JP2002511915A - 気体源用製造プロセスおよび供給システム - Google Patents
気体源用製造プロセスおよび供給システムInfo
- Publication number
- JP2002511915A JP2002511915A JP55059298A JP55059298A JP2002511915A JP 2002511915 A JP2002511915 A JP 2002511915A JP 55059298 A JP55059298 A JP 55059298A JP 55059298 A JP55059298 A JP 55059298A JP 2002511915 A JP2002511915 A JP 2002511915A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0415—Beds in cartridges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0446—Means for feeding or distributing gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C11/00—Use of gas-solvents or gas-sorbents in vessels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/104—Alumina
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
- B01D2253/108—Zeolites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/20—Organic adsorbents
- B01D2253/202—Polymeric adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/26—Halogens or halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/4533—Gas separation or purification devices adapted for specific applications for medical purposes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/4566—Gas separation or purification devices adapted for specific applications for use in transportation means
- B01D2259/4575—Gas separation or purification devices adapted for specific applications for use in transportation means in aeroplanes or space ships
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0454—Controlling adsorption
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0388—Arrangement of valves, regulators, filters
- F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.容器の使用の際に流体を必要に応じて供給するための、収着可能な流体を保 持するための収着媒材料を含む流体貯蔵および供給容器を製造する方法であって 、前記方法は、容器を収着媒材料で充填し、収着媒材料を含む容器を、容器内の 収着媒材料への収着とそこにおける流体の保持とのために容器へと収着可能な流 体を流すために、収着可能な流体のソースに結合することを含み、容器は初期量 の流体でバルク充填され、その後、流体充填温度条件に関する低下された温度条 件で、初期量の流体で満たされる収着媒を含む容器を低下された温度条件に熱的 に平衡化させるのに十分な時間の間保管され、熱平衡化の後、前記流体での容器 の充填を完了する、方法。 2.収着可能な流体のソースは、収着可能な流体の供給口に結合され、容器との 接続のために配列される充填マニフォルドである、請求項1に記載の方法。 3.充填マニフォルドは自動充填マニフォルドである、請求項2に記載の方法。 4.低下された温度条件は低下された温度条件で容器を保持するための大きさお よび特性の環境チャンバによって与えられる、請求項1に記載の方法。 5.容器の使用の際に流体を必要に応じて供給するための、収着可能な流体を保 持するための収着媒材料を含む流体貯蔵および供給容器を製造する方法であって 、前記方法は、容器を収着媒材料で充填し、収着媒材料を含む容器を、容器内の 収着媒材料への収着とそこにおける流体の保持とのために容器へと収着可能な流 体を流すために収着可能な流体のソースと結合することを含み、収着可能な流体 は、容器へと収着可能な流体を流す間の収着効果の熱と容器内の収着媒材料への 収着可能な流体の収着とを緩和するために、容器へと流す前に冷却される、方法 。 6.容器は容器へと収着可能な流体を流す間にさらに冷却される、請求項5に記 載の方法。 7.容器は、収着可能な流体のソースから容器を取除き、異なる熱的環境へと搬 送するために、容器へと収着可能な流体を流すための移動キャリア構造上に保た れる、請求項1に記載の方法。 8.移動キャリア構造は、容器を収着可能な流体のソースに相互接続するために 、マニフォルド接続アセンブリを有する可動カートを含む、請求項7に記載の方 法。 9.容器は、収着媒材料を含む流体の収着熱を放散するために、容器へと流体を 流す間に能動的に冷却される、請求項1に記載の方法。 10.容器とその中の収着媒材料とを脱気するために流体を流す前に容器を循環 パージすることを含む、請求項1に記載のプロセス。 11.容器は、収着媒材料を含む流体の収着熱を放散するために、容器へと流体 を流す間に過充填およびブローダウン条件を受ける、請求項1に記載の方法。 12.流体に対する収着性親和力を有する収着媒材料を含む流体貯蔵および供給 容器を製造するためのシステムであって、容器は収着媒材料を詰め込まれ、流体 は収着媒材料への収着と容器内の後の保持とのために容器へと流し込まれ、前記 システムは、容器への流体の流れの圧力および温度条件を制御するための手段に よって、流体のソースと流れによって通じるように配列されたマニフォルドを含 む、システム。 13.容器への流体の流れの制御された圧力および温度条件と一貫するように容 器への流体の流量を制御するためのマスフローコントローラをさらに含む、請求 項12に記載のシステム。 14.流体は水素化物ガス、ハロゲン化物ガスおよびガス状V族有機金属化合物 からなるグループから選択されるガスを含む、請求項1に記載の方法。 15.流体はシラン、シボラン、ゲルマン、フッ素、アンモニア、ホスフィン、 アルシン、スチビン、硫化水素、セレン化水素、テルル化水素、三フッ化ホウ素 、六フッ化タングステン、塩素、塩化水素、臭化水素、ヨウ化水素およびフッ化 水素からなるグループから選択されるガスを含む、請求項1に記載の方法。 16.収着媒材料は炭素材料、結晶質アルミノ珪酸塩材料、シリカ、アルミナ、 マクロレティキュレートポリマーおよび多孔質珪藻土からなるグループから選択 される、請求項1に記載の方法。 17.収着媒材料は活性化された炭素材料を含む、請求項1に記載の方法。 18.貯蔵および供給容器は細長い形である、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/859,171 US5837027A (en) | 1996-05-20 | 1997-05-20 | Manufacturing process for gas source and dispensing systems |
US859/171 | 1997-05-20 | ||
PCT/US1998/010337 WO1998052678A1 (en) | 1997-05-20 | 1998-05-20 | Manufacturing process for gas source and dispensing systems |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010170705A Division JP2010249324A (ja) | 1997-05-20 | 2010-07-29 | 吸着剤を収容する流体貯蔵および供給容器を製造する方法 |
Publications (2)
Publication Number | Publication Date |
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JP2002511915A true JP2002511915A (ja) | 2002-04-16 |
JP4612920B2 JP4612920B2 (ja) | 2011-01-12 |
Family
ID=25330243
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55059298A Expired - Lifetime JP4612920B2 (ja) | 1997-05-20 | 1998-05-20 | 流体貯蔵および供給容器を製造する方法および流体貯蔵および供給装置を製造する方法 |
JP2010170705A Pending JP2010249324A (ja) | 1997-05-20 | 2010-07-29 | 吸着剤を収容する流体貯蔵および供給容器を製造する方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010170705A Pending JP2010249324A (ja) | 1997-05-20 | 2010-07-29 | 吸着剤を収容する流体貯蔵および供給容器を製造する方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US5837027A (ja) |
EP (1) | EP1017474B1 (ja) |
JP (2) | JP4612920B2 (ja) |
KR (1) | KR100545497B1 (ja) |
AT (1) | ATE336291T1 (ja) |
AU (1) | AU7584198A (ja) |
DE (1) | DE69835600T2 (ja) |
WO (1) | WO1998052678A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006138470A (ja) * | 2004-10-15 | 2006-06-01 | Air Products & Chemicals Inc | ルイス酸性ガスの貯蔵およびデリバリーのためのルイス塩基性反応性化合物を含む液体媒体 |
JP2010249324A (ja) * | 1997-05-20 | 2010-11-04 | Advanced Technology Materials Inc | 吸着剤を収容する流体貯蔵および供給容器を製造する方法 |
KR101942629B1 (ko) | 2016-12-20 | 2019-01-28 | 버슘머트리얼즈한양기공 주식회사 | 반도체 제조용 특수가스 저장 실린더의 냉각 장치 |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
US6309446B1 (en) * | 1997-02-17 | 2001-10-30 | Kanebo, Ltd. | Activated carbon for adsorptive storage of gaseous compound |
US6027547A (en) * | 1997-05-16 | 2000-02-22 | Advanced Technology Materials, Inc. | Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium |
US6110257A (en) * | 1997-05-16 | 2000-08-29 | Advanced Technology Materials, Inc. | Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system |
US5980608A (en) * | 1998-01-07 | 1999-11-09 | Advanced Technology Materials, Inc. | Throughflow gas storage and dispensing system |
US6500238B1 (en) * | 2000-08-10 | 2002-12-31 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system |
JP3758131B2 (ja) * | 2000-08-23 | 2006-03-22 | 株式会社日本製鋼所 | ガス吸放出物質を用いたガス吸放出装置およびその運転方法 |
DE10107895B4 (de) * | 2001-02-20 | 2007-07-05 | Air Liquide Deutschland Gmbh | Verfahren und Vorrichtung zum Befüllen von Druckbehältern mit tiefsiedenden permanenten Gasen oder Gasgemischen |
US6879876B2 (en) | 2001-06-13 | 2005-04-12 | Advanced Technology Materials, Inc. | Liquid handling system with electronic information storage |
US6716271B1 (en) * | 2002-10-29 | 2004-04-06 | Advanced Technology Materials, Inc. | Apparatus and method for inhibiting decomposition of germane |
JP4643589B2 (ja) * | 2003-12-19 | 2011-03-02 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 圧縮ガス容器にガスを充填するための方法 |
US20050229977A1 (en) * | 2004-04-16 | 2005-10-20 | Yang Li | Flow regulating valve assembly |
US7563308B2 (en) | 2004-09-23 | 2009-07-21 | Air Products And Chemicals, Inc. | Ionic liquid based mixtures for gas storage and delivery |
US7404845B2 (en) * | 2004-09-23 | 2008-07-29 | Air Products And Chemicals, Inc. | Ionic liquid based mixtures for gas storage and delivery |
WO2006114137A1 (en) * | 2005-04-25 | 2006-11-02 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Two-step-process for filling gas containers for airbag systems and gas filling device for a two-step-filling process |
KR20080009739A (ko) * | 2005-05-03 | 2008-01-29 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 유체 저장 및 분배 시스템, 및 이를 포함하는 유체 공급방법 |
SG165321A1 (en) | 2005-08-30 | 2010-10-28 | Advanced Tech Materials | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation |
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Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5180303A (en) * | 1975-01-08 | 1976-07-13 | Sagami Asechiren Kk | Yokaiasechirenno jutenho |
JPS59231299A (ja) * | 1983-06-10 | 1984-12-25 | Matsushita Electric Ind Co Ltd | 金属水素化物の水素吸蔵方法 |
JPS6060399A (ja) * | 1983-09-12 | 1985-04-06 | Toshiba Corp | 水素貯蔵システム |
JPS61144495A (ja) * | 1984-12-17 | 1986-07-02 | Kashiwa Kagaku Kogyo:Kk | ガスの充填方法 |
JPS63140200A (ja) * | 1986-12-03 | 1988-06-11 | Mitsubishi Heavy Ind Ltd | 水素吸蔵合金貯蔵装置 |
JPH04224102A (ja) * | 1990-12-21 | 1992-08-13 | Ishikawajima Harima Heavy Ind Co Ltd | オゾンの保存方法 |
WO1996011739A1 (en) * | 1994-10-13 | 1996-04-25 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous compounds |
JPH08504394A (ja) * | 1992-09-28 | 1996-05-14 | アライド−シグナル・インコーポレーテッド | 水素の貯蔵 |
JPH08119601A (ja) * | 1994-10-19 | 1996-05-14 | Chikyu Kankyo Sangyo Gijutsu Kenkyu Kiko | 水素吸蔵合金を用いた水素貯蔵装置 |
JPH08128597A (ja) * | 1994-10-31 | 1996-05-21 | Sanyo Electric Co Ltd | 水素充填装置及び水素充填方法 |
JPH0992318A (ja) * | 1995-09-22 | 1997-04-04 | Nippon Telegr & Teleph Corp <Ntt> | 携帯形燃料電池装置 |
JPH10213292A (ja) * | 1997-01-31 | 1998-08-11 | Mitsubishi Heavy Ind Ltd | 人体検知装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2663626A (en) * | 1949-05-14 | 1953-12-22 | Pritchard & Co J F | Method of storing gases |
US2712730A (en) * | 1951-10-11 | 1955-07-12 | Pritchard & Co J F | Method of and apparatus for storing gases |
US3415069A (en) * | 1966-10-31 | 1968-12-10 | Nasa | High pressure helium purifier |
US3517521A (en) * | 1968-01-24 | 1970-06-30 | Us Interior | Method and apparatus for separating neon from a mixture of gases |
US3626671A (en) * | 1969-05-02 | 1971-12-14 | Air Prod & Chem | Adsorber element and temperature controlled adsorber purification system |
US4026680A (en) * | 1974-10-30 | 1977-05-31 | Union Carbide Corporation | Air separation by adsorption |
US4197095A (en) * | 1978-08-31 | 1980-04-08 | Pall Corporation | Heatless adsorbent fractionators with microprocessor cycle control and process |
US4749384A (en) * | 1987-04-24 | 1988-06-07 | Union Carbide Corporation | Method and apparatus for quick filling gas cylinders |
US4738693A (en) * | 1987-04-27 | 1988-04-19 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
US4723967A (en) * | 1987-04-27 | 1988-02-09 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
US4744221A (en) * | 1987-06-29 | 1988-05-17 | Olin Corporation | Zeolite based arsine storage and delivery system |
JPH01275998A (ja) * | 1988-04-28 | 1989-11-06 | Toho Asechiren Kk | ガス充填容器処理方法 |
US5624477A (en) * | 1991-05-09 | 1997-04-29 | The Boc Group Plc | Pressure swing adsorption plants |
FR2700276B1 (fr) * | 1993-01-08 | 1995-02-10 | Air Liquide | Procédé et unité d'adsorption pour la production d'un gaz par séparation d'un mélange gazeux. |
US5707424A (en) * | 1994-10-13 | 1998-01-13 | Advanced Technology Materials, Inc. | Process system with integrated gas storage and delivery unit |
US5837027A (en) * | 1996-05-20 | 1998-11-17 | Advanced Technology Materials, Inc. | Manufacturing process for gas source and dispensing systems |
-
1997
- 1997-05-20 US US08/859,171 patent/US5837027A/en not_active Expired - Lifetime
-
1998
- 1998-05-20 AU AU75841/98A patent/AU7584198A/en not_active Abandoned
- 1998-05-20 JP JP55059298A patent/JP4612920B2/ja not_active Expired - Lifetime
- 1998-05-20 KR KR1019997010777A patent/KR100545497B1/ko not_active IP Right Cessation
- 1998-05-20 DE DE69835600T patent/DE69835600T2/de not_active Expired - Lifetime
- 1998-05-20 WO PCT/US1998/010337 patent/WO1998052678A1/en active IP Right Grant
- 1998-05-20 AT AT98923580T patent/ATE336291T1/de not_active IP Right Cessation
- 1998-05-20 EP EP98923580A patent/EP1017474B1/en not_active Expired - Lifetime
-
2010
- 2010-07-29 JP JP2010170705A patent/JP2010249324A/ja active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5180303A (en) * | 1975-01-08 | 1976-07-13 | Sagami Asechiren Kk | Yokaiasechirenno jutenho |
JPS59231299A (ja) * | 1983-06-10 | 1984-12-25 | Matsushita Electric Ind Co Ltd | 金属水素化物の水素吸蔵方法 |
JPS6060399A (ja) * | 1983-09-12 | 1985-04-06 | Toshiba Corp | 水素貯蔵システム |
JPS61144495A (ja) * | 1984-12-17 | 1986-07-02 | Kashiwa Kagaku Kogyo:Kk | ガスの充填方法 |
JPS63140200A (ja) * | 1986-12-03 | 1988-06-11 | Mitsubishi Heavy Ind Ltd | 水素吸蔵合金貯蔵装置 |
JPH04224102A (ja) * | 1990-12-21 | 1992-08-13 | Ishikawajima Harima Heavy Ind Co Ltd | オゾンの保存方法 |
JPH08504394A (ja) * | 1992-09-28 | 1996-05-14 | アライド−シグナル・インコーポレーテッド | 水素の貯蔵 |
WO1996011739A1 (en) * | 1994-10-13 | 1996-04-25 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous compounds |
JPH08119601A (ja) * | 1994-10-19 | 1996-05-14 | Chikyu Kankyo Sangyo Gijutsu Kenkyu Kiko | 水素吸蔵合金を用いた水素貯蔵装置 |
JPH08128597A (ja) * | 1994-10-31 | 1996-05-21 | Sanyo Electric Co Ltd | 水素充填装置及び水素充填方法 |
JPH0992318A (ja) * | 1995-09-22 | 1997-04-04 | Nippon Telegr & Teleph Corp <Ntt> | 携帯形燃料電池装置 |
JPH10213292A (ja) * | 1997-01-31 | 1998-08-11 | Mitsubishi Heavy Ind Ltd | 人体検知装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010249324A (ja) * | 1997-05-20 | 2010-11-04 | Advanced Technology Materials Inc | 吸着剤を収容する流体貯蔵および供給容器を製造する方法 |
JP2006138470A (ja) * | 2004-10-15 | 2006-06-01 | Air Products & Chemicals Inc | ルイス酸性ガスの貯蔵およびデリバリーのためのルイス塩基性反応性化合物を含む液体媒体 |
JP4611860B2 (ja) * | 2004-10-15 | 2011-01-12 | エア プロダクツ アンド ケミカルズ インコーポレイテッド | ルイス酸性ガスの貯蔵およびデリバリーのためのルイス塩基性反応性化合物を含む液体媒体 |
KR101942629B1 (ko) | 2016-12-20 | 2019-01-28 | 버슘머트리얼즈한양기공 주식회사 | 반도체 제조용 특수가스 저장 실린더의 냉각 장치 |
Also Published As
Publication number | Publication date |
---|---|
EP1017474A4 (en) | 2002-11-13 |
EP1017474B1 (en) | 2006-08-16 |
KR100545497B1 (ko) | 2006-01-25 |
DE69835600D1 (de) | 2006-09-28 |
EP1017474A1 (en) | 2000-07-12 |
ATE336291T1 (de) | 2006-09-15 |
JP2010249324A (ja) | 2010-11-04 |
JP4612920B2 (ja) | 2011-01-12 |
US5837027A (en) | 1998-11-17 |
WO1998052678A1 (en) | 1998-11-26 |
KR20010012814A (ko) | 2001-02-26 |
DE69835600T2 (de) | 2007-08-23 |
AU7584198A (en) | 1998-12-11 |
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