JP2003042170A - Bearing device and base board treatment device provided with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a bearing device capable of surely preventing a corrosive treatment liquid from infiltrating in the inside bearing and a base board treatment device provided with the bearing device. SOLUTION: There is provided with a housing 12 having a bearing rotatably supporting a rotary shaft 111 and through holes 13a, 13b, 13c and holding the bearing 11 in one side 13a of the through hole, a sealing member 20 having an insertion hole 21 in which the rotary shaft 111 is inserted and one end side is airtightly fitted to the other side 13c of the housing through hole, a first seal member 33 closely touching to both of the one side end face of the sealing member 20 and the rotary shaft 111 for sealing, and pressurized fluid supply means 35, 18, 26 feeding the pressurized fluid into the insertion hole 21 between the first seal member 33 and the second seal member 34. The treating fluid can be prevented from advancing by both of the sealing action of the second seal member 34 and the fluid stream action generated in the sealing part of the second seal member 34.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bearing device suitable for use in a device in which highly corrosive chemicals are used, and a substrate processing in which a rotating shaft for carrying a substrate is rotatably supported by the bearing device. Regarding the device.

[0002]

2. Description of the Related Art For example, a TFT substrate which constitutes a liquid crystal substrate is manufactured through various steps. In each step, a developing solution or a resist film is applied, a chemical solution for peeling the same, an etching solution or a cleaning solution is applied. Various processing liquids are applied to the TFT substrate.

Among them, for example, in the etching process, an etching apparatus is used which is configured to support a substrate and horizontally convey the substrate and jet an etching solution to the substrate to be processed. An example of such an etching apparatus is shown in FIG.

As shown in FIG. 4, the etching apparatus 100 is an apparatus for performing an etching process on a TFT substrate (hereinafter, simply referred to as a substrate) K, and includes a tank main body 101 having an open upper portion and the tank main body 101. Lid 1 for closing the opening
03, an etching solution ejecting device 105 disposed in the tank body 101, a transfer device 110 for transferring the substrate K in the horizontal direction, and the like.

The etching liquid jetting device 105 comprises a plurality of etching liquid jetting nozzles 106, and an etching liquid supply means (not shown) for supplying a pressurized etching liquid to the etching liquid jetting nozzle 106. The etching liquid jet nozzles 106 are arranged above the substrate K transported by the transport device 110 along the width direction and the transportation direction, and spray the etching liquid onto the upper surface of the substrate K transported.

The transfer device 110 is constructed by arranging a pair of rotating shafts 111 and 121 arranged in parallel in the vertical direction in multiple rows in a direction orthogonal to the paper surface. The upper rotary shaft 111 is
Bearing device 12 whose one end is arranged in tank body 101
While it is rotatably supported by 0, the other end is
It penetrates through the side plate 102 of the tank body 101 and projects to the outside, and is rotatably supported by a bearing device 130 provided on the side plate 102.
4 is attached. Also, the lower rotary shaft 121
Both ends of each are rotatably supported by bearing devices 120 arranged in the tank body 101.

A transmission belt 125 for transmitting the rotational power of a drive motor (not shown) is wound around the pulley 124, and the drive belt (not shown) of the drive motor is passed through the transmission belt 125 and the pulley 124. Rotational power is rotating shaft 1
The rotary power transmitted to the rotary shaft 121 is transmitted to the rotary shaft 111 via a gear 119 provided on the rotary shaft 111 and a gear 123 provided on the rotary shaft 121 and meshing with the gear 119. Is transmitted to the rotary shafts 111 and 121, whereby both rotary shafts 111 and 121 rotate about their axes.

A pair of flanged rollers 1 is provided on the lower rotary shaft 111 with a space slightly wider than the width of the substrate K.
17 is provided, and further, this flanged roller 117,
A plurality of rollers 118 are provided between 117 at appropriate intervals. A roller 122 is provided on the upper rotary shaft 121 at a position above the flanged roller 117.

Thus, according to the etching apparatus 100, the substrate K is sandwiched between the flanged roller 117 and the roller 122 by the rotation of the rotary shafts 111 and 121 of the transfer device 110, and the surface of the substrate K is projected on the paper surface. The etching liquid is jetted from the etching liquid jet nozzle 106 to the upper surface of the substrate K that is transported in the direction orthogonal to the substrate K, and the substrate K is thus etched.

By the way, the etching solution is extremely corrosive. Therefore, for the bearing device 120 arranged in the tank body 101, a resin bearing having corrosion resistance to the etching solution is used.

On the other hand, the bearing device 130 that supports the other end of the rotary shaft 111 provided so as to project from the tank body 101 is the side to which the power of the drive motor (not shown) is transmitted. Since the load acting on the bearing of the bearing device 130 is large, the bearing is made of metal. And since the metal bearings are easily corroded by the etching solution,
The bearing device 130 has a structure as shown in FIG. 5 so that the etching liquid in the tank body 101 does not reach the bearing.

That is, as shown in FIG. 5, the bearing device 130 includes a bearing 131 for rotatably supporting a rotary shaft 111 composed of a central shaft 112 and a sleeve 113 fitted onto the central shaft 112, and the bearing 131. A bracket 132 having an L-shaped vertical cross section for holding 131, a sealing member 134 mounted in the mounting hole of the side plate 102 and mounted and supported in the mounting hole of the mounting plate 142, and a tip of the sealing member 146. It comprises a protective cup 146 for covering the part. The rotary shaft 121 also has a double structure including a central shaft and a sleeve.

The outer peripheral portion of the sealing member 134 has a large diameter portion 1
37 and a small-diameter portion 138, which are formed in a stepped shape, have an insertion hole 135 formed in the central portion through which the rotary shaft 111 is inserted, and a blind hole formed on the end surface on the small-diameter portion 138 side. 136 is formed. And this sealing member 1
34, the small diameter portion 138 is fitted and mounted in the mounting hole of the side plate 102, and the large diameter portion 137 is mounted on the mounting plate 1.
It is supported by 42, and the end surface of the large diameter portion 137 is in contact with the bracket 132.

The sleeve 113 is formed in a stepped shape having a small diameter portion 114, a large diameter portion 115 and a flange portion 116 at the tip thereof, and the large diameter portion 115 has a small diameter portion of the sealing member 134. A second seal member (rotary seal) 145 that is in close contact with the end surface of the sealing member 138 is fitted onto the small diameter portion 114, and a first seal member (rotary seal) that is in close contact with the bottom surface of the blind hole 136 formed in the sealing member 134. 144 is externally fitted.

The protective cup 146 has a tapered hole 147.
And is fitted on the sleeve 113 so that the tip of the small diameter portion 138 of the sealing member 134 is located inside the tapered hole 147.

Further, the bracket 132 is provided with a pressing lid 133 for preventing the outer ring of the bearing 131 from coming off. The pressing lid 133 is integrated with the bracket 132 and the sealing member 134 by a mounting bolt (not shown). Are combined together. Incidentally, reference numeral 126 in FIG.
Is a stopper for preventing the pulley 124 from coming off, and reference numeral 1
Reference numeral 39 is a sleeve provided to prevent the inner ring of the bearing 131 from coming off, and reference numeral 143 is a support plate that supports the bracket 132 and the mounting plate 142. Further, reference numerals 140, 141 and 148 are O-rings, respectively.

Thus, according to this bearing device 100,
The space between the mounting hole of the side plate 102 and the small diameter portion 138 of the sealing member 134 is sealed by the O-ring 141.
Since the space between the mounting hole of 42 and the large diameter portion 137 of the sealing member 134 is sealed by the O-ring 140, the tank body 1
The O-rings 140 and 141 prevent the etchant in 01 from leaking through the mounting holes.

The sleeve 113 has a sealing member 13
Second seal member 145 closely contacting the end face of the small diameter portion 138 of No. 4
And the first seal member 144 that comes into close contact with the bottom surface of the blind hole 136.
Is externally fitted, the blind hole 136 of the sealing member 134
The etching liquid enters between the insertion hole 135 and the sleeve 113 because the first and second sealing members 1 are
Blocked by 44,145.

Further, since the tip of the small-diameter portion 138 of the sealing member 134 is arranged so as to be located in the tapered hole 147 of the protective cup 146, the etching solution is directly fed into the tank body 101. The second seal member 145 does not come into contact with the second seal member 145, and even on this surface, it is difficult for the etching liquid to enter from between the blind hole 136 and the insertion hole 135 of the sealing member 134 and the sleeve 113.

[0020]

However, as described above, the bearing device 1 configured to prevent the ingress of the etching solution.
Even if it is 30, it is still impossible to completely prevent the etching solution from entering, and the entering etching solution corrodes and damages the bearing 131 and the pulley 124.
This caused a situation in which this had to be replaced early.

This is because the etching solution is easily vaporized and has high permeability, and the first and second sealing members 144 and 145 are the sealing members 1.
This is due to the fact that a slight gap is easily generated between the sealing member 134 and the sealing member 134 because it is in close contact with the rotating member 34, and vaporized etching gas and mist-like etching liquid are , The first and second sealing members 144,
This is because it enters from a very small gap generated between the 145 and the sealing member 134.

For this reason, in the field of devices using a highly corrosive processing fluid such as an etching solution, a bearing device having a sealing structure capable of further strongly preventing such processing fluid from entering is desired. Was there.

The present invention has been made in view of the above circumstances, and is provided with a bearing device capable of reliably preventing the highly corrosive processing fluid from entering and penetrating the internal bearing. An object is to provide a substrate processing apparatus.

[0024]

The invention described in claim 1 of the present invention for solving the above-mentioned problems comprises a bearing for rotatably supporting a rotary shaft and a through hole, and the through hole. A housing that holds the bearing on one side, and a through hole that penetrates from one end to the other end and through which the rotation shaft is inserted, and the one end side is on the other side of the housing through hole. A sealing member fitted in an airtight manner, and disposed in the through hole of the housing between the bearing and the sealing member, both the one end face of the sealing member and the rotary shaft. To the first sealing member that seals between the rotary shaft and the sealing member, and to both the other end face of the sealing member and the rotary shaft, to seal the rotary shaft and the sealing member. A second sealing member for sealing between the sealing member and the sealing member; A within the through hole, according to the bearing device is characterized in that which is configured by providing a pressure fluid supply means for supplying a pressure fluid to the space between the first and second sealing members.

According to this bearing device, the pressure fluid supply means supplies the pressure fluid to the space between the first seal member and the second seal member within the insertion hole of the sealing member, The space becomes positive pressure. When the rotation of the rotating shaft causes a slight gap in the sealing portion formed by the second seal member, a fluid flow is generated in which the pressure fluid in the space flows out from the gap.

Therefore, in a processing apparatus in which a highly corrosive processing fluid such as an etching solution is used, the rotary shaft arranged in the processing tank with the sealing member side inserted in the processing tank. When the bearing device is used to support the rotating shaft, the sealing effect of the second seal member prevents the processing fluid from entering between the insertion hole and the rotating shaft. When a slight gap is generated in the sealing portion of the second seal member due to the rotation of, the inflow of the processing fluid is blocked by the fluid flow flowing out from the gap.

As described above, according to this bearing device, the processing fluid is inserted by the action of both the sealing action of the second sealing member and the action of the fluid flow generated in the sealing portion of the second sealing member. Since it can be prevented from entering between the hole and the rotary shaft, even if the processing fluid is highly permeable, it can be surely prevented from entering and is retained in the housing. It is possible to reliably prevent the bearing from being corroded or damaged by the processing fluid.

The pressure fluid supply means, as in the invention described in claim 2, is provided with a pressure fluid in the space between the bearing and the sealing member in the through hole of the housing. And a supply hole that is formed in the sealing member and connects the space between the bearing and the sealing member with the space between the first sealing member and the second sealing member. Or, as in the invention described in claim 3, a supply hole formed in the sealing member and opening in a space between the first seal member and the second seal member, and the supply hole. And means for supplying pressure fluid to the supply hole.

Further, as in the invention described in claim 4,
An annular groove may be formed in the insertion hole of the sealing member between the first seal member and the second seal member, and the supply hole may be opened in the annular groove.

According to a fifth aspect of the present invention, in the bearing device according to the fourth aspect, a fluid discharge hole opening to the annular groove is formed in the sealing member, and the fluid discharge hole is formed. And a fluid discharge means for discharging the fluid in the space to the outside.

According to this bearing device, if the second sealing member is insufficiently sealed, the processing fluid will flow from the sealing portion into the space between the first sealing member and the second sealing member. Even if it enters, the processing fluid that has entered the space is collected in the annular groove, and the collected processing fluid is discharged to the outside by the fluid discharge means via the fluid discharge hole, so It is possible to more effectively prevent the processing fluid that has entered from entering the space formed by the bearing, the sealing member, the rotating shaft, and the first sealing member from the same space.

According to a sixth aspect of the present invention, in the bearing device according to any one of the first to fifth aspects, the end portion of the sealing member fitted into the housing through hole is A ring-shaped baffle plate having an outer diameter slightly smaller than the inner diameter of the blind hole is formed on the opposite end face of the blind hole by forming a blind hole coaxial with the insertion hole and axially passed by the rotary shaft. The second sealing member is disposed so as to be located in the blind hole, and is in close contact with both the blind hole bottom surface of the sealing member and the rotary shaft in the blind hole of the sealing member. The present invention relates to a bearing device characterized in that the bearing device is provided.

According to this bearing device, the blind hole is formed in the sealing member, the second seal member is disposed in the blind hole, and the blind hole opening is closed by the baffle plate.
It is difficult for the processing fluid to enter the blind hole, and as a result, the second
The sealing effect of the seal member can be enhanced.

Further, the invention according to claim 7 of the present invention has a processing tank and a rotating shaft arranged in the processing tank such that an end portion thereof projects to the outside, and the rotating shaft rotates. A substrate processing apparatus configured to carry out processing by discharging a processing fluid onto the substrate while the substrate is transferred by the substrate transfer means.
An end portion of the rotary shaft is rotatably supported by the bearing device according to any one of claims 1 to 6, and the other end side of the sealing member is inserted into the processing tank, and The present invention relates to a substrate processing apparatus in which the one end side of the sealing member and the housing are arranged outside the processing bath.

In this substrate processing apparatus, the processing fluid is
Even if it has a strong corrosive property and a high penetrability, it is built in the bearing device because it supports the rotating shaft of the substrate transfer means by the bearing device having a structure that does not easily penetrate inside. The bearing can be effectively protected from corrosion by the treatment fluid, and thus the life of the bearing can be extended. Therefore, the frequency of maintenance such as replacement of bearings can be reduced, and the operating rate of the device can be improved accordingly.

[0036]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a vertical sectional view showing a schematic configuration of a substrate processing apparatus according to this embodiment, and FIG. 2 is an enlarged vertical sectional view showing the bearing device shown in FIG. 1.

The substrate processing apparatus 1 of this embodiment is the bearing apparatus 1
Except for 0, it has the same configuration as the conventional substrate processing apparatus 100 shown in FIG. 4. Therefore, the same reference numerals are used for the same configurations, and detailed description thereof is omitted.

As shown in FIG. 2, the bearing device 10 of the present example.
Is a bearing 11 that rotatably supports a rotating shaft 111 composed of a central shaft 112 and sleeves 113'a and 113'b fitted on the central shaft 112.
Housing 1 for holding 1, housing 12 at one end
The sealing member 20 is inserted into the side plate 102 of the tank body 101, and the other end of the sealing member 20 is inserted into the side plate 102.

The housing 12 has a through hole 1 at the center thereof.
3b, a blind hole 13a on the left side of the figure, and a blind hole 13c on the right side of the figure. And
The bearing 11 is fitted into the blind hole 13a,
The sealing member 20 is fitted in the blind hole 13c.

The bearing 11 is the sleeve 11
3'a is fitted on a sleeve 113'b fitted on the central shaft 112 so as to extend from the central shaft 11
A rotary shaft 111 composed of two and sleeves 113'a and 113'b is rotatably supported. Also, sleeve 1
A pulley 124 is also externally fitted to 13'b, and a spacer 14 is arranged between the bearing 11 and the pulley 124. The bearing 11 prevents the inner ring from coming off by the spacer 14. Has been done. On the other hand, the bearing 11
The outer ring is prevented from coming off by a pressing lid 16 fixed to the housing 12.

The housing 12 is fixed to the support plate 38 with its right end portion in the drawing fitted in the mounting hole of the support plate 38.
1 is fixed to the bracket 40, and the bracket 40
Is fixed to the side plate 102 of the tank body 101.

The sealing member 20 is provided with an insertion hole 21 through which the rotary shaft 111 is inserted, a blind hole 22 on the right side of the drawing, and a tapered taper having a smaller diameter than the blind hole 22. The hole 23 is provided. The one end side is airtightly fitted into the blind hole 13c of the housing 11 via the O-ring 30, and the other end side is airtightly fitted into the mounting hole of the side plate 102 via the O-ring 31. There is. An auxiliary plate 39 is fixed to the side plate 102,
The sealing member 20 is also fitted in the mounting hole of the auxiliary plate 39 via the O-ring 32 in an airtight manner.

The sleeve 113'a is located at a position corresponding to the blind holes 22 and 23 of the sealing member 20.
A ring-shaped baffle plate 37 having an outer diameter slightly smaller than the inner diameter of the blind hole 22 is located in the blind hole 22 on the right side of the flange portion 116 '. As shown in FIG.
A second seal member (rotary seal) 34, which is in close contact with the bottom surface of, is externally fitted in an airtight manner. A first seal member (rotary seal) 33, which is in close contact with the end surface of the sealing member 20, is externally fitted to the left end of the sleeve 113'a.

An annular groove 28 is formed in the insertion hole 21 of the sealing member 20, and a fluid discharge hole 29 is formed in the sealing member 20 at the bottom of the annular groove 28. A discharge pipe 36 penetrates the housing 12 and is connected to the fluid discharge hole 29. Further, the sealing member 20 has a blind hole 13c in the housing 12.
Inside, a supply hole 26 that connects the space 17 between the bearing 11 and the sealing member 20 and the annular groove 28 is formed.

The blind hole 1 is formed in the housing 12.
An air supply hole 18 that opens into the space 17 in 3c is formed, and a compressor (not shown) that supplies pressurized air is connected to this air supply hole 18 via a pipe joint 35.

Thus, according to the bearing device 10 of the present example having the above-described configuration and the substrate processing apparatus 1 having the same, the housing is provided from the compressor (not shown) via the pipe joint 35 and the air supply hole 18. Space 1 in 12 blind holes 13c
Pressurized air is supplied to 7, and the pressurized space maintains a positive pressure in the space 17.

The pressurized air supplied into the space 17 flows into the annular groove 28 through the supply hole 26,
The pressurized air maintains positive pressure in the insertion hole 21 and the annular groove 28 between the first seal member 33 and the second seal member 34.

In the tank main body 101, the etching liquid is jetted from the etching liquid jet nozzle 104, and there are mist-like etching liquid and vaporized etching gas. Although some of them progress toward the blind hole 22, the etching liquid and the etching gas are blocked by the baffle plate 37, so that the etchant and the etching gas do not enter the blind hole 22. This baffle plate 37 prevents it temporarily.

Further, between the rotary shaft 111 and the sealing member 20, more specifically, the sleeve 113'a and the sealing member 20.
Since the insertion hole 21 between and is sealed by the second seal member 34, it is assumed that the blind hole 22 and the baffle plate 37.
Even if the etching liquid or the etching gas flows into the blind hole 22 through the gap between and, the second seal member 34 secondarily prevents the etching liquid and the etching gas from entering the through hole 21.

Further, from the compressor (not shown) through the pipe joint 35, the air supply hole 18 and the supply hole 26, the first
Pressurized air is supplied into the insertion hole 21 and the annular groove 28 between the seal member 33 and the second seal member 34, and the same portion is maintained at a positive pressure. Therefore, when a small gap is created in the sealing portion of the second seal member 34 due to the rotation of the rotating shaft 111, an air flow in which the pressurized air flows out from the gap is created. Therefore, even if the etching liquid or the etching gas flows into the blind hole 22 through the gap between the blind hole 22 and the baffle plate 37, the entry of the etching liquid or the etching gas into the insertion hole 21 does not seal the second seal member 34. Both the stop action and the action of the air flow are reliably prevented.

Further, the insertion hole 21 is connected to a fluid discharge hole 29 and a discharge pipe 36 which are opened at the bottom of the annular groove 28, and the fluid (atmosphere and liquid) in the insertion hole 21 is discharged from this fluid. It is discharged to the outside through the hole 29 and the discharge pipe 36. Further, when liquid is present in the insertion hole 21, it is collected in the annular groove 28 and effectively discharged to the outside. Therefore, temporarily, the second seal member 34
Even if the etching solution or the etching gas may enter the insertion hole 21 from the sealing portion due to insufficient sealing by the sealing portion, the etching liquid or the etching gas may be discharged through the fluid discharge hole 29 and the discharge pipe 36 to the outside. Therefore, it is possible to effectively prevent such etching liquid or etching gas from passing through the first seal member 33 and reaching the inside of the blind hole 13c of the housing 12 (inside the space 17).

As described above, according to the bearing device 10 of this example and the substrate processing apparatus 1 including the bearing device 10, the inside of the insertion hole 21 between the first seal member 33 and the second seal member 34 and the inside of the annular groove 28 are positively exposed. Pressure, that the insertion hole 21 is doubly sealed by providing the first and second sealing members 33 and 34, and the fluid in the insertion hole 21 is eliminated.
By disposing the second seal member 34 in the blind hole 22 formed in the sealing member 20 and closing the opening of the blind hole 22 by the baffle plate 37, the etching liquid and the etching gas in the tank body 101 are However, it can be prevented from reaching the bearing 11 that supports the rotating shaft 111 in multiple orders.

Thus, by such an action, it is possible to reliably prevent the bearing 11 held in the housing 12 from being corroded or damaged by the etching liquid or the etching gas. Therefore, bearing 1
It is possible to reduce the frequency of maintenance such as replacement of 1, and accordingly, the operating rate of the substrate processing apparatus 1 can be improved.

Although one embodiment of the present invention has been described above, the specific mode of the present invention is not limited to this.

For example, in the above example, the compressed air is supplied to the pipe joint 35.
And once supplied into the space 17 through the air supply hole 18,
Through the supply hole 26 communicating with this space 17, the annular groove 2
8 is configured to supply the pressurized air into the (insertion hole 21), but the present invention is not limited to such a configuration, and as shown in FIG. 3, the supply hole 26 ′ opening in the annular groove 28 is formed. A supply pipe 35 'formed in the sealing member 20 and connected to a compressor (not shown) is configured to penetrate the housing 12 and be connected to the supply hole 26', and pressurizing air is
The structure may be such that the gas is directly supplied into the annular groove 28 (insertion hole 21). Even in this case, the same effect as described above can be obtained.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing a schematic configuration of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged vertical sectional view of the bearing device shown in FIG.

FIG. 3 is an enlarged vertical sectional view showing a bearing device according to another embodiment of the present invention.

FIG. 4 is a vertical cross-sectional view showing a schematic configuration of a conventional substrate processing apparatus.

5 is an enlarged vertical sectional view of the bearing device shown in FIG.

[Explanation of symbols]

1 Substrate processing equipment 10 Bearing device 11 bearings 12 housing 13a, 13c blind hole 13b through hole 18 Air supply hole 20 Sealing member 21 insertion holes 22,23 blind hole 26 communication holes 28 annular groove 37 Baffle 111 rotation axis

Continued front page    (72) Inventor Shunji Matsumoto             Sumitomo Precision Works 1-10 Fuso-cho, Amagasaki City, Hyogo Prefecture             Business F term (reference) 3B201 AA03 AB14 BB33 BB92 CD36                 3J016 AA01 BB02 BB24 CA06                 5F043 DD13 EE07 EE15 GG10

Claims (7)

[Claims] 1. A bearing that rotatably supports a rotating shaft, a through hole, a housing that holds the bearing on one side of the through hole, and a hole that penetrates from one end to the other end of the housing. A sealing member having an insertion hole through which the rotary shaft is inserted, the one end side being airtightly fitted and inserted into the other side of the housing through hole, and a sealing member inside the through hole of the housing and sealed with the bearing. A first sealing member disposed between the rotary shaft and the sealing member, the first seal member being disposed between the rotary shaft and the sealing member, the first seal member being in close contact with both the one end face of the sealing member and the rotary shaft. A second seal member that is in close contact with both the other end face of the sealing member and the rotating shaft, and seals between the rotating shaft and the sealing member; and inside the insertion hole of the sealing member, Supplying the pressure fluid to the space between the first seal member and the second seal member. Bearing device being characterized in that configured by providing a pressure fluid supply means for. 2. The means for supplying a pressure fluid to the space between the bearing and the sealing member in the through hole of the housing, the pressure fluid supplying means being formed in the sealing member, 2. The bearing device according to claim 1, comprising a supply hole that connects the space between the bearing and the sealing member and the space between the first sealing member and the second sealing member. 3. The pressure fluid supply means is formed in the sealing member and is connected to the supply hole, which is opened in a space between the first seal member and the second seal member, and is connected to the supply hole. The bearing device according to claim 1, comprising a means for supplying a pressure fluid to the hole. 4. An annular groove is formed in an insertion hole of the sealing member between the first seal member and the second seal member, and the supply hole is opened in the annular groove. The bearing device according to claim 2 or 3. 5. A fluid discharge hole opening to the annular groove is formed in the sealing member, and a fluid discharge means for discharging the fluid in the space to the outside is provided, which is connected to the fluid discharge hole. Claim 4 characterized by the above-mentioned.
The bearing device described. 6. A blind hole, which is coaxial with the insertion hole, is formed on an end face of the sealing member, which is opposite to the end part inserted into the housing through hole, and is axially passed by the rotary shaft. A ring-shaped baffle having an outer diameter slightly smaller than the inner diameter of the blind hole is disposed so as to be located in the blind hole, and the second seal member is a stopper of the sealing member. The bearing device according to any one of claims 1 to 5, wherein the bearing device is arranged in the hole so as to be in close contact with both the bottom surface of the blind hole of the sealing member and the rotary shaft. 7. A processing bath, and a substrate transfer means for transporting a substrate by rotating the rotation shaft, the substrate having a rotating shaft disposed in the processing bath so that an end portion thereof protrudes to the outside. 7. A substrate processing apparatus configured to perform processing by discharging a processing fluid onto the substrate while carrying the substrate by the substrate carrying means, wherein an end of the rotation shaft is any one of claims 1 to 6. Is rotatably supported by the bearing device, the other end side of the sealing member is inserted into the processing tank, and the one end side of the sealing member and the housing are located outside the processing tank. A substrate processing apparatus arranged so as to perform.