JP2003037150A5 - - Google Patents

Description

[Title of the invention] Processing apparatus

[0001]
[Technical field to which the invention belongs]
The present invention relates to a processing apparatus for sequentially processing an object to be processed such as a glass substrate for a liquid crystal display or a semiconductor wafer by a plurality of processing units.

[0017]
[Means for solving problems]
The present invention relates to a processing apparatus for processing an object to be processed.
Multiple processing units arranged side by side in two rows,
A cleaning unit located at the top of the processing unit in one row and a loading / unloading mechanism located at the bottom.
The spin processing device located at the bottom of the processing unit in the other row adjacent to the above one processing unit,
A first delivery means for supplying the untreated object to the cleaning unit,
As a second delivery means that receives the object to be cleaned by the cleaning unit and delivers it to the carry-in / carry-out means.
It is in the processing apparatus characterized by being provided with.

0018.
At one end of the lower part of the processing unit in one row, a loader unit for accommodating the unprocessed object supplied to the cleaning unit by the first delivery means is provided, and the lower part of the processing unit in the other row. It is preferable that one end is provided with an unloader section for storing the object to be processed, which is processed by the spin processing device and taken out by the loading / unloading means, along with the loader section.

[0019]
It is preferable that the first delivery means and the second delivery means each include a roller unit having rollers that are vertically driven and rotationally driven.

0020
It is preferable that a plurality of spin processing devices are provided in series.

0021.
The second delivery means is a liquid supply means for supplying a liquid for preventing drying toward the object to be transported by the roller unit, and the liquid supply means provided on the lower surface side of the roller unit. A drain pan that collects the liquid and is driven up and down integrally with the roller unit, a movable pipe that is connected to the drain pan and discharges the liquid accumulated in the drain pan, and a movable pipe that is slidably inserted from the movable pipe. It preferably consists of a fixed pipe into which the discharged liquid is introduced.

[0022]
On the carry-out side of the cleaning unit, a fixed roller unit is provided, which is arranged at a predetermined height and receives the object to be carried out from the cleaning unit.
The second delivery means includes a movable roller unit that is driven in the vertical direction and descends by receiving an object to be processed carried out to the fixed roller unit at an ascending position.
When the movable roller unit rises, one side of the fixed roller unit and the movable roller unit adjacent to each other has a low inclination toward the inside of each roller unit. A first waterproof cover and a second waterproof cover having a portion are provided, and the inclined portion of the second waterproof cover provided on the movable roller unit is when the movable roller unit is raised. It is preferable that the fixed roller unit is located below the inclined portion of the waterproof cover.

[0023]
The carry-in / carry-out means is arranged between a guide portion provided along the moving direction, a drive device provided parallel to the guide portion and at a predetermined interval, and the guide portion and the drive device. A state in which the robot is freely supported by the guide unit and the drive device and is driven along the travel direction by the drive device, and the guide unit and the drive device are covered along both sides of the travel direction of the robot. It is preferable that the cover body is provided with the above.

0024
The carry-in / carry-out means has a robot, and the robot has a first arm that is rotatably connected to a plurality of links and is provided with a setter at the tip to hold an object to be processed and is driven by expansion and contraction. Equipped with a body and a second arm body,
The setter of the first arm body is located below the setter of the second arm body, and the object to be processed held here in the setter of the second arm body. It is preferable that a nozzle body for injecting a liquid toward the surface is provided.

0025.
A clean unit for introducing clean air into the spin processing device is provided above the processing unit in the other row, and a part of the clean air from the clean unit is arranged in the lower part of the one row by a guide body. It is preferable to be guided by the above-mentioned loading / unloading mechanism.

0026
According to the present invention, by arranging the cleaning unit and the spin processing apparatus in two upper and lower stages, the occupied area can be reduced as compared with the case where the cleaning unit and the spin processing apparatus are arranged in a plane.

[0103]
【The invention's effect】
According to the present invention, since the cleaning unit and the spin processing apparatus are arranged in two upper and lower stages, the occupied area required for installing the apparatus can be reduced as compared with the case where a plurality of processing units are arranged in a plane. , Thereby, for example, the space in the clean room can be effectively used.

Claims (9)

  In a processing apparatus for processing an object,
  A plurality of processing units juxtaposed in two rows;
  A cleaning unit disposed at the top of the processing units in one row and a loading and unloading mechanism disposed at the bottom;
  A spin processing device disposed below the other row of processing units adjacent to the one processing unit;
  First delivery means for supplying an untreated object to the cleaning unit;
A second transfer means for receiving the object to be cleaned cleaned by the cleaning unit and delivering it to the loading and unloading means;
  A processing apparatus comprising:   At one end of the lower portion of the processing units in one row, a loader unit accommodating an unprocessed object to be supplied supplied to the cleaning unit by the first delivery means is provided. The processing apparatus according to claim 1, characterized in that an unloader unit for storing the processing object processed by the spin processing apparatus and taken out by the loading / unloading unit is provided at one end side by side with the loader unit. .   2. A processing apparatus according to claim 1, wherein the first delivery means and the second delivery means each include a roller unit having rollers which are vertically driven and rotationally driven.   The processing apparatus according to claim 1, wherein a plurality of spin processing apparatuses are provided in series.   The second delivery means is a liquid supply means for supplying a liquid for preventing drying toward the object to be treated conveyed by the roller unit, and provided from the liquid supply means provided on the lower surface side of the roller unit. Drain pans that accumulate liquid and are driven up and down integrally with the roller unit, a movable pipe connected to the drain pan and discharging the liquid accumulated in the drain pan, and the movable pipe is slidably inserted from the movable pipe The processing apparatus according to claim 3, comprising a fixed pipe into which the liquid to be discharged is introduced.   On the discharge side of the cleaning unit, there is provided a fixed roller unit which is disposed at a predetermined height and receives an object to be processed which is unloaded from the cleaning unit,
  The second delivery means comprises a movable roller unit which is driven in the vertical direction and which receives and lowers the object to be processed which is carried out to the fixed roller unit at the rising position,
  On one side of the fixed roller unit and the movable roller unit adjacent to each other when the movable roller unit ascends, an inclination inclined low toward the inside of each roller unit A first waterproof cover having a second portion and a second waterproof cover are provided, and the inclined portion of the second waterproof cover provided on the movable roller unit is mounted when the movable roller unit is lifted. The processing apparatus according to claim 1, wherein the processing unit is located below the slope of the waterproof cover of the fixed roller unit.   The loading and unloading means is disposed between a guide portion provided along the moving direction, a drive device parallel to the guide portion and provided at a predetermined distance, and the guide portion and the drive device. A robot which is movably supported by the guide portion and the drive device and driven along the travel direction by the drive device, and covers the guide portion and the drive device along both sides in the travel direction of the robot The processing apparatus according to claim 1, comprising: a cover body provided in   The loading / unloading unit has a robot, and the robot is connected to a plurality of links rotatably and a setter for holding the object to be processed is provided at the tip and the first arm is telescopically driven The body and the second arm,
  The setter of the first arm is located below the setter of the second arm, and the object held by the setter of the second arm is held here The processing apparatus according to claim 1, further comprising a nozzle body for injecting a liquid toward the light source.   A clean unit for introducing clean air to the spin processing apparatus is provided at the upper portion of the processing unit of the other row, and a portion of the clean air from the clean unit is disposed at the lower portion of the one row by the guide body. The processing apparatus according to claim 1, wherein the processing apparatus is guided to the loading and unloading mechanism.