JP2003016621A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JP2003016621A JP2003016621A JP2001200380A JP2001200380A JP2003016621A JP 2003016621 A JP2003016621 A JP 2003016621A JP 2001200380 A JP2001200380 A JP 2001200380A JP 2001200380 A JP2001200380 A JP 2001200380A JP 2003016621 A JP2003016621 A JP 2003016621A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- magnetic recording
- backing layer
- soft magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁気記録媒体、特
に磁気記録媒体面に対して垂直な方向に磁化を記録する
いわゆる垂直磁気記録媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium, and more particularly to a so-called perpendicular magnetic recording medium which records magnetization in a direction perpendicular to the surface of the magnetic recording medium.
【０００２】[0002]
【従来の技術】ハードディスク等の磁気記録媒体におい
て、面記録密度の向上を図る為には、線記録密度および
トラック記録密度の両方か、あるいはどちらか一方を向
上させる必要がある。2. Description of the Related Art In a magnetic recording medium such as a hard disk, in order to improve the areal recording density, it is necessary to improve either or both of the linear recording density and the track recording density.
【０００３】線記録密度を飛躍的に向上させるための有
効な手段として、いわゆる垂直磁気記録方式が従来より
提案されている。この記録方式に用いられる記録媒体
は、一般に、非磁性基板の上に形成された軟磁性裏打ち
層と、この上に形成された基板鉛直方向に磁気異方性を
有する垂直磁気記録層を有する構造をなしている。A so-called perpendicular magnetic recording system has been conventionally proposed as an effective means for dramatically improving the linear recording density. A recording medium used in this recording system generally has a structure having a soft magnetic backing layer formed on a non-magnetic substrate and a perpendicular magnetic recording layer formed on the soft magnetic backing layer having magnetic anisotropy in the vertical direction of the substrate. Is doing.
【０００４】一方、トラック密度を向上させるための有
効な記録媒体構造として、磁気トラックが磁気的に分離
された、いわゆるディスクリートトラック（Discrete t
rack）型と呼ばれる媒体構造がある（特開昭５６−１１
９９３４号公報、特開平２−２０１７３０号公報な
ど）。On the other hand, as an effective recording medium structure for improving the track density, a so-called discrete track in which magnetic tracks are magnetically separated.
There is a medium structure called a rack type (Japanese Patent Laid-Open No. 56-11).
9934, JP-A-2-201730, etc.).
【０００５】ディスクリートトラック型の垂直記録媒体
においては、リソグラフィ技術等によって、軟磁性裏打
ち層と垂直磁気記録層が積層された垂直二層磁気記録媒
体のデータトラックとデータトラックとの間（データト
ラック間）を二層まとめてエッチングして凹状の欠如部
を設けるように形成したものや（例えば、特開平４−３
１０６１２１号公報）、垂直磁気記録層のみをエッチン
グして除去して凹状の欠如部を形成したもの（例えば、
特開平７−１２９９５３号公報）がある。In a discrete track type perpendicular recording medium, between a data track and a data track (between data tracks) of a perpendicular two-layer magnetic recording medium in which a soft magnetic backing layer and a perpendicular magnetic recording layer are laminated by a lithography technique or the like. ) Are collectively formed by etching so as to form a concave portion (for example, JP-A-4-3).
No. 106121), only the perpendicular magnetic recording layer is removed by etching to form a recessed portion (for example,
JP-A-7-129953).
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、上記の
リソグラフィ技術等によって磁性層（垂直磁気記録層）
をエッチングして記録再生が行われるデータトラック間
（ガードバンド部）に凹状の欠如部を設けたり、サーボ
信号部分（いわゆるサーボ領域）にサーボ信号付与のた
めの凹状の欠如部（サーボ信号パターンに応じた凹状欠
如部）を設けることは、直接、垂直磁気記録層にエッチ
ングによるダメージを与える。そのため、垂直磁気記録
層の磁気特性が劣化することがある。However, the magnetic layer (perpendicular magnetic recording layer) is formed by the above-mentioned lithography technique or the like.
A concave cutout is provided between the data tracks (guard band) where recording and reproduction are performed by etching, and a concave cutout (servo signal pattern is added to the servo signal part (so-called servo area) for giving a servo signal. Providing a corresponding recessed portion directly damages the perpendicular magnetic recording layer by etching. Therefore, the magnetic characteristics of the perpendicular magnetic recording layer may deteriorate.
【０００７】また、凹状の欠如部には、一般に、パーテ
ィクル等のゴミが溜まることを防ぐため、および、磁気
ヘッドの浮上を安定させるためにＳｉＯ2等の非磁性材
料を埋め込んだ後、ＣＭＰ（chemical mechanical poli
shing:化学的機械的研磨）等により垂直磁気記録層を含
む表面を平滑化あるいは平坦化することが行われる。こ
の研磨時に、垂直磁気記録層のダメージが生じ、磁気特
性が劣化するおそれがある。In general, in order to prevent dust such as particles from accumulating in the concave portion and to stabilize the floating of the magnetic head, a non-magnetic material such as SiO 2 is embedded and then CMP ( chemical mechanical poli
The surface including the perpendicular magnetic recording layer is smoothed or flattened by shing (chemical mechanical polishing) or the like. During this polishing, the perpendicular magnetic recording layer may be damaged and the magnetic characteristics may be deteriorated.
【０００８】また、平滑化、平坦化を行っても磁性材料
と非磁性材料との物性の違いにより、ディッシング（へ
こみ）等により媒体表面に凹凸が残ってしまい、その上
にダイアモンドライクカーボン等の保護膜やパーフルオ
ロポリエーテル等の潤滑膜の形成が均一にできないこと
がある。Even if smoothing or flattening is performed, due to the difference in the physical properties of the magnetic material and the non-magnetic material, irregularities remain on the medium surface due to dishing (dents) and the like, and diamond-like carbon and the like are left on it. The protective film and the lubricating film such as perfluoropolyether may not be formed uniformly.
【０００９】このような実状のもとに本発明は創案され
たものであり、その目的は、サイドクロストークの低減
化（cross write/cross read の低減化）、およびトラ
ッキング精度の向上を図り面記録密度の向上を図ること
はもとより、垂直磁気記録層の製造面からの磁気特性の
劣化を防止することができるとともに、媒体表面の平滑
性を向上させることができる新規な媒体構成を提供する
ことにある。The present invention was devised based on such an actual situation, and its purpose is to reduce side crosstalk (reduction of cross write / cross read) and improve tracking accuracy. To provide a novel medium structure capable of preventing the deterioration of the magnetic characteristics from the manufacturing side of the perpendicular magnetic recording layer as well as improving the recording density and improving the smoothness of the medium surface. It is in.
【００１０】[0010]
【課題を解決するための手段】このような課題を解決す
るために、本発明は、非磁性基板上に、軟磁性裏打ち層
と、垂直磁気記録層とを備える磁気記録媒体であって、
該媒体の軟磁性裏打ち層は、記録再生が行われるデータ
トラックとデータトラックの間に位置する領域、または
サーボ信号が記録される領域にディスクリート作用を発
揮させるための欠如凹部を有するとともに、その凹部に
は非磁性材が充填されて非磁性層が形成されており、前
記垂直磁気記録層は、少なくとも基板の鉛直方向に磁気
異方性を有するとともに、意図的に形成された欠如凹部
が存在しない平面膜として構成される。In order to solve such a problem, the present invention provides a magnetic recording medium comprising a soft magnetic backing layer and a perpendicular magnetic recording layer on a non-magnetic substrate.
The soft magnetic backing layer of the medium has a recessed recess for exhibiting a discrete function in a region located between data tracks on which recording / reproduction is performed or a region where a servo signal is recorded, and the recess Is filled with a non-magnetic material to form a non-magnetic layer, and the perpendicular magnetic recording layer has magnetic anisotropy at least in the vertical direction of the substrate and has no intentionally formed recessed recess. It is configured as a flat film.
【００１１】また、本発明の好ましい態様として、前記
欠如凹部は、それが形成される場所において、軟磁性裏
打ち層の厚さ方向の一部を欠如させるように形成され
る。また、本発明の好ましい態様として、前記欠如凹部
は、それが形成される場所において、軟磁性裏打ち層の
厚さ方向の実質的全部を欠如させるように形成される。In a preferred embodiment of the present invention, the recessed recess is formed so that a part of the soft magnetic backing layer in the thickness direction is omitted at the place where the recessed recess is formed. Further, as a preferred embodiment of the present invention, the recessed recess is formed so that substantially all of the soft magnetic backing layer in the thickness direction is omitted at the place where it is formed.
【００１２】また、本発明は、非磁性基板上に、軟磁性
裏打ち層と、垂直磁気記録層とを備える磁気記録媒体で
あって、該媒体の軟磁性裏打ち層は、記録再生が行われ
るデータトラックとデータトラックの間に位置する領
域、およびサーボ信号が記録される領域にディスクリー
ト作用を発揮させるための欠如凹部を有するとともに、
その凹部には非磁性材が充填されて非磁性層が形成され
ており、前記垂直磁気記録層は、少なくとも基板の鉛直
方向に磁気異方性を有するとともに、意図的に形成され
た欠如凹部が存在しない平面膜として構成される。Further, the present invention is a magnetic recording medium comprising a soft magnetic backing layer and a perpendicular magnetic recording layer on a non-magnetic substrate, wherein the soft magnetic backing layer of the medium is used for recording and reproducing data. In addition to having a recessed recess for exhibiting a discrete effect in the area located between the track and the data track and the area where the servo signal is recorded,
A non-magnetic layer is formed by filling the recess with a non-magnetic material, and the perpendicular magnetic recording layer has magnetic anisotropy at least in the vertical direction of the substrate and has a intentionally formed recess. It is constructed as a planar film that does not exist.
【００１３】[0013]
【発明の実施の形態】以下、本発明の具体的実施の形態
について詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Specific embodiments of the present invention will be described in detail below.
【００１４】図１（Ａ）には本発明のディスク状の磁気
記録媒体１の全体形状を表す概略平面図が示され、図１
（Ｂ）には、図１（Ａ）の四角で囲まれた微小部分１０
０の部分拡大概略図が示される。特に、図１（Ｂ）にお
いては、サーボ信号領域９０およびデータ領域８０（記
録再生のためのデータトラック群）の位置を概念的に現
すために、本発明において、これらの上に被着されてい
る垂直磁気記録層は除かれた状態で描かれている。図２
（Ａ）および（Ｂ）には、それぞれ、本発明の磁気記録
媒体の好適な実施の形態を概念的に示す断面図が示さ
れ、これらの図は、図１（Ｂ）のα−α矢視断面図に実
質的に相当する。図３（Ａ）〜（Ｈ）は、本発明の磁気
記録媒体の好適な製造プロセスの一例を経時的に説明す
るための概略断面図である。FIG. 1A is a schematic plan view showing the entire shape of the disk-shaped magnetic recording medium 1 of the present invention.
FIG. 1B shows a minute portion 10 surrounded by a square in FIG.
A partially enlarged schematic view of 0 is shown. In particular, in FIG. 1 (B), in order to conceptually represent the positions of the servo signal area 90 and the data area 80 (data track group for recording / reproducing), in the present invention, they are attached on these. The perpendicular magnetic recording layer present is drawn in a state of being removed. Figure 2
1 (A) and 1 (B) are respectively sectional views conceptually showing a preferred embodiment of the magnetic recording medium of the present invention, and these drawings show the arrows α-α in FIG. 1 (B). Substantially corresponds to the cross-sectional view. 3A to 3H are schematic cross-sectional views for explaining an example of a preferable manufacturing process of the magnetic recording medium of the present invention over time.
【００１５】図１（Ａ）において、図示されてはいない
がディスク基板上には記録再生のための複数のデータト
ラック群が同心円状に配置・形成されている。また、デ
ィスクの中心から外方に向けて、放射状にサーボ信号領
域（図面で線状に描かれている箇所）が形成されてい
る。Although not shown in FIG. 1A, a plurality of data track groups for recording / reproducing are concentrically arranged / formed on the disk substrate. Further, servo signal regions (portions drawn linearly in the drawing) are formed radially from the center of the disk toward the outside.
【００１６】図２（Ａ）、（Ｂ）に示されるように、本
発明の磁気記録媒体１は、非磁性基板２上に、軟磁性裏
打ち層１０と、垂直磁気記録層２０とを備える磁気記録
媒体である。As shown in FIGS. 2A and 2B, the magnetic recording medium 1 of the present invention is a magnetic recording medium having a magnetically soft underlayer 10 and a perpendicular magnetic recording layer 20 on a non-magnetic substrate 2. It is a recording medium.
【００１７】本発明における軟磁性裏打ち層１０は、記
録再生が行われるデータトラック２２とデータトラック
２２の間に位置する箇所（いわゆるガードバンド部）
に、隣接するデータトラックが磁気的に分離されるごと
くディスクリート作用を発揮させるための欠如凹部１０
ａを備えるとともに、その凹部１０ａには非磁性材が充
填され非磁性層１５が形成されている。The soft magnetic backing layer 10 in the present invention is a portion (so-called guard band portion) located between the data tracks 22 on which recording / reproduction is performed.
In addition, the lacking recess 10 for exerting a discrete action as if the adjacent data tracks are magnetically separated.
The concave portion 10a is provided with a nonmagnetic material to form a nonmagnetic layer 15.
【００１８】なお、ディスクリート作用を発揮させるた
めの欠如凹部１０ａは、上記のデータトラック間のみな
らず、さらに、サーボ信号が記録される領域（図１のサ
ーボ信号領域９０）において、その信号が機能する形態
に設けてもよい。すなわち、サーボ信号領域９０におい
てサーボ信号パターンに応じた欠如凹が形成されるよう
にしてもよい。サーボ信号パターンは、通常、直流磁化
した後に用いられる。The recessed concave portion 10a for exhibiting the discrete function is not only provided between the data tracks described above, but also in the area where the servo signal is recorded (servo signal area 90 in FIG. 1), the signal functions. You may provide in the form. That is, a recessed portion corresponding to the servo signal pattern may be formed in the servo signal area 90. The servo signal pattern is usually used after being DC magnetized.
【００１９】図２（Ａ）、（Ｂ）に示されるように、本
発明における軟磁性裏打ち層１０および非磁性層１５の
上に形成される垂直磁気記録層２０は、少なくとも基板
２の鉛直方向に磁気異方性を有するとともに、意図的に
形成された欠如凹部が存在しない平面膜として構成され
る。ここで、「意図的に形成された欠如凹部が存在しな
い」とは、従来公知の技術である特開平７−１２９９５
３号公報に開示されているごとく、例えば、リソグラフ
ィー法等によって、意識的に磁性層を欠いて凹部を形成
したものを排除する趣旨である。それゆえ、垂直磁気記
録層２０の成膜により生じる、例えば、ナノメートル
（ｎｍ）単位の表面凹凸部は意図的に形成されたもので
はない。As shown in FIGS. 2A and 2B, the perpendicular magnetic recording layer 20 formed on the soft magnetic backing layer 10 and the nonmagnetic layer 15 in the present invention is at least in the vertical direction of the substrate 2. It has a magnetic anisotropy and is formed as a flat film without any intentionally formed recesses. Here, "there is no intentionally formed recessed recess" is a conventionally known technique. JP-A-7-12995
As disclosed in Japanese Patent Laid-Open No. 3, the purpose is to eliminate those in which the magnetic layer is intentionally lacked and the recess is formed by a lithography method or the like. Therefore, for example, the surface irregularities in nanometer (nm) units, which are generated by the film formation of the perpendicular magnetic recording layer 20, are not intentionally formed.
【００２０】図２（Ａ）における欠如凹部１０ａは、そ
れが形成される場所において、軟磁性裏打ち層１０の厚
さ方向（図面の上下方向）の一部を欠如させるように形
成されている。この態様に限定されることなく、前記欠
如凹部１０ａは、図２（Ｂ）に示されるようにそれが形
成される場所において、軟磁性裏打ち層１０の厚さ方向
の実質的全部を欠如させるように形成してもよい。ここ
で、「実質的全部」とは、本発明の作用効果を逸脱しな
い範囲で、基板２の一部までをわずかにエッチングして
基板の一部に非磁性材が充填されている態様をも含む趣
旨である。厳密に軟磁性裏打ち層１０のみを完全に除去
することは極めて困難であるからである。The recessed recess 10a in FIG. 2 (A) is formed so that a part of the soft magnetic backing layer 10 in the thickness direction (vertical direction in the drawing) is removed at the place where it is formed. Without being limited to this aspect, the recessed recesses 10a are formed so that substantially all of the soft magnetic backing layer 10 in the thickness direction is removed at the place where it is formed as shown in FIG. 2 (B). You may form in. Here, “substantially all” also refers to a mode in which a part of the substrate 2 is slightly etched and a part of the substrate is filled with a non-magnetic material without departing from the operation and effect of the present invention. It is intended to include. This is because it is extremely difficult to completely remove only the soft magnetic underlayer 10 strictly.
【００２１】図２（Ａ）の態様において、実質的なディ
スクリート作用を働かせるための欠如凹部１０ａの深さ
（非磁性材１５の厚さ）Ｄは、媒体を構成する各部材の
材料選定によっても異なるが、軟磁性裏打ち層１０の厚
さをＤsとした場合、Ｄ＝０．２〜０．９Ｄs程度とする
ことが望ましい。また、図２（Ａ）の態様のごとく軟磁
性裏打ち層１０は下部で繋がっていることが望ましい。
使用する単磁極ヘッドと、垂直磁気記録層２０、軟磁性
裏打ち層１０との間で磁束が閉ループを形成しやすく磁
束密度の高い良好な記録ができるからである。In the embodiment shown in FIG. 2A, the depth D (thickness of the non-magnetic material 15) D of the recessed portion 10a for exerting a substantial discrete action depends on the material selection of each member constituting the medium. Although different, when the thickness of the soft magnetic backing layer 10 is Ds, it is desirable that D = 0.2 to 0.9 Ds. Further, it is desirable that the soft magnetic backing layer 10 is connected at the bottom as in the embodiment of FIG.
This is because a magnetic flux is likely to form a closed loop between the single magnetic pole head used and the perpendicular magnetic recording layer 20 and the soft magnetic backing layer 10, and good recording with a high magnetic flux density can be performed.
【００２２】一方、図２（Ｂ）の態様の場合、軟磁性裏
打ち層内に磁壁を形成することが困難となり、軟磁性裏
打ち層の磁区に起因するノイズを抑制することができる
というメリットがある。On the other hand, in the case of the embodiment shown in FIG. 2B, it is difficult to form a domain wall in the soft magnetic backing layer, and there is an advantage that noise due to magnetic domains of the soft magnetic backing layer can be suppressed. .
【００２３】本発明における非磁性基板２としては、ア
ルミニウム、強化ガラス、結晶化ガラス、カーボンプラ
スチック等、通常この種の磁気記録媒体に使用されるも
のを用いれば良い。As the non-magnetic substrate 2 in the present invention, those normally used for this kind of magnetic recording medium such as aluminum, tempered glass, crystallized glass and carbon plastic may be used.
【００２４】本発明における軟磁性裏打ち層１０として
は、ＮｉＦｅ，ＮｉＦｅＮｂ，ＮｉＦｅＭｏ，ＦｅＡｌ
Ｓｉ,ＦｅＴａＣ等が好適に用いられる。データトラッ
クにおける軟磁性裏打ち層１０の厚さは、０．１〜１０
μｍ程度とされる。この厚さが０．１μｍ未満となる
と、使用する単磁極ヘッドと、垂直磁気記録層２０、軟
磁性裏打ち層１０との間で磁束が閉ループを形成しにく
くなり、良好な再生出力を得ることができなくなってし
まう。また、１０μｍを超えると膜の内部応力が増大し
て、膜にクラックが発生し易くなる傾向が生じてしま
う。As the soft magnetic backing layer 10 in the present invention, NiFe, NiFeNb, NiFeMo, FeAl
Si, FeTaC and the like are preferably used. The soft magnetic backing layer 10 in the data track has a thickness of 0.1 to 10
It is about μm. If this thickness is less than 0.1 μm, it becomes difficult for the magnetic flux to form a closed loop between the single magnetic pole head used, and the perpendicular magnetic recording layer 20 and the soft magnetic backing layer 10, and good reproduction output can be obtained. I can not do it. On the other hand, when the thickness exceeds 10 μm, the internal stress of the film increases, and the film tends to be easily cracked.
【００２５】本発明における垂直磁気記録層２０として
は、ＣｏＣｒ，ＣｏＣｒＴａ，ＣｏＰｔ，ＣｏＣｒＰ
ｔ，ＣｏＰｔＣｒＯ，ＴｂＦｅＣｏ等、通常この種の磁
気記録媒体の垂直磁気記録層に使用されるものであれば
いかなるものであっても良い。このような垂直磁気記録
層２０の厚さは、使用するヘッドや用いられる記録波長
等を考慮しつつ適宜選定すれば良い。通常は、１０〜１
００ｎｍ程度とされる。厚さが１０ｎｍ未満となると垂
直磁気記録層２０に信号が記録された際の残留磁化量が
非常に小さくなるために、信号の再生出力が著しく劣化
してしまう傾向が生じる。As the perpendicular magnetic recording layer 20 in the present invention, CoCr, CoCrTa, CoPt, CoCrP
Any material such as t, CoPtCrO, TbFeCo, etc. may be used as long as it is normally used in the perpendicular magnetic recording layer of this type of magnetic recording medium. The thickness of such a perpendicular magnetic recording layer 20 may be appropriately selected in consideration of the head used, the recording wavelength used, and the like. Usually 10-1
It is set to about 00 nm. When the thickness is less than 10 nm, the residual magnetization amount when a signal is recorded in the perpendicular magnetic recording layer 20 becomes very small, and thus the reproduction output of the signal tends to be significantly deteriorated.
【００２６】本発明の欠如凹部１０ａに充填される非磁
性材（非磁性層１５を構成する材料）としては、ＳｉＯ
2、Ａｌ2Ｏ3、Ｃ等が好適に用いられる。The non-magnetic material (the material forming the non-magnetic layer 15) filled in the recessed portion 10a of the present invention is SiO.
2 , Al 2 O 3 and C are preferably used.
【００２７】また、垂直磁気記録層２０の上には、磁性
層を保護する目的でＣ、ＺｒＯ2、ＳｉＯ2等を主体とす
る保護膜を１〜１０ｎｍ程度の厚さに形成することが望
ましい。あまり厚く形成し過ぎるとすると、スペーシン
グロスの問題が生じる傾向にあり、また、あまりに薄く
形成し過ぎると、耐久性等の問題が生じる傾向にある。
さらにこの保護膜の上に公知の種々の有機潤滑剤を含有
させた潤滑膜を形成してもよい。On the perpendicular magnetic recording layer 20, it is desirable to form a protective film mainly containing C, ZrO 2 , SiO 2 or the like with a thickness of about 1 to 10 nm for the purpose of protecting the magnetic layer. . If it is made too thick, the problem of spacing loss tends to occur, and if it is made too thin, problems such as durability tend to occur.
Further, a lubricating film containing various known organic lubricants may be formed on the protective film.
【００２８】本発明の磁気記録媒体の製造方法
本発明の磁気記録媒体の製造方法の好適な一例を図３
（Ａ）〜（Ｈ）に基づいて説明する。 Manufacturing Method of Magnetic Recording Medium of the Present Invention A preferred example of the manufacturing method of the magnetic recording medium of the present invention is shown in FIG.
A description will be given based on (A) to (H).
【００２９】まず、最初に図３（Ａ）に示されるように
非磁性基板２の上に軟磁性裏打ち層１０をスパッタ法等
により形成する。First, as shown in FIG. 3A, the soft magnetic backing layer 10 is formed on the non-magnetic substrate 2 by a sputtering method or the like.
【００３０】次いで、図３（Ｂ）に示されるように軟磁
性裏打ち層１０の上にレジスト層５０を形成する。Next, as shown in FIG. 3B, a resist layer 50 is formed on the soft magnetic backing layer 10.
【００３１】次いで、図３（Ｃ）に示されるようにトラ
ック間隙、サーボ信号等の凹凸形状が微細加工された成
形金型６０を準備して、このものを、レジスト層５０の
表面に加熱しつつ加圧してインプリント（imprint）す
る。成形金型６０を外す（remove）ことによって図３
（Ｄ）のインプリント形状（レジストパターン）が形成
される。なお、レジストパターンは、電子ビームリソグ
ラフィ等で形成してもよい。Next, as shown in FIG. 3C, a molding die 60 in which the unevenness of the track gap and the servo signal is finely processed is prepared, and this is heated on the surface of the resist layer 50. While pressing, imprint (imprint). By removing the molding die 60, FIG.
The imprint shape (resist pattern) of (D) is formed. The resist pattern may be formed by electron beam lithography or the like.
【００３２】次いで、リアクティブイオンエッチング
（ＲＩＥ）等により、軟磁性裏打ち層１０をレジストパ
ターンに沿ってエッチングしていき、図３（Ｅ）に示さ
れるごとく複数の欠如凹部１０ａを形成する。この時、
軟磁性裏打ち層１０のエッチング箇所において、深さ方
向に一部の軟磁性裏打ち層１０を残せば、前述した図２
（Ａ）に示される形態となり、また、深さ方向に実質的
に全ての軟磁性裏打ち層１０を除去すれば、前述の図２
（Ｂ）に示される形態となる。Next, the soft magnetic backing layer 10 is etched along the resist pattern by reactive ion etching (RIE) or the like to form a plurality of recessed recesses 10a as shown in FIG. 3 (E). This time,
When a portion of the soft magnetic backing layer 10 is left in the depth direction at the etching position of the soft magnetic backing layer 10, the above-described FIG.
If the soft magnetic backing layer 10 has the configuration shown in (A) and substantially all of the soft magnetic backing layer 10 is removed in the depth direction, as shown in FIG.
The form is shown in (B).
【００３３】軟磁性裏打ち層１０の上の残余のレジスト
を除去した後、図３（Ｆ）に示されるように非磁性材を
スパッタ堆積させ、軟磁性裏打ち層１０の欠如凹部１０
ａに非磁性層１５を形成させる。After removing the residual resist on the soft magnetic backing layer 10, a non-magnetic material is sputter deposited as shown in FIG.
The nonmagnetic layer 15 is formed on a.
【００３４】次いで、ＣＭＰ（chemical mechanical po
lishing）等の手法で軟磁性裏打ち層１０および非磁性
層１５の平坦化処理（planarization）をすることによ
り、表面の平坦化が図られるとともに不要な非磁性層１
５（非磁性材）が除去され、図３（Ｇ）の状態に至る。Next, CMP (chemical mechanical po
The surface of the soft magnetic backing layer 10 and the nonmagnetic layer 15 is planarized by a method such as lishing) to planarize the surface and eliminate the unnecessary nonmagnetic layer 1.
5 (non-magnetic material) is removed, and the state of FIG.
【００３５】次いで、図３（Ｈ）に示されるように垂直
磁気記録層２０がスパッタ等で堆積形成される。なお、
図面には、示されていないが垂直磁気記録層２０の形成
前に、良好な垂直磁気記録層２０を得るために予め、結
晶配向層を下地層として設けるようにすることが好まし
い。Next, as shown in FIG. 3H, the perpendicular magnetic recording layer 20 is deposited and formed by sputtering or the like. In addition,
Although not shown in the drawing, it is preferable to provide a crystal orientation layer as an underlayer in advance to obtain a good perpendicular magnetic recording layer 20 before forming the perpendicular magnetic recording layer 20.
【００３６】[0036]
【実施例】以下に具体的実施例を示し、本発明をさらに
詳細に説明する。EXAMPLES The present invention will be described in more detail by showing specific examples below.
【００３７】図３（Ａ）〜（Ｈ）に示される製造プロセ
スに準じて本発明の磁気記録媒体サンプルを作製した。
非磁性基板２として、外径６５ｍｍ、内径２０ｍｍ、厚
さ０．６３ｍｍのハードディスク用の結晶化ガラスを用
いた。軟磁性裏打ち層１０として、ＮｉＦｅパーマロイ
を用いてスパッタ成膜し、平坦部の厚さを５００ｎｍ、
欠如凹部１０ａの深さを２５０ｎｍとした。欠如凹部１
０ａに充填する非磁性材としてはＳｉＯ2を用いた。垂
直磁気記録層２０として、ＣｏＣｒＰｔを厚さ５０ｎｍ
にスパッタ成膜した。A magnetic recording medium sample of the present invention was manufactured according to the manufacturing process shown in FIGS.
As the non-magnetic substrate 2, a crystallized glass for a hard disk having an outer diameter of 65 mm, an inner diameter of 20 mm and a thickness of 0.63 mm was used. As the soft magnetic backing layer 10, a NiFe permalloy film was formed by sputtering, and the thickness of the flat portion was 500 nm.
The depth of the recessed recess 10a was set to 250 nm. Missing recess 1
SiO 2 was used as the non-magnetic material filled in 0a. CoCrPt as the perpendicular magnetic recording layer 20 has a thickness of 50 nm.
The film was formed by sputtering.
【００３８】このようにして作製した本発明サンプルに
ついて磁気特性を実験的に確認したところ、本発明サン
プルは、軟磁性裏打ち層１０のみをエッチングしてディ
スクリート作用を発揮させるための欠如凹部を設け、垂
直磁気記録層２０には成膜後、エッチング処理を施さな
いようにしているので、垂直磁気記録層２０の磁気特性
の劣化を防止することが確認できた。When the magnetic properties of the sample of the present invention thus manufactured were experimentally confirmed, it was found that the sample of the present invention was provided with a recessed recess for etching only the soft magnetic backing layer 10 to exert a discrete effect. Since the perpendicular magnetic recording layer 20 is not subjected to the etching treatment after the film formation, it was confirmed that the deterioration of the magnetic characteristics of the perpendicular magnetic recording layer 20 can be prevented.
【００３９】また、本発明のサンプルは、軟磁性裏打ち
層１０の欠如凹部１０ａのみに非磁性材を埋め込み、Ｃ
ＭＰ等により平滑・平坦化処理を行ってから垂直磁気記
録層を形成する構造を備えている。そのため、従来技術
のように例えば垂直磁気記録層に形成した欠如部に非磁
性材を埋め込んでから平滑・平坦化を行うことにより発
生し得る垂直磁気記録層へのダメージを回避することが
でき、この観点からも垂直磁気記録層２０の磁気特性の
劣化を防止することができることが確認できた。In the sample of the present invention, a non-magnetic material is embedded only in the recessed portion 10a of the soft magnetic backing layer 10, and C
It has a structure in which a perpendicular magnetic recording layer is formed after performing smoothing / flattening processing by MP or the like. Therefore, it is possible to avoid the damage to the perpendicular magnetic recording layer that may occur by performing smoothing / planarization after embedding a non-magnetic material in the notch formed in the perpendicular magnetic recording layer as in the prior art, From this point of view, it was confirmed that deterioration of the magnetic characteristics of the perpendicular magnetic recording layer 20 can be prevented.
【００４０】さらに、本発明のサンプルは、従来技術の
媒体構成より必然的に発生していた垂直磁気記録層およ
び非磁性層のディッシング等による媒体表面の凹凸を無
くすことができる。そのため、本発明では、ダイアモン
ドライクカーボン等の保護膜層およびパーフルオロポリ
エーテル等の潤滑膜層を極めて均一に形成できることが
確認できた。Further, the sample of the present invention can eliminate the unevenness of the medium surface caused by the dishing of the perpendicular magnetic recording layer and the non-magnetic layer, which is inevitably caused by the conventional medium structure. Therefore, in the present invention, it was confirmed that the protective film layer such as diamond-like carbon and the lubricating film layer such as perfluoropolyether can be formed extremely uniformly.
【００４１】もちろん、上記の構成よりなる本発明サン
プルは、いわゆるサイドクロストークの低減化（cross
write/cross read の低減化）、およびトラッキング精
度の向上を図り面記録密度の向上を図ることができるこ
とも実験的に確認された。Of course, the sample of the present invention having the above-mentioned structure reduces so-called side crosstalk (cross).
It was also experimentally confirmed that write / cross read can be reduced) and tracking accuracy can be improved to improve the areal recording density.
【００４２】[0042]
【発明の効果】上記の結果より本発明の効果は明らかで
ある。すなわち、本発明は、非磁性基板上に、軟磁性裏
打ち層と、垂直磁気記録層とを備える磁気記録媒体であ
って、該媒体の軟磁性裏打ち層は、記録再生が行われる
データトラックとデータトラックの間に位置する領域、
またはサーボ信号が記録される領域にディスクリート作
用を発揮させるための欠如凹部を有するとともに、その
凹部には非磁性材が充填されて非磁性層が形成されてお
り、前記垂直磁気記録層は、少なくとも基板の鉛直方向
に磁気異方性を有するとともに、意図的に形成された欠
如凹部が存在しない平面膜として構成されているので、
サイドクロストークの低減化（cross write/cross read
の低減化）、およびトラッキング精度の向上を図り面
記録密度の向上を図ることはもとより、垂直磁気記録層
の製造面からの磁気特性の劣化を防止することができる
とともに、媒体表面の平滑性を向上させることができ
る。The effects of the present invention are clear from the above results. That is, the present invention is a magnetic recording medium comprising a soft magnetic backing layer and a perpendicular magnetic recording layer on a non-magnetic substrate, wherein the soft magnetic backing layer of the medium comprises a data track and a data track on which recording and reproduction are performed. The area located between the tracks,
Alternatively, the servo signal recording area has a recessed portion for exhibiting a discrete action, and the recessed portion is filled with a non-magnetic material to form a non-magnetic layer. Since it has a magnetic anisotropy in the vertical direction of the substrate and is configured as a flat film without intentionally formed recessed recesses,
Reduction of side crosstalk (cross write / cross read
Of the perpendicular magnetic recording layer from the manufacturing side, and the smoothness of the medium surface is improved. Can be improved.
【図１】図１（Ａ）は本発明のディスク状の磁気記録媒
体の全体形状を表す概略平面図であり、図１（Ｂ）は図
１（Ａ）の四角で囲まれた微小部分の部分拡大概略図で
ある。FIG. 1 (A) is a schematic plan view showing the overall shape of a disk-shaped magnetic recording medium of the present invention, and FIG. 1 (B) shows a minute portion surrounded by a square in FIG. 1 (A). It is a partially expanded schematic diagram.
【図２】図２（Ａ）および（Ｂ）は、それぞれ、本発明
の磁気記録媒体の好適な実施の形態を概念的に示す断面
図である。2A and 2B are cross-sectional views conceptually showing a preferred embodiment of a magnetic recording medium of the present invention.
【図３】図３（Ａ）〜（Ｈ）は、本発明の磁気記録媒体
の好適な製造プロセスの一例を経時的に説明するための
概略断面図である。3 (A) to 3 (H) are schematic cross-sectional views for explaining an example of a preferable manufacturing process of the magnetic recording medium of the present invention over time.
１…磁気記録媒体 ２…非磁性基板 １０…軟磁性裏打ち層 １０ａ…欠如凹部 １５…非磁性層 ２０…垂直磁気記録層 1 ... Magnetic recording medium 2 ... Non-magnetic substrate 10 ... Soft magnetic backing layer 10a ... Missing recess 15 ... Non-magnetic layer 20 ... Perpendicular magnetic recording layer
フロントページの続き (72)発明者 大川 秀一 東京都中央区日本橋一丁目13番１号 ティ ーディーケイ株式会社内 (72)発明者 江▲崎▼ 城一朗 東京都中央区日本橋一丁目13番１号 ティ ーディーケイ株式会社内 Ｆターム(参考） 5D006 BB07 CA03 CA05 DA03 DA08 EA03 FA09 Continued front page (72) Inventor Shuichi Okawa 1-13-1, Nihonbashi, Chuo-ku, Tokyo -In DC Inc. (72) Inventor E ▲ Saki ▼ Ichiro Jo 1-13-1, Nihonbashi, Chuo-ku, Tokyo -In DC Inc. F-term (reference) 5D006 BB07 CA03 CA05 DA03 DA08 EA03 FA09
Claims (4)
直磁気記録層とを備える磁気記録媒体であって、 該媒体の軟磁性裏打ち層は、記録再生が行われるデータ
トラックとデータトラックの間に位置する領域、または
サーボ信号が記録される領域にディスクリート作用を発
揮させるための欠如凹部を有するとともに、その凹部に
は非磁性材が充填されて非磁性層が形成されており、 前記垂直磁気記録層は、少なくとも基板の鉛直方向に磁
気異方性を有するとともに、意図的に形成された欠如凹
部が存在しない平面膜であることを特徴とする磁気記録
媒体。1. A magnetic recording medium comprising a soft magnetic backing layer and a perpendicular magnetic recording layer on a non-magnetic substrate, wherein the soft magnetic backing layer of the medium comprises a data track for recording and reproduction and a data track. In addition to having a recessed concave portion for exhibiting a discrete effect in a region located between the two, or a region where a servo signal is recorded, the concave portion is filled with a nonmagnetic material to form a nonmagnetic layer, The perpendicular magnetic recording layer is a flat film having magnetic anisotropy at least in the vertical direction of the substrate and having no intentionally formed recessed recess.
において、軟磁性裏打ち層の厚さ方向の一部を欠如させ
るように形成されている請求項１に記載の磁気記録媒
体。2. The magnetic recording medium according to claim 1, wherein the lacking recess is formed so as to lack a part in the thickness direction of the soft magnetic backing layer at the place where it is formed.
において、軟磁性裏打ち層の厚さ方向の実質的全部を欠
如させるように形成されている請求項１に記載の磁気記
録媒体。3. The magnetic recording medium according to claim 1, wherein the recessed recess is formed so that substantially all of the soft magnetic backing layer in the thickness direction is removed at the place where the recessed recess is formed.
直磁気記録層とを備える磁気記録媒体であって、 該媒体の軟磁性裏打ち層は、記録再生が行われるデータ
トラックとデータトラックの間に位置する領域、および
サーボ信号が記録される領域にディスクリート作用を発
揮させるための欠如凹部を有するとともに、その凹部に
は非磁性材が充填されて非磁性層が形成されており、 前記垂直磁気記録層は、少なくとも基板の鉛直方向に磁
気異方性を有するとともに、意図的に形成された欠如凹
部が存在しない平面膜であることを特徴とする磁気記録
媒体。4. A magnetic recording medium having a soft magnetic backing layer and a perpendicular magnetic recording layer on a non-magnetic substrate, wherein the soft magnetic backing layer of the medium comprises a data track and a data track on which recording and reproduction are performed. In addition to having a recessed recess for exhibiting a discrete effect in a region located between and a region where a servo signal is recorded, the recess is filled with a nonmagnetic material to form a nonmagnetic layer, The perpendicular magnetic recording layer is a flat film having magnetic anisotropy at least in the vertical direction of the substrate and having no intentionally formed recessed recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001200380A JP3958943B2 (en) | 2001-07-02 | 2001-07-02 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001200380A JP3958943B2 (en) | 2001-07-02 | 2001-07-02 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003016621A true JP2003016621A (en) | 2003-01-17 |
| JP3958943B2 JP3958943B2 (en) | 2007-08-15 |
Family
ID=19037514
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|---|---|---|---|
| JP2001200380A Expired - Fee Related JP3958943B2 (en) | 2001-07-02 | 2001-07-02 | Magnetic recording medium |
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| US7164548B2 (en) | 2003-03-26 | 2007-01-16 | Tdk Corporation | Magnetic recording medium and method of manufacturing magnetic recording medium |
| EP1463038A3 (en) * | 2003-03-26 | 2005-12-21 | TDK Corporation | Magnetic recording medium and method of manufacturing magnetic recording medium |
| US7423842B2 (en) | 2004-02-26 | 2008-09-09 | Tdk Corporation | Magnetic recording medium having servo and data track regions with different arithmetical mean deviations |
| US7352529B2 (en) | 2004-02-26 | 2008-04-01 | Tdk Corporation | Magnetic recording medium and magnetic recording and reproducing device using a magnetic recording layer formed with a predetermined concavo-convex pattern |
| CN1303587C (en) * | 2004-04-14 | 2007-03-07 | 富士通株式会社 | Vertical magnetic recording medium, magnetic recording apparatus and manufacturing method of a vertical magnetic recording medium |
| US7422808B2 (en) | 2004-04-14 | 2008-09-09 | Fujitsu Limited | Vertical magnetic recording medium, magnetic recording apparatus and manufacturing method of a vertical magnetic recording medium |
| JP2006079807A (en) * | 2004-08-12 | 2006-03-23 | Showa Denko Kk | Perpendicular magnetic recording medium, its manufacturing method, and magnetic recording and reproducing apparatus |
| JP2006260700A (en) * | 2005-03-18 | 2006-09-28 | Fujitsu Ltd | Magnetic recording medium and magnetic recording apparatus |
| US7662264B2 (en) | 2005-04-19 | 2010-02-16 | Kabushiki Kaisha Toshiba | Method for producing magnetic recording medium |
| JP2006302396A (en) * | 2005-04-19 | 2006-11-02 | Toshiba Corp | Method of manufacturing magnetic recording medium |
| JP4649262B2 (en) * | 2005-04-19 | 2011-03-09 | 株式会社東芝 | Method for manufacturing magnetic recording medium |
| US7760467B2 (en) | 2005-09-02 | 2010-07-20 | Kabushiki Kaisha Toshiba | Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus |
| US7936537B2 (en) | 2005-09-02 | 2011-05-03 | Kabushiki Kaisha Toshiba | Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus |
| US8059368B2 (en) | 2005-09-02 | 2011-11-15 | Kabushiki Kaisha Toshiba | Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus |
| US7898768B2 (en) | 2006-03-16 | 2011-03-01 | Kabushiki Kaisha Toshiba | Patterned medium with magnetic pattern depth relationship |
| US7826176B2 (en) | 2006-03-30 | 2010-11-02 | Kabushiki Kaisha Toshiba | Magnetic recording medium with thicker protective film in edge areas and magnetic recording apparatus using the medium |
| US8652338B2 (en) | 2007-09-26 | 2014-02-18 | Kabushiki Kaisha Toshiba | Magnetic recording medium and method of manufacturing the same |
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