JP2002363114A - Apparatus for separating and recovering perfluoro compound gas - Google Patents
Apparatus for separating and recovering perfluoro compound gasInfo
- Publication number
- JP2002363114A JP2002363114A JP2001165873A JP2001165873A JP2002363114A JP 2002363114 A JP2002363114 A JP 2002363114A JP 2001165873 A JP2001165873 A JP 2001165873A JP 2001165873 A JP2001165873 A JP 2001165873A JP 2002363114 A JP2002363114 A JP 2002363114A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- membrane
- separation means
- membrane separation
- permeated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- -1 perfluoro compound Chemical class 0.000 title claims abstract description 37
- 239000012528 membrane Substances 0.000 claims abstract description 157
- 239000000203 mixture Substances 0.000 claims abstract description 20
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 10
- 238000000926 separation method Methods 0.000 claims description 179
- 239000012466 permeate Substances 0.000 claims description 39
- 238000011084 recovery Methods 0.000 claims description 33
- 239000012510 hollow fiber Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 abstract description 211
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229920000620 organic polymer Polymers 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
- Y02P20/155—Perfluorocarbons [PFC]; Hydrofluorocarbons [HFC]; Hydrochlorofluorocarbons [HCFC]; Chlorofluorocarbons [CFC]
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造などに
おいて用いられるＣＦ4、Ｃ2Ｆ6、Ｃ3Ｆ8、Ｃ4Ｆ 10、Ｓ
Ｆ6、ＮＦ3などのパーフルオロ化合物ガスを分離回収す
る装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention
CF used inFour, CTwoF6, CThreeF8, CFourF Ten, S
F6, NFThreeSeparation and recovery of perfluoro compound gas such as
Device.
【０００２】[0002]
【従来の技術】半導体製造などにおいては、エッチン
グ、洗浄等の工程に、ＣＦ4、Ｃ2Ｆ6、Ｃ3Ｆ8、Ｃ
4Ｆ10、ＳＦ6、ＮＦ3などのパーフルオロ化合物ガスが
用いられている。パーフルオロ化合物ガスは、地球環境
に対し有害なガス（例えば温室効果ガス）となり得るこ
とが指摘されている。このため、半導体製造工程などか
ら排出されるガス混合物からパーフルオロ化合物ガスを
分離回収し、再利用することが行われている。パーフル
オロ化合物ガスを分離回収する装置としては、膜分離、
吸着分離、蒸留分離によりパーフルオロ化合物ガスを分
離できるものがあり、特に、分離性能に優れた膜分離を
採用した分離回収装置が多く用いられている。2. Description of the Related Art In semiconductor manufacturing and the like, CF 4 , C 2 F 6 , C 3 F 8 , C 3
4 F 10, perfluoro compound gas such as SF 6, NF 3 is used. It has been pointed out that perfluoro compound gas can be harmful to the global environment (for example, greenhouse gas). For this reason, a perfluoro compound gas is separated and recovered from a gas mixture discharged from a semiconductor manufacturing process or the like and reused. Devices for separating and recovering perfluoro compound gas include membrane separation,
There are some which can separate a perfluoro compound gas by adsorption separation and distillation separation. In particular, a separation and recovery apparatus employing a membrane separation having excellent separation performance is often used.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来の分離回収装置では、パーフルオロ化合物ガスの回収
率が不十分となる問題があった。また分離条件などを調
節することにより回収率の向上を図ると、回収ガス中の
パーフルオロ化合物ガス濃度が低くなり、回収ガスの再
利用が容易でなくなることがあった。特に、ガス混合物
中のパーフルオロ化合物ガス濃度が低い（例えば５００
ｍｇ／ｌ以下）場合に、パーフルオロ化合物ガスの回収
率、または回収ガス中のパーフルオロ化合物ガス濃度が
低くなることがあった。本発明は、上記事情に鑑みてな
されたもので、パーフルオロ化合物ガスを効率よく分離
回収することができ、しかもパーフルオロ化合物ガス濃
度が高い回収物を得ることができる分離回収装置を提供
することを目的とする。However, the conventional separation and recovery apparatus has a problem that the recovery rate of the perfluoro compound gas is insufficient. In addition, when the recovery rate is improved by adjusting the separation conditions and the like, the concentration of the perfluoro compound gas in the recovered gas becomes low, and it may be difficult to reuse the recovered gas. In particular, the concentration of the perfluoro compound gas in the gas mixture is low (eg, 500
mg / l or less), the recovery rate of the perfluoro compound gas or the concentration of the perfluoro compound gas in the recovered gas was sometimes reduced. The present invention has been made in view of the above circumstances, and provides a separation / recovery apparatus capable of efficiently separating and recovering a perfluoro compound gas and obtaining a recovered substance having a high perfluoro compound gas concentration. With the goal.
【０００４】[0004]
【課題を解決するための手段】本発明のパーフルオロ化
合物ガスの分離回収装置は、パーフルオロ化合物ガスを
含むガス混合物中のパーフルオロ化合物ガスを非透過成
分として分離する第１膜分離手段と、この膜分離手段を
経た非透過ガス中のパーフルオロ化合物ガスを非透過成
分として分離する第２膜分離手段と、第１膜分離手段か
らの透過ガス中のパーフルオロ化合物ガスを非透過成分
として分離する透過ガス膜分離手段と、この膜分離手段
からの非透過ガスを第１膜分離手段の上流側に送る非透
過ガス返送経路とを備えていることを特徴とする。透過
ガス膜分離手段は、前記透過ガスを膜分離するにあたっ
て、この透過ガスを分離膜の外部側から内部側へ透過さ
せる外圧式構造とするのが好ましい。透過ガス膜分離手
段は、分離膜内部を減圧することによって、分離膜外部
側から内部側へのガス透過を促すことができるように構
成されていることが好ましい。透過ガス膜分離手段は、
分離膜が中空糸状に形成されていることが好ましい。本
発明の分離回収装置は、第２膜分離手段からの透過ガス
を、第１膜分離手段の上流側に送る透過ガス返送経路を
備えた構成とするのが好ましい。According to the present invention, there is provided a perfluoro compound gas separation / recovery apparatus comprising: a first membrane separation means for separating a perfluoro compound gas in a gas mixture containing the perfluoro compound gas as a non-permeating component; A second membrane separation means for separating a perfluoro compound gas in the non-permeate gas passing through the membrane separation means as a non-permeate component, and a perfluoro compound gas in the permeate gas from the first membrane separation means as a non-permeate component And a non-permeate gas return path for sending the non-permeate gas from the membrane separator to the upstream side of the first membrane separator. It is preferable that the permeable gas membrane separation means has an external pressure structure in which the permeable gas is permeated from the outside to the inside of the separation membrane when the permeable gas is subjected to membrane separation. It is preferable that the permeable gas membrane separation means is configured to be able to promote gas permeation from the outside to the inside of the separation membrane by reducing the pressure inside the separation membrane. The permeable gas membrane separation means,
It is preferable that the separation membrane is formed in a hollow fiber shape. It is preferable that the separation and recovery apparatus of the present invention has a configuration provided with a permeated gas return path for sending the permeated gas from the second membrane separation means to the upstream side of the first membrane separation means.
【０００５】[0005]
【発明の実施の形態】図１は、本発明のパーフルオロ化
合物ガス（以下、ＰＦＣガスという）の分離回収装置の
一実施形態を示すものである。図１において、符号１
は、ＰＦＣガスを含むガス混合物を昇圧させる昇圧機、
符号２は、昇圧されたガス混合物中のＰＦＣガスを非透
過成分として分離する第１膜分離手段、符号３は、第１
膜分離手段２を経た非透過ガス中のＰＦＣガスを非透過
成分として分離する第２膜分離手段、符号４は、第２膜
分離手段３を経た非透過ガス中のＰＦＣガスを非透過成
分として分離する第３膜分離手段、符号５は、第２およ
び第３膜分離手段３、４からの透過ガスを第１膜分離手
段２の上流側に送る透過ガス返送経路、符号６は、第１
膜分離手段２からの透過ガス中のＰＦＣガスを非透過成
分として分離する透過ガス膜分離手段、符号７は、透過
ガス膜分離手段６からの非透過ガスを第１膜分離手段２
の上流側に送る非透過ガス返送経路を示す。FIG. 1 shows an embodiment of the apparatus for separating and recovering perfluoro compound gas (hereinafter referred to as PFC gas) of the present invention. In FIG.
Is a pressurizer that pressurizes a gas mixture containing PFC gas,
Reference numeral 2 denotes a first membrane separation unit for separating the PFC gas in the pressurized gas mixture as a non-permeating component, and reference numeral 3 denotes a first membrane separation unit.
A second membrane separation unit, which separates the PFC gas in the non-permeate gas that has passed through the membrane separation unit 2 as a non-permeate component, is denoted by reference numeral 4 as a PFC gas in the non-permeate gas that has passed through the second membrane separation unit 3 as a non-permeate component. Reference numeral 5 denotes a third membrane separation unit that separates the permeated gas from the second and third membrane separation units 3 and 4, and a permeated gas return path that sends the permeated gas to the upstream side of the first membrane separation unit 2.
The permeable gas membrane separation means for separating the PFC gas in the permeable gas from the membrane separation means 2 as a non-permeable component, and the reference numeral 7 designates the non-permeable gas from the permeable gas membrane separation means 6 as the first membrane separation means 2.
2 shows a non-permeate gas return path to be sent to the upstream side.
【０００６】第１〜第３膜分離手段２〜４は、中空糸
状、管状、スパイラル状などの分離膜を備えた構成とす
ることができる。膜分離手段２〜４には、膜分離にあた
って、ガスを分離膜の外部側から内部側へ透過させる外
圧式構造を採用してもよいし、ガスを分離膜の内部側か
ら外部側へ透過させる内圧式構造を採用してもよい。[0006] The first to third membrane separation means 2 to 4 can be configured to have a separation membrane in a hollow fiber shape, a tubular shape, a spiral shape or the like. The membrane separation means 2 to 4 may employ an external pressure type structure that allows gas to pass from the outside to the inside of the separation membrane during membrane separation, or allows gas to pass from the inside to the outside of the separation membrane. An internal pressure type structure may be adopted.
【０００７】透過ガス膜分離手段６は、中空糸状、管
状、スパイラル状などの分離膜を備えた構成とすること
ができる。なかでも特に、中空糸状の分離膜を用いる
と、膜面積を大きくできるため好ましい。[0007] The permeated gas membrane separation means 6 can be provided with a separation membrane of a hollow fiber shape, a tubular shape, a spiral shape or the like. In particular, it is preferable to use a hollow fiber-shaped separation membrane because the membrane area can be increased.
【０００８】透過ガス膜分離手段６には、第１膜分離手
段２からの透過ガスを膜分離するにあたって、この透過
ガスを分離膜の外部側から内部側へ透過させる外圧式構
造を採用するのが好ましい。図２は、外圧式構造の透過
ガス膜分離手段６の一例を示すもので、ここに示す透過
ガス膜分離手段６は、外容器８内に中空糸状分離膜９が
設けられ、これら外容器８と分離膜９との間に導入され
た導入ガスＧ１の一部を分離膜９内部に透過させ、透過
ガスＧ２を得ることができる構造とされている。なお符
号Ｇ３は非透過ガスを示す。透過ガス膜分離手段６は、
分離膜９内部を減圧ポンプ１０によって減圧することに
よって、分離膜９内外の圧力差により外部側から内部側
へのガス透過を促すことができる構成とするのが好まし
い。なお、透過ガス膜分離手段６としては、外圧式構造
に限らず、上記透過ガスを分離膜の内部側から外部側へ
透過させる内圧式構造を採用することもできる。When the permeated gas from the first membrane separation means 2 is subjected to membrane separation, the permeated gas membrane separation means 6 employs an external pressure type structure for permeating the permeated gas from the outside to the inside of the separation membrane. Is preferred. FIG. 2 shows an example of the permeated gas membrane separation means 6 having an external pressure type structure. The permeated gas membrane separation means 6 shown here is provided with a hollow fiber-like separation membrane 9 in an outer container 8, A part of the introduced gas G1 introduced between the gas and the separation membrane 9 is transmitted through the inside of the separation membrane 9 to obtain a permeated gas G2. The symbol G3 indicates a non-permeated gas. The permeated gas membrane separation means 6
By depressurizing the inside of the separation membrane 9 with the decompression pump 10, it is preferable that the pressure difference between the inside and outside of the separation membrane 9 promotes gas permeation from the outside to the inside. The permeable gas membrane separation means 6 is not limited to the external pressure type structure, but may employ an internal pressure type structure that allows the permeated gas to permeate from the inside to the outside of the separation membrane.
【０００９】膜分離手段２〜４、６に用いられる分離膜
としては、有機高分子材料（ポリスルフォン系、ポリイ
ミド系、ポリオレフィン系、セルロース系、ポリビニル
アルコール系等）からなるものを用いることができる。
また分離膜としては、上記有機高分子材料膜を、熱処理
により炭素化して得られた炭素膜を用いることもでき
る。炭素膜としては、例えば上記有機高分子材料からな
る膜を、不活性ガス（窒素等）雰囲気下において５００
〜９００℃で熱処理し、少なくとも一部を炭素化したも
のを用いることができる。As the separation membrane used in the membrane separation means 2 to 4 and 6, a separation membrane made of an organic polymer material (polysulfone, polyimide, polyolefin, cellulose, polyvinyl alcohol, etc.) can be used. .
Further, as the separation membrane, a carbon membrane obtained by carbonizing the above-mentioned organic polymer material membrane by heat treatment can also be used. As the carbon film, for example, a film made of the above-mentioned organic polymer material is formed in an inert gas (nitrogen or the like) atmosphere for 500 minutes.
Heat treated at about 900 ° C. and carbonized at least in part can be used.
【００１０】次に、図１に示す分離回収装置１を用いた
場合を例として、本発明の分離回収方法の一実施形態を
説明する。本実施形態の分離回収方法の対象となるガス
混合物としては、半導体製造工程などからの排出された
ＰＦＣガス含有ガスを例示できる。例えば、ＰＦＣガス
（ＣＦ4、Ｃ2Ｆ6、Ｃ3Ｆ8、Ｃ4Ｆ10、ＳＦ6、ＮＦ3な
ど）と他成分ガス（不活性ガス、二酸化炭素、空気な
ど）とを含むものを例示できる。不活性ガスとしては窒
素、アルゴンを例示できる。Next, an embodiment of the separation and recovery method of the present invention will be described by taking as an example the case where the separation and recovery apparatus 1 shown in FIG. 1 is used. Examples of the gas mixture to be subjected to the separation and recovery method of the present embodiment include a PFC gas-containing gas discharged from a semiconductor manufacturing process or the like. For example, a gas containing a PFC gas (CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 10 , SF 6 , NF 3, etc.) and another component gas (inert gas, carbon dioxide, air, etc.) Can be illustrated. Examples of the inert gas include nitrogen and argon.
【００１１】このガス混合物を、経路１１を通して昇圧
機１に導入し、ここで昇圧した後、経路１２を通して第
１膜分離手段２に導入する。第１膜分離手段２において
は、ガス混合物中の他成分ガス（窒素ガス等）の大部分
が分離膜を透過し、透過ガスとして経路１３に導出され
る。一方、ガス混合物中のＰＦＣガスの多くの部分は分
離膜を透過せず、ＰＦＣガスが濃縮された非透過ガス
（非透過成分）として経路１４を通して第２膜分離手段
３に送られる。この際、ＰＦＣガスの多くの部分は第２
膜分離手段３に送られるものの、ＰＦＣガスの一部は、
分離膜を透過し、上記他成分ガスとともに透過ガスとし
て経路１３に導出される。The gas mixture is introduced into the pressure booster 1 through a path 11, where the pressure is increased. Then, the gas mixture is introduced into the first membrane separation means 2 through a path 12. In the first membrane separation means 2, most of the other component gas (such as nitrogen gas) in the gas mixture permeates the separation membrane and is led out to the passage 13 as a permeated gas. On the other hand, most of the PFC gas in the gas mixture does not pass through the separation membrane, and is sent to the second membrane separation means 3 through the passage 14 as a non-permeate gas (non-permeate component) in which the PFC gas is concentrated. At this time, most of the PFC gas is
Although sent to the membrane separation means 3, part of the PFC gas is
After passing through the separation membrane, it is led to the passage 13 as a permeated gas together with the other component gas.
【００１２】第２膜分離手段３では、経路１４からの非
透過ガス中のＰＦＣガスがさらに濃縮され、非透過ガス
（非透過成分）として経路１５を通して第３膜分離手段
４に送られる。第２膜分離手段３の透過ガスは、透過ガ
ス返送経路５によって、経路１１を経て再び昇圧機１に
導入される。これによって透過ガス中の残留ＰＦＣガス
は再び膜分離手段２〜４に供給される。In the second membrane separation means 3, the PFC gas in the non-permeate gas from the passage 14 is further concentrated and sent to the third membrane separation means 4 through the passage 15 as a non-permeate gas (non-permeate component). The permeated gas of the second membrane separation means 3 is again introduced into the booster 1 through the permeated gas return path 5 via the path 11. Thereby, the residual PFC gas in the permeated gas is supplied again to the membrane separation means 2 to 4.
【００１３】第３膜分離手段４では、経路１５からの非
透過ガス中のＰＦＣガスがさらに濃縮され、非透過ガス
（非透過成分）として経路１６を通して回収される（以
下、分離回収ガスという）。第３膜分離手段４の透過ガ
スは、透過ガス返送経路５によって、経路１１を経て再
び昇圧機１に導入される。これによって透過ガス中の残
留ＰＦＣガスは再び膜分離手段２〜４に供給される。In the third membrane separation means 4, the PFC gas in the non-permeate gas from the passage 15 is further concentrated and recovered as a non-permeate gas (non-permeate component) through the passage 16 (hereinafter, referred to as a separated and recovered gas). . The permeated gas of the third membrane separation means 4 is again introduced into the booster 1 through the permeated gas return path 5 via the path 11. Thereby, the residual PFC gas in the permeated gas is supplied again to the membrane separation means 2 to 4.
【００１４】上述のように、第１膜分離手段２におい
て、ガス混合物中のＰＦＣガスの一部は、分離膜を透過
し、上記他成分ガスとともに透過ガスとして経路１３に
導出される。この透過ガスは、経路１３を通して導入ガ
スＧ１として透過ガス膜分離手段６に導入される。As described above, in the first membrane separation means 2, a part of the PFC gas in the gas mixture permeates the separation membrane and is led out to the passage 13 as a permeated gas together with the other component gases. This permeated gas is introduced into the permeated gas membrane separation means 6 through the passage 13 as the introduced gas G1.
【００１５】図２に示すように、透過ガス膜分離手段６
では、減圧ポンプ１０によって分離膜９内部を減圧す
る。これによって、導入ガスＧ１中の他成分ガスは、分
離膜９内外の圧力差により透過ガスＧ２として経路１７
を通して系外に導出される。導入ガスＧ１中のＰＦＣガ
スは、非透過ガス返送経路７を通して非透過ガスＧ３
（非透過成分）として導出され、経路１１を経て再び昇
圧機１に導入され、再び膜分離手段２〜４に供給され
る。As shown in FIG. 2, the permeable gas membrane separation means 6
Then, the pressure inside the separation membrane 9 is reduced by the vacuum pump 10. As a result, the other component gas in the introduced gas G1 is converted into the permeated gas G2 by the pressure difference between the inside and outside of the separation membrane 9 as the path 17
Through the system. The PFC gas in the introduction gas G1 passes through the non-permeate gas return path 7 to pass through the non-permeate gas G3.
It is derived as a (non-permeated component), introduced again into the booster 1 via the path 11, and supplied again to the membrane separation means 2 to 4.
【００１６】本実施形態の分離回収装置では、第１膜分
離手段２からの透過ガス中のＰＦＣガスを分離する透過
ガス膜分離手段６と、透過ガス膜分離手段６からの非透
過ガスを第１膜分離手段２の上流側に送る非透過ガス返
送経路７とを備えているので、第１膜分離手段２を透過
したＰＦＣガスを、透過ガス膜分離手段６によって回収
し、再び膜分離手段２〜４に供給することができる。こ
のため、ガス混合物中のＰＦＣガス濃度が低い場合で
も、ＰＦＣガスの回収率を高めることができる。また透
過ガス膜分離手段６において、ＰＦＣガスを、それ以外
のガス（不活性ガスなど）から分離することができるた
め、ガス混合物中のＰＦＣガス濃度が低い場合でも、分
離回収ガス中のＰＦＣガス濃度を高めることができる。
このため、分離回収ガスの再利用が容易となる。In the separation and recovery apparatus of the present embodiment, the permeated gas separation means 6 for separating the PFC gas in the permeated gas from the first membrane separation means 2 and the non-permeated gas from the permeated gas separation means 6 Since it has the non-permeate gas return path 7 for sending upstream to the first membrane separation means 2, the PFC gas permeated through the first membrane separation means 2 is collected by the permeated gas membrane separation means 6, and the membrane separation means is returned again. 2 to 4 can be supplied. For this reason, even when the PFC gas concentration in the gas mixture is low, the recovery rate of the PFC gas can be increased. Further, since the PFC gas can be separated from other gases (inert gas, etc.) in the permeated gas membrane separation means 6, even if the PFC gas concentration in the gas mixture is low, the PFC gas in the separated and collected gas can be separated. The concentration can be increased.
For this reason, it is easy to reuse the separated and collected gas.
【００１７】また一般に、複数の膜分離手段を直列に配
列した分離回収装置では、供給するガスに高い圧力をか
けて分離膜内外の圧力差を大きくすることで、ガスを分
離膜の内側から外側に透過させ、非透過ガス中のＰＦＣ
ガスを高圧条件で濃縮する。この供給ガスと透過ガスと
の圧力差が大きいほど高いガス透過量が得られる。本実
施形態では、透過ガス膜分離手段６として、外圧式構造
のものを用いることによって、透過ガス膜分離手段６に
おける圧力損失を小さくすることができるため、分離膜
９内部を減圧することにより膜分離を行うことが容易と
なる。このため、導入ガスＧ１の圧力を高めることな
く、透過ガス膜分離手段６において良好な膜分離が可能
となる。従って、第１膜分離手段２における膜分離に悪
影響が及ぶのを防ぎ、第１膜分離手段２において高効率
でＰＦＣガスの分離を行うことができる。これに対し、
透過ガス膜分離手段６に内圧式構造のものを用いる場合
には、圧力損失が大きくなりやすいため、効率よく膜分
離を行うには、導入ガスＧ１の圧力を高めることが必要
となる。このため、第１膜分離手段２においてＰＦＣガ
スの分離効率が低下しやすくなる。これは、上述のよう
な分離に必要な、第１膜分離手段２における分離膜内外
の十分な圧力差を設定するのが難しくなるためである。In general, in a separation and recovery apparatus in which a plurality of membrane separation means are arranged in series, a high pressure is applied to a supplied gas to increase a pressure difference between the inside and outside of the separation membrane, so that the gas is moved from inside to outside of the separation membrane. PFC in non-permeated gas
The gas is concentrated under high pressure conditions. The larger the pressure difference between the supply gas and the permeated gas, the higher the gas permeation amount can be obtained. In this embodiment, since the pressure loss in the permeated gas membrane separation means 6 can be reduced by using an external pressure type structure as the permeated gas membrane separation means 6, the pressure in the separation membrane 9 is reduced by reducing the pressure inside the separation membrane 9. Separation becomes easy. Therefore, good membrane separation can be performed in the permeated gas membrane separation means 6 without increasing the pressure of the introduced gas G1. Therefore, it is possible to prevent an adverse effect on the membrane separation in the first membrane separation unit 2 and to separate the PFC gas with high efficiency in the first membrane separation unit 2. In contrast,
When an internal pressure type structure is used for the permeable gas membrane separation means 6, the pressure loss is likely to increase. Therefore, it is necessary to increase the pressure of the introduced gas G1 in order to efficiently perform the membrane separation. For this reason, the separation efficiency of the PFC gas in the first membrane separation means 2 tends to decrease. This is because it becomes difficult to set a sufficient pressure difference between the inside and outside of the separation membrane in the first membrane separation means 2 necessary for the above-described separation.
【００１８】[0018]
【実施例】以下、具体例を示して本発明の分離回収方法
を説明する。 （実施例）図１および図２に示す分離回収装置を用いて
以下の分離回収試験を行った。膜分離手段２〜４として
は内圧式構造のものを用い、透過ガス膜分離手段６とし
ては外圧式構造のものを用いた。本実施形態では、ガス
混合物として窒素とＣＦ4の混合物を使用した。ガス混
合物中のＣＦ4濃度は５００ｍｇ／ｌとした。ガス混合
物の供給流量は３０Ｌ／ｍｉｎとした。このガス混合物
を、昇圧機１で０．９９ＭＰａまで昇圧した後、第１膜
分離手段２に導入し、非透過ガスを第２膜分離手段３に
導入し、第２膜分離手段３からの非透過ガスを第３膜分
離手段４に導入し、第３膜分離手段４からの非透過ガス
を経路１６を通して回収した（分離回収ガス）。膜分離
手段３、４からの透過ガスは、透過ガス返送経路５を通
して昇圧機１に返送した。膜分離手段２〜４における膜
分離時の温度条件は６０℃とした。第１膜分離手段２か
ら透過ガス（導入ガスＧ１）を透過ガス膜分離手段６に
導入し、透過ガスＧ２を経路１７を通して系外に排出
し、非透過ガスＧ３を非透過ガス返送経路７を通して昇
圧機１に返送した。膜分離手段２〜４における圧力条件
を変化させた時の分離回収ガスのＣＦ4濃度と回収率と
の関係を図３に示す。Hereinafter, the separation and recovery method of the present invention will be described with reference to specific examples. (Example) The following separation and recovery test was performed using the separation and recovery apparatus shown in FIGS. The internal pressure type structure was used as the membrane separation means 2 to 4, and the external pressure type structure was used as the permeated gas membrane separation means 6. In the present embodiment, a mixture of nitrogen and CF 4 was used as the gas mixture. The CF 4 concentration in the gas mixture was 500 mg / l. The supply flow rate of the gas mixture was 30 L / min. After this gas mixture is pressurized to 0.99 MPa by the pressure booster 1, it is introduced into the first membrane separation means 2, the non-permeate gas is introduced into the second membrane separation means 3, and the non-permeate gas is supplied from the second membrane separation means 3. The permeated gas was introduced into the third membrane separation means 4, and the non-permeated gas from the third membrane separation means 4 was recovered through the path 16 (separated and recovered gas). The permeated gas from the membrane separation means 3 and 4 was returned to the booster 1 through the permeated gas return path 5. The temperature condition at the time of membrane separation in the membrane separation means 2 to 4 was 60 ° C. The permeated gas (introduced gas G1) is introduced from the first membrane separation means 2 to the permeated gas membrane separation means 6, the permeated gas G2 is discharged out of the system through the path 17, and the non-permeated gas G3 is passed through the non-permeated gas return path 7. It was returned to the booster 1. FIG. 3 shows the relationship between the CF 4 concentration of the separated and recovered gas and the recovery rate when the pressure conditions in the membrane separation means 2 to 4 are changed.
【００１９】（比較例）図４に示すように、透過ガス膜
分離手段６と非透過ガス返送経路７とを備えていないこ
と以外は図１に示す装置と同様の構成の分離回収装置を
用いて実施例と同様の分離回収試験を行った。この試験
では、第１膜分離手段２から透過ガスを経路１３を通し
てそのまま系外に排出した。膜分離手段２〜４における
圧力条件を変化させた時の分離回収ガスのＣＦ4濃度と
回収率との関係を図５に示す。(Comparative Example) As shown in FIG. 4, a separation / recovery apparatus having the same configuration as the apparatus shown in FIG. 1 is used except that the permeated gas membrane separation means 6 and the non-permeated gas return path 7 are not provided. The same separation and recovery test as in the example was performed. In this test, the permeated gas was directly discharged from the first membrane separation means 2 to the outside of the system through the passage 13. FIG. 5 shows the relationship between the CF 4 concentration of the separated and recovered gas and the recovery rate when the pressure conditions in the membrane separation means 2 to 4 were changed.
【００２０】図３に示すように、透過ガス膜分離手段６
を設けない比較例では、分離回収ガスのＣＦ4濃度を高
くするとＣＦ4回収率が低くなり、ＣＦ4回収率を高くす
ると分離回収ガス中のＣＦ4濃度が低くなったことがわ
かる。これに対し、実施例では、高濃度のＣＦ4を高効
率で回収することができたことがわかる。As shown in FIG. 3, the permeable gas membrane separation means 6
With the comparative example not provided, the higher the CF 4 concentration in the separation and recovery gas CF 4 recovery rate is low, it can be seen that became low CF 4 concentration separation and recovery gas and to increase the CF 4 recovery rate. In contrast, in the examples, it can be seen that high-concentration CF 4 could be recovered with high efficiency.
【００２１】[0021]
【発明の効果】以上説明したように、本発明の分離回収
装置では、第１膜分離手段からの透過ガス中のパーフル
オロ化合物ガスを分離する透過ガス膜分離手段と、この
膜分離手段からの非透過ガスを第１膜分離手段の上流側
に送る非透過ガス返送経路とを備えているので、第１膜
分離手段を透過したパーフルオロ化合物ガスを、透過ガ
ス膜分離手段によって回収し、再び第１および第２膜分
離手段に供給することができる。このため、パーフルオ
ロ化合物ガスの回収率を高めることができる。また透過
ガス膜分離手段において、パーフルオロ化合物ガスを、
それ以外のガスから分離することができるため、回収ガ
ス中のパーフルオロ化合物ガス濃度を高めることができ
る。このため、回収ガスの再利用が容易となる。As described above, in the separation and recovery apparatus of the present invention, the permeated gas membrane separation means for separating the perfluoro compound gas in the permeated gas from the first membrane separation means, Since there is provided a non-permeate gas return path for sending the non-permeate gas to the upstream side of the first membrane separation means, the perfluoro compound gas that has passed through the first membrane separation means is collected by the permeate gas membrane separation means, and It can be supplied to the first and second membrane separation means. For this reason, the recovery rate of the perfluoro compound gas can be increased. In the permeated gas membrane separation means, the perfluoro compound gas is
Since the gas can be separated from other gases, the concentration of the perfluoro compound gas in the recovered gas can be increased. For this reason, it is easy to reuse the collected gas.
【図１】 本発明のパーフルオロ化合物ガスの分離回収
装置の一実施形態を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of a perfluoro compound gas separation / recovery device of the present invention.
【図２】 図１に示す分離回収装置の透過ガス膜分離手
段の構造図である。FIG. 2 is a structural view of a permeated gas membrane separation means of the separation and recovery apparatus shown in FIG.
【図３】 試験結果を示すグラフである。FIG. 3 is a graph showing test results.
【図４】 分離回収装置の一例を示す構成図である。FIG. 4 is a configuration diagram illustrating an example of a separation and recovery device.
【図５】 試験結果を示すグラフである。FIG. 5 is a graph showing test results.
１・・・分離回収装置、２・・・第１膜分離手段、３・・・第２
膜分離手段、５・・・透過ガス返送経路、６・・・透過ガス膜
分離手段、７・・・非透過ガス返送経路、９・・・分離膜DESCRIPTION OF SYMBOLS 1 ... Separation and collection apparatus, 2 ... 1st membrane separation means, 3 ... 2nd
Membrane separation means, 5: Permeated gas return path, 6: Permeated gas membrane separation means, 7: Non-permeated gas return path, 9: Separation membrane
───────────────────────────────────────────────────── フロントページの続き (72)発明者 新田 昭彦 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 枝澤 克人 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 真鍋 岳史 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 大矢 浩三 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 永野 修次 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 八高 賢一 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 安藤 秀樹 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 後藤 正敏 東京都港区西新橋１丁目５番13号 第８東 洋海事ビル８階 ＰＦＣ回収・再利用プロ ジェクト室内 (72)発明者 記村 隆章 神奈川県横浜市戸塚区吉田町292 株式会 社半導体先端テクノロジーズＰＦＣグルー プ内 (72)発明者 上村 隆 神奈川県横浜市戸塚区吉田町292 株式会 社半導体先端テクノロジーズＰＦＣグルー プ内 (72)発明者 中坊 康司 神奈川県横浜市戸塚区吉田町292 株式会 社半導体先端テクノロジーズＰＦＣグルー プ内 (72)発明者 関屋 章 茨城県つくば市東１−１−１ 独立行政法 人産業技術総合研究所つくばセンター内 (72)発明者 原谷 賢治 茨城県つくば市東１−１−１ 独立行政法 人産業技術総合研究所つくばセンター内 Ｆターム(参考） 4D006 GA41 HA01 HA18 HA19 HA21 HA61 JA52A JA58A KA12 KA52 KA53 KA56 KA68 MA01 MA02 MA03 MC05 MC11 MC22 MC33 MC58 MC62 NA50 PA03 PB19 PB70 PC01 4H006 AA02 AD19 BD82 BD84 EA02 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Akihiko Nitta 8th floor of the 8th Toyo Kaiji Building, 1-5-13 Nishishinbashi, Minato-ku, Tokyo PFC collection and reuse project room (72) Inventor Ezawa Katsuto 1-5-13 Nishi-Shimbashi, Minato-ku, Tokyo The 8th floor of the 8th Oriental Maritime Building PFC collection and reuse project room (72) Inventor Takefumi Manabe 1-5-13-1 Nishi-Shimbashi, Minato-ku, Tokyo (72) Inventor Kozo Oya 1-5-13 Nishi-Shimbashi, Minato-ku, Tokyo 8th Toyo Maritime Building 8th Floor PFC Collection / Reuse Room (72) Inventor Shuji Nagano 1-5-13 Nishi-Shimbashi, Minato-ku, Tokyo 8th Toyo Maritime Building 8F PFC Collection / Reuse Project Room (72) Inventor 8 Kenichi 1-5-13 Nishi-Shimbashi, Minato-ku, Tokyo Eighth Toyo Maritime Building 8F PFC Collection / Reuse Project Room (72) Inventor Hideki Ando 1-5-13-1, Nishi-Shimbashi, Minato-ku, Tokyo (72) Inventor Masatoshi Goto 1st-13-13 Nishishinbashi, Minato-ku, Tokyo 8th Oriental Maritime Building 8th Floor PFC Collection / Reuse Project Room (72) 72) Inventor Takaaki Kikimura 292, Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Inside the Semiconductor Advanced Technologies PFC Group (72) Inventor Takashi Uemura 292, Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Semiconductor Advanced Technologies PFC Group Inside (72) Inventor Yasushi Nakabo 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Within the Semiconductor Advanced Technologies PFC Group (72) Inventor Akira Sekiya 1-1-1 Higashi, Tsukuba-shi, Ibaraki Independent Administrative Law Human Industrial Technology Comprehensive research Inside the Tsukuba Center (72) Inventor Kenji Haratani 1-1-1 Higashi, Tsukuba City, Ibaraki Prefecture Independent Administrative Law National Institute of Advanced Industrial Science and Technology Tsukuba Center F-term (reference) MA01 MA02 MA03 MC05 MC11 MC22 MC33 MC58 MC62 NA50 PA03 PB19 PB70 PC01 4H006 AA02 AD19 BD82 BD84 EA02
Claims (5)
物中のパーフルオロ化合物ガスを非透過成分として分離
する第１膜分離手段と、 この膜分離手段を経た非透過ガス中のパーフルオロ化合
物ガスを非透過成分として分離する第２膜分離手段と、 第１膜分離手段からの透過ガス中のパーフルオロ化合物
ガスを非透過成分として分離する透過ガス膜分離手段
と、 この膜分離手段からの非透過ガスを第１膜分離手段の上
流側に送る非透過ガス返送経路とを備えていることを特
徴とするパーフルオロ化合物ガスの分離回収装置。1. A first membrane separation means for separating a perfluoro compound gas in a gas mixture containing a perfluoro compound gas as a non-permeate component, and a non-permeate gas in the non-permeate gas passed through the membrane separation means. A second membrane separation means for separating as a permeate component, a permeate gas separation means for separating a perfluoro compound gas in a permeate gas from the first membrane separation means as a non-permeate component, and a non-permeate gas from the membrane separation means And a non-permeate gas return path for sending the gas to the upstream side of the first membrane separation means.
膜分離するにあたって、この透過ガスを分離膜の外部側
から内部側へ透過させる外圧式構造とされていることを
特徴とする請求項１記載のパーフルオロ化合物ガスの分
離回収装置。2. The permeable gas membrane separation means has an external pressure type structure for permeating the permeable gas from the outside to the inside of the separation membrane when separating the permeable gas into a membrane. 2. The apparatus for separating and recovering a perfluoro compound gas according to claim 1.
圧することによって、分離膜外部側から内部側へのガス
透過を促すことができるように構成されていることを特
徴とする請求項２記載のパーフルオロ化合物ガスの分離
回収装置。3. The permeable gas membrane separation means is configured to be able to promote gas permeation from the outside to the inside of the separation membrane by reducing the pressure inside the separation membrane. 3. The apparatus for separating and recovering a perfluoro compound gas according to 2.
状に形成されていることを特徴とする請求項１〜３のう
ちいずれか１項記載のパーフルオロ化合物ガスの分離回
収装置。4. The perfluoro compound gas separation and recovery apparatus according to claim 1, wherein the permeated gas membrane separation means has a separation membrane formed in a hollow fiber shape.
膜分離手段の上流側に送る透過ガス返送経路を備えてい
ることを特徴とする請求項１〜４のうちいずれか１項記
載のパーフルオロ化合物ガスの分離回収装置。5. The method according to claim 1, wherein the permeated gas from the second membrane separation means is supplied to the first membrane separation means.
The perfluoro compound gas separation / recovery apparatus according to any one of claims 1 to 4, further comprising a permeated gas return path for sending the gas to an upstream side of the membrane separation means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001165873A JP3727552B2 (en) | 2001-05-31 | 2001-05-31 | Perfluoro compound gas separation and recovery equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001165873A JP3727552B2 (en) | 2001-05-31 | 2001-05-31 | Perfluoro compound gas separation and recovery equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002363114A true JP2002363114A (en) | 2002-12-18 |
| JP3727552B2 JP3727552B2 (en) | 2005-12-14 |
Family
ID=19008492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001165873A Expired - Lifetime JP3727552B2 (en) | 2001-05-31 | 2001-05-31 | Perfluoro compound gas separation and recovery equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3727552B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007055934A (en) * | 2005-08-24 | 2007-03-08 | Showa Denko Kk | Method for production of pentafluoroethane |
| JP2015505273A (en) * | 2011-12-27 | 2015-02-19 | エボニック ファイバース ゲゼルシャフト ミット ベシュレンクテル ハフツングＥｖｏｎｉｋ Ｆｉｂｒｅｓ ＧｍｂＨ | Gas separation method |
| JP2015525134A (en) * | 2013-06-25 | 2015-09-03 | ファインテック．カンパニー，リミテッド | Perfluoro compound separation and recycling system |
| WO2016076091A1 (en) * | 2014-11-12 | 2016-05-19 | 三菱重工業株式会社 | Apparatus for separating co2 in gas, membrane separation method therefor, and membrane separation control method for apparatus for separating co2 in gas |
| JP2016523965A (en) * | 2013-07-12 | 2016-08-12 | アーケマ・インコーポレイテッド | Method for separating organic fluorine compounds using a membrane |
| CN108404613A (en) * | 2018-01-09 | 2018-08-17 | 丁五行 | The separator of mixed gas |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101420767B1 (en) * | 2012-09-14 | 2014-07-17 | 한국화학연구원 | Appratus for enriching and recovering fluorinated gas using membrane, and the method for enriching and recoverying of fluorinated gas thereby |
-
2001
- 2001-05-31 JP JP2001165873A patent/JP3727552B2/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007055934A (en) * | 2005-08-24 | 2007-03-08 | Showa Denko Kk | Method for production of pentafluoroethane |
| JP2015505273A (en) * | 2011-12-27 | 2015-02-19 | エボニック ファイバース ゲゼルシャフト ミット ベシュレンクテル ハフツングＥｖｏｎｉｋ Ｆｉｂｒｅｓ ＧｍｂＨ | Gas separation method |
| EP3338876A1 (en) * | 2011-12-27 | 2018-06-27 | Evonik Fibres GmbH | Method for separating gases by membranes |
| JP2015525134A (en) * | 2013-06-25 | 2015-09-03 | ファインテック．カンパニー，リミテッド | Perfluoro compound separation and recycling system |
| JP2016523965A (en) * | 2013-07-12 | 2016-08-12 | アーケマ・インコーポレイテッド | Method for separating organic fluorine compounds using a membrane |
| WO2016076091A1 (en) * | 2014-11-12 | 2016-05-19 | 三菱重工業株式会社 | Apparatus for separating co2 in gas, membrane separation method therefor, and membrane separation control method for apparatus for separating co2 in gas |
| JP2016093767A (en) * | 2014-11-12 | 2016-05-26 | 三菱重工業株式会社 | Apparatus for separating co2 in gas and membrane separation method therefor, and membrane separation management method of apparatus for separating co2 in gas |
| US10913027B2 (en) | 2014-11-12 | 2021-02-09 | Mitsubishi Heavy Industries, Ltd. | CO2 separation device in gas and its membrane separation method and method for controlling membrane separation of CO2 separation device in gas |
| CN108404613A (en) * | 2018-01-09 | 2018-08-17 | 丁五行 | The separator of mixed gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3727552B2 (en) | 2005-12-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2872521B2 (en) | Two-stage membrane separation drying method and apparatus | |
| CA1340001C (en) | Process for separating components of a gas stream | |
| JPH05192530A (en) | Improved gas film separating method | |
| EP0411254A1 (en) | Production of dry, high purity nitrogen | |
| CA2351272A1 (en) | Membrane-assisted fluid separation apparatus and method | |
| JPH035309A (en) | Improved method and apparatus for producing dry high-purity nitrogen | |
| CN104941394B (en) | Gas separation system and method for producing enriched gas | |
| KR850000361A (en) | Separation method of high purity carbon monoxide | |
| JP2002363114A (en) | Apparatus for separating and recovering perfluoro compound gas | |
| US5693121A (en) | Semi-permeable membrane separation process for the production of very high purity nitrogen | |
| KR20200125851A (en) | Method for producing nitrogen-enriched air using flue gas | |
| JP2012236123A (en) | Carbon dioxide separation and recovery system in exhaust gas by zeolite membrane | |
| JP2898741B2 (en) | Treatment method of exhaust gas containing organic vapor | |
| JPH06234505A (en) | Production of oxygen-rich gas | |
| JPH0857243A (en) | Separation of gas by partial purging for preliminary or after purification | |
| JP6102130B2 (en) | Carbon dioxide recovery system and carbon dioxide recovery method | |
| US4832714A (en) | Device for the decomposition of a multicomponent gas and to a method of operating the system for the decomposition of gases | |
| JPH02135117A (en) | Gas separation module and multistage gas separator | |
| JP2000072419A (en) | Method for recovering rare gas | |
| JP7031214B2 (en) | Helium-enriched gas production method and gas separation system | |
| JPH0667449B2 (en) | Gas dehumidification method | |
| US6478851B2 (en) | Ethylene treatment by gas permeation | |
| JP2879846B2 (en) | Separation and recovery method of gas by separation membrane | |
| JPH09206541A (en) | Separation of oxygen and argon in air and device therefor | |
| JPH0328363B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20041029 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050303 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050315 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050511 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20050830 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20050928 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 3727552 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313532 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081007 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141007 Year of fee payment: 9 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141007 Year of fee payment: 9 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141007 Year of fee payment: 9 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |