JP2002506988A5 - - Google Patents

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Publication number
JP2002506988A5
JP2002506988A5 JP2000537047A JP2000537047A JP2002506988A5 JP 2002506988 A5 JP2002506988 A5 JP 2002506988A5 JP 2000537047 A JP2000537047 A JP 2000537047A JP 2000537047 A JP2000537047 A JP 2000537047A JP 2002506988 A5 JP2002506988 A5 JP 2002506988A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000537047A
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Japanese (ja)
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JP4511724B2 (ja
JP2002506988A (ja
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Publication date
Priority claimed from US09/044,217 external-priority patent/US6179466B1/en
Application filed filed Critical
Publication of JP2002506988A publication Critical patent/JP2002506988A/ja
Publication of JP2002506988A5 publication Critical patent/JP2002506988A5/ja
Application granted granted Critical
Publication of JP4511724B2 publication Critical patent/JP4511724B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000537047A 1998-03-18 1999-02-23 基板温度測定法及び基板温度測定装置 Expired - Fee Related JP4511724B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/044,217 US6179466B1 (en) 1994-12-19 1998-03-18 Method and apparatus for measuring substrate temperatures
US09/044,217 1998-03-18
PCT/US1999/003978 WO1999047901A1 (en) 1998-03-18 1999-02-23 Method and apparatus for measuring substrate temperatures

Publications (3)

Publication Number Publication Date
JP2002506988A JP2002506988A (ja) 2002-03-05
JP2002506988A5 true JP2002506988A5 (enExample) 2009-01-29
JP4511724B2 JP4511724B2 (ja) 2010-07-28

Family

ID=21931132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000537047A Expired - Fee Related JP4511724B2 (ja) 1998-03-18 1999-02-23 基板温度測定法及び基板温度測定装置

Country Status (7)

Country Link
US (1) US6179466B1 (enExample)
EP (1) EP1064527B1 (enExample)
JP (1) JP4511724B2 (enExample)
KR (1) KR100396423B1 (enExample)
DE (1) DE69916256T2 (enExample)
TW (1) TW455676B (enExample)
WO (1) WO1999047901A1 (enExample)

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US8367983B2 (en) * 2008-04-09 2013-02-05 Applied Materials, Inc. Apparatus including heating source reflective filter for pyrometry
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US7985945B2 (en) * 2008-05-09 2011-07-26 Applied Materials, Inc. Method for reducing stray light in a rapid thermal processing chamber by polarization
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