JP2002346803A - Groove processing method, grooved goods, and, optical parts or presision parts - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a groove processing method which can reduce an inclination error not greater than 1 minute, or a position error not greater than 3 μm of the groove formed on a work piece, and form the groove with sufficient inclination accuracy or position accuracy, and grooved goods, and, an optical part or a precision part using the processing method. SOLUTION: When the groove processing start signal is outputted (step 1), the groove Gt for inclination measurement is formed on a trial processing object subject 15 (step 2). The inclination error θof the groove for inclination measurement is measured (step 3), and an inclination of a tool is compensated (step 4). Next, the groove Gp for position measurement is formed (step 5), and a distance OGp from a reference plane O is measured (step 6). The relative position of the tool to a processing surface 10a is compensated from this measurement result (step 7), and the groove G1 is formed on in the processing surface (step 8).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a groove processing method for processing grooves with high precision, a groove processed product having grooves formed by the groove processing method, and an optical component or precision component. .

[0002]

2. Description of the Related Art Conventionally, optical parts, grooves for positioning optical parts, and other precision parts have been required to be processed with high precision. As a groove machining method for machining a highly accurate groove, a so-called fly-cut machining method in which a groove is cut using a tool having the same shape as a groove to be formed is known.

FIG. 11 is an explanatory view showing an example of a grooving apparatus used for performing grooving by a fly-cut processing method. The configuration of the grooving device 1 is such that a tool 3 is mounted on a tool mounting portion 4a formed on a part of the outer periphery of a wheel 4 as a rotary support, and a rotating shaft on which the wheel 4 is rotated by a rotation driving unit (not shown). 6 is attached to the tip. When machining the groove, the tool is applied to the machining surface of the machining object 10 while rotating the tool 3 together with the wheel 4 via the rotating shaft 6 to cut the machining surface 10a.
The groove 11 is formed by transferring the shape of the tool to the groove.

[0004]

However, in the above-described grooving apparatus, the inclination of the groove described below and the position of the groove to be formed from a reference position can be determined with a high degree of precision by a predetermined inclination (hereinafter, referred to as a "slant"). It is difficult to form at a tilt set value) or at a predetermined position (hereinafter, referred to as a position set value).

FIG. 12 is an explanatory diagram showing an error in the inclination θ of the groove 11. In this drawing, a line that bisects the angle of the groove 11 formed on the processing surface 10a of the processing target 10 is a bisector S, and a line that passes through the groove bottom 11a and is perpendicular to the processing surface 10a is a perpendicular line P. Originally, when the groove was to be formed with the oblique side symmetrical to the perpendicular P, the angle between the bisector S and the perpendicular P is the inclination error θ of the groove. FIG. 13 shows a conventional method of attaching a tool to the wheel 4. Conventionally, the tool is set in accordance with the reference surface 4a of the wheel 4 (the surface adjacent to the hatched portion in the figure) (hereinafter referred to as reference surface alignment) to set the inclination of the tool and consequently the inclination of the groove. The accuracy was guaranteed. That is, the inclination is determined only by the reference plane alignment.

FIG. 14 shows a depth of 1 mm formed on a precision part.
It is an enlarged view of a tool used for the following fine groove processing.
As shown in the figure, the tool 3 includes a prismatic body 3a and a blade 3b provided at the tip of the body. For example, the length of the body 3a is 8 mm. Of about 3 mm can be used. In such a tool, when the side surface of the body 3a is used as the tool reference plane 3c, the inclination of the tip of the cutting edge with respect to the tool reference plane 3c occurs for about 3 to 4 minutes. Further, when the tool 3 is mounted on the wheel 4 with the reference surface aligned, an installation error occurs for about one minute. From these facts, even if the tool is aligned and mounted on the wheel 4 so that the groove inclination becomes a predetermined inclination set value,
It is difficult to form a groove with high inclination accuracy due to both errors of the inclination error of the tip of the cutting edge with respect to the tool reference plane 3c of the tool itself and the error of attaching the tool 3 to the wheel 4. Specifically, it is inevitable that the inclination error will be longer than 3 minutes.

[0007] In addition, the position at which the groove is formed in the object 10 has conventionally been determined by the relative position of the wheel 10 on which the tool is mounted to the reference plane O, which is the reference of the object 10. For this reason, a position error occurs due to a mounting error of the tool with respect to the wheel 4. Assuming that the distance from the reference plane O of the processing target 10 to the bottom 11a of the groove after formation is L, an error between the reference plane O and a distance from a predetermined position is a position error, which is larger than 10 μm. There was a case.

In particular, in the case of a groove formed in a precision component, it is desired that the inclination error of the groove be 1 minute or less, and that the position error of the groove be 3 μm or less.

The applicant of the present invention has previously proposed a groove processing method, a V-groove shape product, and an optical component capable of improving the processing accuracy of a groove (Japanese Patent Application No. 12-194040).
However, in this proposal, the opening of the V-groove to be formed, that is, the magnitude of the angle ψ between the grooves can be accurately formed to the level of a few seconds, and the inclination error of the groove and the position error of the groove are required. It was not to shrink.

The present invention has been made in view of the above problems, and a first object of the present invention is to reduce a tilt error of a groove formed in a processing object to one minute or less, and to improve the tilt accuracy. An object of the present invention is to provide a groove processing method and a groove processing apparatus capable of forming a groove. A second object of the present invention is to provide a groove processing method and a groove processing apparatus capable of reducing a position error of a groove formed in a processing target object to 3 μm or less and forming a groove with high positional accuracy. That is.

[0011]

According to a first aspect of the present invention, there is provided a grooving method, comprising: a tool for cutting a processing surface of an object to be processed; In a grooving method for forming a groove by cutting with a tool on a processing surface of a workpiece, the driving method includes a support and a driving unit that rotationally drives the rotary support, and the inclination of a groove formed by the tool is determined. Preliminarily forming an inclination measuring groove for measurement, and correcting the inclination of the tool with respect to the processing surface based on an error of the inclination of the inclination measuring groove with respect to the inclination of the groove to be formed on the workpiece. After performing the inclination correction, a groove is formed on a processing surface of the processing object. Note that the inclination correction of the tool with respect to the processing surface may be performed by changing any of the inclination of the tool, the inclination of the object to be processed, or both.

In the groove machining method according to the first aspect, the inclination measuring groove is formed in advance while the tool is supported on the rotary support, and the inclination of the tool with respect to the processing surface is determined based on the inclination of the inclination measuring groove. After the correction, the groove processing is performed on the object to be processed for the first time. By this, even if an inclination error of the tip of the cutting edge with respect to the tool reference plane is considered to normally occur due to the processing accuracy of the tool, it occurs based on the inclination of the actually formed inclination measuring groove even for about 3 to 4 minutes. Since the inclination of the tip of the tool tip with respect to the machining surface is corrected, the inclination error, which is an error with respect to a predetermined inclination set value of the groove actually formed on the object to be machined, is corrected when the inclination of the final tool with respect to the machining surface is corrected. Only the mounting errors that occur. This mounting error is at most about one minute. After the correction is performed first, the groove may be continuously formed on the processing object,
The formation of the inclination measuring groove and the inclination correction may be performed each time the workpiece is replaced.

According to a second aspect of the present invention, in the grooving method of the first aspect, the cutting edge of the tool tip is provided with a tool support member extending in a radial direction of the rotary support. When the tool is attached to the rotating support so as to face the rotating support, and the rotation axis direction of the rotating support is the X-axis direction, the inclination of the tool supporting member with respect to the rotating support in the X-axis direction is adjusted. And correcting the inclination of the cutting edge of the tool with respect to the processing surface. Here, the present invention can be applied to both a horizontal milling machine in which the rotation axis of the rotary support is horizontal to the processing surface and a vertical milling machine in which the rotation axis is vertical.

In the groove machining method of the second aspect, the inclination of the tool support member provided on the rotary support in the X-axis direction, which is the direction of the rotation axis, is adjusted, so that the cutting edge of the tool is aligned with the radial direction of the rotary support. The inclination with respect to the processing surface of the tool is corrected by changing the angle between the X-axis direction and the X-axis direction.

In order to achieve the second object, according to a third aspect of the present invention, there is provided a groove machining method, comprising: a tool for cutting a machining surface of an object to be machined; a rotating support for rotating and supporting the tool; Drive means for driving the support to rotate, and in a groove processing method of forming a groove on the processing surface of the processing object by cutting with the tool, a position of the groove formed by the tool on the processing object is determined. Preliminarily forming a position measurement groove for measurement, and correcting the position of the tool with respect to the processing surface based on an error of the position of the position measurement groove with respect to the position of the groove to be formed in the workpiece. After performing the position correction, a groove is formed on a processing surface of the processing object. Incidentally, the position correction of the tool with respect to the processing surface is as follows.
This may be performed by changing only the tool, only the object to be processed, or both.

According to a third aspect of the present invention, a groove for position measurement is formed in advance while the tool is supported on a rotary support, and the position of the tool with respect to the processing surface is determined based on the position of the groove for position measurement. After the correction, the groove processing is performed on the object to be processed for the first time. Originally, the groove position error, which is a composite factor of the error of the tip position of the blade tip caused by the processing accuracy of the tool itself and the error of the tool installation position with respect to the processing surface when the tool is installed, often becomes 10 μm or more. In the present invention, the position error is limited to the error of the tool installation position when re-installing based on the position error of the actually formed position measurement groove. As a result, the position of the groove actually formed in the object to be processed is limited to only the error of the tool installation position generated when the final installation position of the tool with respect to the processing surface is corrected. The error of the tool installation position is at most about 3 μm.

According to a fourth aspect of the present invention, in the grooving method according to the first or second aspect, after performing the inclination correction and before forming a groove in a processing surface of a workpiece, the tool is used. A groove to be formed on the object by preliminarily forming an inclination and a position measurement groove for measuring the inclination of the groove to be formed and the position on the object to be processed, and the inclination and the inclination of the position measurement groove. It is checked whether or not the inclination correction of the tool has been correctly performed, and based on the error of the inclination and the position of the position measuring groove with respect to the position of the groove to be formed on the object, the machining of the tool is performed. The method is characterized in that a position with respect to a surface is corrected, and after the position is corrected, a groove is formed on a processing surface of the processing object.

In the grooving method according to the fourth aspect, after correcting the inclination of the tool with respect to the processing surface, it is checked whether or not the inclination correction of the groove is correctly performed by the inclination and position measurement groove. The position error is measured, and the position of the tool on the processing surface is corrected. Thus, it is confirmed whether or not the correction of the groove inclination error has been correctly performed, and the position of the groove is corrected.

According to a fifth aspect of the present invention, there is provided a grooved product having at least one groove on a surface thereof, wherein the groove is formed by the groove processing method of the first, second, third or fourth aspect. It is characterized by being.

In the grooved product according to the fifth aspect, by forming the groove by the groove processing method according to the first, second, third or fourth aspect, a groove having high inclination accuracy, position accuracy, or inclination and position accuracy can be obtained. Is formed on the grooved product.

According to a sixth aspect of the present invention, there is provided an optical component or a precision component manufactured using a grooved product, wherein the grooved product according to the fifth aspect is used as the grooved product. It is a feature.

In the optical component or the precision component according to the sixth aspect, the optical component or the precision component is manufactured by using a grooved product having a groove having excellent inclination accuracy, position accuracy, or inclination and position accuracy. Therefore, it is possible to obtain an optical component or a precision component having a groove with excellent accuracy that can meet the demands such as the position and inclination accuracy of the groove.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A grooving apparatus as an embodiment to which the grooving method of the present invention is applied will be described below.

FIG. 1 is a schematic configuration diagram of a grooving apparatus according to the present embodiment, and FIG. As shown in FIG.
Are a tool 3 for cutting a groove, a wheel 4 as a rotary support for supporting the tool, and a rotary drive unit 7 as drive means.
A rotary shaft 6 that is driven to rotate and transmits a driving force to a wheel 4 connected to the tip, and a transfer device 8 that sequentially transfers the workpiece 10 to a position where a groove is formed below the tool.

In FIG. 2, the tool 3 has a prismatic body 3a and a cutting edge 3b provided at the tip of the body. Attach the tool to the wheel 4
This is performed via a tool supporting member 9 provided on the wheel 4 so as to extend in the radial direction of the wheel 4 so that the cutting edge 3b at the tip of the wheel 4 faces the processing surface 10a of the workpiece 10. Further, a balance adjusting weight 12 for correcting the balance of the wheel 4 caused by providing the tool 3 and the tool support member 9 at one position is opposed to a position where the tool support member 9 is attached to the rotation center of the wheel 4. It is provided in the position where it does.

When the groove 11 is formed in the workpiece 10, the wheel 4 is rotated via the rotating shaft 6, and the cutting edge 3 b of the tool 3 provided on the outer periphery of the wheel 4 is moved in the circumferential direction of the wheel, ie, as shown in FIG. In the direction of the arrow h, and relatively moved in the direction of the groove forming the rotation shaft 6 and the workpiece 10 (in the present embodiment, the Y direction in the figure) to move the workpiece surface 10a on the surface of the workpiece 10 A groove 11 is formed.

In the present embodiment, the inclination error and the position error of the groove 11 to be formed are corrected so that the groove 11 having high angle and high positional accuracy can be formed. Hereinafter, the characteristic portions of the present embodiment will be described.

In this embodiment, before the cutting of the groove 11 on the workpiece 10, the inclination measuring groove Gt and the position measuring groove Gp are preliminarily formed. Among them, the position measurement groove Gp is for measuring the inclination together with the position, and is a so-called inclination and position measurement groove. 1 in the figure
Reference numeral 5 denotes a trial processing target 15 for forming the inclination measuring groove Gt and the position measuring groove Gp. FIG. 3 is a flowchart showing the steps of the groove processing in the present embodiment, and FIGS. 4 (a) to 4 (c) show the steps. In addition, the grooving apparatus 1 of the present embodiment is capable of moving the processing object 10 in two directions of the X direction and the Y direction in the drawing, and the wheel 4 is moved together with the rotating shaft 6 in the vertical direction (Z in the drawing). Direction).

First, when a signal for starting the groove processing is output (step 1), the test object 15 is positioned below the tool 3 to form the inclination measuring groove Gt as shown in FIG. (Step 2). An inclination error θ of the inclination measurement groove Gt with respect to a perpendicular line P of the processing surface at the bisector S is measured by a stylus which is a stylus type roughness meter provided in the apparatus (step 3). The inclination of the tool 3 is corrected by a method described later based on the error of the obtained inclination error θ with respect to a predetermined inclination set value (in this embodiment, the perpendicular line P) (step 4). Next, the surface of the processing object 10 facing the test processing object side is set as a reference surface O to be a reference of the groove position, and the surface of the test processing object 15 separated from the reference surface O by a predetermined distance is set. A position measurement groove Gp is formed at the position (step 5). The distance OGp of the position measurement groove Gp from the reference plane O is measured (step 6). Then, a position error between the distance OGp obtained in step 6 and a preset position set value is calculated, and the actual position of the workpiece 1 is calculated.
The tool 3 with respect to the processing surface 10a including an error so that the distance of the groove 11 formed at 0 from the reference surface O approaches the position set value.
Is corrected (step 7). Then, a groove G1 is formed on the processing surface 10a of the processing target 10 (step 8), and the groove forming process is completed (step 9).

By forming the groove 11 through the above-described steps, it is possible to confirm whether or not the inclination error has been correctly corrected based on the formation of the position measurement groove Gp and the measurement result. Further, the positional deviation occurring after the inclination correction can be measured as the positional deviation of the position measuring groove Gp together with the positional deviation before the inclination correction, and the correction can be performed collectively.

The method of correcting the inclination of the tool 3 performed in step 4 will be described. FIG. 5 is an explanatory view showing a method for measuring the inclination of the tool support member 9, and FIG.
FIG. 7 shows the inclination of the tool support member 9 and the inclination of the tool support member 9.
FIG. 7 is a diagram illustrating the orientation of the tool support member 9 and the tool 3 after the inclination correction.

In FIG. 5, the probe is brought into contact with the side surface of the tool support member 9 and is slid up and down to measure the inclination of the tool support member 9. Further, the inclination of the position measurement groove Gp from the position set value is measured as described above. FIG.
As shown in the figure, the inclination error of the inclination measuring groove Gt is defined as θ. In addition, an inclination error of the support member from the perpendicular line P, which is a reference of the inclination set value of the tool support member 9 (referred to as a support member inclination error), is α. Since the final correction of the inclination of the tool 3 requires only the inclination error θ, the inclination of the tool support member 9 is returned by θ. As a result, as shown in FIG. 7, the tool support member 9 is inclined with respect to the perpendicular P by θ-α in the direction opposite to that of FIG. 6, thereby making it possible to eliminate the inclination error of the groove 11.

More specifically, FIG. 8 is an enlarged plan view of the tool support member 9 used in the present embodiment. FIG. 9 shows the wheel 4
FIG. 4 is a schematic diagram schematically showing the inclination angle and the moving distance of the camera. As shown in FIG. 8, when the length of the tool support member 9 in the radial direction of the wheel 4 is 35 mm, the scannable distance of the probe 20 is assumed to be 30 mm. As shown in FIG. 9, the displacement amount δ at a position 30 mm away from the fulcrum corresponding to one minute of the inclination of the tool support member 9 is about 8.7 μm. When adjusting the inclination, the tool support member 9 is inclined in the direction shown in FIG. 7 by an angle of θ-α. here,
Assuming that the displacement amount corresponding to the angle of θ-α obtained by the probe 20 shown in FIG. 5 is γ, in order to suppress the inclination error to 1 minute or less, the displacement amount of the tool supporting member is γ ± 8.7 μm.
The tool support member may be inclined so as to be within the range of m. Since the displacement of the tool support member can be easily controlled manually to suppress the inclination in the range of γ ± 8.7 μm, the inclination of the tool support member 9 can be manually adjusted in units of 1 minute or less. Becomes

FIG. 10A is a front view of the wheel 4 when the tool 3 according to the present embodiment is attached to the wheel 4 as viewed from the X-axis direction, and FIG. 10B is a side view as viewed from the XZ plane. The tool support member 9 is pressed against the hatched portion of the wheel 4 in the figure, and is fixed at two upper and lower portions by fixing screws 19a and 19b. When the inclination of the tool support member 9 is corrected as described above, the inclination of the tool support member 9 provided in the hatched portion in the X-axis direction is manually changed to the desired inclination as described above. adjust.
As a result, as shown in FIG. 10B, the inclination of the cutting edge 3b at the tool tip can be changed in the double-headed arrow i direction, that is, the X-axis direction.

Next, a method of correcting the relative position of the tool 3 with respect to the processing surface 10a performed in step 7 will be described. The position of the tool 3 is corrected from the reference plane O to the position measuring groove G.
The position of the cutting edge 3b with respect to the reference plane O is determined from the measurement result of the distance OGp to p, and the processing object 1 is determined from the position.
This is performed by moving the workpiece 10 in the X-axis direction in FIG. 1 by a distance for causing the blade edge portion 3b to face the groove forming position of 0.

Table 1 shows the inclination error of the groove 11 when the inclination is not corrected before forming the groove 11 on the processing surface 10a of the object 10 (hereinafter, referred to as “before correction”), and the present embodiment. The inclination error when the inclination is corrected before forming the groove 11 by the method (hereinafter referred to as “after correction”),
The position of the groove 11 when the position of the position measuring groove Gp from the reference plane is not measured before reflecting the groove 11 before forming the groove 11 (hereinafter referred to as “before reflecting the measured groove value”). The error and the position error of the groove 11 when reflected (hereinafter referred to as “after reflected groove measurement value”) have different shapes.
It shows the result of measurement with three grooves (shape 1, shape 2, shape 3).

[Table 1]

As a result, the inclination errors of the grooves 11 all exceed 1 minute before the correction, but can be reduced to 1 minute or less after the correction. In addition, the position error is much larger than 3 μm before the groove measurement value is reflected, but can be all reduced to 3 μm or less after the groove measurement value is reflected. Thus, as in the present embodiment, after the inclination measurement groove Gt and the position measurement groove Gp are formed in advance and the relative angle and position between the workpiece 10 and the tool 3 are corrected according to the results, It has been found that if the grooves 11 are formed, the grooves 11 with good inclination accuracy and position accuracy can be formed.

Further, it is conceivable to apply the groove processing method to a prism array as a grooved product.
However, the optical parts and precision parts applicable as a grooved product are not limited to this, and various other parts having a shape having a groove on the surface can be applied.

[0039]

According to the groove machining method of the present invention, the inclination error of the groove actually formed on the object can be limited to only the error at the time of the final tool inclination correction. The error of the inclination of the groove to be formed can be reduced to 1 minute or less, and there is an excellent effect that a groove with good inclination accuracy can be formed.

According to the groove machining method of the second aspect, there is an excellent effect that the inclination of the tool support with respect to the rotary support can be adjusted for correcting the inclination of the tool with respect to the machining surface.

According to the groove machining method of the third aspect, the position error of the groove actually formed on the object can be limited to only the error generated at the time of final tool position correction. There is an excellent effect that a position error of a groove to be formed can be reduced to 3 μm or less, and a groove with high positional accuracy can be formed.

According to the groove machining method of the fourth aspect, it is possible to form a groove with good inclination and position accuracy by correcting both the inclination error and the position error of the groove formed on the machining surface of the object to be machined. In addition to the above, there is an excellent effect that it is possible to confirm whether or not the inclination error has been correctly corrected. Further, since the position error is corrected after the inclination error is corrected, there is an excellent effect that the position error newly generated by correcting the tilt error can be corrected.

According to the grooved product of the fifth aspect, the inclination accuracy,
There is an excellent effect that it is possible to obtain a groove processed product in which a groove having excellent positional accuracy, inclination accuracy and positional accuracy is formed. Also, if these grooved products are used to form optical component molding dies, positioning jigs, assembling jigs, and other members, the molding accuracy, alignment accuracy, and assembly accuracy of the optical components can be improved. There is also an excellent effect that a member having good accuracy and the like can be obtained.

According to the optical component or the precision component of the sixth aspect, the optical component or the precision component has a groove in which the inclination, the position, or the inclination and the position are formed with high precision, and the performance is more excellently exhibited. There is an excellent effect that it can be done.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a groove processing apparatus according to an embodiment.

FIG. 2 is a perspective view of a main part of the grooving apparatus and the object to be processed according to the embodiment;

FIG. 3 is a flowchart showing a groove processing step in the embodiment.

FIGS. 4A to 4C are views showing a groove processing step in the embodiment.

FIG. 5 is an explanatory view showing a method for measuring the inclination of the tool support member.

FIG. 6 is a diagram showing the inclination of the inclination measuring groove and the inclination of the tool support member.

FIG. 7 is a diagram showing the orientation of the tool support member and the tool after the inclination correction.

FIG. 8 is an enlarged plan view of a tool support member used in the embodiment.

FIG. 9 is a schematic diagram of a tilt angle and a moving distance of a wheel.

FIG. 10A is a front view of the wheel showing a state in which the tool according to the embodiment is attached to the wheel. (B)
Is a side view of the same as viewed from the XZ plane.

FIG. 11 is an explanatory view showing an example of a groove processing apparatus used for performing groove processing by a fly cut processing method.

FIG. 12 is an explanatory diagram showing a method for measuring the inclination θ of the groove.

FIG. 13 is a view showing a conventional method of attaching a tool to a wheel.

FIG. 14 is an enlarged view of a tool used for processing a fine groove having a depth of about 1 mm or less formed in a precision part.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Groove processing apparatus 3 Tool 3a Body part 3b Blade tip part 4 Wheel 6 Rotating shaft 8 Transfer device 9 Tool support member 10 Workpiece 11 Groove 12 Balance adjustment weight 15 Trial workpiece 18 Stylus 19a, b Screw for fixing support member 20 Probe Gt Slope measurement groove Gp Position measurement groove P Perpendicular line S Bisection line

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Zhang Army 1-3-6 Nakamagome, Ota-ku, Tokyo F-term in Ricoh Co., Ltd. (reference) 3C001 KA02 KB04 TA02 TB02 TB04 3C022 EE02 EE17 3C045 BA31 BA40 CA30 DA03 HA07

Claims (6)

[Claims] An apparatus for machining a workpiece includes a tool for cutting a machining surface of the workpiece, a rotating support that rotates and supports the tool, and a driving unit that rotationally drives the rotating support. In a grooving method for forming a groove on a surface by cutting with the tool, a groove for inclination measurement for measuring the inclination of the groove formed by the tool is preliminarily formed, and a groove to be formed on the object to be processed is formed. The inclination of the tool with respect to the processing surface is corrected based on an error of the inclination of the inclination measurement groove with respect to the inclination, and after performing the inclination correction, a groove is formed on the processing surface of the workpiece. And groove processing method. 2. The groove machining method according to claim 1, wherein the tool is rotatably supported so that a cutting edge at the tip of the tool faces the processing surface via a tool support member extending in a radial direction of the rotary support. When the direction of the rotation axis of the rotary support is set to the X-axis direction, the inclination of the tool support member with respect to the rotary support in the X-axis direction is adjusted, so that the processing of the cutting edge of the tool is performed. A grooving method characterized by performing tilt correction on a surface. 3. A machining of an object to be machined, comprising: a tool for cutting a machined surface of the object to be machined, a rotating support for rotating and supporting the tool, and a driving means for driving the rotating body to rotate. In a grooving method for forming a groove on the surface by cutting with the tool, a position measurement groove for measuring the position of the groove formed by the tool on the object to be processed is preformed,
After correcting the position of the tool with respect to the processing surface based on the error of the position of the position measurement groove with respect to the position of the groove to be formed on the processing object, and performing the position correction, A groove processing method, wherein a groove is formed in a processing surface. 4. The groove machining method according to claim 1, wherein after the inclination correction is performed and before the groove is formed on the processing surface of the workpiece, the inclination of the groove formed by the tool is adjusted. A groove for measuring the position on the object to be processed and a groove for position measurement are preliminarily formed, and the inclination of the groove to be formed on the object is correctly corrected by the inclination and the inclination of the position measurement groove. Check whether or not, and, based on the error of the position of the inclination and position measurement groove with respect to the position of the groove to be formed in the workpiece, correct the position of the tool with respect to the processing surface, A groove forming method, wherein a groove is formed on a processing surface of the processing object after performing the position correction. 5. A grooved product having at least one groove on the surface, wherein the groove is a groove formed by the groove processing method of claim 1, 2, 3, or 4. Grooved products. 6. An optical component or a precision component manufactured using a grooved product, wherein the grooved product according to claim 5 is used as the grooved product.