JP2003014855A - Radiation detector and detecting system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the weight of a radiation detector. SOLUTION: The radiation detector comprises a photoelectric conversion elements for converting light based on radiation into charges and control elements for controlling read out of the converted charges arranged on a plane in a pixel area wherein a substrate having a circuit for driving the control elements and a substrate having a circuit for processing the charges read out by the control element are disposed along one side of the pixel area while being superposed in the incident direction of light and a material for shielding radiation to the drive circuit and the processing circuit is provided above the substrate on the upper side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a radiation detection apparatus and system, and more particularly to a medical X-ray detection apparatus and
The present invention relates to a radiation detection device and system such as an industrial destructible device.

[0002]

2. Description of the Related Art Conventionally, as a reading device such as a facsimile, a copying machine, a scanner or an X-ray detecting device, a system in which a reduction optical system and a CCD type sensor are combined has recently become a hydrogenated amorphous silicon (hereinafter referred to as "a-S").
i ". By the development of the photoelectric conversion semiconductor material typified by 1), the development of the contact type sensor in which the photoelectric conversion element and the signal processing unit are formed on a large-area substrate and read by an optical system of the same size as the information source is in progress.

In particular, a-Si is not only used as a photoelectric conversion material, but also as a thin film field effect transistor (hereinafter referred to as "TFT").
Called. Since it can also be used as the semiconductor material of (1), it has an advantage that the photoelectric conversion semiconductor layer and the semiconductor layer of the TFT can be simultaneously formed.

FIG. 8 is a schematic circuit diagram of a conventional radiation detecting apparatus. 9 (A) to 9 (C) are schematic configuration diagrams of a conventional radiation detection apparatus, FIG. 9 (A) is a schematic plan view, and FIGS. 9 (B) and 9 (C) are diagrams respectively. 9
It is a schematic sectional drawing of AA 'of (A), and a schematic sectional drawing of BB'.

As shown in FIG. 8, each pixel of the photoelectric conversion device 3 is composed of a photoelectric conversion element P including a photodiode and a signal transfer element T including a thin film transistor (TFT). The photoelectric conversion element P, the signal transfer element T, and the wirings Vs, Sig, and Vg of the photoelectric conversion device 3 are manufactured on the glass substrate by a thin film semiconductor process.

The cathode electrode of the photodiode is connected to the bias line Vs and a bias voltage is applied. The source electrode of the TFT is connected to the data line SigN, and the gate electrode thereof is connected to the gate line VgN. In this example, the wiring necessary for driving the photoelectric conversion device is a bias line, a data line, and a gate line.

The anode electrode of the photodiode and T
The drain electrode of the FT is connected to each other in each pixel. In this example, the bias line and the data line are routed vertically upward, and the gate line is routed horizontally leftward so as to be routed to one side of each photoelectric conversion device.

Further, the bias line and the data line are connected to the reading device 1 which is an electric circuit board, and the gate line is connected to the gate driving device 2 which is the other electric circuit board.

The reading device 1 which is an electric circuit board has a printed circuit board (PCB) formed by a wiring pattern.
d) Above, a power supply circuit that creates various potentials for driving the photoelectric conversion element, a control circuit for controlling the power supply, a signal processing circuit that receives a signal from the photoelectric conversion element, and the like are provided. It is covered with a radiation shielding member 5 made of a heavy metal such as lead. The control circuit includes electronic parts 21 such as various amplifier ICs, various logic ICs, regulator ICs, etc., which are semiconductor elements.

Further, the gate drive device 2 which is the other electric circuit board is provided with various circuits for driving the signal transfer element on the PCB, similarly to the readout device 1, and the circuit is constructed on the PCB. Electronic components 22 such as various ICs made of semiconductor elements are mounted. Then, the upper part is covered with the radiation shielding member 5. The photoelectric conversion device and each of the electric circuit boards include wiring members 101, 10 such as flexible wiring boards.
2 are connected to each other.

On the photoelectric conversion device 3, a radiation-visible light conversion device 4 composed of a fluorescent plate for converting X-rays into visible light is arranged so as to cover the pixel region.

The X-rays incident on the fluorescent plate are converted into visible light, and the converted visible light is incident on the photoelectric conversion element of the photoelectric conversion device 3 and is accumulated as an electric signal and photoelectrically converted. The photoelectrically converted signal is read by the signal transfer element 1
Read out, and further processed by a signal processing circuit etc. X
Line image data can be obtained.

[0013]

However, the conventional technique has a radiation shielding member made of a heavy metal such as lead, which hinders the weight reduction of the radiation detecting device. Particularly, in a radiation detection device in which the reading device and the like are formed so as to cover the periphery of the photoelectric conversion device, it is necessary to provide as many radiation shielding members as possible, so a strong supporting member that can withstand the weight thereof is provided. However, it was difficult to keep the cost low. Further, when the radiation detection device is heavy, it becomes difficult to handle it during transportation or the like. Therefore, it is desired to reduce the weight of the device.

Therefore, an object of the present invention is to reduce the weight of the radiation detecting apparatus.

[0015]

In order to solve the above-mentioned problems, the present invention comprises a pixel region for converting light based on radiation into electric charges, and a processing region for processing the electric charges converted in the pixel regions. In the radiation detection apparatus, the processing region is arranged along one side of the pixel region, and a shielding material that shields radiation is provided above the processing region.

Further, according to the present invention, a photoelectric conversion element for converting light based on radiation into an electric charge and a control element for controlling readout of the electric charge converted by the photoelectric conversion element are arranged in a plane on a pixel region. In the radiation detection device, a substrate having a drive circuit for driving the control element and a substrate having a processing circuit for processing the charges read by the control element are provided along one side of the pixel region, It is characterized in that it is arranged so as to overlap with the incident direction of light, and a shielding material for shielding the radiation to the drive circuit and the processing circuit is provided on the upper substrate.

Furthermore, the radiation detection system of the present invention comprises:
It is characterized by comprising any one of the radiation detecting devices described above.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) FIGS. 1 (A) and 1 (B) are schematic configuration diagrams of a radiation detecting apparatus according to Embodiment 1 of the present invention. FIG. 1 (A) is a schematic plan view and a drawing. Figure 1 (B) is
It is a schematic sectional drawing of AA 'of (A).

The reading device 1, which is an electric circuit board, has a printed circuit board (PCB) formed of a wiring pattern.
d) Above, a power supply circuit that creates various potentials for driving the photoelectric conversion element, a control circuit for controlling the power supply, a signal processing circuit that receives a signal from the photoelectric conversion element, and the like are provided. It is covered with a radiation shielding member 5 made of a heavy metal such as lead. The control circuit includes electronic parts 21 such as various amplifier ICs, various logic ICs, regulator ICs, etc., which are semiconductor elements.

The gate drive device 2, which is the other electric circuit board, is provided with various circuits for driving the signal transfer elements on the PCB, similarly to the readout device 1, and the circuit is constructed on the PCB. Electronic components 22 such as various ICs made of semiconductor elements are mounted. Then, the upper part is covered with the radiation shielding member 5. The photoelectric conversion device 3 and each reading device 1 are connected by a wiring member 101 such as a flexible wiring board. The photoelectric conversion device 3 and the gate drive device 2 are connected by a wiring member 202.

On the photoelectric conversion device 3, a radiation visible light conversion device 4 composed of a fluorescent plate for converting X-rays into visible light is arranged so as to cover the pixel region.

The X-rays incident on the fluorescent plate are converted into visible light, and the converted visible light is incident on the photoelectric conversion element of the photoelectric conversion device 3 and is accumulated as an electric signal and photoelectrically converted. The photoelectrically converted signal is read by the signal transfer element 1
Read out, and further processed by a signal processing circuit etc. X
Line image data can be obtained.

In the present embodiment, the gate driving device 2 is arranged on the side where the bias line and the data line of the photoelectric conversion device 3 are drawn out, that is, on the same side as the reading device 1 in plan view. Further, the two electric circuit boards of the reading device 1 and the gate driving device 2 are arranged so as to overlap each other.

The radiation shielding member 5 is provided in the X-ray incident direction on the two electric circuit boards of the reading device 1 and the gate driving device 2, and suppresses the X-ray exposure of the two electric circuit boards. . Thus, the X-ray exposure of the electronic components 21 and 22 made of semiconductor elements is suppressed without disposing the radiation shielding member in a wide range.

Further, as shown in FIG. 4, the photoelectric conversion device 3
The wiring member 101 for connecting the reading device 1 and the wiring member 102 is arranged on the same side of the photoelectric conversion device 3, and the wiring members 101 and 102 are arranged on the same side of the photoelectric conversion device 3 in plan view.

That is, the wiring member, which is a connection line, is arranged so as to cross one side of the pixel region of the photoelectric conversion device 3.

When the wiring member 102 is used instead of the wiring member 202 to connect the gate driving device 2 and the photoelectric conversion device 3, the wiring length can be reduced, and the wiring member can be manufactured at a lower cost, and the radiation detecting device can be manufactured. Can be downsized.

(Embodiment 2) FIGS. 2A and 2B are schematic configuration diagrams of a radiation detecting apparatus according to Embodiment 2 of the present invention. FIG. 2A is a schematic plan view and a drawing. 2 (B) is Figure 2
It is a schematic sectional drawing of AA 'of (A). In FIG. 2, the same parts as those in FIG. 1 are designated by the same reference numerals.

As shown in FIG. 2, in the present embodiment, the radiation shield member 5 includes the electronic component 2 on each of the electric circuit boards 1 and 2.
Since the radiation shielding member 5 is partially disposed only on the upper portions of the first and second portions 22, the area where the radiation shielding member 5 is disposed is further reduced.

In FIG. 2, the electronic components 21 and 22 are provided at close positions, and the radiation shielding member 5 is provided at three positions above the periphery of the electronic components 21 and 22.
The radiation shielding member 5 may be arranged only on the top of each of the 22.

Although not particularly shown, the radiation shielding member 5 can be similarly arranged in FIG. 4 and the same effect can be obtained.

(Embodiment 3) FIGS. 3 (A) and 3 (B) are schematic configuration diagrams of a radiation detecting apparatus according to Embodiment 3 of the present invention. FIG. 3 (A) is a schematic plan view and a drawing. Figure 3 (B) is
It is a schematic sectional drawing of AA 'of (A). In FIG. 3, the same parts as those in FIG. 1 are designated by the same reference numerals.

In FIG. 3, reference numeral 9 is a reading and gate driving device, and electronic components 21 and 2 are provided on the same electric circuit board.
2 are mounted on the front and back, respectively. Further, the reading and gate driving device 9 and the bias line and data line of the photoelectric conversion device 3 are connected by a wiring member 101. The gate line is the wiring member 202.
Connected by.

Further, the radiation shielding member 5 is provided on the electronic component 2 in the X-ray incident direction of the reading and gate driving device 9.
It is partially arranged so as to cover 1, 22. Therefore, the cost can be reduced by reducing the number of members and man-hours.

The mounting positions of the electronic components 21 and 22 are as follows.
The present invention is not limited to the one shown in FIG.

Further, as shown in FIG. 5, as in FIG.
The wiring member 102 that connects the photoelectric conversion device 3 and the reading device 1 and the wiring member 102 are arranged on the same side of the photoelectric conversion device 3, and the wiring member 10 is arranged on the same side of the photoelectric conversion device 3 in plan view.
A configuration in which 1 and 102 are arranged is also possible.

That is, the wiring member 101, which is a connection line,
102 is arranged so as to cross one side of the pixel region of the photoelectric conversion device 3.

When the wiring member 102 is used instead of the wiring member 202 to connect the gate driving device 2 and the photoelectric conversion device 3, the wiring length can be further reduced, and the wiring member can be manufactured at a lower cost, and radiation detection can be performed. The device can be downsized.

(Embodiment 4) FIGS. 6 (A) to 6 (C) are schematic configuration diagrams of a radiation detecting apparatus according to Embodiment 4 of the present invention, and FIG. 6 (A) is a schematic plan view, FIG. 6 (B) is shown in FIG.
It is a schematic sectional drawing of AA 'of (A). FIG. 6B is a schematic cross-sectional view taken along the line AA ′ of FIG. In FIG. 6, the same parts as those in FIG. 1 are designated by the same reference numerals.

In the present embodiment, as described with reference to FIG. 3 and the like, in order to mount the electronic components 21 and 22 on the same electric circuit board and connect the reading and gate driving device 9 and the photoelectric conversion device 3 to each other. The wiring members 111 and 112 are arranged so as to cross one side of the pixel region of the photoelectric conversion device 3.

Further, in this embodiment, the electronic components 21 and 22 are also used as wiring members (electronic component mounting wiring members 111 and 112) for connecting the read / gate driving device 9 and the bias lines and data lines of the photoelectric conversion device 3. Is mounted, and the electronic circuit board and the electronic components on the wiring member are arranged so as to overlap each other.

Thus, the reading and gate driving device 9
And the radiation shielding member 5 can be further reduced in size, and the weight can be further reduced.

(Fifth Embodiment) FIG. 7 is a schematic configuration diagram of a radiation diagnostic system according to a fifth embodiment of the present invention. The X-ray 6060 generated by the X-ray tube 6050 passes through the chest 6062 of the patient or the subject 6061, and
Radiation detector (image sensor) 6 described in 4 to 4
It is incident on 040. This incident X-ray has a patient 6061
Contains information about the inside of the body. The phosphor emits light in response to the incidence of X-rays and photoelectrically converts this to obtain electrical information. This information is converted to digital, image processed by the image processor 6070 and viewed on the display 6080 in the control room.

Further, this information can be transferred to a remote place by a transmission means such as a telephone line 6090, can be displayed on a display 6081 such as a doctor room in another place, or can be stored in a storage means such as an optical disc. It is also possible to diagnose. Also the film processor 6
It is also possible to record by 100 on the film 6110.

In this embodiment, the photoelectric conversion device is
I explained the case of applying it to the X-ray diagnostic system.
It can also be applied to a radiation imaging system such as a nondestructive inspection apparatus using α rays, β rays, γ rays, etc. other than X rays.

[0047]

As described above, according to the present invention,
It is possible to suppress X-ray exposure of electronic components made of semiconductor elements without disposing a radiation shielding member in a wide range, and to obtain a stable, high image quality, highly reliable, and lightweight radiation detection device.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a radiation detection apparatus according to a first exemplary embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of a radiation detecting apparatus according to a second embodiment of the present invention.

FIG. 3 is a schematic configuration diagram of a radiation detecting apparatus according to a third embodiment of the present invention.

FIG. 4 is a schematic configuration diagram of a radiation detection apparatus according to the first exemplary embodiment of the present invention.

FIG. 5 is a schematic configuration diagram of a radiation detecting apparatus according to a third embodiment of the present invention.

FIG. 6 is a schematic configuration diagram of a radiation detecting apparatus according to a fourth embodiment of the present invention.

FIG. 7 is a schematic configuration diagram of a radiation detection system according to a fifth embodiment of the present invention.

FIG. 8 is a schematic circuit diagram of a conventional technique.

FIG. 9 is a schematic configuration diagram of a conventional technique.

[Explanation of symbols]

1 Readout device (electrical circuit board) 2 Gate drive device (electrical circuit board) 3 Photoelectric conversion device 4 Radiation visible light converter 5 Radiation shielding member 9 Readout and gate driver (electrical circuit board) 21,22 Electronic parts made of semiconductors 101, 102, 202 wiring members

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2G088 EE01 EE29 FF02 GG19 JJ05                       JJ09 JJ29                 4M118 AA10 AB01 BA04 BA05 CA02                       CA11 CB06 CB11 FB03 FB09                       GA10 GB01 GB11 GB20 HA21                       HA22 HA26                 5F088 BA15 BB03 BB07 EA04 EA06                       EA20 HA10 HA15 KA08 LA08

Claims (7)

[Claims] 1. A radiation detection apparatus comprising: a pixel region that converts light based on radiation into an electric charge; and a processing region that processes the electric charge converted in the pixel region. A radiation detecting apparatus, wherein the processing region is arranged, and a shielding material that shields radiation is provided above the processing region. 2. A radiation detecting apparatus in which a photoelectric conversion element for converting light based on radiation into an electric charge and a control element for controlling readout of the electric charge converted by the photoelectric conversion element are arranged in a pixel region on a plane. A substrate having a drive circuit for driving the control element along one side of the pixel region, and a substrate having a processing circuit for processing charges read by the control element,
A radiation detecting apparatus, wherein the radiation detecting apparatus is disposed so as to be overlapped with respect to the light incident direction, and a shielding material that shields radiation to the driving circuit and the processing circuit is provided on an upper substrate. 3. The radiation detecting apparatus according to claim 2, wherein the shielding material is provided in accordance with respective positions of the drive circuit and the processing circuit. 4. The radiation detection apparatus according to claim 2, wherein the drive circuit and the processing circuit are located at positions overlapping with each other in the incident direction of the light. 5. The connection line connecting the drive circuit and the processing circuit to the control element is wired so as to cross one side of the pixel region.
5. The radiation detection device according to any one of 4 to 4. 6. The radiation detecting apparatus according to claim 5, wherein a part of the drive circuit and the processing circuit is also mounted on the connection line. 7. A radiation detection system comprising the radiation detection apparatus according to claim 1. Description: