JP2003011064A - Manufacturing method for grindstone, grindstone, and grinding method - Google Patents

Manufacturing method for grindstone, grindstone, and grinding method

Info

Publication number
JP2003011064A
JP2003011064A JP2001195010A JP2001195010A JP2003011064A JP 2003011064 A JP2003011064 A JP 2003011064A JP 2001195010 A JP2001195010 A JP 2001195010A JP 2001195010 A JP2001195010 A JP 2001195010A JP 2003011064 A JP2003011064 A JP 2003011064A
Authority
JP
Japan
Prior art keywords
grindstone
workpiece
raw material
magnetic field
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001195010A
Other languages
Japanese (ja)
Inventor
Tokuji Umehara
徳次 梅原
Shinsaku Hagiwara
親作 萩原
Isao Shibata
勲 芝田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2001195010A priority Critical patent/JP2003011064A/en
Priority to KR1020020021646A priority patent/KR20030001236A/en
Publication of JP2003011064A publication Critical patent/JP2003011064A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/112Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/12Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method for a grindstone capable of providing a strong pressing pressure of abrasive grains and being suitable for grinding a three-dimensional shape. SOLUTION: This manufacturing method for the grindstone comprises a process for applying parting agent 3 for preventing the adhesion of the grindstone 17 to a surface of a workpiece 1, a process for charging a grindstone raw material 6 containing at least abrasive grains and bond into a space 5 having the similar shape as the workpiece 1, a process for stirring the grindstone raw material 6 in the space 5, and a process for solidifying or gelatinizing the liquidlike grindstone raw material 6. Since parting agent is supplied to the surface of the workpiece, a capillary phenomenon on the surface of the workpiece is reduced, and the grindstone can be easily released from the workpiece. Moreover, since the abrasive grain raw material is stirred in the space, the abrasive grains are three-dimensionally and uniformly dispersed when the liquidlike grindstone raw material is solidified or gelatinized.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、加工物の形状が転
写された形状転写砥石、形状転写砥石の製造方法、及び
形状転写砥石を用いた研磨方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape transfer grindstone to which a shape of a workpiece is transferred, a method for manufacturing the shape transfer grindstone, and a polishing method using the shape transfer grindstone.

【0002】[0002]

【従来の技術】技術革新の急速な進展と共に工業製品の
高精度化が求められている。この要求に伴い、研磨若し
くは研削加工の対称となる工業製品又は部品等の加工物
の形状は複雑化し、微細で高精度寸法、高い仕上げ面粗
さを要求される場合が多くなってきている。
2. Description of the Related Art With the rapid progress of technological innovation, high precision of industrial products is required. Along with this demand, the shape of a workpiece such as an industrial product or a part which is symmetrical with respect to polishing or grinding becomes complicated, and it is often demanded that a fine and highly accurate dimension and a high finished surface roughness are required.

【0003】ところが、この様な微細な表面仕上げ又は
高精度寸法を要求される加工物の最終仕上げは、現在に
おいても手作業に依存する場合が多い。この手作業の工
程を機械化又は省力化する事ができれば、加工コストの
低減化、作業工程時間の短縮化が図れる。また、このよ
うな手作業による研磨作業では、熟練工をもってして
も、加工面における鏡面研磨精度において限界がある。
However, the final finishing of a work requiring such a fine surface finish or high-precision dimensions often still depends on manual work. If the manual process can be mechanized or labor-saving, the processing cost and the work process time can be shortened. Further, in such a manual polishing work, even a skilled worker has a limit in the precision of mirror polishing on the processed surface.

【0004】このような状況下において、加工物の高精
度な鏡面研磨を実現する方法として、固体砥石を用いた
ELID研削が行われてきた。これは固体砥石に電界を
与え、ドレッシングを行いながら研磨・研削を行う方法
である。研磨面のスクラッチ(ひっかき傷)が少なく、
高い仕上げ精度が可能ではあるが、平面、円柱等形状が
限定された物に適用されている。
Under such circumstances, ELID grinding using a solid grindstone has been carried out as a method for realizing highly accurate mirror polishing of a workpiece. This is a method in which an electric field is applied to a solid grindstone to perform polishing and grinding while performing dressing. There are few scratches on the polishing surface,
High finishing accuracy is possible, but it is applied to objects with limited shapes such as planes and cylinders.

【0005】さらに、固体砥石以外では軟質ラッピング
砥石を用いた研磨方法がある。これは、ポリビニール・
アセタール、アルギン酸ナトリュウム等の高分子ラップ
材をセーム皮の表面に溶かし込んでラッピングを行う方
法であるが、研磨圧力(砥石押し付け圧)を大きく取れ
ないため研磨効率が悪い。
Further, there is a polishing method using a soft lapping grindstone other than the solid grindstone. This is polyvinyl
This is a method in which a polymer wrap material such as acetal or sodium alginate is melted on the surface of the chamois and lapping is performed, but the polishing efficiency is poor because the polishing pressure (grinding stone pressing pressure) cannot be large.

【0006】さらに、自由な形状を研磨する方法とし
て、結合剤に液体から固体に相変化を行う物質を用い
た、こんにゃく砥石、ゼラチン砥石、蝋砥石を用いた方
法がある。これらは液体で形状を作り固体化を行うこと
で、どんな形状の砥石でも自由に作ることができるとい
う長所があるが、加工物、砥粒、結合剤との間で毛細管
現象があるため、砥石の表面には砥粒の突き出し量がほ
とんどない。このため、研磨効率が悪い。
Further, as a method of polishing a free shape, there is a method of using a konjac grindstone, a gelatin grindstone, or a wax grindstone in which a substance that changes phase from liquid to solid is used as a binder. These have the advantage that any shape of grindstone can be made freely by forming a shape with a liquid and solidifying it, but because of the capillary phenomenon between the work piece, the abrasive grains, and the binder, the grindstone There is almost no protrusion of abrasive grains on the surface of. Therefore, the polishing efficiency is poor.

【0007】一方、本願の発明者らにより、磁界によっ
て砥粒の配列及び分散を制御することが可能な、砥粒を
含む磁性流体やMR流体等を用いた研磨方法が提案され
ている。本内容は磁性流体(砥粒を含む)を加工物表面
に浸漬し、所定の強さの磁界を磁性流体に与えた状態
で、磁性流体と加工物間に振動若しくは揺動等の相対運
動を行うことにより研磨を行う方法である。この様な磁
性流体を利用した研磨方法の例としては、特開平1−1
35466号公報、特開平4−336954号公報、特
開平4−41173号公報、特許第3081911号等
が挙げられる。
On the other hand, the inventors of the present application have proposed a polishing method using a magnetic fluid or an MR fluid containing abrasive grains, in which the arrangement and dispersion of the abrasive grains can be controlled by a magnetic field. This content is a magnetic fluid (including abrasive grains) immersed in the surface of the workpiece, and when a magnetic field of a predetermined strength is applied to the magnetic fluid, the magnetic fluid and the workpiece undergo relative motion such as vibration or oscillation. This is a method of polishing by performing. As an example of a polishing method using such a magnetic fluid, Japanese Patent Application Laid-Open No. 1-1 is known.
No. 35466, JP-A-4-336954, JP-A-4-41173, and Japanese Patent No. 3081911.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、この様
に砥粒を含む流体を加工面に浸漬し、加工物との間に相
対運動を与えることにより加工物を研磨するこれらの従
来の方法は、研磨材が流動性の高い液体であることか
ら、加工面に対する砥粒の押し付け圧力が弱く、研磨効
率が低い。したがって、加工物の研削及び研磨行程にお
ける最終工程に適用できるものの、研削工程若しくは研
磨中間工程には不向きである。
However, these conventional methods for polishing a work piece by immersing a fluid containing abrasive grains in the work surface and applying relative motion to the work piece in this way are as follows. Since the abrasive material is a highly fluid liquid, the pressing pressure of the abrasive particles against the processed surface is weak and the polishing efficiency is low. Therefore, although it can be applied to the final step in the grinding and polishing steps of the workpiece, it is not suitable for the grinding step or the polishing intermediate step.

【0009】また、従来技術において、磁性流体を用
い、所定の強さの磁界を与えることにより砥粒を配列制
御した状態で研磨しても、磁性流体の流動性によって研
磨効率は十分な物ではない。さらに、この磁性流体研磨
方法を3次元形状に適応すると、3次元形状の特徴であ
るコーナー部、シャープエッジの角が丸くなり、だれが
生じてしまうという問題がある。
Further, in the prior art, even if a magnetic fluid is used and polishing is performed in a state in which the abrasive grains are array-controlled by applying a magnetic field of a predetermined strength, the fluidity of the magnetic fluid does not provide sufficient polishing efficiency. Absent. Further, when this magnetic fluid polishing method is applied to a three-dimensional shape, there is a problem that the corners and sharp edges, which are the features of the three-dimensional shape, are rounded, causing sagging.

【0010】そこで、本発明は、砥粒の押し付け圧力が
強く、3次元形状を研磨するのに適した砥石の製造方
法、砥石及び研磨方法を提供することを目的とする。
Therefore, it is an object of the present invention to provide a method for manufacturing a grindstone, a grindstone and a polishing method, which are suitable for polishing a three-dimensional shape in which the pressing pressure of the abrasive grains is high.

【0011】[0011]

【課題を解決するための手段】上記課題を解決するため
に、本発明者は、砥粒を含有する流体砥石の長所である
自由形状性(加工物形状に合わせてその形を立体的に自
由に変形できること、さらに、狭い隙間から流し入れる
ことによって、人間の手や工具が入り込めないような狭
く閉鎖的な形状の内部に流体砥石を構成できる)を維持
し、固体砥石による研磨の長所である研磨圧力(砥石押
し付け圧)を大きくできることを可能にした。
In order to solve the above problems, the present inventor has taken advantage of the free shape property (the shape is three-dimensionally free according to the shape of a work piece) which is an advantage of a fluid grindstone containing abrasive grains. Can be deformed into a small shape, and by pouring it into a narrow gap, the fluid grinding stone can be configured inside a narrow and closed shape that human hands and tools cannot enter), which is an advantage of polishing with a solid grinding stone. It has become possible to increase the polishing pressure (grinding stone pressing pressure).

【0012】そして、本発明者は、表面の毛細管現象を
緩和する離型剤を加工物に塗布することで、砥粒の突き
出し量を確保しながら、加工物と相似形の液体で砥粒分
散の良い形状転写の砥石を作成し、この砥石の固体化を
おこなった。
Then, the present inventor applies a mold release agent for alleviating the capillary phenomenon on the surface to the workpiece to disperse the abrasive grains in a liquid similar in shape to the workpiece while securing the protrusion amount of the abrasive grains. A grindstone with a good shape transfer was created and this grindstone was solidified.

【0013】すなわち、請求項1の発明は、加工物の表
面に砥石が粘着するのを防止する離型材を塗布する工程
と、加工物と相似形の空間に少なくとも砥粒及び結合剤
を含む砥石原料を装入する工程と、該空間内で前記砥石
原料を攪拌する工程と、液体状の前記砥石原料を固化若
しくはゲル化させる工程とを備えることを特徴とする砥
石の製造方法により、上述した課題を解決した。
That is, the invention of claim 1 applies a step of applying a release material for preventing the grindstone from sticking to the surface of the workpiece, and a grindstone containing at least abrasive grains and a binder in a space similar to the workpiece. According to the method for manufacturing a grindstone, which comprises a step of charging a raw material, a step of stirring the grindstone raw material in the space, and a step of solidifying or gelling the liquid grindstone raw material, as described above. Solved the problem.

【0014】この発明によれば、加工物の表面に離型剤
を塗布するので、加工物の表面の毛細管現象が緩和し、
加工物から砥石を容易に離型できる。また、空間内で砥
粒原料が攪拌されるので、液体状の砥石原料が固化若し
くはゲル化する際に砥粒が3次元で均一に分散する(す
なわち砥粒の偏析が少なくなる)。これにより、いずれ
の表面にも砥粒の突き出しがあり、しかも砥粒の分散性
が良い固体砥石が得られるため、砥粒の押し付け圧力を
大きく取れると共に3次元自由形状の任意の面を研磨す
ることができる。
According to the present invention, since the mold release agent is applied to the surface of the workpiece, the capillary phenomenon on the surface of the workpiece is alleviated,
The grindstone can be easily released from the work piece. Further, since the abrasive grain raw material is stirred in the space, the abrasive grains are three-dimensionally and uniformly dispersed when the liquid grindstone raw material is solidified or gelled (that is, the segregation of the abrasive grains is reduced). As a result, a solid grindstone having abrasive grains protruding on any of the surfaces and having good dispersibility of the abrasive grains can be obtained, so that the pressing pressure of the abrasive grains can be made large and any three-dimensional free-form surface can be polished. be able to.

【0015】また、砥石と加工物との間にわずかな隙間
による凹凸があり、且つ、砥粒の分散性があるので、研
磨屑を除去しつつ微少ストロークでの研磨が確保でき
る。このような隙間を利用し、研磨による砥石減耗を促
進して砥石と加工物の隙間を増加させ、増加させた隙間
を利用して次面の研磨ストロークを確保することで、コ
ーナー部をダレさせない3次元形状の研磨も可能とな
る。
Further, since there is unevenness due to a slight gap between the grindstone and the workpiece and the dispersibility of the abrasive grains, it is possible to secure polishing with a minute stroke while removing polishing dust. By using such a gap, the wear of the grindstone due to polishing is promoted to increase the gap between the grindstone and the workpiece, and by using the increased gap to secure the polishing stroke of the next surface, the corner portion is not sagged It is also possible to polish a three-dimensional shape.

【0016】砥粒の比重は結合剤の比重よりも重いの
で、磁石原料を攪拌しないと砥粒が沈殿したまま液体状
の砥石原料が固化する。この場合、砥粒が沈殿している
砥石の底面では砥粒の突き出しがあり、加工物を研磨す
ることはできるが、砥石の側面では砥粒の突き出しが得
られず、研磨できないという問題が生じる。
Since the specific gravity of the abrasive grains is heavier than the specific gravity of the binder, if the magnet raw material is not stirred, the liquid grindstone raw material is solidified while the abrasive grains are precipitated. In this case, there is a protrusion of the abrasive grains on the bottom surface of the whetstone in which the abrasive grains are precipitated, and the workpiece can be polished, but the protrusion of the abrasive grains cannot be obtained on the side surface of the whetstone, which causes a problem that polishing cannot be performed. .

【0017】また、請求項2の発明は、前記離型剤には
砥粒が含まれていることを特徴とする。
Further, the invention of claim 2 is characterized in that the release agent contains abrasive grains.

【0018】砥石と加工面の凝着力があったり、加工面
は凹凸(仕上げ面粗さ)になっていたりするため、砥石が
加工物より離脱することが困難であり、離脱時に砥石形
状が崩れるおそれがある。この問題を解決する手段とし
て、砥粒を含む離型剤を加工面に塗布することで、加工
面凹凸(仕上げ面粗さ)の隙間に砥粒が遊離砥粒として充
填される。砥粒の転がり運動を利用して離型を行い、さ
らに加工面の凝着力を離型剤の層で緩和することで離型
がより容易になる。
Since the grindstone has a cohesive force with the machined surface and the machined surface has irregularities (finished surface roughness), it is difficult for the grindstone to separate from the workpiece, and the shape of the grindstone collapses during separation. There is a risk. As a means for solving this problem, a release agent containing abrasive grains is applied to the processed surface so that the abrasive grains are filled as free abrasive grains in the gaps of the processed surface irregularities (finished surface roughness). The rolling movement of the abrasive grains is used to perform the mold release, and the cohesive force on the machined surface is mitigated by the layer of the mold release agent, which facilitates the mold release.

【0019】請求項3の発明は、前記離型剤には前記結
合剤を溶解する成分が含まれていることを特徴とする。
The invention of claim 3 is characterized in that the release agent contains a component capable of dissolving the binder.

【0020】加工面の凹凸(仕上げ面粗さ)の隙間にある
砥粒の砥石側は砥石に締結しているため、離脱時に砥粒
の転がりを規制する。離型剤は、この締結力を除去する
ために砥石表面をわずかに溶解させる。
Since the grindstone side of the abrasive grains in the gap between the irregularities (finished surface roughness) of the processed surface is fastened to the grindstone, the rolling of the abrasive grains is regulated at the time of detachment. The release agent slightly dissolves the wheel surface to remove this fastening force.

【0021】請求項4の発明は、前記空間は、加工物の
形状が凹の場合は加工物の形状より僅かに小さく、加工
物の形状が凸の場合は加工物の形状よりわずかに大きい
ことを特徴とする。
According to a fourth aspect of the present invention, the space is slightly smaller than the shape of the workpiece when the shape of the workpiece is concave, and slightly larger than the shape of the workpiece when the shape of the workpiece is convex. Is characterized by.

【0022】3次元加工物においては、縦の一部、横の
一部、高さの一部の3方向に空間がないと、加工面の凹
凸(仕上げ面粗さ)や凝着力により、砥石を加工物より取
り出すことは不可能である。このため離型剤層の厚さだ
け加工物と異なる相似形の空間を形成する。
In the case of a three-dimensional workpiece, if there is no space in the three directions of the vertical part, the horizontal part and the height part, the grindstone will be generated due to the unevenness of the processed surface (finish surface roughness) and the adhesive force. Cannot be taken out of the work piece. Therefore, a space having a similar shape to that of the workpiece is formed by the thickness of the release agent layer.

【0023】請求項5の発明は、前記砥石原料には、磁
場感応性物質が含まれることを特徴とする。
The invention of claim 5 is characterized in that the grindstone raw material contains a magnetic field sensitive substance.

【0024】液体内での砥粒沈殿による分散悪さを減少
させる目的で磁場感応性物質(MnZn・Fe2O3、BaO・6Fe2O
3、NiZn・Fe2O3、Coγ・Fe2O3、γ・Fe2O3、パーマロ
イ、電磁軟鉄等)を砥石原料として配合し、液体又はゾ
ル状態の砥石原料に磁場を与えることで粘度効果と攪拌
効果により、砥粒の均一分散を確保できる。
The magnetic field-sensitive material for the purpose of reducing the abrasive grain precipitation by dispersing poor in the liquid (MnZn · Fe 2 O 3, BaO · 6Fe 2 O
3 , NiZn ・ Fe 2 O 3 , Coγ ・ Fe 2 O 3 , γ ・ Fe 2 O 3 , γ ・ Fe 2 O 3 , permalloy, electromagnetic soft iron, etc.) as the raw material for the grinding stone, and the viscosity is given by applying a magnetic field to the raw material in the liquid or sol state. Due to the effect and the stirring effect, it is possible to ensure uniform dispersion of the abrasive grains.

【0025】請求項6の発明は、前記空間内で砥石原料
を攪拌する工程では、磁場、機械的振動、あるいは電場
のいずれか一つを前記砥石原料に与え、又はこれらを併
用して前記砥石原料に与えることを特徴とする。
According to a sixth aspect of the present invention, in the step of stirring the grindstone raw material in the space, any one of a magnetic field, a mechanical vibration, and an electric field is applied to the grindstone raw material, or a combination of these is applied to the grindstone. Characterized by feeding to raw materials.

【0026】砥石原料が砥粒(電界の影響を受ける)、
磁場感応性物質(磁場の影響を受ける)、結合剤の3種
類以上を含む物質で構成されると、磁場または電界を砥
石原料(液体又はゾル状態)に与えることで攪拌が可能
である。また、上記3種類の物質はそれぞれ比重が異な
るため、機械的振動により攪拌が促進される。これら、
砥粒を分散させるためには、上記攪拌方法のどれか一つ
を適用しても良いし、2種以上の攪拌方法を併用しても
良い。
The raw material of the grindstone is abrasive grains (affected by the electric field),
When it is composed of a substance containing three or more kinds of a magnetic field sensitive substance (affected by a magnetic field) and a binder, stirring can be performed by applying a magnetic field or an electric field to a grindstone raw material (liquid or sol state). Further, since the three types of substances have different specific gravities, mechanical vibration promotes stirring. these,
In order to disperse the abrasive grains, any one of the above stirring methods may be applied, or two or more stirring methods may be used in combination.

【0027】請求項7の発明は、前記砥石原料に磁場を
与える場合、複数の磁場発生源を用い、互いに異なる複
数の方向から前記砥石原料に磁場を与えることを特徴と
する。
The invention of claim 7 is characterized in that, when a magnetic field is applied to the grindstone material, a plurality of magnetic field generating sources are used to apply the magnetic field to the grindstone material from a plurality of mutually different directions.

【0028】本発明では、液体又はゾル状態の砥石原料
に磁場による攪拌効果を与えている。さらに攪拌を良く
する目的で、2個以上の磁場発生源、望ましくは3個以
上の磁場発生源を上下、左右、縦横、斜め等に配置し、
磁場の方向を変え攪拌することで砥粒のより均一な分散
が行われる。
In the present invention, the stirring effect by the magnetic field is given to the grindstone raw material in the liquid or sol state. For the purpose of further improving the stirring, two or more magnetic field sources, preferably three or more magnetic field sources are arranged vertically, horizontally, vertically and horizontally, diagonally, etc.,
By changing the direction of the magnetic field and stirring, the abrasive grains are dispersed more uniformly.

【0029】請求項8の発明は、前記磁場発生源にはコ
イルが設けられ、該コイルには交流が流され、あるいは
該コイルに流される電流がON−OFF制御され、ある
いは該コイルに流される電流が変化されることを特徴と
する。
According to an eighth aspect of the present invention, a coil is provided in the magnetic field generation source, an alternating current is made to flow through the coil, or an electric current made to flow in the coil is ON-OFF controlled, or is made to flow in the coil. It is characterized in that the current is changed.

【0030】この発明によれば、砥石原料に与える磁場
の方向を変えたり、砥石原料に磁場強弱を与えたりする
ことで、攪拌効果を増大させることができる。
According to the present invention, the stirring effect can be increased by changing the direction of the magnetic field applied to the grindstone raw material or by applying the magnetic field strength to the grindstone raw material.

【0031】請求項9の発明は、前記磁場による攪拌
は、砥石原料が固化する前に行われることを特徴とす
る。
The invention of claim 9 is characterized in that the stirring by the magnetic field is performed before the grindstone raw material is solidified.

【0032】周知のとおり砥石原料固化後では強磁場を
与えても砥粒がほとんど移動しない。必要以上の無駄な
エネルギーを与えれば、固体砥石内に微少なクラックを
生じさせるおそれがある。このため適度な固化進行状態
まで磁場を与えることで、エネルギー効率が良く、クラ
ックのない、強固な固体砥石が作成できる。
As is well known, after the grinding stone raw material is solidified, the abrasive grains hardly move even when a strong magnetic field is applied. Applying more energy than is necessary may cause minute cracks in the solid grindstone. Therefore, by applying a magnetic field to an appropriate solidification progress state, it is possible to create a solid solid grindstone having good energy efficiency and no cracks.

【0033】請求項10の発明は、前記砥石原料は前記
空間内への装入される時点では粉体又は液体であり、前
記空間内へ装入される時点で前記砥石原料が粉体の場合
は、前記空間内で砥石原料を液体状態にし、その後空間
内で前記砥石原料を攪拌することを特徴とする。
According to a tenth aspect of the present invention, the grindstone raw material is powder or liquid at the time of being charged into the space, and the grindstone raw material is powder at the time of being charged into the space. Is characterized in that the grindstone raw material is brought into a liquid state in the space, and then the grindstone raw material is stirred in the space.

【0034】この発明は、融点の高い結合剤を取り扱う
場合の安全性・取り扱い性を考慮している。融点が高い
結合剤を取り扱うと火傷などの事故となりやすいので、
空間内に温度の低い状態で砥石原料を挿入することとし
た。つまり、融点の低い結合剤では砥石原料を液体状態
で挿入し、融点の高い結合剤では砥石原料を粉体で挿入
し、空間内で溶融させる。
The present invention considers the safety and handleability when handling a binder having a high melting point. Handling a binder with a high melting point may cause accidents such as burns.
It was decided to insert the grindstone raw material into the space at a low temperature. That is, with a binder having a low melting point, the grindstone raw material is inserted in a liquid state, and with a binder having a high melting point, the grindstone raw material is inserted as powder and melted in the space.

【0035】請求項11の発明は、加工物と相似形の空
間に少なくとも砥粒、結合剤及び磁場感応性物質を含む
砥石原料を装入する工程と、複数の磁場発生源を用い、
互いに異なる複数の方向から前記砥石原料に磁場を与え
ることによって、前記空間内で前記砥石原料を攪拌する
工程と、液体状の砥石原料を固化若しくはゲル化させる
工程とを備えることを特徴とする砥石の製造方法によ
り、上述した課題を解決した。
According to the invention of claim 11, a step of charging a grindstone raw material containing at least abrasive grains, a binder and a magnetic field sensitive substance into a space having a shape similar to that of the workpiece, and using a plurality of magnetic field generation sources,
By applying a magnetic field to the grindstone raw material from a plurality of directions different from each other, a step of stirring the grindstone raw material in the space, and a step of solidifying or gelling the liquid grindstone raw material The above-mentioned problems have been solved by the manufacturing method.

【0036】この発明によれば、複数の磁場発生源を上
下、左右、縦横、斜め等に配置し、磁場の方向を変え攪
拌することで砥粒のより均一な分散が行われる。液体状
の砥石原料が固化若しくはゲル化する際に砥粒が3次元
で略均一に分散するので、固体砥石のいずれの表面にも
砥粒の突き出しがあり、3次元自由形状の任意の面を研
磨するのに適した砥石が得られる。これに対し、砥石原
料に一方向のみから磁場を与えた場合、砥粒を2次元的
には略均一に分散させることはできるが、3次元的に略
均一に分散(例えば網目のように分散、あるいはビルデ
ィングの窓のように分散)させることができない。
According to the present invention, a plurality of magnetic field generation sources are arranged vertically, horizontally, vertically and horizontally, obliquely, etc., and the direction of the magnetic field is changed to stir, whereby more uniform dispersion of the abrasive grains is performed. Since the abrasive particles are three-dimensionally and substantially evenly dispersed when the liquid grindstone raw material is solidified or gelled, there is protrusion of the abrasive particles on any surface of the solid grindstone, and any surface of the three-dimensional free shape can be formed. A grindstone suitable for polishing is obtained. On the other hand, when a magnetic field is applied to the grindstone raw material from only one direction, the abrasive grains can be two-dimensionally and substantially evenly dispersed, but three-dimensionally and substantially uniformly (for example, dispersed like a mesh). , Or dispersed like a building window).

【0037】請求項12の発明は、少なくとも砥粒及び
結合剤を含む液体状の砥石原料を加工物の形状に合わせ
て固化若しくはゲル化させた砥石であって、前記砥粒は
砥石内に3次元的に略均一に分布されていることを特徴
とする砥石により、上述した課題を解決した。ここで、
3次元的に略均一に分布とは、砥粒がX,Y,Zいずれ
の方向においても略均等間隔を開けて略等ピッチで配置
されていることをいう。
According to a twelfth aspect of the present invention, there is provided a grindstone in which a liquid grindstone raw material containing at least abrasive grains and a binder is solidified or gelled in accordance with the shape of a workpiece. The above-mentioned problems have been solved by a grindstone characterized by being distributed substantially evenly in dimensions. here,
The expression “three-dimensionally substantially evenly distributed” means that the abrasive grains are arranged at substantially equal intervals in any of the X, Y, and Z directions and at substantially equal pitches.

【0038】この発明によれば、上述の理由で3次元自
由形状の任意の面を研磨するのに適した砥石が得られ
る。
According to the present invention, a grindstone suitable for polishing an arbitrary surface having a three-dimensional free shape can be obtained for the above reason.

【0039】請求項13の発明は、加工物と相似形の空
間に少なくとも砥粒及び結合剤を含む砥石原料、並びに
砥石を保持する砥石保持部を装入する工程と、液体状の
前記砥石原料を固化若しくはゲル化させる工程とを備え
ることを特徴とする砥石の製造方法により、上述した課
題を解決した。
According to a thirteenth aspect of the present invention, a step of charging a grindstone raw material containing at least abrasive grains and a binder and a grindstone holding portion for holding the grindstone into a space similar to the workpiece, and the liquid grindstone raw material The above-mentioned problem is solved by a method for manufacturing a grindstone, which comprises a step of solidifying or gelling.

【0040】砥石を加工物に対して相対運動させるため
には、砥石に砥石保持部を取り付ける必要がある。この
発明によれば、砥石保持部に砥石をしっかりと保持させ
ることができる。
In order to move the grindstone relative to the workpiece, it is necessary to attach a grindstone holding portion to the grindstone. According to the present invention, the whetstone can be firmly held by the whetstone holding portion.

【0041】請求項14の発明は、前記砥石の製造方法
は、さらに、磁場発生源を用い、前記砥石原料に磁場を
与えることによって、前記空間内で前記砥石原料を攪拌
する工程を備え、前記砥石保持部が磁場回路の一部とな
ることを特徴とする。
According to a fourteenth aspect of the present invention, the method for manufacturing a grindstone further comprises a step of stirring the grindstone raw material in the space by applying a magnetic field to the grindstone raw material using a magnetic field source. It is characterized in that the grindstone holding portion becomes a part of the magnetic field circuit.

【0042】この発明は加工物内面に強磁場を与えるこ
とができる構造を示している。砥石保持部が磁場回路の
一部となっていることで、磁場回路の磁気抵抗が下が
り、弱い磁場発生源でも磁場を強くすることが可能であ
り、加工物形状に合わせた磁場攪拌が可能である。
The present invention shows a structure capable of applying a strong magnetic field to the inner surface of the workpiece. Since the grindstone holding part is part of the magnetic field circuit, the magnetic resistance of the magnetic field circuit is reduced, and it is possible to strengthen the magnetic field even with a weak magnetic field source, and magnetic field stirring according to the shape of the workpiece is possible. is there.

【0043】請求項15の発明は、前記砥石保持部又は
その近傍にコイルが設けられることを特徴とする。
A fifteenth aspect of the invention is characterized in that a coil is provided in the grindstone holding portion or in the vicinity thereof.

【0044】流体状の砥石近傍に磁場発生源であるコイ
ルを配置することにより、砥粒攪拌の制御がしやすくな
る。周知の通り、磁力線は磁場発生源に対し距離が一番
近いところの影響をもっとも受けやすい。このため、砥
石保持部か砥石保持部近傍に磁場発生源であるコイルの
形成を行った。また、磁場発生源はコイル以外に永久磁
石を用いても同様の効果がある。
By disposing a coil, which is a magnetic field generating source, in the vicinity of the fluid grindstone, it becomes easy to control the stirring of the abrasive grains. As is well known, the magnetic field lines are most susceptible to the effect of being closest to the magnetic field source. Therefore, a coil, which is a magnetic field generation source, was formed in the grindstone holding portion or in the vicinity of the grindstone holding portion. Further, the same effect can be obtained by using a permanent magnet as the magnetic field generation source other than the coil.

【0045】請求項16の発明は、前記砥石保持部が複
数本の支柱を有することを特徴とする。
The invention of claim 16 is characterized in that the grindstone holding portion has a plurality of columns.

【0046】砥石を多数の支柱で支えることで上下、左
右、前後、斜め方向等の砥石保持力増加効果を持つ。こ
のため段を設けた支柱、屈曲させた支柱も本発明に含ま
れる。また、多数の支柱を配置することにより、加工物
形状に適応した磁場攪拌が可能となる。
Supporting the whetstone with a large number of columns has the effect of increasing the whetstone holding force in the up / down, left / right, front / rear, and diagonal directions. Therefore, the present invention includes a column provided with a step and a column which is bent. In addition, by arranging a large number of columns, magnetic field agitation adapted to the shape of the workpiece becomes possible.

【0047】請求項17の発明は、前記砥石保持部と前
記砥石との締結面積を大きくとれるように、前記砥石保
持部に溝あるいは段差が形成され、又は前記砥石保持部
に他部品が取り付けられることを特徴とする。
According to a seventeenth aspect of the present invention, a groove or a step is formed in the whetstone holding portion, or another component is attached to the whetstone holding portion so that the fastening area between the whetstone holding portion and the whetstone can be increased. It is characterized by

【0048】固化した砥石の強度は十分ではないので、
加工物から砥石を取り出す時に砥石の変形、割れ等が発
生しやすい。また研磨圧力を大きく取ろうとするとき
に、本砥石結合部に大きな力が加わる。これらの強度を
増するため、砥石結合部に溝、段差、他部品を取り付け
る等により、等価的に砥石締結面積を増加することで砥
石強度を増加する。
Since the strength of the solidified grindstone is not sufficient,
When taking out the grindstone from the work piece, the grindstone is likely to be deformed or cracked. Further, when trying to obtain a large polishing pressure, a large force is applied to the main wheel joint portion. In order to increase these strengths, the grindstone strength is increased by equivalently increasing the grindstone fastening area by attaching grooves, steps, or other parts to the grindstone coupling portion.

【0049】請求項18の発明は、前記砥石保持部の磁
場回路に軟磁性体を使用したことを特徴とする。
The invention of claim 18 is characterized in that a soft magnetic material is used in the magnetic field circuit of the grindstone holding portion.

【0050】周知のとおり、磁場回路は磁気抵抗が低い
ほど強磁場になる。このため、磁場回路に一般の鉄系、
コバルト系の強磁性体を用いると強磁場にはなるが、残
留磁気が残るので磁場攪拌が良好に行われない。この対
策として磁気回路には磁気抵抗を低くし、強磁性体で残
留磁気の少ないパーマロイ、電磁軟鉄、珪素鋼等の軟磁
性体を使用する。
As is well known, the lower the magnetic resistance of the magnetic field circuit, the stronger the magnetic field. Therefore, general iron-based magnetic field circuit,
If a cobalt-based ferromagnetic material is used, a strong magnetic field will be obtained, but since residual magnetism remains, magnetic field stirring cannot be performed well. As a countermeasure against this, a soft magnetic material such as permalloy, electromagnetic soft iron, or silicon steel, which has a low magnetic resistance and a small residual magnetism, is used in the magnetic circuit.

【0051】請求項19の発明は、少なくとも砥粒及び
結合剤を含む砥石原料を加工物の形状に合わせて固化若
しくはゲル化させた砥石であって、液体状の砥石原料を
固化若しくはゲル化させることによって砥石を保持する
砥石保持部と砥石とを締結させたことを特徴とする砥石
により、上述した課題を解決した。
According to a nineteenth aspect of the present invention, there is provided a grindstone in which a grindstone raw material containing at least abrasive grains and a binder is solidified or gelled in accordance with the shape of a workpiece, and the liquid grindstone raw material is solidified or gelled. The above problem is solved by the grindstone characterized in that the grindstone holding portion for holding the grindstone is fastened to the grindstone.

【0052】この発明によれば、砥石を加工物に対して
相対運動させるために砥石に砥石保持部を取り付ける必
要がある。この発明によれば、砥石保持部に砥石をしっ
かりと保持させることができる。
According to the present invention, it is necessary to attach the grindstone holding portion to the grindstone in order to move the grindstone relative to the workpiece. According to the present invention, the whetstone can be firmly held by the whetstone holding portion.

【0053】請求項20の発明は、砥石を加工物に対し
て相対運動することで加工物が研磨され、前記相対運動
には、砥石保持部が利用されることを特徴とする。
The invention of claim 20 is characterized in that the workpiece is polished by moving the grindstone relative to the workpiece, and the grindstone holding portion is used for the relative movement.

【0054】固化した砥石の強度は十分ではないので、
砥石保持部がない砥石での研磨は砥石カケ、変形が発生
し、研磨圧力が大きくできない。このため研磨時間が長
くなり、研磨ムラが発生しやすい。研磨圧力を大きくす
るには、砥石との締結面積を大きくした、強固な砥石保
持部が必要である。このように、砥石の締結面積を砥石
結合部で確保し、この砥石保持部の一端に研磨相対運動
と研磨圧力を与えることで、研磨圧力の増大ができ、研
磨ムラ、研磨時間の短縮が可能となる。
Since the strength of the solidified grindstone is not sufficient,
Grinding with a whetstone without a whetstone holding part causes whetstone chipping and deformation, and the polishing pressure cannot be increased. Therefore, the polishing time becomes long and uneven polishing is likely to occur. In order to increase the polishing pressure, it is necessary to have a strong whetstone holding portion with a large fastening area with the whetstone. In this way, the fastening area of the grindstone is secured by the grindstone coupling part, and the relative polishing motion and the polishing pressure are applied to one end of this grindstone holding part, so that the polishing pressure can be increased, and the uneven polishing and the polishing time can be shortened. Becomes

【0055】請求項21の発明は、少なくとも砥粒及び
結合剤を含む液体状の砥石原料を加工物の形状に合わせ
て固化若しくは液化させた砥石を、加工物の加工面に押
し付け、加工物と砥石との間に相対運動を与える研磨方
法において、加工物に対して砥石が相対運動可能な第一
の方向に砥石を相対運動させることによって、加工物の
第一面を研磨し、砥石を減耗する一次工程と、砥石の減
耗によって生じた加工物の前記第一面と砥石との隙間を
利用して、前記第一の方向と異なる第二の方向に砥石を
相対運動させることによって、加工物の第二面を研磨す
る二次工程とを備えることを特徴とする研磨方法によ
り、上述した課題を解決した。ここで第一及び第二の方
向は回転方向でも、直線方向でもよい。
According to a twenty-first aspect of the present invention, a grindstone obtained by solidifying or liquefying a liquid grindstone raw material containing at least abrasive grains and a binder in accordance with the shape of the work is pressed against the processed surface of the work, In a polishing method that gives relative movement to the grindstone, the first surface of the work piece is polished and the whetstone is depleted by moving the grindstone in the first direction in which the grindstone can move relative to the work piece. Using a gap between the first step and the grindstone of the workpiece caused by the wear of the grindstone, by performing relative movement of the grindstone in a second direction different from the first direction, the workpiece The above-mentioned problem is solved by a polishing method characterized by including a secondary step of polishing the second surface of the. Here, the first and second directions may be rotational directions or linear directions.

【0056】本発明は、積極的に砥石の減耗を促進さ
せ、この砥石減耗を次の面への研磨動作ストロークと関
連させている。すなわち、砥石減耗による隙間を確保
し、この隙間に相当した、相対運動のストロークと相対
運動の方向を砥石に与え加工物を研磨する。具体的に
は、固体の砥石を用いて加工物を研磨する際の相対運動
において、加工物内で砥石の可動可能な距離がもっとも
大きい方向から相対運動を行うことで、砥石は減耗す
る。これにより、砥石減耗部と加工物の第一面との隙間
が増加する。この隙間ができることにより、加工物の第
二面の相対運動のストローク量を確保し、砥石を相対運
動させて研磨を行う。したがって、3次元の自由形状の
複数の面を研磨することができる。
The present invention positively promotes wheel wear and relates this wheel wear to the stroke of the polishing action to the next surface. That is, a gap due to wear of the grindstone is secured, and a stroke of relative motion and a direction of relative motion corresponding to this gap are given to the grindstone to polish the workpiece. Specifically, in the relative movement when polishing a workpiece using a solid grindstone, the relative movement is performed from the direction in which the movable distance of the grindstone is the largest in the workpiece, so that the grindstone wears down. This increases the gap between the grindstone depleted portion and the first surface of the workpiece. By forming this gap, the stroke amount of the relative movement of the second surface of the workpiece is secured, and the grindstone is moved relative to the polishing. Therefore, a plurality of three-dimensional free-form surfaces can be polished.

【0057】請求項21の発明は、前記研磨方法は、さ
らに砥石の減耗によって生じた加工物の前記第二面と砥
石との隙間を利用して、前記第二の方向と異なる第三の
方向に砥石を相対運動させることによって、加工物の第
三面を研磨する三次工程とを備えることを特徴とする。
According to a twenty-first aspect of the present invention, in the polishing method, a gap between the second surface of the workpiece and the grindstone caused by wear of the grindstone is further utilized to make a third direction different from the second direction. And a third step of polishing the third surface of the workpiece by relatively moving the grindstone.

【0058】砥石の減耗面と加工物の第二面との隙間が
相対運動による砥石減耗で増加する。逐次砥石が減耗す
ることにより、砥石は徐々に小さくなる。これにより、
砥石の相対運動のストロークが確保され、可動可能な方
向を増大する。したがって、3次元自由形状を持つ加工
物の研磨ができる。
The clearance between the worn surface of the grindstone and the second surface of the workpiece increases due to the grindstone wear due to the relative movement. As the grindstone wears successively, the grindstone becomes smaller gradually. This allows
The stroke of relative movement of the grindstone is secured, and the movable direction is increased. Therefore, a workpiece having a three-dimensional free shape can be polished.

【0059】請求項23の発明は、前記砥石の表面に結
合剤を溶解する砥石溶解液を塗布する工程を備えること
を特徴とする。
A twenty-third aspect of the present invention is characterized by including a step of applying a grindstone dissolving solution for dissolving a binder to the surface of the grindstone.

【0060】砥石溶解液を砥石表面に塗布すると、砥石
と加工物との間の相対運動による減耗が促進する。ま
た、この減耗効果は砥石表面の温度を融点に近づけるこ
とにより促進される。
When the grindstone solution is applied to the surface of the grindstone, the wear due to the relative movement between the grindstone and the workpiece is accelerated. Further, this wear reduction effect is promoted by bringing the temperature of the grindstone surface close to the melting point.

【0061】請求項24の発明は、前記砥石溶解液を塗
布する工程が繰り返されることを特徴とする。
The invention of claim 24 is characterized in that the step of applying the grindstone dissolving liquid is repeated.

【0062】相対運動によって砥石を減耗させると、砥
石屑及び砥石溶解液が加工物の内面より徐々に排出され
る。従って、砥石溶解液を逐次塗布させることで、一定
の減耗量を砥石に与えることが可能である。
When the grindstone is depleted by relative movement, grindstone scraps and grindstone solution are gradually discharged from the inner surface of the workpiece. Therefore, it is possible to give a constant amount of wear to the grindstone by successively applying the grindstone dissolving liquid.

【0063】請求項25の発明は、前記研磨方法は、さ
らに加工物の表面に砥石が加工物の表面に粘着するのを
防止する離型剤を塗布する工程を備え、該離型剤と前記
砥石溶解液が兼用されることを特徴とする。
According to a twenty-fifth aspect of the present invention, the polishing method further comprises a step of applying a release agent to the surface of the workpiece so as to prevent the grindstone from adhering to the surface of the workpiece. The feature is that the grindstone solution is also used.

【0064】本発明は、砥石溶解液、離型剤など薬品が
ふえて作業者ミスが起きる可能性を防止する方法であ
る。離型剤と砥石溶解液を兼用する事により、種類が少
なく作業者ミスを最小限にすることができる。
The present invention is a method for preventing the possibility of operator error due to the addition of chemicals such as a grindstone solution and a release agent. By using both the release agent and the grindstone solution, the number of types is small and operator error can be minimized.

【0065】請求項26の発明は、砥石減耗屑や研磨屑
を研磨面から排除するために、研磨物に送風を行う工程
を備えることを特徴とする。
The invention of claim 26 is characterized by comprising a step of blowing air to the polishing object in order to remove grinding wheel debris and polishing chips from the polishing surface.

【0066】本発明は、加工物面上の砥石減耗屑、研磨
屑、などによる研磨ムラを防止する方法である。適当な
送風を加工物に与え、上記屑を加工面内部から排出する
ことで安定した研磨面を得ることができる。
The present invention is a method for preventing uneven polishing due to grindstone abrasion debris, polishing debris, etc. on the surface of a workpiece. A stable polishing surface can be obtained by applying an appropriate air flow to the workpiece and discharging the scraps from the inside of the processing surface.

【0067】請求項27の発明は、前記砥石は、あらか
じめ設定された回数の研磨動作を完了させた後、次の面
の研磨を行うように制御されていることを特徴とする。
A twenty-seventh aspect of the present invention is characterized in that the grindstone is controlled so as to polish the next surface after completing a preset number of polishing operations.

【0068】砥粒を含む液体を固化した砥石を加工物の
加工面に押し付け、加工物と砥石との間に相対運動を与
えた場合、砥石減耗量と研磨動作(例えば往復運動)の
回数との相関性がうまれる。この相関性を利用すると、
あらかじめ設定された回数の研磨動作を終了させ、次の
面を研磨する相対運動方向、相対運動ストローク、研磨
圧力等の研磨条件を設定できる。このことにより、人の
関与がない自動研磨が可能となる。
When a grindstone in which a liquid containing abrasive grains is solidified is pressed against the work surface of a workpiece and relative movement is applied between the work and the grindstone, the abrasion loss of the grindstone and the number of polishing operations (for example, reciprocating motion) and The correlation of Using this correlation,
It is possible to finish the preset number of polishing operations and set the polishing conditions such as the relative movement direction for polishing the next surface, the relative movement stroke, and the polishing pressure. This allows automatic polishing without human involvement.

【0069】[0069]

【発明の実施の形態】本発明では、砥粒を含有する粉体
又は液体を、離型剤を塗布した加工物に充填し、液体状
態で攪拌させ、固化させ加工物に相似形の固体砥石を製
作する。このため、本発明は少量生産若しくは単品生産
に対応した研磨方法である。また、本発明は、人の手の
届かない箇所、狭い空間を持つ加工物など、加工物全般
にわたる幅広い適応範囲を有する。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, a powder or liquid containing abrasive grains is filled in a work piece coated with a release agent, stirred in a liquid state and solidified to solidify a grindstone similar to the work piece. To produce. Therefore, the present invention is a polishing method corresponding to small-quantity production or single-item production. In addition, the present invention has a wide range of application over the entire workpiece, such as a place that is out of reach of humans and a workpiece having a narrow space.

【0070】本発明の具体的な利用分野は、砥粒加工の
全般にわたる。主な利用分野例としては光学分野とし
て、眼鏡レンズ、特定形状のプリズム、ミラー等を挙げ
ることができる。また各種工業製品の金型、ケーシング
部品、宝飾品、時計部品等、さらに高度な寸法精度が要
求されるゲージ類、シリンダー、軸受け、ベアリング、
カム、歯車等の研削及び研磨にも適応できる。また半導
体分野では集積回路の基本となるシリコンウェハの仕上
げ、特殊な例としては入れ歯、人工骨、等の医療製品に
も適用できる。
A particular field of application of the present invention is in the general area of abrasive grain processing. Examples of main fields of use include spectacle lenses, prisms of specific shapes, mirrors, and the like as optical fields. In addition, dies for various industrial products, casing parts, jewelry, watch parts, etc., gauges, cylinders, bearings, bearings, etc. that require higher dimensional accuracy.
It can also be applied to grinding and polishing of cams, gears, etc. Further, in the field of semiconductors, it can be applied to the finishing of silicon wafers, which are the basis of integrated circuits, and as a special example, medical products such as dentures and artificial bones.

【0071】以下、本発明の砥粒を含む砥石原料で形状
転写砥石(形状適合性砥石)を作成する砥石の製造方
法、並びに砥石を用いて研磨を行う研磨方法を説明す
る。
Hereinafter, a method for manufacturing a grindstone for forming a shape transfer grindstone (shape conforming grindstone) using a grindstone raw material containing the abrasive grains of the present invention, and a polishing method for polishing using the grindstone will be described.

【0072】本発明に係る研磨方法の適応領域は上記し
たように広範囲に及ぶため、使用する砥粒及び砥粒を含
有させた砥石原料の配合内容は加工物の材質、形状、仕
上げ程度に応じて定まることになる。
Since the applicable range of the polishing method according to the present invention covers a wide range as described above, the content of the abrasive grains to be used and the content of the grinding stone raw material containing the abrasive grains to be used depend on the material, shape and finish of the workpiece. Will be decided.

【0073】使用する砥粒の材質としては、磁気感応性
砥粒の場合は、具体的には酸化鉄(Fe2O3、Fe3O4)、コー
ティング砥粒(SiCにメッキ、ダイヤモンドにメッキ)、
非磁性砥粒としてはアルミナ(Al2O3)、シリカ(SiO3)、
炭化珪素(SiC)、ダイヤモンド(C)等が挙げられる。砥粒
の粒子径は要求される仕上げ精度が高ければ高いほど粒
子径の小さな物を用いる。
As the material of the abrasive grains used, in the case of the magnetically sensitive abrasive grains, specifically, iron oxide (Fe 2 O 3 , Fe 3 O 4 ), coating abrasive grains (SiC plated, diamond plated) ),
As non-magnetic abrasive grains alumina (Al 2 O 3 ), silica (SiO 3 ),
Examples thereof include silicon carbide (SiC) and diamond (C). Regarding the particle size of the abrasive grains, the higher the required finishing accuracy, the smaller the particle size used.

【0074】また、結合剤としては、水、各種オイル、
蝋(ロウ)、石鹸、オレイン酸等を挙げることができ
る。結合剤は1種類の場合もあれば、数種類の場合もあ
る。また砥粒及び磁気感応性物質の凝結を防止するため
には界面活性剤を加えると良い。
As the binder, water, various oils,
Wax, soap, oleic acid, etc. can be mentioned. The binder may be one kind or several kinds. Further, a surfactant may be added to prevent the abrasive grains and the magnetically sensitive substance from coagulating.

【0075】液体から固体に相変化をさせる方法とし
て、融点温度以下ではゲル又は固体、融点温度以上では
ゾル又は液体となる温度相変化を利用する方法を挙げる
ことができる。油脂の場合は温度相変化の他に化学反応
を利用する方法が考えられる。また高分子結合剤の場合
は光重合反応を利用する方法が考えられる。
As a method of changing the phase from a liquid to a solid, there can be mentioned a method of utilizing a temperature phase change of gel or solid at a melting point temperature or lower and sol or liquid at a melting point temperature or higher. In the case of fats and oils, a method of utilizing a chemical reaction in addition to the temperature phase change can be considered. Further, in the case of a polymer binder, a method utilizing a photopolymerization reaction can be considered.

【0076】ゲル化若しくは固化させる前に液体中にお
ける砥粒の分散を制御する方法は、本発明においてきわ
めて重要である。加工物の加工面と接する砥石面は、砥
粒状態により、研磨速度、研磨精度及び研磨効率に大き
な影響が与えられるからである。砥石原料は比重の異な
る結合剤、磁気感応性物質、及び砥粒が含まれているた
め、液体状態では砥粒の沈殿と偏析が発生し、研磨面の
有効砥粒数がばらつく。加工物が3次元形状の場合に
は、この有効砥粒数を3次元形状内で均一に制御する必
要がある。
A method of controlling the dispersion of abrasive grains in a liquid before gelation or solidification is extremely important in the present invention. This is because the grindstone surface in contact with the processed surface of the workpiece has a great influence on the polishing rate, polishing accuracy, and polishing efficiency depending on the state of the abrasive grains. Since the raw material of the grindstone contains a binder having different specific gravity, a magnetically sensitive substance, and abrasive grains, precipitation and segregation of the abrasive grains occur in a liquid state, and the number of effective abrasive grains on the polishing surface varies. When the workpiece has a three-dimensional shape, it is necessary to uniformly control the number of effective abrasive grains within the three-dimensional shape.

【0077】磁性を含む流体と加工物を磁界環境下にお
いた場合、磁気感応性物質は磁力線に沿って配列する。
また単位面積当たりの磁力線の数は、磁界強度に比例す
るので、磁場強度を制御することにより磁気感応性物質
の密度を制御することができる。磁場強度を与える方向
を上下、左右、前後等に変化させることで、磁場感応性
物質が液体中で攪拌するため、砥粒もそれにつられて攪
拌される。このようにして、液体中における砥粒の分布
を要求に応じて制御することができる。
When the fluid containing magnetism and the workpiece are placed in a magnetic field environment, the magnetically responsive substance is arranged along the magnetic field lines.
Further, since the number of magnetic lines of force per unit area is proportional to the magnetic field strength, the density of the magnetically sensitive substance can be controlled by controlling the magnetic field strength. By changing the direction in which the magnetic field strength is applied to up, down, left, right, front and back, the magnetic field sensitive substance stirs in the liquid, so that the abrasive grains are also stirred accordingly. In this way, the distribution of abrasive grains in the liquid can be controlled as required.

【0078】磁性を含む流体の場合は磁場環境下におい
て、荷電砥粒を用いる場合は電界環境下において、それ
ぞれ固化させる際に液体中における砥粒の分散を制御す
る。
The dispersion of the abrasive grains in the liquid is controlled at the time of solidification under the magnetic field environment in the case of the fluid containing magnetism and under the electric field environment in the case of using the charged abrasive grains.

【0079】荷電砥粒を使用する場合は、砥粒はプラス
又はマイナスの一方の電荷に帯電させるので、両方の極
性(N極とS極)を常時併せ持つ磁性流体やMR流体の
場合とは異なり、荷電砥粒相互間には反発力が生じてい
る。荷電砥粒自体が液体内において均一に分布しようと
する力が働いているので、必ずしも固化若しくはゲル化
させる際に電界環境下で行わせる必要はない。しかし、
電界を加えて液体における荷電砥粒の分布を制御するこ
とで、分布の状態がより均一となる。
When the charged abrasive grains are used, the abrasive grains are charged to one of positive and negative charges, which is different from the case of a magnetic fluid or an MR fluid that always has both polarities (N pole and S pole). A repulsive force is generated between the charged abrasive grains. Since the charged abrasive grains themselves exert a force to evenly distribute them in the liquid, it is not always necessary to perform the solidification or gelation in an electric field environment. But,
By controlling the distribution of the charged abrasive grains in the liquid by applying an electric field, the distribution state becomes more uniform.

【0080】ゲル化若しくは固化させた砥粒を含む砥石
は、加工物の被加工面との間で振動若しくは振動等の相
対運動を起こすことによって、研削若しくは研磨を行
う。固化の状態によっては、本砥石と加工面との間が密
着状態に接合している場合がある。このような状態のま
ま、相互間に相対運動をさせようとしても研磨効率が悪
い。そこでこのような場合は、砥石と加工面との接触面
に砥石溶解液を塗布し砥石表面をわずかに溶かした状態
にして相対運動をおこなう。この他、本砥石と加工面と
の接触面を溶かす方法としては、砥石表面を凝固点より
も高くする温度制御方法、または、加工物の被加工面に
砥石よりも凝固点の低い薬品等を塗布しておく等の方法
がある。
A grindstone containing gelled or solidified abrasive grains is ground or polished by causing relative motion such as vibration or vibration with respect to the surface of a workpiece to be processed. Depending on the state of solidification, there may be a case where the main grindstone and the processed surface are in close contact with each other. In such a state, polishing efficiency is poor even if relative movement is attempted between them. Therefore, in such a case, relative movement is performed with the whetstone dissolving liquid applied to the contact surface between the whetstone and the processed surface to slightly melt the whetstone surface. In addition, as a method of melting the contact surface between the main grindstone and the processed surface, a temperature control method for raising the surface of the grindstone above the freezing point, or applying a chemical having a lower freezing point than the grindstone to the work surface of the workpiece There is a method such as keeping.

【0081】本砥石と加工物間で相対運動を生じさせる
方法として、機械力を用いて振動を生じさせる他に、磁
性による力、電界による力を利用し研磨する方法、さら
に、磁性による力と機械力を併用させる方法や電界によ
る力と機械力を併用させる方法や磁性による力と電界に
よる力を併用させる方法も採用しうる。
As a method of causing relative motion between the main grindstone and the workpiece, in addition to generating vibration by using mechanical force, a method of polishing by using force by magnetism or force by electric field, and further by force by magnetism A method in which mechanical force is used in combination, a method in which electric field and mechanical force are used in combination, and a method in which magnetic force and electric field are used in combination may be employed.

【0082】相対運動の方向は、加工物の加工面の形状
に応じて、平面であるならば1次元若しくは2次元、立
体面であるならば3次元の方向となる。これらの3次元
に対応するための相対運動として、1次元や2次元の動
作を3次元の各構成面に対し適用して逐次部分研磨を行
うことにより、3次元面の研磨が可能となる。
The direction of relative movement is one-dimensional or two-dimensional if it is a plane and three-dimensional if it is a three-dimensional surface, depending on the shape of the machined surface of the workpiece. As a relative motion for coping with these three dimensions, a three-dimensional surface can be polished by applying a one-dimensional or two-dimensional operation to each of the three-dimensional constituent surfaces and successively performing partial polishing.

【0083】相対運動のストロークは、目的とする加工
に応じて調整される。単位時間に大きな研削を行いたい
場合は、大きな砥粒を含有した砥石で加工物との間で大
きなストロークの相対運動を生じさせることにより行
い、精密な寸法精度が要求される鏡面加工の場合は、小
さな砥粒を含有した砥石で加工物との間で小さなストロ
ークの相対運動を生じさせることによって行う。これら
の砥粒やストロークの設定は、加工物の仕上げ目的によ
り変化するので、加工物ごとに調整を行う。砥石保持部
を研磨装置に取り付けて研磨条件、加工物仕上げ目的、
加工物形状をデータ入力しておくことにより自動制御に
より研削及び研磨をすることも可能である。
The stroke of the relative movement is adjusted according to the intended processing. If you want to perform large grinding in a unit time, use a grindstone containing large abrasive grains to generate a relative movement of a large stroke with the workpiece, and in the case of mirror finishing where precise dimensional accuracy is required. , A grindstone containing small abrasive grains is used to generate a small stroke of relative motion with the work piece. Since the settings of these abrasive grains and strokes vary depending on the finishing purpose of the workpiece, adjustment is made for each workpiece. Attach the grindstone holding part to the polishing device to polish the condition, finish the workpiece,
It is also possible to perform grinding and polishing by automatic control by inputting data of the shape of the workpiece.

【0084】次に、本発明の具体的な実施例として、新
しい砥石の製造方法について、図1に基づいて説明す
る。
Next, as a concrete example of the present invention, a method for manufacturing a new grindstone will be described with reference to FIG.

【0085】図1(1)において、加工物1の加工面2に
砥石が粘着するのを防止する離型剤3を塗布する。離型
剤には、砥粒及び結合剤を溶解する成分が含まれてい
る。塗布は筆ぬりでも良いし、スプレーで吹き付けても
良い。離型剤3を塗布することにより、離型剤層4の厚
さ分だけ、被加工面で囲われた空間より小さな相似空間
5ができる。この具体例では、加工物の形状が凹であ
り、相似空間5は加工物の形状より僅かに小さい。一方
加工物の形状が凸の場合には、相似空間5は加工物の形
状よりもわずかに大きい。
In FIG. 1 (1), a mold release agent 3 for preventing the grindstone from adhering to the work surface 2 of the work 1 is applied. The release agent contains components that dissolve the abrasive grains and the binder. The application may be brush painting or spraying. By applying the release agent 3, a similar space 5 smaller than the space surrounded by the surface to be processed is formed by the thickness of the release agent layer 4. In this example, the shape of the work piece is concave, and the similar space 5 is slightly smaller than the shape of the work piece. On the other hand, when the shape of the workpiece is convex, the similar space 5 is slightly larger than the shape of the workpiece.

【0086】図1(2)において、相似空間5に粉体状の
砥石原料6と砥石保持部7を挿入する。砥石原料には砥
粒、結合剤及び磁場感応性物質が含まれる。そして、相
似空間5の中で砥石原料の温度を上昇させ液体化をおこ
なう(図は粉体の砥石原料6をヒータ8で温度を上昇す
る場合を示す)。このとき加工物1の温度は砥石原料の
融点に近ければ常温のままでも良い。融点の高い砥石原
料を使用する場合は、加工物1を予め余熱しておくと良
い。なお、この実施例では、粉体状の砥石原料が相似空
間5に装入されているが、勿論液体状の砥石原料を流し
込んでも良い。
In FIG. 1 (2), a powdery grinding stone raw material 6 and a grinding stone holding portion 7 are inserted into the similar space 5. The grinding stone raw material contains abrasive grains, a binder and a magnetic field sensitive substance. Then, the temperature of the grindstone raw material is raised in the similar space 5 to liquefy it (the figure shows a case where the temperature of the powdery grindstone raw material 6 is raised by the heater 8). At this time, the temperature of the workpiece 1 may be normal temperature as long as it is close to the melting point of the raw material of the grindstone. When using a grindstone raw material having a high melting point, it is preferable to preheat the workpiece 1 in advance. In this embodiment, the powdery grindstone raw material is charged in the similar space 5, but of course the liquid grindstone raw material may be poured.

【0087】砥石保持部7は、複数本の支柱を有する。
砥石保持部と砥石との締結面積を大きくとれるように、
砥石保持部に溝あるいは段差が形成され、又は砥石保持
部に他部品が取り付けられる。
The grindstone holding portion 7 has a plurality of columns.
In order to make the fastening area between the whetstone holding part and the whetstone large,
A groove or a step is formed in the grindstone holding portion, or another component is attached to the grindstone holding portion.

【0088】図1(3)において、液体状態の砥石原料9
に磁場を与え攪拌を行う。図において、3つの磁場発生
源10,11,12が設けられ、それぞれの磁場発生源
にはコイル13,14,15が巻かれる。そして、コイ
ル13,14,15に電流を流し、互いに異なる複数の
方向(この実施形態では上、左右の3方向)から砥石原
料9に磁場を与える。これらのコイル13,14,15
から発生される磁場の方向は互いに交差する。そして、
コイル13,14,15から生じる磁力線は放射状に拡
がる。
In FIG. 1 (3), a grindstone raw material 9 in a liquid state
A magnetic field is applied to and stirring is performed. In the figure, three magnetic field generation sources 10, 11, 12 are provided, and coils 13, 14, 15 are wound around each magnetic field generation source. Then, an electric current is applied to the coils 13, 14 and 15 to apply a magnetic field to the grindstone raw material 9 from a plurality of mutually different directions (in this embodiment, the upper and left three directions). These coils 13, 14, 15
The directions of the magnetic fields generated by And
The magnetic lines of force generated from the coils 13, 14, 15 spread radially.

【0089】砥石保持部7には磁場発生源10が結合さ
れ、砥石保持部7も磁場回路の一部となる。この砥石保
持部7には軟磁性体が使用される。また、形状に適応し
た砥粒攪拌が行われるように、それぞれのコイルに流れ
る電流は変化され、あるいはコイルには交流が流され、
あるいはコイルに流される電流がON−OFF制御され
ることもある。本図において△は砥粒を示す。
A magnetic field generation source 10 is coupled to the grindstone holding portion 7, and the grindstone holding portion 7 also becomes a part of the magnetic field circuit. A soft magnetic material is used for the grindstone holding portion 7. In addition, the current flowing through each coil is changed, or an alternating current is applied to the coils, so that the abrasive grain agitation suitable for the shape is performed.
Alternatively, the current passed through the coil may be ON-OFF controlled. In the figure, Δ indicates an abrasive grain.

【0090】この実施例では、砥石原料に磁場を与える
ことによって砥石原料を攪拌しているが、この他にも機
械的振動あるいは電場のいずれか一つを砥石原料に与
え、又はこれらを併用して砥石原料に与えることで、砥
石原料を攪拌しても良い。
In this embodiment, the whetstone raw material is agitated by applying a magnetic field to the whetstone raw material, but in addition to this, either one of mechanical vibration and electric field is given to the whetstone raw material, or these are used in combination. The whetstone raw material may be agitated by feeding it to the whetstone raw material.

【0091】図1(4)において、相似空間5内で砥石を
冷却し、固化を行わせ砥石を抜け方向に引き出す。この
とき砥石保持部の溝16には砥石原料が入り込むので固
化砥石17の引き抜きが容易となる。このように砥石保
持部7と固化砥石17の接触断面積を大きく取れる構造
にしておくことで、研磨相対運動に対し大きな研磨圧力
をかけることができる。
In FIG. 1 (4), the grindstone is cooled in the similar space 5 to be solidified, and the grindstone is pulled out in the removal direction. At this time, since the grindstone raw material enters the groove 16 of the grindstone holding portion, the solidified grindstone 17 can be easily pulled out. With such a structure that allows a large contact cross-sectional area between the grindstone holding portion 7 and the solidified grindstone 17, a large polishing pressure can be applied to the relative movement of polishing.

【0092】図1(5)は、図1(4)の研磨部18の拡大図
であり、砥石と離型剤層4と被加工面の接触状態を示
す。本図のように離型剤4内の砥粒が可動することで、
面粗さの凹凸による抜けにくさが緩和され、また離型剤
3の溶剤があるため表面凝着力による抜けにくさが緩和
される。
FIG. 1 (5) is an enlarged view of the polishing section 18 of FIG. 1 (4), showing a contact state between the grindstone, the release agent layer 4 and the surface to be processed. By moving the abrasive grains in the release agent 4 as shown in the figure,
The difficulty of removal due to the unevenness of the surface roughness is mitigated, and the difficulty of removal due to the surface adhesive force is mitigated because of the solvent of the release agent 3.

【0093】次に、本発明の実施例として、新しい研磨
方法について、図2に基づいて説明する。
Next, a new polishing method will be described as an embodiment of the present invention with reference to FIG.

【0094】図2(1)において、図1(4)で作成された固
化砥石17(形状転写砥石)を相似空間内5に置き、砥
石保持部7又は砥石5に左右方向(加工面の法線方向)
に研磨圧力を加え、加工物に対して砥石が相対運動可能
な第一の方向としての上下方向(加工面の接線方向)に
相対運動(←→)を与える。このとき砥石溶解液19を適
度に与え、砥石を減耗させながら第一面の研磨を行う。
この砥石溶解液19は離型剤と兼用されている。砥石5
の往復運動の回数はあらかじめ設定され、この回数の研
磨動作が完了すると次の面の研磨を行うように、砥石5
の往復運動は制御されている。
In FIG. 2 (1), the solidified grindstone 17 (shape transfer grindstone) created in FIG. 1 (4) is placed in the similar space 5 and the grindstone holding portion 7 or grindstone 5 is moved in the left-right direction (the method of processing surface). (Line direction)
A polishing pressure is applied to, and relative movement (← →) is applied in the vertical direction (tangential direction of the processing surface) as the first direction in which the grindstone can move relative to the workpiece. At this time, the grindstone dissolving liquid 19 is appropriately applied to polish the first surface while depleting the grindstone.
The grindstone solution 19 is also used as a release agent. Whetstone 5
The number of reciprocating movements of the grinding wheel 5 is set in advance so that when the polishing operation of this number is completed, the next surface is polished.
The reciprocating motion of is controlled.

【0095】図2(2)において、図2(1)にて研磨するこ
とにより、本図の様に加工面に接していた砥石面は減耗
し加工面と砥石の隙間が増大する。この隙間を利用し
て、さらに本図の様に、砥石保持部又は砥石に斜め方向
(加工面の法線方向)に研磨圧力を加え、これとほぼ直
行する、第一の方向と異なる第二の方向としての斜め方
向(加工面の接線方向)に相対運動(←→)を与える。相
対運動のストロークは隙間より小さく設定される。この
ときも、砥石溶解液19を適度に与え、砥石を減耗させ
ながら第二面の研磨を行う。
In FIG. 2 (2), by polishing in FIG. 2 (1), the grindstone surface which was in contact with the machined surface as shown in this figure is depleted and the gap between the machined surface and the grindstone increases. Utilizing this gap, as shown in the figure, a polishing pressure is applied to the grindstone holding portion or the grindstone in an oblique direction (the normal direction of the machining surface), and a second direction different from the first direction, which is almost orthogonal to this, is applied. Relative motion (← →) is given in the diagonal direction (tangential direction of the machined surface) as the direction of. The stroke of relative movement is set smaller than the gap. Also at this time, the second surface is polished while the grindstone dissolving liquid 19 is appropriately applied to reduce the wear of the grindstone.

【0096】図2(3)において、図2(2)にて研磨するこ
とにより、本図の様に被加工面に接していた砥石面は減
耗し加工面と砥石の隙間が増大する。この隙間を利用し
て、さらに本図の様に、砥石保持部又は砥石に上下方向
(被加工面の放線方向)に研磨圧力を加え、第二の方向
と異なる第三の方向としての左右方向(被加工面の接線
方向)に相対運動(←→)を与える。相対運動のストロー
クは隙間より小さく設定される。このときも、砥石溶解
液19を適度に与え、砥石を減耗させながら第三面の研
磨を行う。
In FIG. 2 (3), by grinding in FIG. 2 (2), the grindstone surface which was in contact with the surface to be machined as shown in this figure is depleted and the gap between the machined surface and the grindstone is increased. Using this gap, polishing pressure is applied to the grindstone holding part or grindstone in the vertical direction (radial direction of the surface to be processed) as shown in this figure, and the left-right direction as a third direction different from the second direction. Relative motion (← →) is given to (tangential direction of the work surface). The stroke of relative movement is set smaller than the gap. At this time as well, the grindstone dissolving liquid 19 is appropriately applied to polish the third surface while depleting the grindstone.

【0097】図2(4)において、最終的に砥石は小さく
なり、本図の様に転写形状が劣化することになる。本発
明の研磨方法によれば、加工物の加工面がどのような傾
斜の組み合わせであっても、研磨が可能である。さら
に、寸法精度を向上させたり、鏡面に研磨したりする場
合は、前記図1、図2の行程を繰り返し行うことで、寸
法精度や仕上げ面粗さの向上が可能である。
In FIG. 2 (4), the grindstone finally becomes small, and the transfer shape deteriorates as shown in this figure. According to the polishing method of the present invention, polishing is possible regardless of the combination of inclinations of the processed surface of the workpiece. Further, in the case of improving the dimensional accuracy or polishing to a mirror surface, it is possible to improve the dimensional accuracy and the finished surface roughness by repeating the steps of FIGS. 1 and 2.

【0098】また、砥石減耗屑や研磨屑を加工面から排
除するために、図示しないブロワ等により加工面に送風
を行ってもよい。
Further, in order to remove grindstone wear debris and polishing debris from the work surface, air may be blown to the work surface by a blower or the like not shown.

【0099】上記実施例では、研磨対象となる加工物内
に砥石を製造し、この砥石で加工物を研磨する例につい
て説明した。本発明はこの実施例に限定されることな
く、種々の変更が可能である。例えば加工物と相似形の
模型内に砥石を製造し、この砥石を模型から抜き、模型
から抜いた砥石を加工物に挿入し、加工物を研磨しても
よい。
In the above-mentioned embodiment, an example in which a grindstone is manufactured in the workpiece to be polished and the workpiece is polished by the grindstone has been described. The present invention is not limited to this embodiment, and various modifications can be made. For example, a grindstone may be manufactured in a model having a shape similar to that of the work, the grindstone may be removed from the model, the grindstone removed from the model may be inserted into the work, and the work may be polished.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例における形状転写砥石の製造
方法を示す工程図。
FIG. 1 is a process drawing showing a method for manufacturing a shape transfer grindstone in one embodiment of the present invention.

【図2】本発明の一実施例における研磨方法を示す工程
図。
FIG. 2 is a process diagram showing a polishing method according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…加工物 2…被加工面 3…離型剤 4…離型剤層 5…相似空間 6…砥石原料 7…砥石保持部 8…ヒータ 9…液体状態の砥石原料 10…磁場発生源 11…磁場発生源 12…磁場発生源 13…コイル 14…コイル 15…コイル 16…砥石保持部の溝 17…固化砥石 18…研磨部 19…砥石溶解液 1 ... Processed product 2 ... Surface to be processed 3 ... Release agent 4 ... Release agent layer 5 ... similar space 6 ... Raw material for whetstone 7 ... Whetstone holding part 8 ... Heater 9 ... Liquid whetstone raw material 10 ... Magnetic field source 11 ... Magnetic field source 12 ... Magnetic field generator 13 ... Coil 14 ... Coil 15 ... Coil 16 ... Groove holding section 17 ... Solidifying whetstone 18 ... Polishing part 19 ... Grinding stone solution

───────────────────────────────────────────────────── フロントページの続き (72)発明者 梅原 徳次 東京都八王子市別所2丁目46−3−102 (72)発明者 萩原 親作 山梨県甲府市羽黒町1241−5 (72)発明者 芝田 勲 山梨県中巨摩郡田富町布施1198−87 Fターム(参考) 3C047 FF09 HH11 3C049 AA02 AA09 AA12 AC05 CB03 3C063 AA02 AB05 BB01 BC01 CC30 EE19    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Tokuji Umehara             Tokyo Hachioji City Bessho 2-chome 46-3-102 (72) Inventor Hagiwara             1241-5 Haguro-cho, Kofu City, Yamanashi Prefecture (72) Inventor Isao Shibata             1198-87 Fuse, Tatomi Town, Nakakoma District, Yamanashi Prefecture F term (reference) 3C047 FF09 HH11                 3C049 AA02 AA09 AA12 AC05 CB03                 3C063 AA02 AB05 BB01 BC01 CC30                       EE19

Claims (27)

【特許請求の範囲】[Claims] 【請求項1】 加工物の表面に砥石が粘着するのを防止
する離型材を塗布する工程と、加工物と相似形の空間に
少なくとも砥粒及び結合剤を含む砥石原料を装入する工
程と、該空間内で前記砥石原料を攪拌する工程と、液体
状の前記砥石原料を固化若しくはゲル化させる工程とを
備えることを特徴とする砥石の製造方法。
1. A step of applying a release material for preventing a grindstone from sticking to the surface of a workpiece, and a step of charging a grindstone raw material containing at least abrasive grains and a binder into a space similar to the workpiece. A method of manufacturing a grindstone, comprising: a step of stirring the grindstone material in the space; and a step of solidifying or gelling the liquid grindstone material.
【請求項2】 前記離型剤には砥粒が含まれていること
を特徴とする請求項1に記載の砥石の製造方法。
2. The method of manufacturing a grindstone according to claim 1, wherein the release agent contains abrasive grains.
【請求項3】 前記離型剤には前記結合剤を溶解する成
分が含まれていることを特徴とする請求項1又は2に記
載の砥石の製造方法。
3. The method for manufacturing a grindstone according to claim 1, wherein the release agent contains a component that dissolves the binder.
【請求項4】 前記空間は、加工物の形状が凹の場合は
加工物の形状より僅かに小さく、加工物の形状が凸の場
合は加工物の形状よりわずかに大きいことを特徴とする
請求項1ないし3いずれかに記載の砥石の製造方法。
4. The space is slightly smaller than the shape of the workpiece when the shape of the workpiece is concave, and slightly larger than the shape of the workpiece when the shape of the workpiece is convex. Item 4. A method for manufacturing a grindstone according to any one of Items 1 to 3.
【請求項5】 前記砥石原料には、磁場感応性物質が含
まれることを特徴とする請求項1ないし4いずれかに記
載の砥石の製造方法。
5. The method for manufacturing a grindstone according to claim 1, wherein the grindstone raw material contains a magnetic field sensitive substance.
【請求項6】 前記空間内で砥石原料を攪拌する工程で
は、磁場、機械的振動、あるいは電場のいずれか一つを
前記砥石原料に与え、又はこれらを併用して前記砥石原
料に与えることを特徴とする請求項1ないし5いずれか
に記載の砥石の製造方法。
6. In the step of stirring the grindstone raw material in the space, any one of a magnetic field, mechanical vibration, and an electric field is applied to the grindstone raw material, or a combination thereof is applied to the grindstone raw material. The method for manufacturing a grindstone according to any one of claims 1 to 5, which is characterized by the above.
【請求項7】 前記砥石原料に磁場を与える場合、複数
の磁場発生源を用い、互いに異なる複数の方向から前記
砥石原料に磁場を与えることを特徴とする請求項6に記
載の砥石の製造方法。
7. The method of manufacturing a grindstone according to claim 6, wherein when a magnetic field is applied to the grindstone raw material, a plurality of magnetic field generation sources are used to apply the magnetic field to the grindstone raw material from a plurality of mutually different directions. .
【請求項8】 前記磁場発生源にはコイルが設けられ、
該コイルには交流が流され、あるいは該コイルに流され
る電流がON−OFF制御され、あるいは該コイルに流
される電流が変化されることを特徴とする請求項7に記
載の砥石の製造方法。
8. A coil is provided in the magnetic field generation source,
8. The method of manufacturing a grindstone according to claim 7, wherein an alternating current is applied to the coil, or an electric current applied to the coil is ON-OFF controlled, or an electric current applied to the coil is changed.
【請求項9】 前記磁場による攪拌は、前記砥石原料が
固化する前に行われることを特徴とする請求項7又は8
に記載の砥石の製造方法。
9. The stirring by the magnetic field is performed before the grindstone raw material is solidified.
The method for producing a grindstone according to.
【請求項10】 前記砥石原料は前記空間内への装入さ
れる時点では粉体又は液体であり、 前記空間内へ装入される時点で前記砥石原料が粉体の場
合は、前記空間内で前記砥石原料を液体状態にし、その
後前記空間内で前記砥石原料を攪拌することを特徴とす
る請求項1ないし9いずれかに記載の砥石の製造方法。
10. The grindstone raw material is powder or liquid at the time of charging into the space, and if the grindstone raw material is powder at the time of charging into the space, inside the space The method for producing a grindstone according to any one of claims 1 to 9, wherein the grindstone raw material is brought into a liquid state in step 1, and then the grindstone raw material is stirred in the space.
【請求項11】 加工物と相似形の空間に少なくとも砥
粒、結合剤及び磁場感応性物質を含む砥石原料を装入す
る工程と、複数の磁場発生源を用い、互いに異なる複数
の方向から前記砥石原料に磁場を与えることによって、
前記空間内で前記砥石原料を攪拌する工程と、液体状の
前記砥石原料を固化若しくはゲル化させる工程とを備え
ることを特徴とする砥石の製造方法。
11. A step of charging a grindstone raw material containing at least abrasive grains, a binder and a magnetic field-sensitive substance into a space having a shape similar to that of a workpiece, and a plurality of magnetic field generation sources are used, and the grindstone raw material is supplied from a plurality of different directions. By applying a magnetic field to the grindstone material,
A method of manufacturing a grindstone, comprising: a step of stirring the grindstone raw material in the space; and a step of solidifying or gelating the liquid grindstone raw material.
【請求項12】 少なくとも砥粒及び結合剤を含む液体
状の砥石原料を加工物の形状に合わせて固化若しくはゲ
ル化させた砥石であって、 前記砥粒は砥石内に3次元的に略均一に分布されている
ことを特徴とする砥石。
12. A grindstone in which a liquid grindstone raw material containing at least abrasive grains and a binder is solidified or gelled according to the shape of a workpiece, wherein the abrasive grains are three-dimensionally substantially uniform in the grindstone. A grindstone characterized by being distributed in.
【請求項13】 加工物と相似形の空間に少なくとも砥
粒及び結合剤を含む砥石原料、並びに砥石を保持する砥
石保持部を装入する工程と、液体状の前記砥石原料を固
化若しくはゲル化させる工程とを備えることを特徴とす
る砥石の製造方法。
13. A step of charging a grindstone raw material containing at least abrasive grains and a binder, and a grindstone holding portion for holding the grindstone into a space similar to the workpiece, and solidifying or gelling the liquid grindstone raw material. A method of manufacturing a grindstone, comprising:
【請求項14】 前記砥石の製造方法は、さらに、磁場
発生源を用い、前記砥石原料に磁場を与えることによっ
て、前記空間内で前記砥石原料を攪拌する工程を備え、 前記砥石保持部が磁場回路の一部となることを特徴とす
る請求項13に記載の砥石の製造方法。
14. The method for manufacturing a grindstone further includes a step of stirring the grindstone raw material in the space by applying a magnetic field to the grindstone raw material using a magnetic field generation source, wherein the grindstone holding portion has a magnetic field. 14. The method of manufacturing a grindstone according to claim 13, wherein the grindstone is a part of a circuit.
【請求項15】 前記砥石保持部又はその近傍にコイル
が設けられることを特徴とする請求項14に記載の砥石
の製造方法。
15. The method for manufacturing a grindstone according to claim 14, wherein a coil is provided at or near the grindstone holding portion.
【請求項16】 前記砥石保持部が複数本の支柱を有す
ることを特徴とする請求項13ないし15いずれかに記
載の砥石の製造方法。
16. The method of manufacturing a grindstone according to claim 13, wherein the grindstone holding portion has a plurality of columns.
【請求項17】 前記砥石保持部と砥石との締結面積を
大きくとれるように、前記砥石保持部に溝あるいは段差
が形成され、又は前記砥石保持部に他部品が取り付けら
れることを特徴とする請求項13ないし16いずれかに
記載の砥石の製造方法。
17. A groove or a step is formed in the grindstone holding portion, or another component is attached to the grindstone holding portion so that a fastening area between the grindstone holding portion and the grindstone can be increased. Item 17. A method for manufacturing a grindstone according to any one of items 13 to 16.
【請求項18】 前記砥石保持部の磁場回路に軟磁性体
を使用したことを特徴とする請求項14ないし17いず
れかに記載の砥石の製造方法。
18. The method of manufacturing a grindstone according to claim 14, wherein a soft magnetic material is used in the magnetic field circuit of the grindstone holding portion.
【請求項19】 少なくとも砥粒及び結合剤を含む液体
状の砥石原料を加工物の形状に合わせて固化若しくはゲ
ル化させた砥石であって、液体状の砥石原料を固化若し
くはゲル化させることによって砥石を保持する砥石保持
部と砥石とを締結させたことを特徴とする砥石。
19. A grindstone in which a liquid grindstone raw material containing at least abrasive grains and a binder is solidified or gelled in accordance with the shape of a workpiece, which is obtained by solidifying or gelling the liquid grindstone raw material. A grindstone in which a grindstone holding portion that holds the grindstone is fastened to the grindstone.
【請求項20】 砥石を加工物に対して相対運動するこ
とで加工物が研磨され、前記相対運動には、砥石保持部
が利用されることを特徴とする請求項19に記載の砥
石。
20. The grindstone according to claim 19, wherein the grindstone is polished by moving the grindstone relative to the work, and the grindstone holding portion is used for the relative movement.
【請求項21】 少なくとも砥粒及び結合剤を含む液体
状の砥石原料を加工物の形状に合わせて固化若しくは液
化させた砥石を、加工物の加工面に押し付け、加工物と
砥石との間に相対運動を与える研磨方法において、 加工物に対して砥石が相対運動可能な第一の方向に砥石
を相対運動させることによって、加工物の第一面を研磨
し、砥石を減耗する一次工程と、砥石の減耗によって生
じた加工物の前記第一面と砥石との隙間を利用して、前
記第一の方向と異なる第二の方向に砥石を相対運動させ
ることによって、加工物の第二面を研磨する二次工程と
を備えることを特徴とする研磨方法。
21. A grindstone in which a liquid grindstone raw material containing at least abrasive grains and a binder is solidified or liquefied in accordance with the shape of the workpiece is pressed against the machined surface of the workpiece, and between the workpiece and the grindstone. In a polishing method that provides relative movement, a primary step of polishing the first surface of the workpiece by depressing the stone relative to the workpiece in a first direction in which the stone can move relative to the workpiece, and abrading the stone, Utilizing the gap between the first surface of the workpiece and the grindstone caused by the wear of the grindstone, by relatively moving the grindstone in a second direction different from the first direction, the second surface of the workpiece And a second step of polishing.
【請求項22】 前記研磨方法は、さらに砥石の減耗に
よって生じた加工物の前記第二面と砥石との隙間を利用
して、前記第二の方向と異なる第三の方向に砥石を相対
運動させることによって、加工物の第三面を研磨する三
次工程とを備えることを特徴とする請求項21に記載の
研磨方法。
22. The polishing method further utilizes a gap between the second surface of the workpiece and the grindstone caused by wear of the grindstone, and relatively moves the grindstone in a third direction different from the second direction. The polishing method according to claim 21, further comprising a tertiary step of polishing the third surface of the workpiece.
【請求項23】 前記砥石の表面に結合剤を溶解する砥
石溶解液を塗布する工程を備えることを特徴とする請求
項21又は22に記載の研磨方法。
23. The polishing method according to claim 21, further comprising a step of applying a whetstone dissolving liquid that dissolves a binder to the surface of the whetstone.
【請求項24】 前記砥石溶解液を塗布する工程が繰り
返されることを特徴とする請求項23に記載の研磨方
法。
24. The polishing method according to claim 23, wherein the step of applying the grindstone dissolving liquid is repeated.
【請求項25】 前記研磨方法は、さらに加工物の表面
に砥石が粘着するのを防止する離型剤を塗布する工程を
備え、 前記離型剤と前記砥石溶解液が兼用されることを特徴と
する請求項23または24に記載の研磨方法。
25. The polishing method further comprises a step of applying a release agent for preventing the grindstone from adhering to the surface of the workpiece, wherein the release agent and the grindstone solution are used together. The polishing method according to claim 23 or 24.
【請求項26】 砥石減耗屑や研磨屑を加工面から排除
するために、加工面に送風を行う工程を備えることを特
徴とする請求項21ないし25のいずれかに記載の研磨
方法。
26. The polishing method according to claim 21, further comprising a step of blowing air to the working surface in order to remove grindstone debris and polishing waste from the working surface.
【請求項27】 前記砥石は、あらかじめ設定された回
数の往復運動を完了させた後、次の面の研磨を行うよう
に制御されていることを特徴とする請求項21ないし2
6いずれかに記載の研磨方法。
27. The grinding wheel is controlled so as to polish the next surface after completing a predetermined number of reciprocating motions.
6. The polishing method according to any one of 6 above.
JP2001195010A 2001-06-27 2001-06-27 Manufacturing method for grindstone, grindstone, and grinding method Pending JP2003011064A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001195010A JP2003011064A (en) 2001-06-27 2001-06-27 Manufacturing method for grindstone, grindstone, and grinding method
KR1020020021646A KR20030001236A (en) 2001-06-27 2002-04-19 Method for manufacturing of abrasives and method of polishing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001195010A JP2003011064A (en) 2001-06-27 2001-06-27 Manufacturing method for grindstone, grindstone, and grinding method

Publications (1)

Publication Number Publication Date
JP2003011064A true JP2003011064A (en) 2003-01-15

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Country Link
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KR (1) KR20030001236A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007044815A (en) * 2005-08-10 2007-02-22 Kobe Univ Machining device and method using magnetic fluid
JP2009012180A (en) * 2008-10-20 2009-01-22 Toshiba Mach Co Ltd Polishing device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58192737A (en) * 1982-04-28 1983-11-10 Inoue Japax Res Inc Method of polishing machining
JPS5947166A (en) * 1982-09-10 1984-03-16 Tokiwa Seiki Kogyo Kk Working tool for superfine cutting and manufacture thereof
JPS63272457A (en) * 1987-05-01 1988-11-09 Seibu Electric & Mach Co Ltd Polishing method for workpiece
JPH11165252A (en) * 1997-12-04 1999-06-22 Nisca Corp Abrasive material, manufacture of abrasive material and polishing or grinding method
JPH11165268A (en) * 1997-12-04 1999-06-22 Nisca Corp Polishing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007044815A (en) * 2005-08-10 2007-02-22 Kobe Univ Machining device and method using magnetic fluid
JP2009012180A (en) * 2008-10-20 2009-01-22 Toshiba Mach Co Ltd Polishing device
JP4648970B2 (en) * 2008-10-20 2011-03-09 東芝機械株式会社 Polishing equipment

Also Published As

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