JP2002359116A - Chip type common mode choke coil - Google Patents

Chip type common mode choke coil

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Publication number
JP2002359116A
JP2002359116A JP2001165777A JP2001165777A JP2002359116A JP 2002359116 A JP2002359116 A JP 2002359116A JP 2001165777 A JP2001165777 A JP 2001165777A JP 2001165777 A JP2001165777 A JP 2001165777A JP 2002359116 A JP2002359116 A JP 2002359116A
Authority
JP
Japan
Prior art keywords
coil
magnetic
common mode
mode choke
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001165777A
Other languages
Japanese (ja)
Inventor
Tomokazu Ito
知一 伊藤
Takakiyo Kudo
孝潔 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2001165777A priority Critical patent/JP2002359116A/en
Publication of JP2002359116A publication Critical patent/JP2002359116A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a chip type common mode choke coil that can make uniform the impedance value between a pair of coil sections, prevents noise from being given to normal mode characteristics, and has excellent magnetic coupling. SOLUTION: On the main surface of a magnetic substrate 1, a pair of coil wires is formed in structure where an insulating layer and a conductive thin film are overlapped in the thickness direction. A recess 1a is present on the magnetic substrate 1 under a section where the winding direction, the number of turns, or shape of the conductive thin films that become the pair of coil wires is different. An amorphous magnetic material 6 is buried into the recess 1a. At the same time, a magnetic material 10 is provided on a region including an equal shape section other than sections where the winding direction, the number of turns, or the shape of the conductive thin films is different.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、各種電子機器に侵
入するノイズ対策に用いられる電子部品に係り、とくに
チップ型コモンモードチョークコイルに関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component used as a countermeasure for noise invading various electronic devices, and more particularly to a chip type common mode choke coil.

【0002】[0002]

【従来の技術】従来、チップ型コモンモードチョークコ
イルとしては、積層タイプが知られている。この部品は
フェライト等の磁性体シート表面にコイル導体パターン
が形成されて第1コイルを形成する第1コイル用磁性シ
ートと、同様な第2コイル用磁性シートを交互に積層し
た構造である。
2. Description of the Related Art Conventionally, a laminated type is known as a chip type common mode choke coil. This component has a structure in which a coil conductor pattern is formed on the surface of a magnetic material sheet such as ferrite to form a first coil, and a first magnetic sheet for a second coil and a similar magnetic sheet for a second coil are alternately laminated.

【0003】また、薄膜工法を使用したものとして、特
開平8−203737号公報に示されたコイル部品が知
られている。このコイル部品は図7及び図8に示すよう
に、磁性基板40上に、絶縁層41、引出電極53,5
4、絶縁層42、第1コイル導体51、絶縁層43、第
2コイル導体52、絶縁層44を順に配し、その上面よ
り磁性基板45で挟み込んだ構造である。また、外部電
極55は図8のように磁性基板40,45の側面に形成
されている。なお、スルーホール56は第1コイル導体
51と引出電極53とを接続して第1のコイル巻線を形
成するためのものであり、スルーホール57a,57b
は第2コイル導体52と引出電極54とを接続して第2
のコイル巻線を形成するためのものである。
Further, a coil component disclosed in Japanese Patent Application Laid-Open No. 8-203737 is known as one using a thin film method. As shown in FIGS. 7 and 8, this coil component is provided on an insulating layer 41 and extraction electrodes 53 and 5 on a magnetic substrate 40.
4, an insulating layer 42, a first coil conductor 51, an insulating layer 43, a second coil conductor 52, and an insulating layer 44 are arranged in this order, and are sandwiched by a magnetic substrate 45 from the upper surface thereof. The external electrodes 55 are formed on the side surfaces of the magnetic substrates 40 and 45 as shown in FIG. The through-hole 56 is for connecting the first coil conductor 51 and the extraction electrode 53 to form a first coil winding, and the through-holes 57a, 57b
Connects the second coil conductor 52 and the extraction electrode 54 to the second
In order to form the coil winding.

【0004】[0004]

【発明が解決しようとする課題】上記従来の積層タイプ
では、第1コイル、第2コイル導体間に磁性体シートが
存在し、コモンモードチョークコイルとして使用する場
合には2個のコイル部の磁気的結合が低下し特性上問題
となる。
In the above-mentioned conventional laminated type, a magnetic sheet exists between the first coil and the second coil conductor, and when used as a common mode choke coil, the magnetic properties of the two coil portions are reduced. The mechanical coupling is reduced, which causes a problem in characteristics.

【0005】また、図7及び図8に示す薄膜工法を使用
した薄膜タイプのコモンモードチョークコイルは、2個
のコイル導体51,52間は非磁性の絶縁層であり、上
下より磁性基板40,45により挟み込んでいるため、
磁気的結合の問題点は解決されている。しかしながら、
この構造では、外部電極の取り出しの為、第1コイル導
体51、第2コイル導体52それぞれの外部電極付近5
1a,52aや引出電極53,54の外部電極付近53
a,54aで、巻き方向、巻数及び形状(線路長等)に
差が発生し、これにより対を成す2個のコイル部のイン
ピーダンス値に差が生じる。このため、ノーマルモード
特性にノイズ発生等の大きな悪影響を与える。この対策
として、コイル導体の巻き方向,巻数及び形状を同様に
した場合、引出電極形状で2個のコイル部間に大きな差
が発生するため、同様の不具合が発生する。
In a thin-film common mode choke coil using the thin-film method shown in FIGS. 7 and 8, a non-magnetic insulating layer is provided between two coil conductors 51 and 52. Because it is sandwiched by 45,
The problem of magnetic coupling has been solved. However,
In this structure, in order to take out the external electrodes, the first coil conductor 51 and the second coil conductor 52 each have an area near the external electrodes 5.
1a, 52a and near the external electrodes 53 of the extraction electrodes 53, 54
At a and 54a, a difference occurs in the winding direction, the number of windings, and the shape (line length, etc.), thereby causing a difference in the impedance value of the two coil portions forming a pair. For this reason, the normal mode characteristics have a large adverse effect such as generation of noise. As a countermeasure, when the winding direction, the number of turns, and the shape of the coil conductor are the same, a large difference occurs between the two coil portions in the shape of the extraction electrode, and the same problem occurs.

【0006】また、図8に示す外部電極55とコイル導
体や引出電極端部との電気的接合部56はそれら導体の
切断面のみであり、電気的接合の点で問題が発生し易
い。
Further, the electrical joint 56 between the external electrode 55 and the coil conductor or the end of the extraction electrode shown in FIG. 8 is only a cut surface of the conductor, and a problem is likely to occur in terms of electrical connection.

【0007】本発明は、上記の点に鑑み、コイル巻線の
巻き方向、巻数又は形状が異なる個所には下側の磁性基
板との距離を大きくしかつ上側の磁性材を配さず、コイ
ル巻線の同等形状部分の上面に選択的に前記上側の磁性
材を配することで、対をなすコイル部間のインピーダン
ス値を均一化することができ、ひいてはノーマルモード
特性にノイズを与えない磁気結合の優れたチップ型コモ
ンモードチョークコイルを提供することを目的とする。
SUMMARY OF THE INVENTION In view of the above, the present invention increases the distance to the lower magnetic substrate and places the upper magnetic material in places where the winding direction, the number of turns, or the shape of the coil winding is different. By selectively arranging the upper magnetic material on the upper surface of the equivalently shaped portion of the winding, the impedance value between the coil portions forming a pair can be made uniform, and the magnetic characteristics that do not give noise to the normal mode characteristics can be achieved. An object of the present invention is to provide a chip type common mode choke coil having excellent coupling.

【0008】本発明のその他の目的や新規な特徴は後述
の実施の形態において明らかにする。
[0008] Other objects and novel features of the present invention will be clarified in embodiments described later.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するため
に、本発明に係るチップ型コモンモードチョークコイル
は、磁性基板の主面上に、絶縁層及び導体薄膜を厚み方
向に積み重ねた構造で対を成すコイル巻線を形成し、該
対を成すコイル巻線となる導体薄膜相互の巻き方向、巻
数又は形状が異なる個所下の前記磁性基板に凹部が存在
し、その凹部に非磁性材が埋設されているとともに、前
記導体薄膜相互の巻き方向、巻数又は形状が異なる個所
以外の同等形状部分を含む領域上に磁性材を設けたこと
を特徴としている。
In order to achieve the above object, a chip-type common mode choke coil according to the present invention has a structure in which an insulating layer and a conductive thin film are stacked in a thickness direction on a main surface of a magnetic substrate. A pair of coil windings is formed, and the winding direction, the number of turns or the shape of the conductor thin film to be the pair of coil windings has a recess in the magnetic substrate under a different place, and a nonmagnetic material is present in the recess. It is characterized in that a magnetic material is provided on a region that is buried and includes an equivalently shaped portion other than a portion where the conductor thin films have different winding directions, numbers of turns, or shapes.

【0010】前記チップ型コモンモードチョークコイル
において、前記対を成すコイル巻線が複数対設けられて
いてもよい。
In the chip type common mode choke coil, a plurality of pairs of coil windings may be provided.

【0011】前記コイル巻線の同等形状部分の中央部及
び当該同等形状部分の周辺部となる位置の前記絶縁層に
開口を形成し、該開口を通して前記磁性材と前記磁性基
板とが接して閉磁路構造となっているとよい。
An opening is formed in the insulating layer at a position corresponding to a central portion of the equivalently shaped portion of the coil winding and a peripheral portion of the equivalently shaped portion, and the magnetic material and the magnetic substrate are brought into contact with each other through the opening to close the magnetic field. It is good to have a road structure.

【0012】前記磁性基板の側面部に設けられた外部電
極の一部が前記コイル巻線の端部が形成された導体成膜
面又は該成膜面の平行面上に延長しており、前記コイル
巻線の端部が前記導体成膜面又は該成膜面の平行面上で
前記外部電極に接続しているとよい。
[0012] A part of the external electrode provided on a side surface of the magnetic substrate extends on a conductor film forming surface on which an end of the coil winding is formed or on a plane parallel to the film forming surface. Preferably, an end of the coil winding is connected to the external electrode on the conductor deposition surface or on a plane parallel to the deposition surface.

【0013】[0013]

【発明の実施の形態】以下、本発明に係るチップ型コモ
ンモードチョークコイルの実施の形態を図面に従って説
明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a chip type common mode choke coil according to the present invention will be described below with reference to the drawings.

【0014】図1及び図2は本発明に係るチップ型コモ
ンモードチョークコイルの第1の実施の形態を示す。実
際の作製時は複数個のチップ型コモンモードチョークコ
イルを同時に磁性基板上で作製するが、本実施の形態で
は1素子分で説明する。
FIGS. 1 and 2 show a first embodiment of a chip type common mode choke coil according to the present invention. At the time of actual production, a plurality of chip-type common mode choke coils are produced simultaneously on a magnetic substrate, but in the present embodiment, description will be made for one element.

【0015】図1及び図2に示すように、チップ型コモ
ンモードチョークコイルは、磁性基板1の主面上に、絶
縁層2、導体薄膜の引出電極13,14、絶縁層3、導
体薄膜の第1コイル導体11、絶縁層4、導体薄膜の第
2コイル導体12、絶縁層5を順次設ける。そして、第
1コイル導体11及び引出電極13の直列接続で第1コ
イル巻線が、第2コイル導体12及び引出電極14の直
列接続で第2コイル巻線が構成されるが、これら第1及
び第2コイル巻線相互の巻き方向、巻数又は形状(線路
長等)が異なる個所11a,12a,13a,14a
(引出電極及びコイル導体の外部電極取り出し部付近)
下側の前記磁性基板1には凹部1aが形成してあり、該
凹部1a内に非磁性材6が埋設されている。非磁性材6
の上面は磁性基板1の主面と同じ高さの平面となってい
る。また、第1及び第2コイル巻線相互の巻き方向、巻
数又は形状(線路長等)が異なる個所11a,12a,
13a,14a以外の導体薄膜同等形状部分上面を含む
領域を磁性材10で覆うようにしている。また、図2の
ように、外部電極(端子電極)15を磁性基板1の側面
部に形成している。なお、同等形状部分とは、微細な差
異はあっても実質的に同じ形状とみなせる部分である。
As shown in FIGS. 1 and 2, the chip-type common mode choke coil comprises an insulating layer 2, conductive thin-film extraction electrodes 13 and 14, an insulating layer 3, and a conductive thin-film on a main surface of a magnetic substrate 1. A first coil conductor 11, an insulating layer 4, a second coil conductor 12 of a conductive thin film, and an insulating layer 5 are sequentially provided. A first coil winding is formed by connecting the first coil conductor 11 and the extraction electrode 13 in series, and a second coil winding is formed by connecting the second coil conductor 12 and the extraction electrode 14 in series. Locations 11a, 12a, 13a, 14a where the winding directions, number of turns, or shapes (line length, etc.) of the second coil windings are different.
(Near the lead-out electrode and the external electrode take-out part of the coil conductor)
A concave portion 1a is formed in the lower magnetic substrate 1, and a nonmagnetic material 6 is embedded in the concave portion 1a. Non-magnetic material 6
Is a flat surface having the same height as the main surface of the magnetic substrate 1. Further, the portions 11a, 12a, 11a, 12a,
The region including the upper surface of the portion having the same shape as the conductive thin film other than 13a and 14a is covered with the magnetic material 10. Further, as shown in FIG. 2, external electrodes (terminal electrodes) 15 are formed on the side surface of the magnetic substrate 1. The equivalently shaped portion is a portion that can be regarded as having substantially the same shape even though there is a slight difference.

【0016】前記絶縁層2上には、前記外部電極15に
接続される2つの前記引出電極13,14が薄膜形成工
法で形成され、2つの引出電極13,14ともに一端は
外部電極15と電気的にそれぞれ接続されている。ま
た、他端については、引出電極13は絶縁層3のスルー
ホール16を介し、引出電極14は絶縁層3,4のスル
ーホール17a,17bを介して上層のコイル導体1
1,12の一端とそれぞれ電気的に接続されている。ま
た、コイル導体11,12の他端は外部電極15にそれ
ぞれ接続されている。
On the insulating layer 2, the two extraction electrodes 13, 14 connected to the external electrode 15 are formed by a thin film forming method, and one end of each of the two extraction electrodes 13, 14 is electrically connected to the external electrode 15. Are connected to each other. With respect to the other end, the extraction electrode 13 is provided through the through hole 16 of the insulating layer 3, and the extraction electrode 14 is provided through the through holes 17 a and 17 b of the insulating layers 3 and 4.
1 and 12 are electrically connected respectively. The other ends of the coil conductors 11 and 12 are connected to external electrodes 15, respectively.

【0017】なお、最上層の磁性材10は、上記したよ
うにコイル導体11,12、引出電極13,14のうち
大きく巻き方向、巻数又は形状の異なる個所11a,1
2a,13a,14a以外の上層部分を選択的に覆って
いる。
As described above, the magnetic material 10 in the uppermost layer is formed of the coil conductors 11 and 12 and the extraction electrodes 13 and 14 at locations 11a and 1 having greatly different winding directions, turns or shapes.
Upper layers other than 2a, 13a and 14a are selectively covered.

【0018】前記磁性基板1は焼結フェライト、複合フ
ェライト等であり、絶縁層2,3,4,5はポリイミド
樹脂,エポキシ樹脂等の絶縁性に優れ,加工性の良い材
料であり、磁性材10は焼結フェライト薄板、複合フェ
ライト等であり、コイル導体11,12、引出電極1
3,14の材料はCu,Ag,Al等の優れた電気伝導
度を有する金属が採用される。また、磁性基板1の両縁
部に形成された凹部1aを埋設する非磁性材6は前記絶
縁層2等と同様の樹脂等である。
The magnetic substrate 1 is made of sintered ferrite, composite ferrite, or the like. The insulating layers 2, 3, 4, and 5 are made of a material having excellent insulation properties such as polyimide resin and epoxy resin and having good workability. Reference numeral 10 denotes a sintered ferrite thin plate, a composite ferrite, etc., and the coil conductors 11 and 12, the extraction electrode 1
Metals having excellent electric conductivity, such as Cu, Ag, and Al, are used for the materials 3 and 14. The non-magnetic material 6 burying the concave portions 1a formed on both edges of the magnetic substrate 1 is the same resin or the like as the insulating layer 2 or the like.

【0019】次に本実施の形態に係るチップ型コモンモ
ードチョークコイルの製造手順を図1を参照し説明す
る。
Next, a manufacturing procedure of the chip type common mode choke coil according to the present embodiment will be described with reference to FIG.

【0020】予め凹部1aを形成してある磁性基板1の
当該凹部1a内に非磁性材を印刷法等で埋設する。
A nonmagnetic material is buried by a printing method or the like in the concave portion 1a of the magnetic substrate 1 in which the concave portion 1a has been formed in advance.

【0021】次に、磁性基板1上に絶縁層2を形成す
る。形成方法としては、スピンコート法、ディップ法、
スプレ法、印刷法等が採用される。
Next, an insulating layer 2 is formed on the magnetic substrate 1. As a forming method, a spin coating method, a dipping method,
A spray method, a printing method, or the like is employed.

【0022】それから、絶縁層2上に導体薄膜を成膜
し、フォトリソグラフィー法により引出電極13,14
のパターンを形成する。成膜工法はスパッタ、蒸着、め
っき等の薄膜形成工法が採用される。フォトリソグラフ
ィー工法では感光性のレジストを使用し露光現像後、不
要金属部分をエッチングし、その後で前記レジストを剥
離する。
Then, a conductive thin film is formed on the insulating layer 2 and the extraction electrodes 13 and 14 are formed by photolithography.
Is formed. As a film forming method, a thin film forming method such as sputtering, vapor deposition, or plating is employed. In the photolithography method, a photosensitive resist is used, and after exposure and development, unnecessary metal portions are etched, and then the resist is peeled off.

【0023】次に、絶縁層3を形成する。形成工法は絶
縁層2と同様であるが、引出電極13,14とコイル導
体11,12の接続の為、フォトリソグラフィー工法を
使用しスルーホール16,17aを現像により形成す
る。このスルーホール16により引出電極13と第1コ
イル導体11が電気的に接続される。
Next, an insulating layer 3 is formed. The forming method is the same as that of the insulating layer 2, but the through holes 16 and 17 a are formed by development using a photolithography method in order to connect the extraction electrodes 13 and 14 and the coil conductors 11 and 12. The extraction electrode 13 and the first coil conductor 11 are electrically connected by the through hole 16.

【0024】次に、第1コイル導体11の成膜、パター
ンニングを行う。工法は引出電極13,14と同様であ
る。
Next, the first coil conductor 11 is formed and patterned. The construction method is the same as that of the extraction electrodes 13 and 14.

【0025】その後、絶縁層4を絶縁層3と同様工法で
形成する。ここではフォトリソグラフィー工法の現像に
よりスルーホール17bを形成する。このスルーホール
17bと絶縁層3に形成されたスルーホール17aによ
り引出電極14と第2コイル導体12が電気的に接続さ
れる。
After that, the insulating layer 4 is formed by the same method as the insulating layer 3. Here, the through hole 17b is formed by development using a photolithography method. The extraction electrode 14 and the second coil conductor 12 are electrically connected by the through hole 17b and the through hole 17a formed in the insulating layer 3.

【0026】次に、第2コイル導体12の成膜、パター
ンニングを行う。工法は引出電極13,14と同様であ
る。
Next, film formation and patterning of the second coil conductor 12 are performed. The construction method is the same as that of the extraction electrodes 13 and 14.

【0027】その後、絶縁層5を同様工法で全面に形成
する。
Thereafter, an insulating layer 5 is formed on the entire surface by the same method.

【0028】さらに、第1及び第2コイル導体11,1
2及び引出電極13,14の磁性基板1外周(つまり完
成後のチップ外周)の外部電極接続部付近のコイル導体
及び引出電極の巻き方向、巻数又は形状が異なる個所1
1a,12a,13a,14a以外の同等形状部分を含
む領域に選択的に磁性材10を層状に厚く形成する(又
は、磁性材10の薄板を配置固定する)。
Further, the first and second coil conductors 11, 1
2 and locations where the winding direction, number of turns, or shape of the coil conductor and the extraction electrode near the external electrode connection on the outer periphery of the magnetic substrate 1 (that is, the outer periphery of the chip after completion) of the extraction electrodes 13 and 14 are different.
The magnetic material 10 is selectively formed thick in a layered manner (or a thin plate of the magnetic material 10 is arranged and fixed) in a region including an equivalently shaped portion other than 1a, 12a, 13a, and 14a.

【0029】上記説明は1個の素子での説明であるが、
実際は複数個の素子が同時に基板上で作製される。この
基板上で作製されたものを1素子形状に切断後、1素子
分の磁性基板1の側面部に外部電極15を形成しチップ
型コモンモードチョークコイルが完成する。
Although the above description is for one element,
In practice, a plurality of elements are simultaneously produced on a substrate. After the device fabricated on this substrate is cut into one element shape, external electrodes 15 are formed on the side surface of the magnetic substrate 1 for one element, and a chip type common mode choke coil is completed.

【0030】この第1の実施の形態によれば、対をなし
たコイル巻線(コイル導体と引出電極との直列接続)の
うち、凡そ巻き方向、巻数、形状及び線路長が同等の領
域については上下に磁性材が存在し、高いインピーダン
スが得られるが、インピーダンスの差が発生し易い外部
電極15付近の巻き方向、巻数又は形状の異なる部分
は、下方は凹部1aの存在により導体薄膜と磁性基板1
の距離が大きくかつ上方には磁性材10が存在しないた
めインピーダンスが低く、コモンモードチョークコイル
の2個のコイル部のインピーダンスの差が小さくなる。
これにより小型で、磁気特性が優れかつノーマルモード
信号へのノイズ発生等の悪影響が無視できる部品を生産
できる。
According to the first embodiment, of a pair of coil windings (series connection of a coil conductor and an extraction electrode), a region in which the winding direction, the number of turns, the shape, and the line length are substantially the same. The magnetic material exists above and below, and high impedance is obtained. However, the portion where the winding direction, the number of turns or the shape near the external electrode 15 where the impedance difference is likely to occur is different from the conductor thin film due to the presence of the recess 1a. Substrate 1
Is large and the magnetic material 10 does not exist above, the impedance is low, and the difference between the impedances of the two coil portions of the common mode choke coil is small.
As a result, it is possible to produce a component that is small in size, has excellent magnetic properties, and has negligible adverse effects such as noise on a normal mode signal.

【0031】図3及び図4は本発明の第2の実施の形態
であって、下側の磁性基板1に上側の磁性材10の一部
が接合して閉磁路構造となっている場合を示す。この場
合、製造手順は第1の実施の形態と同様であるが、異な
る点は絶縁層2,3,4,5のパターン形状である。第
1の実施の形態での各絶縁層形成領域に絶縁層開口部2
a,3a,4a,5aが互いに重なるように現像により
形成され、上側の磁性材10を層状に形成したときに、
絶縁層開口部2a,3a,4a,5a内に磁性材10が
入り込んで下側の磁性基板1に接合して閉磁路構造が形
成される。ここで、対をなしたコイル巻線(コイル導体
と引出電極との直列接続)のうち、凡そ巻き方向、巻
数、形状及び線路長が同等の領域の中心部1個所及び当
該領域外側左右2個所(当該領域の周辺部)に前記開口
部2a,3a,4a,5aが位置しているから、前記コ
イル巻線の巻き方向、巻数、形状及び線路長が実質同等
部分を囲むように閉磁路が構成される。
FIGS. 3 and 4 show a second embodiment of the present invention in which a part of the upper magnetic material 10 is joined to the lower magnetic substrate 1 to form a closed magnetic circuit structure. Show. In this case, the manufacturing procedure is the same as that of the first embodiment, except for the pattern shape of the insulating layers 2, 3, 4, and 5. An insulating layer opening 2 is formed in each insulating layer forming region in the first embodiment.
a, 3a, 4a, and 5a are formed by development so as to overlap each other, and when the upper magnetic material 10 is formed in a layer shape,
The magnetic material 10 enters the insulating layer openings 2a, 3a, 4a, 5a and is joined to the lower magnetic substrate 1 to form a closed magnetic circuit structure. Here, of the paired coil windings (series connection of the coil conductor and the extraction electrode), one central portion and two right and left outside the region having approximately the same winding direction, number of turns, shape, and line length. Since the openings 2a, 3a, 4a, and 5a are located at (peripheries of the region), a closed magnetic path is formed so as to surround a portion having substantially the same winding direction, number of turns, shape, and line length of the coil winding. Be composed.

【0032】なお、第1の実施の形態と同一又は相当部
分には同一符号を付して説明を省略する。
The same or corresponding parts as in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

【0033】この第2の実施の形態によれば、前記第1
の実施の形態の作用効果に加えて、下側の磁性基板1に
上側の磁性材10の一部が接合して閉磁路構造となるよ
うにしたので、より高い磁気結合とノーマルモード信号
へのノイズ対策を図ることが可能となる。
According to the second embodiment, the first
In addition to the functions and effects of the embodiment, a part of the upper magnetic material 10 is joined to the lower magnetic substrate 1 to form a closed magnetic circuit structure, so that higher magnetic coupling and normal mode signal can be obtained. Noise countermeasures can be taken.

【0034】図5及び図6は本発明の第3の実施の形態
であって、コイル巻線の端部と外部電極15との接続を
いっそう確実にした構造を示す。この場合、製造手順は
第1の実施の形態と同様であるが、異なる点はコイル巻
線の薄膜導体のパターン形状及び絶縁層のパターン形状
である。すなわち、対を成すコイル巻線を構成する各コ
イル導体11,12の外部電極に接続する端部に、フォ
トリソグラフィー法による現像時に幅広導体部21,2
2が形成されるとともに、引出電極13,14の外部電
極に接続する端部にも幅広導体部23,24が形成され
ている。また、絶縁層3,4,5には外部電極取出用の
絶縁層開口部3b,4b,5bが互いに重なる位置に形
成されている。そして、図6のように外部電極15を磁
性基板1の側面及びこれに隣接する上下面側に延長して
設けることで、外部電極15は第1及び第2コイル巻線
の端部である幅広導体部21,22,23,24にその
導体成膜面にて接合する(図6の接合部26に示す)。
FIGS. 5 and 6 show a third embodiment of the present invention, in which the connection between the end of the coil winding and the external electrode 15 is further ensured. In this case, the manufacturing procedure is the same as that of the first embodiment, but different points are the pattern shape of the thin film conductor of the coil winding and the pattern shape of the insulating layer. That is, the wide conductor portions 21 and 22 are attached to the ends of the coil conductors 11 and 12 constituting the pair of coil windings connected to the external electrodes at the time of development by photolithography.
2 are formed, and wide conductors 23 and 24 are also formed at ends of the extraction electrodes 13 and 14 connected to the external electrodes. Insulating layer openings 3b, 4b, 5b for taking out external electrodes are formed in the insulating layers 3, 4, 5 at positions overlapping each other. Then, as shown in FIG. 6, by providing the external electrodes 15 extending to the side surfaces of the magnetic substrate 1 and the upper and lower surfaces adjacent thereto, the external electrodes 15 are formed as wide ends which are the ends of the first and second coil windings. The conductor portions 21, 22, 23, and 24 are joined on the conductor film formation surface (shown in a joining portion 26 in FIG. 6).

【0035】なお、第1、第2コイル巻線を構成する第
1、第2コイル導体11,12の外部電極に接続する端
部、及び引出電極13,14の外部電極に接続する端部
をそれぞれスルーホールを介して上層の絶縁層5上に導
出し、絶縁層5上に延長した外部電極15の一部と接続
する構成(導体成膜面の平行面で外部電極15と接続す
る構成)としてもよい。
The ends of the first and second coil conductors 11 and 12 constituting the first and second coil windings connected to the external electrodes and the ends of the lead electrodes 13 and 14 connected to the external electrodes are connected to each other. A configuration in which each is led out onto the upper insulating layer 5 through a through hole and is connected to a part of the external electrode 15 extended on the insulating layer 5 (a configuration in which the external electrode 15 is connected to a plane parallel to the conductor film formation surface). It may be.

【0036】各絶縁層形成領域には、第2の実施の形態
と同様に、絶縁層開口部2a,3a,4a,5aも互い
に重なるように形成され、磁性基板1と上側の磁性材1
0とで閉磁路を構成するようになっており、第2の実施
の形態と同一又は相当部分には同一符号を付して説明を
省略する。
As in the second embodiment, the insulating layer openings 2a, 3a, 4a, and 5a are also formed in the respective insulating layer forming regions so as to overlap each other, and the magnetic substrate 1 and the upper magnetic material 1 are formed.
0 constitutes a closed magnetic circuit, and the same or corresponding parts as in the second embodiment are denoted by the same reference numerals and description thereof is omitted.

【0037】この第3の実施の形態によれば、第1及び
第2コイル巻線上に選択的に磁性材10を形成する構造
により、磁性基板1外周部(チップ表面外周部)に磁性
材10がない部分が存在し、この部分を利用して外部電
極15とコイル巻線の端部の導体薄膜との接合面積を大
きくすることが可能となり電気的接合の安定が得られ
る。
According to the third embodiment, the magnetic material 10 is selectively formed on the first and second coil windings. There is a portion where there is no gap, and by using this portion, it is possible to increase the bonding area between the external electrode 15 and the conductor thin film at the end of the coil winding, so that the electrical connection can be stabilized.

【0038】以上本発明の実施の形態について説明して
きたが、本発明はこれに限定されることなく請求項の記
載の範囲内において各種の変形、変更が可能なことは当
業者には自明であろう。例えば、コイル巻線のパターン
形状、引出し形状、磁性材形状が実施の形態と異なった
ものでもよい。また、各実施の形態において、磁性基板
に形成した凹部は磁性基板長手方向に連続しているが、
コイル巻線の通る位置の近傍を少なくとも非磁性材に置
換できれば、部分的な凹部であってもよい。さらに、各
実施の形態では1素子に1対のコイルを例としている
が、1素子中にコイルが複数対含まれた部品であっても
本発明は適用可能である。
Although the embodiments of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited to the embodiments and various modifications and changes can be made within the scope of the claims. There will be. For example, the pattern shape, lead shape, and magnetic material shape of the coil winding may be different from those of the embodiment. Further, in each embodiment, the concave portion formed on the magnetic substrate is continuous in the longitudinal direction of the magnetic substrate.
A partial recess may be used as long as at least the vicinity of the position where the coil winding passes can be replaced with a non-magnetic material. Further, in each embodiment, one pair of coils is used for one element, but the present invention is applicable to a component in which a plurality of pairs of coils are included in one element.

【0039】[0039]

【発明の効果】以上説明したように、本発明によれば、
対をなすコイル巻線となる導体薄膜の下側に位置する磁
性基板の適切な位置に凹部を設けるとともに、上側に磁
性材を選択的に配することにより、対をなすコイル部の
インピーダンスを均一にすることができ、ノーマルモー
ド特性にノイズを与えない磁気結合の優れた小型のチッ
プ型コモンモードチョークコイルを実現できる。
As described above, according to the present invention,
A concave portion is provided at an appropriate position on the magnetic substrate located below the conductor thin film that will be the coil winding that forms the pair, and the magnetic material is selectively arranged on the upper side to make the impedance of the coil portion forming the pair uniform. Thus, a compact chip-type common mode choke coil with excellent magnetic coupling that does not give noise to the normal mode characteristics can be realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係るチップ型コモンモードチョークコ
イルの第1の実施の形態を示す分解斜視図である。
FIG. 1 is an exploded perspective view showing a first embodiment of a chip-type common mode choke coil according to the present invention.

【図2】同斜視図である。FIG. 2 is a perspective view of the same.

【図3】本発明の第2の実施の形態を示す分解斜視図で
ある。
FIG. 3 is an exploded perspective view showing a second embodiment of the present invention.

【図4】同正断面図である。FIG. 4 is a front sectional view of the same.

【図5】本発明の第3の実施の形態を示す分解斜視図で
ある。
FIG. 5 is an exploded perspective view showing a third embodiment of the present invention.

【図6】同斜視図である。FIG. 6 is a perspective view of the same.

【図7】従来技術の分解斜視図である。FIG. 7 is an exploded perspective view of a conventional technique.

【図8】同斜視図である。FIG. 8 is a perspective view of the same.

【符号の説明】[Explanation of symbols]

1,40,45 磁性基板 1a 凹部 2,3,4,5,41,42,43,44 絶縁層 2a,3a,3b,4a,4b,5a,5b 開口部 6 非磁性材 10 磁性材 11,12,51,52 コイル導体 13,14,53,54 引出電極 15,55 外部電極 16,17a,17b スルーホール 21,22,23,24 幅広導体部 1,40,45 Magnetic substrate 1a Depression 2,3,4,5,41,42,43,44 Insulating layer 2a, 3a, 3b, 4a, 4b, 5a, 5b Opening 6 Non-magnetic material 10 Magnetic material 11, 12, 51, 52 Coil conductors 13, 14, 53, 54 Leader electrodes 15, 55 External electrodes 16, 17a, 17b Through holes 21, 22, 23, 24 Wide conductor portion

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 磁性基板の主面上に、絶縁層及び導体薄
膜を厚み方向に積み重ねた構造で対を成すコイル巻線を
形成し、該対を成すコイル巻線となる導体薄膜相互の巻
き方向、巻数又は形状が異なる個所下の前記磁性基板に
凹部が存在し、その凹部に非磁性材が埋設されていると
ともに、前記導体薄膜相互の巻き方向、巻数又は形状が
異なる個所以外の同等形状部分を含む領域上に磁性材を
設けたことを特徴とするチップ型コモンモードチョーク
コイル。
1. A pair of coil windings having a structure in which an insulating layer and a conductor thin film are stacked in a thickness direction on a main surface of a magnetic substrate, and the windings of the conductor thin films to be the coil windings forming the pair are formed. A concave portion is present in the magnetic substrate under a location where the direction, the number of turns or the shape is different, and a non-magnetic material is buried in the concave portion and an equivalent shape other than a location where the winding direction, the number of turns or the shape of the conductor thin films is different. A chip-type common mode choke coil characterized in that a magnetic material is provided on a region including a portion.
【請求項2】 前記対を成すコイル巻線が複数対設けら
れている請求項1記載のチップ型コモンモードチョーク
コイル。
2. The chip-type common mode choke coil according to claim 1, wherein a plurality of pairs of the coil windings are provided.
【請求項3】 前記コイル巻線の同等形状部分の中央部
及び当該同等形状部分の周辺部となる位置の前記絶縁層
に開口を形成し、該開口を通して前記磁性材と前記磁性
基板とが接して閉磁路構造となっている請求項1又は2
記載のチップ型コモンモードチョークコイル。
3. An opening is formed in the insulating layer at a position corresponding to a central portion of the equivalently shaped portion of the coil winding and a peripheral portion of the equivalently shaped portion, and the magnetic material and the magnetic substrate come into contact with each other through the opening. And a closed magnetic circuit structure.
The described chip type common mode choke coil.
【請求項4】 前記磁性基板の側面部に設けられた外部
電極の一部が前記コイル巻線の端部が形成された導体成
膜面又は該成膜面の平行面上に延長しており、前記コイ
ル巻線の端部が前記導体成膜面又は該成膜面の平行面上
で前記外部電極に接続している請求項1,2又は3のチ
ップ型コモンモードチョークコイル。
4. A part of an external electrode provided on a side surface of the magnetic substrate extends on a conductor film forming surface on which an end of the coil winding is formed or on a plane parallel to the film forming surface. 4. The chip-type common mode choke coil according to claim 1, wherein an end of said coil winding is connected to said external electrode on said conductor film-forming surface or a plane parallel to said film-forming surface.
JP2001165777A 2001-05-31 2001-05-31 Chip type common mode choke coil Withdrawn JP2002359116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001165777A JP2002359116A (en) 2001-05-31 2001-05-31 Chip type common mode choke coil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001165777A JP2002359116A (en) 2001-05-31 2001-05-31 Chip type common mode choke coil

Publications (1)

Publication Number Publication Date
JP2002359116A true JP2002359116A (en) 2002-12-13

Family

ID=19008409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001165777A Withdrawn JP2002359116A (en) 2001-05-31 2001-05-31 Chip type common mode choke coil

Country Status (1)

Country Link
JP (1) JP2002359116A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7646280B2 (en) * 2007-09-07 2010-01-12 Tdk Corporation Common mode choke coil and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7646280B2 (en) * 2007-09-07 2010-01-12 Tdk Corporation Common mode choke coil and manufacturing method thereof

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