JP2002535744A - 製造の際の品質の監視 - Google Patents
製造の際の品質の監視Info
- Publication number
- JP2002535744A JP2002535744A JP2000593995A JP2000593995A JP2002535744A JP 2002535744 A JP2002535744 A JP 2002535744A JP 2000593995 A JP2000593995 A JP 2000593995A JP 2000593995 A JP2000593995 A JP 2000593995A JP 2002535744 A JP2002535744 A JP 2002535744A
- Authority
- JP
- Japan
- Prior art keywords
- product
- value
- type
- state
- average value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 126
- 238000012544 monitoring process Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 61
- 239000013598 vector Substances 0.000 claims abstract description 22
- 238000012360 testing method Methods 0.000 claims description 25
- 238000005303 weighing Methods 0.000 claims description 20
- 238000004364 calculation method Methods 0.000 claims description 17
- 238000005070 sampling Methods 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 5
- 230000007547 defect Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 1
- 238000003860 storage Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 14
- 239000000047 product Substances 0.000 description 249
- 238000007726 management method Methods 0.000 description 48
- 230000008569 process Effects 0.000 description 26
- 238000010586 diagram Methods 0.000 description 18
- 239000011159 matrix material Substances 0.000 description 11
- 238000009826 distribution Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 230000007774 longterm Effects 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 230000007935 neutral effect Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000003908 quality control method Methods 0.000 description 3
- 238000003070 Statistical process control Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 101100217231 Caenorhabditis elegans asic-1 gene Proteins 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012905 input function Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 238000012353 t test Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
- G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
- G07C3/14—Quality control systems
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Factory Administration (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19901410 | 1999-01-15 | ||
| DE19901410.8 | 1999-01-15 | ||
| DE19901486 | 1999-01-17 | ||
| DE19901486.8 | 1999-01-17 | ||
| DE19902795.1 | 1999-01-25 | ||
| DE19902795A DE19902795A1 (de) | 1999-01-15 | 1999-01-25 | Qualitätsüberwachung bei einer Fertigung mit breitem Produktspektrum |
| PCT/DE2000/000144 WO2000042480A1 (de) | 1999-01-15 | 2000-01-17 | Qualitatsüberwachung bei einer fertigung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002535744A true JP2002535744A (ja) | 2002-10-22 |
| JP2002535744A5 JP2002535744A5 (https=) | 2009-12-24 |
Family
ID=27218921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000593995A Pending JP2002535744A (ja) | 1999-01-15 | 2000-01-17 | 製造の際の品質の監視 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6622101B1 (https=) |
| EP (1) | EP1145088B1 (https=) |
| JP (1) | JP2002535744A (https=) |
| AT (1) | ATE267415T1 (https=) |
| WO (1) | WO2000042480A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008506564A (ja) * | 2004-07-19 | 2008-03-06 | バクスター・インターナショナル・インコーポレイテッド | パラメトリック射出成形のシステムおよび方法 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG96658A1 (en) * | 2001-11-08 | 2003-06-16 | Sony Electronics Singapore Pte | Dynamic quality control method |
| TWI286285B (en) * | 2002-08-08 | 2007-09-01 | Hon Hai Prec Ind Co Ltd | A system and method for measuring an object |
| US6781096B2 (en) * | 2002-08-09 | 2004-08-24 | Matrix Innovations, Llc | Apparatus and method for pattern-based control of a system |
| DE10253700B4 (de) | 2002-11-18 | 2005-11-17 | Siemens Ag | Verfahren zum Durchführen einer Qualitätskontrolle für einen Analyseprozess und Verwendung des Verfahrens |
| DE602004025368D1 (de) * | 2003-09-05 | 2010-03-18 | Sensitech Inc | Automatische aufbereitung von durch versorgungskettenprozesse überwachende sensoren akkumulierten daten |
| EP1542108A1 (de) * | 2003-12-12 | 2005-06-15 | Siemens Aktiengesellschaft | Verfahren zur Überwachung einer technischen Einrichtung |
| US20070091325A1 (en) * | 2005-01-07 | 2007-04-26 | Mehrdad Nikoonahad | Multi-channel optical metrology |
| JP4207915B2 (ja) * | 2005-01-24 | 2009-01-14 | オムロン株式会社 | 品質変動表示装置、品質変動表示方法、品質変動表示プログラム及び該プログラムを記録した記録媒体 |
| US7489980B2 (en) * | 2005-08-09 | 2009-02-10 | International Business Machines Corporation | Factory level and tool level advanced process control systems integration implementation |
| US7113845B1 (en) | 2005-08-09 | 2006-09-26 | International Business Machines Corporation | Integration of factory level and tool level advanced process control systems |
| JP2007102189A (ja) * | 2005-09-07 | 2007-04-19 | Ricoh Co Ltd | 色ずれ補正装置、色ずれ補正方法、画像形成装置、色ずれ補正プログラム及び記録媒体 |
| US20070067125A1 (en) * | 2005-09-14 | 2007-03-22 | Baptiste Guivarch | Procedure of expertise of exhaustibility, of efficiency and of the feasibility of systems of traceability put in place on an industrial site, notably in the agro-food sector |
| US8374234B2 (en) * | 2006-09-29 | 2013-02-12 | Francis S. J. Munoz | Digital scaling |
| JP6193916B2 (ja) | 2015-05-25 | 2017-09-06 | ファナック株式会社 | 射出成形システム |
| US10606254B2 (en) * | 2016-09-14 | 2020-03-31 | Emerson Process Management Power & Water Solutions, Inc. | Method for improving process/equipment fault diagnosis |
| FR3101175B1 (fr) * | 2019-09-24 | 2023-11-17 | Thales Sa | Procédé d'analyse de qualité de produits au moyen d'un banc de test, produit programme d'ordinateur et dispositif d'analyse associés |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4679137A (en) | 1985-04-30 | 1987-07-07 | Prometrix Corporation | Process control interface system for designer and operator |
| US4951190A (en) | 1985-04-30 | 1990-08-21 | Prometrix Corporation | Multilevel menu and hierarchy for selecting items and performing tasks thereon in a computer system |
| US4843538A (en) | 1985-04-30 | 1989-06-27 | Prometrix Corporation | Multi-level dynamic menu which suppresses display of items previously designated as non-selectable |
| US4805089A (en) | 1985-04-30 | 1989-02-14 | Prometrix Corporation | Process control interface system for managing measurement data |
| US4873623A (en) | 1985-04-30 | 1989-10-10 | Prometrix Corporation | Process control interface with simultaneously displayed three level dynamic menu |
| US4967381A (en) | 1985-04-30 | 1990-10-30 | Prometrix Corporation | Process control interface system for managing measurement data |
| US5225998A (en) | 1990-03-26 | 1993-07-06 | At&T Bell Laboratories | Quality control using multi-process performance analysis |
| US5479340A (en) | 1993-09-20 | 1995-12-26 | Sematech, Inc. | Real time control of plasma etch utilizing multivariate statistical analysis |
| US5440478A (en) * | 1994-02-22 | 1995-08-08 | Mercer Forge Company | Process control method for improving manufacturing operations |
| GB9404536D0 (en) | 1994-03-09 | 1994-04-20 | Kodak Ltd | Process verification in photographic processes |
| US5715181A (en) | 1995-04-03 | 1998-02-03 | Horst; Robert L. | Isogrammetric analysis method for high-yield processes |
| GB2303720B (en) * | 1995-07-25 | 2000-03-08 | Kodak Ltd | Reject Analysis |
| GB2309800B (en) | 1996-02-03 | 1999-07-28 | Kodak Ltd | A method of controlling the effect of raw materials on manufacturability |
| TW364956B (en) | 1996-10-21 | 1999-07-21 | Nxp Bv | Method and system for assessing a measurement procedure and measurement-induced uncertainties on a batchwise manufacturing process of discrete products |
| JP3897922B2 (ja) * | 1998-12-15 | 2007-03-28 | 株式会社東芝 | 半導体装置の製造方法、及びコンピュ−タ読取り可能な記録媒体 |
-
2000
- 2000-01-17 US US09/868,922 patent/US6622101B1/en not_active Expired - Fee Related
- 2000-01-17 JP JP2000593995A patent/JP2002535744A/ja active Pending
- 2000-01-17 EP EP00908934A patent/EP1145088B1/de not_active Expired - Lifetime
- 2000-01-17 AT AT00908934T patent/ATE267415T1/de active
- 2000-01-17 WO PCT/DE2000/000144 patent/WO2000042480A1/de not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008506564A (ja) * | 2004-07-19 | 2008-03-06 | バクスター・インターナショナル・インコーポレイテッド | パラメトリック射出成形のシステムおよび方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1145088B1 (de) | 2004-05-19 |
| US6622101B1 (en) | 2003-09-16 |
| EP1145088A1 (de) | 2001-10-17 |
| WO2000042480A1 (de) | 2000-07-20 |
| ATE267415T1 (de) | 2004-06-15 |
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