JP2002353363A - Ceramic wiring board for taking many pieces - Google Patents

Ceramic wiring board for taking many pieces

Info

Publication number
JP2002353363A
JP2002353363A JP2001159637A JP2001159637A JP2002353363A JP 2002353363 A JP2002353363 A JP 2002353363A JP 2001159637 A JP2001159637 A JP 2001159637A JP 2001159637 A JP2001159637 A JP 2001159637A JP 2002353363 A JP2002353363 A JP 2002353363A
Authority
JP
Japan
Prior art keywords
wiring board
ceramic
depth
dividing
dividing groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001159637A
Other languages
Japanese (ja)
Other versions
JP4428883B2 (en
Inventor
Kazuhiro Kajiya
和浩 加治屋
Genta Taniguchi
源太 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2001159637A priority Critical patent/JP4428883B2/en
Publication of JP2002353363A publication Critical patent/JP2002353363A/en
Application granted granted Critical
Publication of JP4428883B2 publication Critical patent/JP4428883B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting

Landscapes

  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To easily and precisely divide a ceramic base substrate along dividing grooves. SOLUTION: On a substantially square tabular base plate part 2a having a mounting part 2c where electronic components are mounted on upper side in the central part, a number of wiring substrate regions 2 are formed by stacking a substantially square frame-shaped frame part 2b surrounding the mounting part 2c where a step 2e protruding inside a pair of sides facing each other of the inner peripheral surface. On the upper side of ceramic base substrate 1 which is arrayed and formed in lengthwise and breadthwise lines, dividing grooves 3a, 3b dividing each wiring substrate region 2 are formed in the direction being parallel to the face of the side having the step 2e and in the direction being perpendicular to this. Depth of the dividing groove 3a in the direction being parallel to the face of the side having the step 2e is slighter than that of the dividing groove 3b being perpendicular to this.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、半導体素子や水晶
振動子等の電子部品を搭載するための小型の配線基板と
なる多数の配線基板領域を広面積のセラミック母基板中
に縦横の並びに一体的に配列形成して成る多数個取りセ
ラミック配線基板に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a large-sized ceramic mother board having a large number of wiring board regions, which are to be mounted on a large-sized ceramic mother board, in a horizontal and vertical direction. The present invention relates to a multi-cavity ceramic wiring board formed in an arrayed manner.

【0002】[0002]

【従来の技術】従来、半導体素子や水晶振動子等の電子
部品を収容するための電子部品収納用パッケージに用い
られる小型の配線基板は、例えば酸化アルミニウム質焼
結体等のセラミックス材料から成り、上面中央部に電子
部品を搭載するための搭載部を有する略四角平板状の底
板と、この底板の上面に搭載部を取り囲むようにして積
層された、その最上面に各辺の幅が略同一の封止面を有
するとともにその内周面の相対向する一対の面に内側に
突出する段差部を有する略四角枠状の枠体とから主に構
成されており、枠体の段差部上面から枠体外周側面およ
び底板下面にかけて枠体を貫通して形成された複数のメ
タライズ配線導体を有している。そして、底板の搭載部
に電子部品を搭載固定するとともに電子部品の電極を枠
体の段差部上面のメタライズ配線導体にボンディングワ
イヤを介して電気的に接続し、しかる後、枠体の封止面
に電子部品を封止するようにして金属やガラス等から成
る蓋体を接合させ、配線基板と蓋体とから成る容器内部
に電子部品を気密に収容することによって製品としての
電子装置となる。
2. Description of the Related Art Conventionally, a small-sized wiring board used for an electronic component housing package for housing electronic components such as a semiconductor element and a crystal oscillator is made of a ceramic material such as an aluminum oxide sintered body. A substantially rectangular flat bottom plate having a mounting portion for mounting electronic components at the center of the upper surface, and a bottom plate that is stacked on the upper surface of the bottom plate so as to surround the mounting portion. And a substantially rectangular frame-shaped frame having a stepped portion projecting inward on a pair of opposing surfaces of the inner peripheral surface of the frame, and from the top of the stepped portion of the frame. A plurality of metallized wiring conductors are formed penetrating the frame over the outer peripheral side surface of the frame and the lower surface of the bottom plate. Then, the electronic component is mounted and fixed on the mounting portion of the bottom plate, and the electrodes of the electronic component are electrically connected to the metallized wiring conductors on the upper surface of the step portion of the frame via bonding wires. An electronic device as a product is obtained by joining a lid made of metal, glass, or the like so as to seal the electronic component, and hermetically housing the electronic component in a container including the wiring board and the lid.

【0003】ところで、このような配線基板は近時の電
子装置の小型化の要求に伴い、その大きさが数mm角程
度の極めて小さなものとなってきており、多数個の配線
基板の取り扱いを容易とするために、また配線基板およ
び電子装置の製作を効率よくするために1枚の広面積の
セラミック母基板中から多数個の配線基板を同時集約的
に得るようになした、いわゆる多数個取りセラミック配
列基板の形態で製作されている。
[0003] In recent years, with the recent demand for miniaturization of electronic devices, the size of such a wiring board has become extremely small, on the order of several mm square, and a large number of wiring boards must be handled. In order to facilitate the manufacture of wiring boards and electronic devices, a large number of wiring boards are simultaneously and intensively obtained from a single large-area ceramic mother board. It is manufactured in the form of a ceramic array substrate.

【0004】この多数個取りセラミック配線基板は、広
面積のセラミック母基板中に各々が上述の配線基板とな
る多数の配線基板領域を縦横の並びに一体的に配列形成
して成る。各配線基板領域は、上述の底板となる略四角
平板状の底板部上に上述の枠体となる略四角枠状の枠体
部が積層されている。底板部の上面中央部には上述の搭
載部が形成されており、枠体部の相対向する一対の内周
には上述の段差部が形成されている。また、段差部の上
面から底板下面にかけては上述のメタライズ配線導体が
形成されている。さらに、セラミック母基板の上面には
各配線基板領域を区切る所定深さの分割溝が縦横に形成
されており、この分割溝に沿ってセラミック母基板を撓
折することによって多数個の小型の配線基板を同時集約
的に得ることができる。
[0004] This multi-cavity ceramic wiring board is formed by forming a large number of wiring board regions, each of which becomes the above-mentioned wiring board, vertically and horizontally and integrally in a large-area ceramic mother board. In each of the wiring board regions, a substantially square frame-shaped frame portion serving as the above-described frame is laminated on a substantially square flat plate-shaped bottom plate portion serving as the above-described bottom plate. The above-described mounting portion is formed at the center of the upper surface of the bottom plate portion, and the above-described step portion is formed at a pair of inner circumferences of the frame body portion facing each other. The above-mentioned metallized wiring conductor is formed from the upper surface of the step portion to the lower surface of the bottom plate. Further, on the upper surface of the ceramic mother substrate, division grooves having a predetermined depth are formed vertically and horizontally to divide each wiring substrate region, and a large number of small wirings are formed by bending the ceramic mother substrate along the division grooves. Substrates can be obtained simultaneously and intensively.

【0005】なお、この多数個取りセラミック配線基板
は、セラミックグリーンシート積層法によって製作され
ている。具体的には、まず、上述の底板部となる略四角
平板状の多数の領域が縦横の並びに一体的に配列形成さ
れた一枚あるいはそれ以上の底板部用セラミックグリー
ンシートと上述の枠体部となる略四角枠状の多数の領域
が縦横の並びに一体的に配列形成された二枚あるいはそ
れ以上の枠体部用セラミックグリーンシートとを準備す
るとともに、これらのセラミックグリーンシートに上述
のメタライズ配線導体となるメタライズペーストを印刷
塗布した後、これらのセラミックグリーンシートを上下
に積層して各配線基板領域となる領域が縦横の並びに配
列形成されたセラミック母基板となるセラミックグリー
ンシート積層体を得、次にこのセラミックグリーンシー
ト積層体の上面に例えばカッター刃や金型により各配線
基板領域となる領域を区切る分割溝用の切り込みを形成
し、最後にこのセラミックグリーンシート積層体を高温
で焼成することによって製作される。
The multi-cavity ceramic wiring board is manufactured by a ceramic green sheet laminating method. Specifically, first, one or more ceramic green sheets for the bottom plate portion in which a large number of substantially rectangular flat plate-shaped regions serving as the above-described bottom plate portion are vertically and horizontally arranged integrally and the above-mentioned frame body portion In addition to preparing two or more ceramic green sheets for a frame part in which a large number of substantially rectangular frame-shaped regions are vertically and horizontally arranged and integrally formed, the above-mentioned metallized wiring is provided on these ceramic green sheets. After printing and applying a metallizing paste to be a conductor, these ceramic green sheets are stacked up and down to obtain a ceramic green sheet laminate that becomes a ceramic mother substrate in which the regions to be each wiring board region are arranged vertically and horizontally, and Next, an area to be each wiring board area is separated on the upper surface of the ceramic green sheet laminate by, for example, a cutter blade or a mold. Cut to form for splitting groove, and finally manufactured by sintering the ceramic green sheet laminate at a high temperature.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、この従
来の多数個取りセラミック配線基板によると、セラミッ
ク母基板用のセラミックグリーンシート積層体に分割溝
用の切り込みを入れた際に発生する応力によって段差部
を有する面と直交する方向に形成された切り込みの一部
が閉じてしまいやすく、そのため、セラミックグリーン
シート積層体を焼成して得られるセラミック母基板に形
成された分割溝が癒着してしまうことがあり、そのよう
な癒着があると、セラミック母基板を分割溝に沿って分
割する際にその分割が困難であるとともに得られる配線
基板にばりや割れが発生しやすく正確に分割することが
できないという問題点を有していた。
However, according to the conventional multi-cavity ceramic wiring board, the stepped portion is formed by the stress generated when the cut for the dividing groove is formed in the ceramic green sheet laminate for the ceramic mother board. A part of the cut formed in the direction orthogonal to the surface having the pattern is likely to be closed, and therefore, the divided grooves formed in the ceramic mother substrate obtained by firing the ceramic green sheet laminate may adhere. Yes, if there is such adhesion, it is difficult to divide the ceramic mother board along the dividing groove, and it is difficult to divide the obtained wiring board easily due to burrs and cracks. Had problems.

【0007】本発明の目的は、セラミック母基板に形成
された分割溝が癒着することがなく、セラミック母基板
を分割溝に沿って容易かつ正確に分割することが可能な
多数個取りセラミック配線基板を提供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a multi-cavity ceramic wiring board which can easily and accurately divide a ceramic mother board along a dividing groove without causing the dividing grooves formed in the ceramic mother board to adhere. Is to provide.

【0008】[0008]

【課題を解決するための手段】本発明の多数個取りセラ
ミック配線基板は、上面中央部に電子部品が搭載される
搭載部を有する略四角平板状の底板部上に、搭載部を取
り囲み、その内周面の相対向する一対の面に内側に突出
する段差部が形成された略四角枠状の枠体部を積層して
成る多数の配線基板領域が縦横の並びに配列形成された
セラミック母基板の上面に、各配線基板領域を区切る分
割溝が段差部を有する側の面に平行な方向およびこれと
直交する方向に形成されて成る多数個取りセラミック配
線基板であって、段差部を有する側の面に平行な方向の
分割溝の深さがこれと直交する分割溝の深さよりも浅い
ことを特徴とするものである。
SUMMARY OF THE INVENTION A multi-piece ceramic wiring board according to the present invention surrounds a mounting portion on a substantially square flat plate-like bottom plate having a mounting portion in the center of an upper surface on which electronic components are mounted. A ceramic mother board in which a large number of wiring board regions are vertically and horizontally arranged and formed by laminating a substantially rectangular frame-shaped frame portion in which a step portion projecting inward is formed on a pair of opposing inner peripheral surfaces. A multi-cavity ceramic wiring board formed on a top surface thereof with a dividing groove for dividing each wiring board region formed in a direction parallel to the surface having the stepped portion and in a direction orthogonal to the surface having the stepped portion. Is characterized in that the depth of the dividing groove in the direction parallel to the surface is smaller than the depth of the dividing groove orthogonal to this.

【0009】本発明の多数個取りセラミック配線基板に
よれば、段差部を有する側の面に平行な方向の分割溝の
深さがこれと直交する分割溝の深さよりも浅いことか
ら、セラミック母基板となるセラミックグリーンシート
積層体に分割溝用の切込みを入れる際に、枠体部の段差
部を有する側では段差部の分だけ剛性が高く変形しにく
いので分割溝用の切り込みが浅くてもこの切り込みが閉
じにくいとともに、これと直交する側では段差部側の切
り込みが浅い分だけこの段差部側の切り込みを形成した
際に発生する応力の影響が小さので分割溝用の切り込み
の一部が閉じてしまいにくい。
According to the multi-cavity ceramic wiring board of the present invention, since the depth of the dividing groove in the direction parallel to the surface having the step portion is smaller than the depth of the dividing groove orthogonal to the surface, the ceramic mother board is formed. When making cuts for the dividing grooves in the ceramic green sheet laminate to be the substrate, the rigidity is high and it is difficult to deform by the amount of the steps on the side of the frame that has the steps, so even if the cuts for the dividing grooves are shallow. This notch is difficult to close, and on the side orthogonal to this, the effect of the stress generated when forming the notch on this step side is small because the notch on the step side is shallow, so a part of the notch for the dividing groove is It is hard to close.

【0010】[0010]

【発明の実施の形態】次に、本発明の多数個取りセラミ
ック配線基板について添付の図面を基に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a multi-cavity ceramic wiring board according to the present invention will be described with reference to the accompanying drawings.

【0011】図1は、本発明の多数個取りセラミック配
線基板の実施の形態の一例を示す斜視図であり、1はセ
ラミック母基板、2は配線基板領域、3a・3bは分割
溝である。
FIG. 1 is a perspective view showing an embodiment of a multi-cavity ceramic wiring board according to the present invention, wherein 1 is a ceramic mother board, 2 is a wiring board region, and 3a and 3b are division grooves.

【0012】セラミック母基板1は、例えばこの例では
酸化アルミニウム質焼結体や窒化アルミニウム質焼結体
・ムライト質焼結体・ガラス−セラミックス等のセラミ
ックス材料から成る3層の絶縁層4・5・6が積層され
て成り、その中央部に各々が小型の配線基板となる多数
の配線基板領域2が縦横の並びに一体的に配列形成され
ている。
The ceramic mother substrate 1 is composed of, for example, three insulating layers 4 and 5 made of a ceramic material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, and a glass-ceramic. A large number of wiring board regions 2 each of which becomes a small-sized wiring board are vertically and horizontally arranged in an integrated manner in a central portion thereof.

【0013】セラミック母基板1の中央部に配列形成さ
れた各配線基板領域2は、図2に部分拡大断面図で示す
ように、絶縁層4で形成された略四角平板状の底板部2
aと、セラミック層5・6で形成された略四角枠状の枠
体部2bとから構成されている。底板部2aはその上面
中央部に電子部品を搭載するための搭載部2cを有して
おり、この搭載部2cに電子部品がろう材やガラス・樹
脂等の接着材を介して接着固定される。他方、枠体部2
bは底板部2aの搭載部2cを取り囲むようにして底板
部2a上に積層されており、その最上面に各辺の幅が略
同一の封止面2dを有しているとともにその内周面の相
対向する一対の面にセラミック層5が内側に突出して形
成された段差部2eを有している。そして、それにより
枠体部2bは、段差部2eを有する側の辺の幅が他の側
の辺よりも広いものとなっている。
As shown in a partially enlarged sectional view of FIG. 2, each of the wiring board regions 2 arranged and formed in the center of the ceramic mother board 1 has a substantially square flat bottom plate portion 2 formed of an insulating layer 4.
a and a substantially rectangular frame portion 2b formed of ceramic layers 5 and 6. The bottom plate portion 2a has a mounting portion 2c for mounting an electronic component at the center of the upper surface thereof, and the electronic component is bonded and fixed to the mounting portion 2c via an adhesive such as brazing material, glass or resin. . On the other hand, the frame 2
b is laminated on the bottom plate portion 2a so as to surround the mounting portion 2c of the bottom plate portion 2a. The top surface has a sealing surface 2d having substantially the same width on each side and an inner peripheral surface thereof. The ceramic layer 5 has a stepped portion 2e formed so as to protrude inward on a pair of opposed surfaces. As a result, the side of the frame body 2b having the stepped portion 2e is wider than the side of the other side.

【0014】また、段差部2eの上面から各枠体部2b
・底板部2aの外周側面を介して底板部2aの下面にか
けてはタングステンやモリブデン・銅・銀等の金属粉末
メタライズから成るメタライズ配線導体7が被着形成さ
れており、このメタライズ配線導体7の段差部2e上に
は電子部品の電極がボンディングワイヤ等の電気的接続
手段を介して電気的に接続される。
Further, each frame portion 2b extends from the upper surface of the step portion 2e.
A metallized wiring conductor 7 made of metallized metal powder such as tungsten, molybdenum, copper, silver or the like is formed on the lower surface of the bottom plate 2a via the outer peripheral side surface of the bottom plate 2a. Electrodes of the electronic component are electrically connected to the portion 2e via electrical connection means such as a bonding wire.

【0015】このようなセラミック母基板1における絶
縁層4・5・6およびメタライズ配線導体7は、例えば
絶縁層4・5・6が酸化アルミニウム質焼結体から成る
場合であれば、酸化アルミニウム・酸化珪素・酸化カル
シウム・酸化マグネシウム等の原料粉末に適当な有機バ
インダおよび溶剤を添加混合して泥漿状となすとともに
これを従来周知のドクタブレード法を採用してシート状
に形成し、これに例えば打ち抜き金型を用いて打ち抜き
加工を施すことにより絶縁層4・5・6用のセラミック
グリーンシートを準備するとともにこれらのセラミック
グリーンシートにメタライズ配線導体7用のタングステ
ンペーストをスクリーン印刷法により所定のパターンに
印刷塗布し、しかる後、これらのセラミックグリーンシ
ートを上下に積層してセラミックグリーンシート積層体
となすとともにこのセラミックグリーンシート積層体を
還元雰囲気中約1600℃の温度で焼成することによって形
成される。
The insulating layers 4, 5, 6 and the metallized wiring conductors 7 in the ceramic mother substrate 1 are made of aluminum oxide, if the insulating layers 4, 5, 6 are made of an aluminum oxide sintered body. An appropriate organic binder and a solvent are added to raw material powders such as silicon oxide, calcium oxide, and magnesium oxide to form a slurry, which is then formed into a sheet by using a conventionally known doctor blade method. A ceramic green sheet for the insulating layers 4, 5, and 6 is prepared by punching using a punching die, and a tungsten paste for the metallized wiring conductor 7 is formed on the ceramic green sheet by a screen printing method in a predetermined pattern. And then apply these ceramic green sheets on top and bottom Is formed by firing at a temperature of the ceramic green sheet laminate approximately 1600 ° C. in a reducing atmosphere with form a ceramic green sheet laminate Te.

【0016】さらに、セラミック母基板1の上面には、
各配線基板領域2を区切る分割溝3a・3bが枠体部2
bの段差部2eを有する側の面に平行な方向およびこれ
に直交する方向に形成されている。分割溝3a・3b
は、その断面形状が略V字状であり、セラミック母基板
1の厚さや材質等により異なるが、その深さが0.05〜1.
5mm程度、その開口幅が0.01〜0.3mm程度である。こ
のような分割溝3a・3bは、セラミック母基板1用の
セラミックグリーンシート積層体の上面にカッター刃や
金型等を押し付けて切り込みを入れておくことによって
形成される。
Further, on the upper surface of the ceramic mother substrate 1,
The dividing grooves 3a and 3b for dividing each wiring board region 2
The b is formed in a direction parallel to the surface having the step portion 2e and a direction perpendicular thereto. Dividing grooves 3a and 3b
Has a substantially V-shaped cross-section and varies depending on the thickness, material, and the like of the ceramic mother substrate 1, but has a depth of 0.05 to 1.
The opening width is about 5 mm and the opening width is about 0.01 to 0.3 mm. Such dividing grooves 3a and 3b are formed by pressing a cutter blade, a mold, or the like on the upper surface of the ceramic green sheet laminate for the ceramic mother substrate 1 to make cuts.

【0017】そして、各配線基板領域2の搭載部2c上
に電子部品を搭載した後、セラミック母基板1を分割溝
3a・3bに沿って分割することにより、多数の電子装
置が同時集約的に製造されるのである。
After the electronic components are mounted on the mounting portion 2c of each wiring board region 2, the ceramic mother substrate 1 is divided along the dividing grooves 3a and 3b, so that a large number of electronic devices can be simultaneously and intensively integrated. It is manufactured.

【0018】なお、本発明においては、枠体部2bの内
周面の段差部2eを有する側の面に平行な方向に形成さ
れた分割溝3aの深さがこれと直交する方向に形成され
た分割溝3bの深さよりも浅くなっており、そのことが
重要である。
In the present invention, the depth of the dividing groove 3a formed in a direction parallel to the surface having the stepped portion 2e on the inner peripheral surface of the frame 2b is formed in a direction perpendicular to this. It is shallower than the depth of the divided groove 3b, which is important.

【0019】このように、枠体部2bの内周面の段差部
2eを有する側の面に平行な方向に形成された分割溝3
aの深さがこれと直交する方向に形成された分割溝3b
の深さよりも浅くなっていることにより、セラミック母
基板1用のセラミックグリーンシート積層体に分割溝3
a・3b用の切り込みを入れる際にこれらの切り込みが
閉じにくく、したがって分割溝3a・3bに癒着が発生
しにくい。これは、セラミック母基板1用のセラミック
グリーンシート積層体の枠体部2bとなる領域におい
て、段差部を有する側は段差部の分だけ剛性が高く変形
しにくいので分割溝3a用の切り込みが浅くてもこの切
り込みが閉じにくいとともに、これと直交する側では分
割溝3a用の切り込みが浅い分だけこの分割溝3a用の
切り込みを形成した際に発生する応力の影響が小さので
分割溝3b用の切り込みが閉じにくいからである。
As described above, the dividing groove 3 formed in the direction parallel to the surface having the step 2e on the inner peripheral surface of the frame 2b.
a divided groove 3b formed in a direction in which the depth of “a” is orthogonal to the depth
Is smaller than the depth of the ceramic green sheet laminate for the ceramic mother substrate 1.
When the cuts for a and 3b are made, these cuts are difficult to close, and therefore, adhesion to the divided grooves 3a and 3b hardly occurs. This is because, in a region to be the frame portion 2b of the ceramic green sheet laminate for the ceramic mother substrate 1, the side having the step portion has high rigidity and is not easily deformed by the step portion, so that the cut for the dividing groove 3a is shallow. However, the notch is difficult to close, and on the side orthogonal to the notch, the effect of the stress generated when the notch for the dividing groove 3a is formed by the shallow amount of the notch for the dividing groove 3a is small, so that the notch for the dividing groove 3b is small. This is because the cut is difficult to close.

【0020】なお、枠体部2bの内周面の段差部2eを
有する側の面に平行な方向に形成された分割溝3aの深
さがこれと直交する方向に形成された分割溝3bの深さ
よりも0.05mm未満浅い場合には、段差部2eを有する
側の面に直交する方向に形成された分割溝3bに癒着が
発生しやすくなり、他方、0.5mmを超えて浅い場合に
は、セラミック母基板1を分割溝3aに沿って分割する
ことが困難となる。したがって、枠体部2bの内周面の
段差部2eを有する側の面に平行な方向に形成された分
割溝3aの深さは、これと直交する方向に形成された分
割溝3bの深さよりも0.05〜0.5mm浅いことが好まし
い。
The depth of the dividing groove 3a formed in a direction parallel to the surface of the inner peripheral surface of the frame 2b having the stepped portion 2e is parallel to the depth of the dividing groove 3b formed in a direction perpendicular to the surface. If the depth is less than 0.05 mm less than the depth, adhesion is likely to occur in the divided groove 3b formed in a direction perpendicular to the surface having the step portion 2e, and if the depth is more than 0.5 mm, It becomes difficult to divide the ceramic mother substrate 1 along the dividing grooves 3a. Therefore, the depth of the dividing groove 3a formed in a direction parallel to the surface having the stepped portion 2e on the inner peripheral surface of the frame body 2b is larger than the depth of the dividing groove 3b formed in a direction orthogonal to this. Is also preferably 0.05 to 0.5 mm shallower.

【0021】かくして、本発明の多数個取りセラミック
配線基板によれば、各配線基板領域2の搭載部2c上に
電子部品を搭載した後、セラミック母基板1を分割溝3
a・3bに沿って分割することによりバリや割れのない
電子装置を提供することができる。
Thus, according to the multi-cavity ceramic wiring board of the present invention, after the electronic component is mounted on the mounting portion 2c of each wiring board area 2, the ceramic mother board 1 is divided into the dividing grooves 3
By dividing the device along a 3b, an electronic device free from burrs and cracks can be provided.

【0022】なお、本発明は、上述の実施の形態例に限
定されるものではなく、本発明の要旨を逸脱しない範囲
であれば種々の変更は可能である。例えば上述の実施の
形態例では、セラミック母基板1は三層の絶縁層4・5
・6を積層することによって製作されていたが、セラミ
ック母基板1は四層以上の絶縁層を積層することによっ
て製作されてもよい。
It should be noted that the present invention is not limited to the above-described embodiment, and various changes can be made without departing from the gist of the present invention. For example, in the above-described embodiment, the ceramic mother substrate 1 has three insulating layers 4.5.
The ceramic motherboard 1 may be manufactured by stacking four or more insulating layers.

【0023】[0023]

【発明の効果】以上説明したように、本発明の多数個取
りセラミック配線基板によれば、枠体部の内周面の段差
部を有する側の面に平行な方向の分割溝の深さがこれと
直交する分割溝の深さよりも浅いことから、セラミック
母基板となるセラミックグリーンシート積層体に分割溝
用の切込みを入れた際に、これらの切り込みの一部が閉
じてしまいにくい。したがって、分割溝に癒着がなくセ
ラミック母基板を分割溝に沿って容易かつ正確に分割す
ることが可能な多数個取りセラミック配線基板を提供す
ることができる。
As described above, according to the multi-cavity ceramic wiring board of the present invention, the depth of the dividing groove in the direction parallel to the surface having the step on the inner peripheral surface of the frame body is reduced. Since the grooves are shallower than the depth of the dividing grooves orthogonal to the above, when the cuttings for the dividing grooves are made in the ceramic green sheet laminate serving as the ceramic mother substrate, some of these cuts are not easily closed. Therefore, it is possible to provide a multi-cavity ceramic wiring board that can easily and accurately divide the ceramic mother substrate along the division grooves without adhesion in the division grooves.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の多数個取りセラミック配線基板の実施
の形態の一例を示す斜視図である。
FIG. 1 is a perspective view showing an example of an embodiment of a multi-cavity ceramic wiring board according to the present invention.

【図2】図1に示す多数個取りセラミック配線基板の部
分拡大断面図である。
FIG. 2 is a partially enlarged sectional view of the multi-cavity ceramic wiring board shown in FIG. 1;

【符号の説明】[Explanation of symbols]

1・・・・・・セラミック母基板 2・・・・・・配線基板領域 2a・・・・・底板部 2b・・・・・枠体部 2c・・・・・搭載部 2e・・・・・段差部 3a・3b・・・分割溝 1 Ceramic mother board 2 Wiring board area 2a Bottom plate 2b Frame 2c Mounting part 2e .Steps 3a, 3b: Dividing groove

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 上面中央部に電子部品が搭載される搭載
部を有する略四角平板状の底板部上に、前記搭載部を取
り囲み、その内周面の相対向する一対の面に内側に突出
する段差部が形成された略四角枠状の枠体部を積層して
成る多数の配線基板領域が縦横の並びに配列形成された
セラミック母基板の上面に、前記各配線基板領域を区切
る分割溝が前記段差部を有する側の面に平行な方向およ
びこれと直交する方向に形成されて成る多数個取りセラ
ミック配線基板であって、前記段差部を有する側の面に
平行な方向の分割溝の深さがこれと直交する分割溝の深
さよりも浅いことを特徴とする多数個取りセラミック配
線基板。
1. A substantially rectangular flat bottom plate having a mounting portion on which an electronic component is mounted at the center of the upper surface, surrounding the mounting portion, and projecting inward from a pair of opposing inner peripheral surfaces thereof. On the upper surface of a ceramic mother substrate in which a large number of wiring board regions formed by laminating substantially square frame-shaped frame portions on which step portions are formed are formed on the upper surface of a ceramic mother substrate arranged in a matrix, a dividing groove for separating each of the wiring board regions is provided. A multi-cavity ceramic wiring board formed in a direction parallel to the surface having the step portion and in a direction perpendicular to the surface, the depth of the dividing groove in a direction parallel to the surface having the step portion. A multi-cavity ceramic wiring board, characterized in that the depth is smaller than the depth of a dividing groove orthogonal to this.
JP2001159637A 2001-05-28 2001-05-28 Multi-cavity ceramic wiring board Expired - Fee Related JP4428883B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001159637A JP4428883B2 (en) 2001-05-28 2001-05-28 Multi-cavity ceramic wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001159637A JP4428883B2 (en) 2001-05-28 2001-05-28 Multi-cavity ceramic wiring board

Publications (2)

Publication Number Publication Date
JP2002353363A true JP2002353363A (en) 2002-12-06
JP4428883B2 JP4428883B2 (en) 2010-03-10

Family

ID=19003176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001159637A Expired - Fee Related JP4428883B2 (en) 2001-05-28 2001-05-28 Multi-cavity ceramic wiring board

Country Status (1)

Country Link
JP (1) JP4428883B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111148351A (en) * 2019-12-18 2020-05-12 惠州市金百泽电路科技有限公司 Processing method of 5G small-sized base station power amplifier module PCB with step groove

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111148351A (en) * 2019-12-18 2020-05-12 惠州市金百泽电路科技有限公司 Processing method of 5G small-sized base station power amplifier module PCB with step groove

Also Published As

Publication number Publication date
JP4428883B2 (en) 2010-03-10

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