JP2002520554A5 - - Google Patents

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Publication number
JP2002520554A5
JP2002520554A5 JP2000559369A JP2000559369A JP2002520554A5 JP 2002520554 A5 JP2002520554 A5 JP 2002520554A5 JP 2000559369 A JP2000559369 A JP 2000559369A JP 2000559369 A JP2000559369 A JP 2000559369A JP 2002520554 A5 JP2002520554 A5 JP 2002520554A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000559369A
Other languages
Japanese (ja)
Other versions
JP3972172B2 (ja
JP2002520554A (ja
Filing date
Publication date
Priority claimed from US09/111,999 external-priority patent/US6374859B1/en
Priority claimed from US09/229,722 external-priority patent/US6394138B1/en
Application filed filed Critical
Publication of JP2002520554A publication Critical patent/JP2002520554A/ja
Publication of JP2002520554A5 publication Critical patent/JP2002520554A5/ja
Application granted granted Critical
Publication of JP3972172B2 publication Critical patent/JP3972172B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000559369A 1998-07-08 1999-07-07 流体を分配するための取り外し可能な部品のマニホルド装置 Expired - Fee Related JP3972172B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/111,999 1998-07-08
US09/111,999 US6374859B1 (en) 1996-10-30 1998-07-08 Manifold system for enabling a distribution of fluids
US09/229,722 1999-01-13
US09/229,722 US6394138B1 (en) 1996-10-30 1999-01-13 Manifold system of removable components for distribution of fluids
PCT/US1999/015272 WO2000003169A2 (en) 1998-07-08 1999-07-07 Manifold system of removable components for distribution of fluids

Publications (3)

Publication Number Publication Date
JP2002520554A JP2002520554A (ja) 2002-07-09
JP2002520554A5 true JP2002520554A5 (cg-RX-API-DMAC7.html) 2005-12-22
JP3972172B2 JP3972172B2 (ja) 2007-09-05

Family

ID=26809455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000559369A Expired - Fee Related JP3972172B2 (ja) 1998-07-08 1999-07-07 流体を分配するための取り外し可能な部品のマニホルド装置

Country Status (6)

Country Link
US (1) US6394138B1 (cg-RX-API-DMAC7.html)
EP (1) EP1133652B1 (cg-RX-API-DMAC7.html)
JP (1) JP3972172B2 (cg-RX-API-DMAC7.html)
AT (1) ATE266166T1 (cg-RX-API-DMAC7.html)
DE (1) DE69917064T2 (cg-RX-API-DMAC7.html)
WO (1) WO2000003169A2 (cg-RX-API-DMAC7.html)

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US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP5785813B2 (ja) * 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
JP5890984B2 (ja) * 2011-08-30 2016-03-22 株式会社フジキン 流体制御装置
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
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US20140137961A1 (en) * 2012-11-19 2014-05-22 Applied Materials, Inc. Modular chemical delivery system
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CN115143305B (zh) * 2021-03-31 2023-12-26 浙江三花汽车零部件有限公司 流体控制组件及其制造方法
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