JP2002510879A5 - - Google Patents

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JP2002510879A5
JP2002510879A5 JP2000542796A JP2000542796A JP2002510879A5 JP 2002510879 A5 JP2002510879 A5 JP 2002510879A5 JP 2000542796 A JP2000542796 A JP 2000542796A JP 2000542796 A JP2000542796 A JP 2000542796A JP 2002510879 A5 JP2002510879 A5 JP 2002510879A5
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Japan
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JP2000542796A
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JP2002510879A (ja
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Priority claimed from US09/054,575 external-priority patent/US6198616B1/en
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JP2000542796A 1998-04-03 1999-03-31 静電チャック電源 Pending JP2002510879A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/054,575 US6198616B1 (en) 1998-04-03 1998-04-03 Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system
US09/054,575 1998-04-03
PCT/US1999/007192 WO1999052144A1 (en) 1998-04-03 1999-03-31 Electrostatic chuck power supply

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JP2011109948A Division JP5583633B2 (ja) 1998-04-03 2011-05-16 静電チャック電源

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JP2002510879A JP2002510879A (ja) 2002-04-09
JP2002510879A5 true JP2002510879A5 (https=) 2009-04-16

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JP2000542796A Pending JP2002510879A (ja) 1998-04-03 1999-03-31 静電チャック電源
JP2011109948A Expired - Lifetime JP5583633B2 (ja) 1998-04-03 2011-05-16 静電チャック電源

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US (1) US6198616B1 (https=)
JP (2) JP2002510879A (https=)
WO (1) WO1999052144A1 (https=)

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