JP2002515592A5 - - Google Patents

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Publication number
JP2002515592A5
JP2002515592A5 JP2000549903A JP2000549903A JP2002515592A5 JP 2002515592 A5 JP2002515592 A5 JP 2002515592A5 JP 2000549903 A JP2000549903 A JP 2000549903A JP 2000549903 A JP2000549903 A JP 2000549903A JP 2002515592 A5 JP2002515592 A5 JP 2002515592A5
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JP
Japan
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JP2000549903A
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Japanese (ja)
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JP2002515592A (ja
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Priority claimed from US09/082,095 external-priority patent/US6121611A/en
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Publication of JP2002515592A publication Critical patent/JP2002515592A/ja
Publication of JP2002515592A5 publication Critical patent/JP2002515592A5/ja
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JP2000549903A 1998-05-20 1999-05-17 走査型プローブ顕微鏡検査法用の力感知プローブ Withdrawn JP2002515592A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/082,095 US6121611A (en) 1998-05-20 1998-05-20 Force sensing probe for scanning probe microscopy
US09/082,095 1998-05-20
PCT/US1999/010859 WO1999060330A1 (en) 1998-05-20 1999-05-17 Force sensing probe for scanning probe microscopy

Publications (2)

Publication Number Publication Date
JP2002515592A JP2002515592A (ja) 2002-05-28
JP2002515592A5 true JP2002515592A5 (enExample) 2007-08-16

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JP2000549903A Withdrawn JP2002515592A (ja) 1998-05-20 1999-05-17 走査型プローブ顕微鏡検査法用の力感知プローブ

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US (1) US6121611A (enExample)
EP (1) EP1080340B1 (enExample)
JP (1) JP2002515592A (enExample)
AT (1) ATE246340T1 (enExample)
DE (1) DE69910014T2 (enExample)
WO (1) WO1999060330A1 (enExample)

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