JP2002537129A5 - - Google Patents

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Publication number
JP2002537129A5
JP2002537129A5 JP2000599560A JP2000599560A JP2002537129A5 JP 2002537129 A5 JP2002537129 A5 JP 2002537129A5 JP 2000599560 A JP2000599560 A JP 2000599560A JP 2000599560 A JP2000599560 A JP 2000599560A JP 2002537129 A5 JP2002537129 A5 JP 2002537129A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2000599560A
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Japanese (ja)
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JP2002537129A (ja
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Priority claimed from US09/250,822 external-priority patent/US6179887B1/en
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Publication of JP2002537129A publication Critical patent/JP2002537129A/ja
Publication of JP2002537129A5 publication Critical patent/JP2002537129A5/ja
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JP2000599560A 1999-02-17 2000-01-13 研磨物品の製造方法及びその研磨物品 Withdrawn JP2002537129A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/250,822 US6179887B1 (en) 1999-02-17 1999-02-17 Method for making an abrasive article and abrasive articles thereof
US09/250,822 1999-02-17
PCT/US2000/000799 WO2000048790A1 (en) 1999-02-17 2000-01-13 Method for making an abrasive article and abrasive articles thereof

Publications (2)

Publication Number Publication Date
JP2002537129A JP2002537129A (ja) 2002-11-05
JP2002537129A5 true JP2002537129A5 (enExample) 2007-03-01

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JP2000599560A Withdrawn JP2002537129A (ja) 1999-02-17 2000-01-13 研磨物品の製造方法及びその研磨物品

Country Status (7)

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US (2) US6179887B1 (enExample)
EP (1) EP1150803B1 (enExample)
JP (1) JP2002537129A (enExample)
KR (1) KR100612164B1 (enExample)
AU (1) AU3470900A (enExample)
DE (1) DE60005793T2 (enExample)
WO (1) WO2000048790A1 (enExample)

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US5958794A (en) 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
KR19990064304A (ko) 1995-10-20 1999-07-26 스프레이그 로버트 월터 무기 금속 오르토포스페이트를 함유한 연마 용품
US5903951A (en) * 1995-11-16 1999-05-18 Minnesota Mining And Manufacturing Company Molded brush segment
US5766277A (en) 1996-09-20 1998-06-16 Minnesota Mining And Manufacturing Company Coated abrasive article and method of making same
US6179887B1 (en) * 1999-02-17 2001-01-30 3M Innovative Properties Company Method for making an abrasive article and abrasive articles thereof

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