JP2003020214A - Method for manufacturing purified hydrogen peroxide water - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing high-purity hydrogen peroxide water from which organic compound-based impurities are removed to the utmost by purifying the hydrogen peroxide water containing organic compound-based impurities. SOLUTION: This method for manufacturing purified hydrogen peroxide water comprises a step to remove the organic compound-based impurities contained in the hydrogen peroxide water by being brought into contact with a silica gel filled having at least one group selected from 4-20C alkyl groups on the surface of a silica gel carrier or a graft-modified ion exchange fiber or its fabric-like material.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a method for producing purified hydrogen peroxide water, and more particularly to a method for producing highly pure hydrogen peroxide water capable of efficiently removing organic compound-based impurities contained as impurities in hydrogen peroxide water. .

[0002]

BACKGROUND OF THE INVENTION Hydrogen peroxide water is widely used in many fields such as bleaching of paper and pulp, and chemical polishing liquids. In recent years, it has been used as a cleaning agent for silicon wafers and a cleaning agent for semiconductor processes. The use in the electronic industry field has increased, and along with this, high-purity quality in which various impurities in hydrogen peroxide water are reduced as much as possible is required.

Generally, hydrogen peroxide is currently mainly produced by the anthraquinone method. The production method is as follows. First, an anthraquinone derivative such as 2-alkylanthraquinone is hydrogenated to anthrahydroquinone in the presence of a hydrogenation catalyst in a water-insoluble solvent, and the catalyst is removed, followed by oxidation with air. −
This is a method of regenerating the alkyl anthraquinone and extracting the hydrogen peroxide produced at this time with water to obtain a hydrogen peroxide-containing aqueous solution. This method is called the anthraquinone autoxidation method.

The hydrogen peroxide solution produced by this method contains Al, Fe, Cr, N due to the material of the equipment.
In addition to inorganic ion / compound impurities such as a and Si, organic impurities caused by the manufacturing method are included. Therefore, the hydrogen peroxide solution is subjected to an operation of removing these impurities and purifying it to a higher purity, depending on the quality requirements for use.

Conventionally, as a method of removing organic impurities contained in hydrogen peroxide water, a method of treating with a synthetic adsorbent composed of a porous styrene-divinylbenzene cross-linked copolymer (Japanese Patent Publication No. 46-26095). Gazette) or a method of removing it using a halogen-containing porous resin (JP-A-63-
No. 156004) and the like are known. However, these styrene-divinylbenzene crosslinked copolymers having no ion exchange ability and halogen-containing porous resins have a problem that the removal efficiency of organic impurities is not necessarily high because of their high hydrophobicity. For this reason, when using a hydrophobic synthetic adsorbent having no ion exchange capacity, the synthetic adsorbent is treated in advance with a polar solvent such as alcohol or acetone to increase its affinity with water. Was used, but in addition to being complicated to operate,
There have been problems such as the use of a solvent such as alcohol or acetone and pure water required for cleaning the same, and a reduction in economic efficiency due to secondary treatment of cleaning wastewater.

For this reason, Japanese Patent Application Laid-Open No. 10-114507 discloses a hydrogen peroxide solution in which a chloroalkyl group or an alkyl hydroxide group is introduced into a porous resin having no ion exchange capacity to make the resin hydrophilic. A purification method is proposed. This method does not require pretreatment for hydrophilization,
Further, although the floating of the resin is improved, the ability to remove organic impurities and the like was not always sufficient.

Under these circumstances, the inventors of the present invention have conducted extensive studies to solve the above-mentioned problems. As a result, hydrogen peroxide solution containing an organic compound-based impurity was used to By contacting the silica gel filler having at least one group selected from the group consisting of 4 to 20 alkyl groups, or (ii) the graft-modified ion-exchange fiber or its cloth, to a surprising degree, It has been found that the organic compound-based impurities contained in the hydrogen oxide water can be removed, and the present invention has been completed.

[0008]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for purifying hydrogen peroxide water containing organic compound impurities to produce highly pure hydrogen peroxide water from which organic compound impurities are removed as much as possible. .

[0009]

SUMMARY OF THE INVENTION A method for producing purified hydrogen peroxide water according to the present invention comprises:
Peroxidation by contacting with a silica gel filler having at least one group selected from the group consisting of alkyl groups having 4 to 20 carbon atoms on the surface of the silica gel carrier, or (ii) graft-modified ion exchange fiber or its cloth It is characterized in that organic compound impurities contained in hydrogen water are removed.

In the method for producing purified hydrogen peroxide water according to the present invention, hydrogen peroxide water containing organic compound-based impurities is added to
A flocculant is added, solid impurities contained in the hydrogen peroxide solution are filtered with a precision filter, and the resulting hydrogen peroxide solution is (i) composed of an alkyl group having 4 to 20 carbon atoms on the surface of the silica gel carrier. To remove the organic compound impurities contained in the hydrogen peroxide solution by contacting it with a silica gel filler having at least one group selected from the group, or (ii) a graft-modified ion exchange fiber or a cloth thereof. It has a feature.

In the method for producing purified hydrogen peroxide water according to the present invention, a flocculating agent is added to hydrogen peroxide water containing organic compound-based impurities to remove solid impurities contained in the hydrogen peroxide water with a precision filter. After filtration with, the hydrogen peroxide solution obtained is (i) first contacted with H ⁺ cation exchange resin, and (ii) then (ii-1) the surface of the silica gel carrier is composed of an alkyl group having 4 to 20 carbon atoms. A silica gel filler having at least one group selected from the group, or (ii-2) a graft-modified ion exchange fiber or a cloth thereof is brought into contact, and further, (i
ii) It is characterized in that the impurities contained in the hydrogen peroxide solution are removed by bringing it into contact with a carbonate ion type or hydrogen carbonate ion type anion exchange resin, and then contacting with (iv) H ⁺ cation exchange resin.

The graft-modified ion-exchange fiber was obtained by irradiating polypropylene non-woven fabric with radiation, graft-polymerizing glycidyl methacrylate, opening the epoxy ring, and introducing a sulfonic acid group with sodium sulfite to obtain a strong acidity. A weakly basic anion obtained by irradiating a cation exchange fiber or polypropylene non-woven fabric with radiation, graft-polymerizing glycidyl methacrylate, then opening the epoxy ring and introducing a tertiary amine group with diethanolamine. Exchange fibers are preferred.

Hydrogen peroxide The concentration of hydrogen peroxide in water is 4
It is preferably from 0 to 70% by weight. The aggregating agent is phosphoric acid, polyphosphoric acid, sodium acid pyrophosphate,
It is preferably at least one phosphorus compound selected from the group consisting of aminotri (methylenephosphonic acid) and its salts, ethylenediaminetetra (methylenephosphonic acid) and its salts.

The average pore size of the precision filter is 0.2 μm
The following is preferable.

[0015]

DETAILED DESCRIPTION OF THE INVENTION The method for purifying purified hydrogen peroxide solution according to the present invention will be specifically described below. In addition, in this specification, ppm shows weight ppm. As the raw hydrogen peroxide solution used in the present invention, anthraquinone autoxidation method, direct synthesis method of directly reacting hydrogen and oxygen,
A product manufactured by a known manufacturing method is used.

This hydrogen peroxide solution usually contains organic compound impurities in the order of several ppb to several tens of ppm. This organic compound-based impurity is derived from anthraquinone used in the anthraquinone autoxidation method of the production method, its solvent, and the like. In the present invention, a hydrogen peroxide solution containing such an organic compound-based impurity is used as a silica gel filler having (i) at least one group selected from the group consisting of an alkyl group having 4 to 20 carbon atoms on the surface of a silica gel carrier. , Or
(ii) It is characterized in that the organic compound-based impurities contained in the hydrogen peroxide solution are removed by bringing the graft-modified ion-exchange fiber or its cloth-like material into contact. (1) Pretreatment In the production of purified hydrogen peroxide water according to the present invention, after adding an aggregating agent to the hydrogen peroxide water in advance, it is filtered with a precision filter to remove silicon oxide impurities contained in the hydrogen peroxide water. May be removed. It is not always necessary to perform such pretreatment, and hydrogen peroxide solution containing silicon oxide impurities may be brought into contact with the ion-exchange fiber or the cloth-like material described later without pretreatment.

At this time, it is desirable that the concentration of hydrogen peroxide in the hydrogen peroxide water is 40 to 70% by weight, preferably 45 to 65% by weight. When such a hydrogen peroxide concentration is used, In particular, silicon oxide impurities can be removed efficiently. The aggregating agent is added for aggregating with insoluble silicon oxide-based impurities in hydrogen peroxide water to enable filtration, and usually a phosphorus-based compound is used. As the phosphorus compound, at least one phosphorus compound selected from the group consisting of phosphoric acid, polyphosphoric acid, sodium acid pyrophosphate, aminotri (methylenephosphonic acid) and its salts, ethylenediaminetetra (methylenephosphonic acid) and its salts. It is preferably used.

Such a phosphorus-based compound has a ratio (Si / P atomic ratio) of not more than 0.0001, preferably, to a silica-based impurity (converted to silicon atom) contained in hydrogen peroxide water in terms of phosphorus atom. It is desirable to add it so as to be 0.00001 to 0.0001. After adding the phosphorus-based compound, it is usually desirable to age it for 1 day or longer, preferably 1 to 5 days. Aging may be carried out under stirring condition or non-stirring condition. By this aging, the insoluble silicon oxide-based impurity components aggregate to the extent that they can be filtered.
grow up.

The insoluble silicon oxide-based impurity component is filtered by a cartridge type precision filter. The precision filter used in the present invention has an average pore size of 0.2 μm or less, preferably 0.1 μm or less.
The material constituting such a precision filter is not particularly limited as long as it does not contain a component that dissolves in hydrogen peroxide solution, but it is a fluororesin, a polyolefin resin such as polyethylene or polypropylene, a polysulfone resin, or a polycarbonate. A resin or the like is used. Of these, those made of fluororesin are particularly preferable.

(2) Treatment with silica gel filler or ion exchange fiber After the above-mentioned pre-treatment, if necessary, in the present invention, hydrogen peroxide solution containing an organic compound-based impurity is applied to the surface of the silica gel carrier with 4 to 20 carbon atoms. The silica gel filler or ion-exchange fiber having at least one group selected from the group consisting of alkyl groups, or the cloth thereof is brought into contact.

(I) Silica gel filler As the silica gel filler, a silica gel filler having at least one group selected from the group consisting of alkyl groups having 4 to 20 carbon atoms on the surface of the silica gel carrier is used.
The silica gel filler may have two or more kinds of alkyl groups having 4 to 20 carbon atoms. Examples of the alkyl group having 4 to 20 carbon atoms include butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group and octadecyl group. Particularly, those having an alkyl group having 8 to 18 carbon atoms are preferable.

As the silica gel carrier, a packing material usually used for chromatography can be used. The physical properties of the silica gel carrier are not particularly limited, but the particle size is 1
To 1000 μm, more preferably 2 to 50 μm, pore size 10000 Å or less, more preferably ^{2 to} 1000 Å, specific surface area 1 to 1000 m ² / g, more preferably 10 to 60 μm.
Those of 0 m ² / g can be preferably used.

The silica gel filler used in the present invention is
The surface of such a silica gel carrier is chemically modified so as to have at least one selected from the group consisting of alkyl groups having 4 to 20 carbon atoms. Specifically, the silica gel carrier and the chemical modifier are: Methanol as needed,
It is obtained by reacting in the presence of a solvent such as toluene. Such a chemical modifier has 4 to 2 carbon atoms.
A silane coupling agent containing 0 alkyl groups is used.

The reaction between the silane coupling agent and silica gel is usually a dehydrochlorination reaction in the presence of a catalyst such as pyridine,
Alternatively, the surface silanol group is replaced with an alkyl group having 4 to 20 carbon atoms by a dealcoholization reaction without a catalyst. (ii) Ion exchange fiber Specifically, as the ion exchange fiber, a strongly acidic cation exchange fiber and a weakly basic anion exchange fiber are used, and a strongly acidic cation exchange fiber and a weakly basic anion exchange fiber are used in combination. May be.

Strongly acidic cation exchange fibers and weakly basic anion exchange fibers are used as the ion exchange fibers. Such an ion exchange fiber may be used alone, or may be brought into contact with a weakly acidic anion exchange fiber after contacting a hydrogen peroxide solution with a strongly acidic cation exchange fiber,
Alternatively, the hydrogen peroxide solution may be contacted with the weakly basic anion exchange fiber and then contacted with the strongly acidic cation exchange fiber.

The strongly acidic cation exchange fiber is usually obtained by irradiating a polypropylene nonwoven fabric with radiation, graft-polymerizing glycidyl methacrylate, opening the epoxy ring and introducing a sulfonic acid group with sodium sulfite. Those obtained are preferably used. The amount of sulfonic acid group is preferably 1 to 3 meq / g, preferably 2 to 3 meq / g.

The weakly basic anion-exchange fiber is obtained by irradiating a polypropylene non-woven fabric with radiation, graft-polymerizing glycidyl methacrylate, and then opening the epoxy ring to introduce a tertiary amine group with diethanolamine. Those obtained are preferably used. The amount of the tertiary amine group is 1 to 6 meq / g, preferably 2 to 3 meq / g.

By using a specific silica gel filler or ion exchange fiber such as these, it is possible to remove organic compound impurities to a very high degree of purity. Although the reason why the organic compound impurities can be removed by such a silica gel filler or ion exchange fiber is not always clear, an organic group may be added to the alkyl group having 4 to 20 carbon atoms on the surface of the silica gel filler or the graft chain on the surface of the ion exchange fiber. It is presumed that the compound impurities are captured and removed (such adsorption is referred to as tentacle adsorption). When such a silica gel filler or ion exchange fiber is used, organic compound impurities can be removed more efficiently than in the case where a conventional adsorption resin is used.

Such silica gel filler or ion exchange fiber is usually packed in a packed column and used for treating hydrogen peroxide solution. The ion-exchange fiber is usually used as a cloth-like material, and is usually processed into a shape that can easily come into contact with hydrogen peroxide solution, and then stored in a column for storing the ion-exchange fiber for use. The cloth-like material may be a non-woven fabric or a woven fabric.

For example, as shown in FIG. 1, the ion-exchange fibers are punched out and laminated to form a plurality of sheets (for example, 20 to 200 sheets, preferably 50 to 150 sheets) or a bellows as shown in FIG. To be folded into a shape (pleated fold structure), or, as shown in FIG. 3, flat plate ion-exchange fibers and bellows-folded (pleat fold structure) ion-exchange fibers were alternately superposed. Used as a laminated structure. In the laminated structure shown in FIG. 3, the ion-exchange fiber having the pleat-fold structure and the adhesive portion of the flat plate ion-exchange fiber are fused and fixed.

In the laminated structure shown in FIG. 1, the same ion exchange fibers may be laminated or different ion exchange fibers may be laminated. For example, as shown in FIG. Alternatively, the strongly acidic ion exchange fibers 1 and the weakly basic ion exchange fibers 2 may be alternately laminated. In the laminated structure shown in FIG. 3, the flat plate ion-exchange fiber 1 and the pleat-folded ion-exchange fiber 2 may be made of the same material or different materials. For example, the ion exchange fiber 3 may be a strongly acidic ion exchange fiber, and the pleated folded ion exchange fiber 4 may be a weakly basic ion exchange fiber.

When the hydrogen peroxide solution is brought into contact with such an ion-exchange fiber, the fold line of the ion-exchange fiber may be either orthogonal or parallel flow type. Also,
In the ion exchange fiber 5 folded back in a bellows shape as shown in FIG. 4, a separator 6 having a pleated fold structure may be inserted into the hydrogen peroxide solution flow path. The separator 4 may be a perforated plate having a large number of small holes (not shown) or a net. In the case of the ion exchange fiber shown in FIG. 4 as well, the hydrogen peroxide solution is passed so as to be orthogonal or parallel to the folds of the ion exchange fiber.

In the present invention, the contact between the hydrogen peroxide solution containing an organic compound-based impurity and the silica gel filler or the ion exchange fiber is carried out by a continuous liquid flow system, and hydrogen peroxide is passed through the filler layer or the fiber layer. Water is space velocity (SV)
Is 0.1 to 2 Hr ^-1 , preferably 0.5 to 1.5 Hr
It is preferably carried out in the range of ^-1 . In the present invention, a silica gel filler and an ion exchange fiber may be used in combination. For example, a column filled with a silica gel filler is passed through a hydrogen peroxide solution, and then the column containing the ion exchange fiber is treated with a filter. Hydrogen peroxide water may be passed through, or vice versa.
The hydrogen peroxide solution may be passed through the column containing the ion-exchange fibers, and then the hydrogen peroxide solution may be passed through the column filled with silica gel.

In the treatment using the silica gel filler or the ion-exchange fiber as in the present invention, the hydrogen peroxide solution is not decomposed, so that decomposition gas and safety measures are hardly necessary. (3) Other treatment After hydrogen peroxide solution is contacted with ion-exchange fiber or its cloth to reduce organic compound-based impurities, further known strongly acidic cation-exchange resin having sulfonic acid group and hydrogen carbonate ion type It may be contacted with a strongly basic anion exchange resin. When the ion-exchange fiber and a known anion and cation exchange resin are combined, the order of passing the liquid is appropriately selected according to the intended components of the purified hydrogen peroxide solution.

As a combination of anion and cation exchange resin, it is desirable to pass cation exchange resin, ion exchange fiber or silica gel, anion exchange resin and cation exchange resin in this order, and especially H ⁺ type cation exchange resin and ion exchange resin. By passing through fibers or silica gel, F-type anion exchange resin, carbonate ion type or hydrogen carbonate ion type anion exchange resin, and H ⁺ type cation exchange resin in this order, it is possible to remove extremely small amounts of impurity components other than organic compound impurities. You can

The hydrogen peroxide solution thus obtained may be further adjusted with ultrapure water to adjust the hydrogen peroxide concentration, if necessary. The ultrapure water used is preferably one from which impurities are highly removed. By the above operation, highly purified purified hydrogen peroxide water from which organic compound impurities are highly removed can be produced.

Further, in the present invention, hydrogen peroxide water which has been previously purified to a high degree to remove other metal ion impurities and the like by a known method may be used, and the high purity obtained by the production method of the present invention may be used. Other metal ion impurities and the like may be removed from the hydrogen peroxide solution by using a known method. Known methods for removing other metal ion impurities and the like,
Examples include a method using distillation, an ultrafiltration membrane, an adsorption resin, a chelate resin and the like. By combining these methods with the method of the present invention, not only organic compound-based impurities,
Other metal ion impurities and the like can be highly removed.

[0038]

According to the present invention, organic compound-based impurities contained in hydrogen peroxide water can be effectively removed,
The content of organic compound impurities is extremely low, that is,
It is possible to produce high-quality hydrogen peroxide water with an extremely small amount of TOC. Further, according to the method of the present invention, reproducibility of removal of organic compound impurities is stable and stable.

[0039]

EXAMPLES The present invention will be described below with reference to examples, but the present invention is not limited to these examples. The amount of organic compound impurities was evaluated by measuring the TOC amount. The TOC (total organic carbon) was measured by the combustion method. The TOC concentration in ppm is weight ppm.

[0040]

Example 1 Hydrogen peroxide solution containing 36 ppm of TOC amount of organic compound impurities in an easy chromatographic cartridge (column, Kurabo Industries Co., Ltd.) filled with 0.4 g of silica gel filler modified with octadecyl group 50 ml of (hydrogen peroxide 31% by weight) was passed.

The TOC in the obtained treating solution was lowered to 5 ppm.

[0042]

Example 2 A hydrogen peroxide solution containing an organic compound-based impurity of 36 ppm as an TOC amount in an easy chromatographic cartridge (column, Kurabo Industries Co., Ltd.) filled with 0.4 g of a silica gel filler modified with an octyl group. 50 ml of (hydrogen peroxide 31% by weight) was passed.

The TOC in the obtained treating solution was lowered to 15 ppm.

[0044]

[Comparative Example 1] An organic compound-based impurity was added to an Easy Chromatography Cartridge (column, Kurabo Industries Co., Ltd.) filled with 0.4 g of silica gel filler that was not chemically modified.
500 ml of hydrogen peroxide solution (hydrogen peroxide 31% by weight) containing 36 ppm of C was passed.

The TOC in the obtained treatment liquid did not change.

[0046]

[Example 3] Strongly acidic cation exchange fiber manufactured by EBARA CORPORATION,
Weakly basic anion exchange fibers were punched out to a diameter of 24 mm and placed in a vinyl chloride column, alternating with 100
I stacked them. In this column, at a space velocity of SV = ¹ Hr ^-1 , T
Hydrogen peroxide water containing 36 ppm as OC (hydrogen peroxide 3
(1% by weight) was continuously passed to bring it into contact with anion exchange fibers for purification.

The TOC of the hydrogen peroxide solution after the treatment had dropped to 5 ppm.

[0048]

[Comparative Example 2] A 25 mm diameter filter manufactured by Sumitomo Electric Co., Ltd. (material: polypropylene, having no ion exchange capacity, 10 µm pore size) was used as a spring made of 100 vinyl chloride columns. The column was continuously passed with hydrogen peroxide solution (31% by weight of hydrogen peroxide) containing 36 ppm of TOC at a space velocity of SV = ¹ Hr ⁻¹ to bring it into contact with the anion exchange fiber,
Purified.

The TOC of the hydrogen peroxide solution after the treatment was unchanged.

[Brief description of drawings]

FIG. 1 is a schematic view showing one embodiment of ion exchange fibers used in a production method according to the present invention.

FIG. 2 is a schematic view showing another embodiment of the ion exchange fiber used in the production method according to the present invention.

FIG. 3 is a schematic view showing another embodiment of the ion exchange fiber used in the production method according to the present invention.

FIG. 4 is a schematic view showing another embodiment of the ion exchange fiber used in the production method according to the present invention.

[Explanation of symbols]

1 ・ ・ Strongly acidic ion exchange fiber 2 ・ ・ Weakly basic ion-exchange fiber 3 ... Flat ion-exchange fiber 4 ・ ・ Pleated folding structure ion exchange fiber 5 ... Ion exchange fiber 6 ... Separator

─────────────────────────────────────────────────── ─── Continued Front Page (51) Int.Cl. ⁷ Identification Code FI Theme Coat (Reference) B01J 20/26 B01J 20/26 G 20/28 20/28 AZ 39/04 39/04 H 41/04 41/04 H 47/12 47/12 E (72) Inventor Kenichi Midorikawa 10-2 Otake Shinta, Imozawa, Aoba-ku, Sendai City, Miyagi Prefecture F-term (reference), Mitoku Chemical Industry Co., Ltd. 4D006 GA07 KA01 KA71 KB12 KB13 MA22 MB11 MC22 MC23 MC28 MC49 MC62 PA01 PB20 4D015 BA01 BA19 BB05 CA20 DB41 DB46 FA01 FA17 FA22 4D017 AA13 BA03 CA04 CB01 CB03 CB05 DA01 4G066 AA30B AC13B AE05 AE10 BA02 BA03 BA05 BA07 BA16 DA10

Claims (7)

[Claims] 1. A hydrogen peroxide solution containing an organic compound-based impurity, (i) a silica gel filler having (i) at least one group selected from the group consisting of alkyl groups having 4 to 20 carbon atoms on the surface of the silica gel carrier, or (ii) A method for producing purified hydrogen peroxide solution, which comprises removing organic compound-based impurities contained in hydrogen peroxide solution by contacting with graft-modified ion-exchange fiber or its cloth-like material. 2. A hydrogen peroxide solution containing an organic compound-based impurity is added with a flocculant, and solid impurities contained in the hydrogen peroxide solution are filtered with a precision filter. (i) Contact with a silica gel filler having at least one group selected from the group consisting of alkyl groups having 4 to 20 carbon atoms on the surface of the silica gel carrier, or (ii) graft-modified ion exchange fiber or its cloth-like material. A method for producing purified hydrogen peroxide water, which comprises removing organic compound-based impurities contained in the hydrogen peroxide water by means of. 3. A hydrogen peroxide solution containing an organic compound-based impurity is added with an aggregating agent and solid impurities contained in the hydrogen peroxide solution are filtered with a precision filter. , (I) first contacting with H ⁺ cation exchange resin, (ii) then (ii-1) silica gel packing having at least one group selected from the group consisting of alkyl groups having 4 to 20 carbon atoms on the surface of the silica gel carrier. Agent, or (ii-
2) Contacting the graft-modified ion exchange fiber or its cloth-like material, further contacting with (iii) carbonate ion type or hydrogen carbonate ion type anion exchange resin, and then contacting with (iv) H ⁺ cation exchange resin To remove impurities contained in the hydrogen peroxide solution. 4. A graft-modified ion exchange fiber is obtained by irradiating a polypropylene non-woven fabric with radiation, graft-polymerizing glycidyl methacrylate, opening the epoxy ring and introducing a sulfonic acid group with sodium sulfite. A weakly basic cation exchange fiber obtained by irradiating polypropylene non-woven fabric with radiation or irradiation with glycidyl methacrylate, graft-polymerizing glycidyl methacrylate, opening the epoxy ring and introducing a tertiary amine group with diethanolamine. It is an anion exchange fiber, The manufacturing method of the purified hydrogen peroxide solution in any one of Claims 1-3 characterized by the above-mentioned. 5. The concentration of hydrogen peroxide in hydrogen peroxide water is 40.
% To 70% by weight, The method for producing purified hydrogen peroxide water according to claim 1. 6. The aggregating agent is at least one selected from the group consisting of phosphoric acid, polyphosphoric acid, sodium acid pyrophosphate, aminotri (methylenephosphonic acid) and its salts, ethylenediaminetetra (methylenephosphonic acid) and its salts. The method for producing purified hydrogen peroxide water according to claim 2 or 3, wherein the method is a phosphorus-based compound. 7. The method for producing purified hydrogen peroxide solution according to claim 2 or 3, wherein the precision filter has an average pore diameter of 0.2 µm or less.