and the like scraped out together with the cleaning liquid from the holes 12 of the polishing pad 11 by the projections 3 in the central portion of the dresser 1 and then discharge the same to the outer peripheral side of the dresser 1 through the gap between the projections 3 and 3. become.
【００２７】図９には、本発明によるドレッサーの第５
の実施の形態が示されていて、このドレッサー１は、基
板２の表面の外周縁部に複数の突起３を環状に設けて外
側環状部７を形成するとともに、外側環状部７の内側に
外側環状部７よりも粗い密度で複数の突起３を設けて環
状の内側環状部８を形成したものであって、その他の構
成は前記第１、第２、及び第３の実施の形態に示すもの
と同様である。FIG. 9 shows a fifth dresser according to the present invention.
In the dresser 1, a plurality of protrusions 3 are annularly provided on the outer peripheral edge portion of the surface of the substrate 2 to form an outer annular portion 7, and the outer annular portion 7 has an outer portion. A plurality of protrusions 3 are provided with a density higher than that of the annular portion 7 to form an annular inner annular portion 8, and other configurations are those shown in the first, second, and third embodiments. Is the same as.
【００２８】そして、この実施の形態に示すドレッサー
１にあっても、前記第１、第２、及び第３の実施の形態
に示すものと同様の作用効果を奏する他、突起３の密度
の異なる外側環状部７と内側環状部８との協働により、
研磨パッド１１の表面の刷毛状の部分１３を効果的に毛
羽立たせることができるとともに、研磨パッド１１の表
面の穴１２内から研磨剤等を洗浄液とともに効果的に掻
き出すことができることになる。The dresser 1 shown in this embodiment has the same effects as those shown in the first, second and third embodiments, and the density of the projections 3 is different. By the cooperation of the outer annular portion 7 and the inner annular portion 8,
The brush-like portion 13 on the surface of the polishing pad 11 can be effectively fluffed, and the polishing agent and the like can be effectively scraped out from the inside of the hole 12 on the surface of the polishing pad 11 together with the cleaning liquid.
【００２９】図１０には、本発明によるドレッサーの第
６の実施の形態が示されていて、このドレッサー１は、
基板２の表面の外周縁部に、周方向に向かって所定の間
隔ごとに複数の突起３を扇状に設けて扇状部９とし、こ
の複数の扇状部９により全体を環状に形成するととも
に、隣接する扇状部９、９間に基板２の中心部と外周部
とを連通する排出溝１０を形成したものであって、その
他の構成は前記第１、第２、第３の実施の形態に示すも
のと同様である。FIG. 10 shows a sixth embodiment of the dresser according to the present invention. The dresser 1 comprises:
A plurality of projections 3 are provided in a fan shape on the outer peripheral edge portion of the surface of the substrate 2 in the circumferential direction at predetermined intervals to form a fan-shaped portion 9. The plurality of fan-shaped portions 9 form an entire ring shape and are adjacent to each other. A discharge groove 10 that connects the central portion and the outer peripheral portion of the substrate 2 is formed between the fan-shaped portions 9, 9, and other configurations are shown in the first, second, and third embodiments. It is similar to the one.
【００３０】そして、この実施の形態に示すドレッサー
１にあっても、前記第１、第２、第３の実施の形態に示
すものと同様の作用効果を奏する他、ドレッサー１の中
心部に溜められた研磨剤等を排出溝１０を介してドレッ
サー１の外周側に効果的に排出させることができること
になる。The dresser 1 shown in this embodiment has the same function and effect as those shown in the first, second and third embodiments, and also has a reservoir at the center of the dresser 1. It is possible to effectively discharge the obtained polishing agent or the like to the outer peripheral side of the dresser 1 through the discharge groove 10.
【００３１】なお、前記各実施の形態においては、各突
起３をストレートの柱状としたものを図示したが、図示
はしないが、傾斜した柱状、根元から先端に向かって順
次大径となるテーパー柱状等としても良いものである。
また、前記各実施の形態においては、ドレッサー１を焼
結セラミックスで構成したが、発泡セラミックスで構成
しても良いものであり、またその他の素材で構成しても
良い。In each of the above-mentioned embodiments, each projection 3 is shown as a straight columnar shape, but it is not shown, but it is a slanted columnar shape, and a tapered columnar shape whose diameter gradually increases from the root to the tip. It is also good as
Further, in each of the above-described embodiments, the dresser 1 is made of sintered ceramics, but it may be made of foamed ceramics, or may be made of other materials.
【００３２】[0032]
【発明の効果】以上説明したように、本発明によれば、
複数の突起により、研磨パッドの表面の穴内に詰まって
いる研磨剤等が洗浄液とともに穴内から掻き出され排出
されることになる。また、研磨パッドの表面の寝ている
刷毛状の部分が掻き起こされて毛羽立たされることにな
る。この場合、突起によって研磨パッドの表面が削り取
られることはなく、寝ている状態が掻き起こされるだけ
なので、研磨パッドの寿命を大幅に長くすることができ
ることになる。また、複数の突起は、複数の長尺突起と
複数の短尺突起とからなり、かつ長尺突起の先端部の断
面積が短尺突起の先端部の断面積も大とされているの
で、長尺突起によって研磨パッドの表面を凹ませ、長尺
突起間に位置する研磨パッドの表面を浮き上がらせ、そ
の浮き上がらせた部分に位置する穴内に詰まっている研
磨剤等を短尺突起によって洗浄液とともに掻き出すこと
ができることになる。したがって、研磨パッドの表面の
穴内から研磨剤等を効果的に掻き出すことができること
になる。さらに、基板の表面には排出溝が設けられてい
るので、この排出溝を介して研磨パッドの表面の穴内か
ら掻き出した研磨剤等を効率良く排出することができる
ことになる。さらに、複数の突起が設けられる領域を環
状としたことにより、環状の部分で研磨パッドの目立て
を効率的に行うことができるとともに、目立てによって
発生した研磨剤等を環状部内側の領域内に一旦溜めてお
くことができることになる。さらに、環状の領域を、内
側環状部と外側環状部とに区画し、内側環状部より外側
環状部の方が突起が密となるように構成したことによ
り、突起の密度の異なる２つの環状部の協働により研磨
パッドの表面の目立て作業を効率良く行うことができる
ことになる。さらに、複数の突起が設けられる領域が、
等間隔環状配置されているように構成したことにより、
隣接する複数の突起間に基板の中央部と外周部とを連通
する排出溝を形成することができ、この排出溝を介して
研磨パッドの穴内から掻き出した研磨剤等を効果的にド
レッサーの外周側に効果的に排出させることができるこ
とになる。As described above, according to the present invention,
Due to the plurality of protrusions, the polishing agent or the like clogged in the hole on the surface of the polishing pad is scraped out and discharged from the hole together with the cleaning liquid. In addition, the sleeping brush-like portion on the surface of the polishing pad is scratched and fluffed. In this case, the surface of the polishing pad is not scraped off by the protrusion, and the sleeping state is only agitated, so that the life of the polishing pad can be significantly extended. Further, the plurality of protrusions is composed of a plurality of long protrusions and a plurality of short protrusions, and the cross-sectional area of the tip of the long protrusion is also large, so that the cross-section of the tip of the short protrusion is large. It is possible to dent the surface of the polishing pad with the projections, to raise the surface of the polishing pad located between the long protrusions, and to scrape the polishing agent, etc., clogged in the holes located in the raised portions together with the cleaning liquid with the short protrusions. You can do it. Therefore, the polishing agent or the like can be effectively scraped out from the holes on the surface of the polishing pad. Further, since the discharge groove is provided on the surface of the substrate, it is possible to efficiently discharge the polishing agent and the like scraped from the inside of the hole on the surface of the polishing pad through the discharge groove. Furthermore, by making the region where the plurality of protrusions are provided annular, it is possible to efficiently dress the polishing pad at the annular portion, and the abrasive or the like generated by the dressing is temporarily put in the region inside the annular portion. It will be possible to store. Furthermore, the annular region is divided into an inner annular portion and an outer annular portion, and the outer annular portion is configured so that the protrusions are denser than the inner annular portion, so that two annular portions having different protrusion densities are formed. With this cooperation, it is possible to efficiently perform the work of dressing the surface of the polishing pad. Furthermore, the area where a plurality of protrusions are provided is
By being configured to be arranged at equal intervals in an annular shape,
It is possible to form a discharge groove that connects the central portion and the outer peripheral portion of the substrate between a plurality of adjacent protrusions, and the polishing agent and the like scraped from the inside of the hole of the polishing pad through the discharge groove can be effectively used for the outer periphery of the dresser. It can be effectively discharged to the side.
【図１】 本発明によるドレッサーの第１の実施の形態
を示した概略平面図である。FIG. 1 is a schematic plan view showing a first embodiment of a dresser according to the present invention.
【図２】 図１に示すものの部分拡大断面図である。FIG. 2 is a partially enlarged sectional view of what is shown in FIG.
【図３】 図１に示すものの突起と研磨パッドの刷毛状
の部分との関係を示した説明図である。FIG. 3 is an explanatory diagram showing the relationship between the protrusions of FIG. 1 and brush-like portions of the polishing pad.
【図４】 図１に示すものの突起と研磨パッドの穴との
関係を示した説明図である。FIG. 4 is an explanatory view showing the relationship between the protrusions and the holes of the polishing pad shown in FIG.
【図５】 本発明によるドレッサーの第２の実施の形態
を示した部分拡大断面図である。FIG. 5 is a partially enlarged sectional view showing a second embodiment of the dresser according to the present invention.
【図６】 図５に示すものの長尺突起及び短尺突起と研
磨パッドとの関係を示した説明図である。FIG. 6 is an explanatory view showing the relationship between the long and short protrusions and the polishing pad shown in FIG.
【図７】 本発明によるドレッサーの第３の実施の形態
を示した部分拡大断面図である。FIG. 7 is a partially enlarged sectional view showing a third embodiment of the dresser according to the present invention.
【図８】 本発明によるドレッサーの第４の実施の形態
を示した概略平面図である。FIG. 8 is a schematic plan view showing a fourth embodiment of the dresser according to the present invention.
【図９】 本発明によるドレッサーの第５の実施の形態
を示した概略平面図である。FIG. 9 is a schematic plan view showing a fifth embodiment of the dresser according to the present invention.
【図１０】 本発明によるドレッサーの第６の実施の形
態を示した概略平面図である。FIG. 10 is a schematic plan view showing a sixth embodiment of the dresser according to the present invention.
１…ドレッサー ２…基板 ３…突起 ４…長尺突起 ５…短尺突起 ６…排出溝 ７…外側環状部 ８…内側環状部 ９…扇状部 １０…排出溝 1 ... Dresser 2 ... Substrate 3 ... Protrusion 4 ... Long protrusion 5 ... Short protrusion 6 ... Discharge groove 7 ... Outer annular part 8 ... Inner annular part 9 ... Fan-shaped part 10 ... Discharge groove
Claims (6)
の突起を備えてなるドレッサーにおいて、前記突起が柱
状に形成されてなり、該突起の先端部の断面積Ｓ１と基
端部の断面積Ｓ２とが、Ｓ１≧Ｓ２とされていることを
特徴とするドレッサー。1. A dresser comprising a ceramic substrate having a plurality of protrusions on the surface thereof, wherein the protrusions are formed in a columnar shape, and a cross-sectional area S1 of a front end portion and a cross-sectional area S2 of a base end portion of the protrusion are formed. The dresser is characterized in that S1 ≧ S2.
長さ寸法が小とされた複数の短尺突起とからなり、か
つ、長尺突起の先端部の断面積が短尺突起の先端部の端
面積より大とされていることを特徴とするドレッサー。2. The dresser according to claim 1, wherein the plurality of protrusions includes a plurality of long protrusions and a plurality of short protrusions having a length dimension smaller than that of the long protrusions, and A dresser characterized in that the cross-sectional area of the tip of the long protrusion is larger than the end area of the tip of the short protrusion.
て、 前記基板の表面に排出溝が設けられてなることを特徴と
するドレッサー。3. The dresser according to claim 1, wherein a discharge groove is provided on the surface of the substrate.
サーであって、 前記複数の突起が設けられる領域を環状としたことを特
徴とするドレッサー。4. The dresser according to claim 1, wherein a region in which the plurality of protrusions are provided has an annular shape.
れ、前記突起が、前記内側環状部により外側環状部が密
となるように設けられていることを特徴とするドレッサ
ー。5. The dresser according to claim 4, wherein the annular region is divided into an inner annular portion and an outer annular portion, and the protrusion has the outer annular portion densely formed by the inner annular portion. Dresser characterized by being provided.
サーであって、 前記複数の突起が設けられる領域が等間隔環状配置され
ていることを特徴とするドレッサー。6. The dresser according to claim 1, wherein the regions in which the plurality of protrusions are provided are annularly arranged at equal intervals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001244583A JP2003053665A (en) | 2001-08-10 | 2001-08-10 | Dresser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001244583A JP2003053665A (en) | 2001-08-10 | 2001-08-10 | Dresser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003053665A true JP2003053665A (en) | 2003-02-26 |
Family
ID=19074491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001244583A Pending JP2003053665A (en) | 2001-08-10 | 2001-08-10 | Dresser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003053665A (en) |
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| JP2006324310A (en) * | 2005-05-17 | 2006-11-30 | Hitachi Chem Co Ltd | INTEGRAL SiC-CMP DRESSER PAD |
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