JP2002331406A - Abrasion resistant coating film-covered tool - Google Patents

Abrasion resistant coating film-covered tool

Info

Publication number
JP2002331406A
JP2002331406A JP2001140901A JP2001140901A JP2002331406A JP 2002331406 A JP2002331406 A JP 2002331406A JP 2001140901 A JP2001140901 A JP 2001140901A JP 2001140901 A JP2001140901 A JP 2001140901A JP 2002331406 A JP2002331406 A JP 2002331406A
Authority
JP
Japan
Prior art keywords
coating film
cutting
tool
film
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001140901A
Other languages
Japanese (ja)
Inventor
Takashi Ishikawa
剛史 石川
Nobuhiko Shima
順彦 島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP2001140901A priority Critical patent/JP2002331406A/en
Publication of JP2002331406A publication Critical patent/JP2002331406A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a hard coating film-covered tool remarkably enhancing lubricity of a coating film, restraining a rise in a cutting temperature, and superior in oxidation resistance and adhesion for coping with drying and speedup of cutting work of highly hard steel, and provide a composite hard coating film-covered tool further superior in adhesion by a combination with a conventional coating film. SOLUTION: This abrasion resistant coating film-covered tool is formed by covering a base body surface with a hard coating film of at least one layer (TiAl) system. The lubricity is improved by adding S. The coating film is constituted by being covered with the hard coating film further improved in the lubricity by substituting a part of S with B.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明が属する技術分野】本発明は、超硬合金、高硬度
鋼製工具の高速切削加工に使用される硬質皮膜被覆工具
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film-coated tool used for high-speed cutting of a tool made of cemented carbide and high-hardness steel.

【0002】[0002]

【従来の技術】金属加工の高能率化を目的とした調質鋼
の直切削においては、特開昭62−56565号公報、
特開平2−194159号公報に代表されるTiAlN
皮膜が開発され切削工具に適用されている。TiAlN
皮膜は、TiN、TiCNに比べ耐酸化性が優れるた
め、刃先が高温に達する調質鋼の切削においては、切削
工具の性能を著しく向上させるものである。
2. Description of the Related Art Japanese Patent Application Laid-Open No. Sho 62-56565 discloses the direct cutting of tempered steel for the purpose of improving the efficiency of metal working.
TiAlN represented by JP-A-2-194159
Coatings have been developed and applied to cutting tools. TiAlN
Since the coating has better oxidation resistance than TiN and TiCN, the performance of the cutting tool is remarkably improved in cutting of tempered steel whose cutting edge reaches a high temperature.

【0003】しかしながら、近年では更なる加工の高能
率、高精度化の要求を満たす為、切削速度の高速化に加
え、環境問題及び加工コスト低減の観点から乾式での切
削加工が重要視されている。こうような切削環境下にお
いては、切削工具表面に被覆される耐摩耗皮膜と切削さ
れる材料(以下、被削材と称す)との溶着現象が切削性
能に大きな影響を及ぼすとともに、切削温度がより高温
になりTiAlN系皮膜でも耐酸化が十分ではない状況
にある。すなわち、従来までの前記TiN、TiCN及
びTiAlN皮膜はこのような苛酷な切削環境下におい
ては、被削材との溶着現象等に起因した摩擦抵抗の増加
及び酸化の進行により、十分な切削性能を得られなく、
また酸化による摩耗進行を十分に抑制できていなくなっ
たのが現状である。
However, in recent years, in order to meet the demand for higher efficiency and higher precision of processing, dry cutting has been regarded as important in view of environmental problems and reduction of processing cost in addition to increasing the cutting speed. I have. In such a cutting environment, the welding phenomena between the wear-resistant film coated on the cutting tool surface and the material to be cut (hereinafter referred to as the work material) has a great effect on the cutting performance, and the cutting temperature decreases. As the temperature becomes higher, oxidation resistance is not sufficient even with a TiAlN-based film. In other words, the conventional TiN, TiCN and TiAlN coatings have sufficient cutting performance under such a severe cutting environment due to an increase in frictional resistance and oxidation progress caused by a welding phenomenon with a work material and the like. I ca n’t get it
At present, the progress of wear due to oxidation cannot be sufficiently suppressed.

【0004】このような問題を解決する為に、耐溶着性
を改善する観点より特表平11−502775号公報に
示される二硫化モリブデンや、特開平7−164211
号公報に示される炭化タングステン及びダイヤモンドラ
イクカーボンからなる潤滑性皮膜を硬質皮膜最表面に積
層した切削工具が開発されているが、いずれも硬質皮膜
との密着性が悪く、皮膜そのものが非常に脆い上耐酸化
性に乏しく、切削時に剥離または破壊、酸化摩滅などに
より上記切削環境下においては十分対応できてはいな
い。
In order to solve such a problem, molybdenum disulfide disclosed in JP-A-11-502775 and JP-A-7-164211 are disclosed from the viewpoint of improving the welding resistance.
A cutting tool has been developed in which a lubricating film consisting of tungsten carbide and diamond-like carbon is laminated on the outermost surface of the hard film, but the adhesion of the hard film to the film is poor and the film itself is very brittle. It is poor in oxidation resistance, and cannot be adequately treated in the above-mentioned cutting environment due to peeling or destruction during cutting, oxidative wear, and the like.

【0005】また耐酸化性を改善する観点から特開平7
−237010号公報や特開平10−130620号公
報に代表されるようにTiAlNに第3成分を添加する
事例があるものの、第3成分の添加によるだけでは十分
に満足される耐酸化性の向上は実現されていないのが実
状である。また特開平8−118106号公報にはTi
SiNの事例も提案されているが、単なるTiSiNで
は耐酸化性を改善するには至っていないと同時に切削温
度そのものを低下させるには至っていない。
From the viewpoint of improving oxidation resistance, Japanese Patent Application Laid-Open
Although there is a case where a third component is added to TiAlN as typified by JP-A-237010 and JP-A-10-130620, the improvement in oxidation resistance that is sufficiently satisfied only by the addition of the third component is not achieved. The reality is that it has not been realized. Japanese Patent Application Laid-Open No. 8-118106 discloses Ti
Although the case of SiN has been proposed, mere TiSiN has not been able to improve the oxidation resistance and has not been able to lower the cutting temperature itself.

【0006】[0006]

【発明が解決しようとする課題】本発明はこうした事情
に鑑み、切削加工の乾式化、高速化に対応可能な、即
ち、耐酸化性に優れるとともに被削材との溶着性が少な
く潤滑性を有する硬質層を提案し、切削温度を低減し、
耐酸化性及び耐溶着性を同時に実現し、高硬度鋼を乾式
で高速切削出来うる耐摩耗皮膜被覆工具を提供すること
を課題とする。総括すれば、耐酸化性の向上よりも高硬
度材の乾式高速切削においては、皮膜の耐酸化性を維持
しつつ、切削抵抗そのものを低減せしめ、切削温度の上
昇を抑制することが極めて重要な課題であり切削温度を
低下せしめることを課題とする。
SUMMARY OF THE INVENTION In view of these circumstances, the present invention can cope with dry and high-speed cutting, that is, it has excellent oxidation resistance, has low adhesion to a work material, and has low lubricity. We propose a hard layer to have, reduce the cutting temperature,
An object of the present invention is to provide a wear-resistant film-coated tool capable of simultaneously realizing oxidation resistance and welding resistance and capable of dry cutting high-hardness steel at high speed. In summary, in dry high-speed cutting of hard materials rather than oxidation resistance, it is extremely important to reduce the cutting resistance itself and suppress the rise in cutting temperature while maintaining the oxidation resistance of the film. It is an issue to reduce the cutting temperature.

【0007】[0007]

【課題を解決するための手段】本発明者は、硬質皮膜の
耐摩耗性と様々な被削材と摩擦抵抗の低減に及ぼす影響
及び皮膜の層構造について詳細な検討を行った結果、切
削中の高温化により皮膜内部で金属成分の拡散が発生す
ることを見出しかつ拡散速度が皮膜全体の結晶配向によ
り異なる事実を検証した。つまり、金属成分が皮膜表面
に拡散しやすい結晶配向と拡散した皮膜表面に拡散した
金属成分が潤滑性を付与するような金属成分の選択によ
り極めて切削温度を低減できることを実証した。また上
記硬質皮膜は、物理蒸着法により被覆されることが望ま
しい。
The inventor of the present invention has conducted detailed studies on the wear resistance of a hard coating, its effect on various work materials and reduction of frictional resistance, and the layer structure of the coating. It was found that metal components diffused inside the film due to high temperature, and the fact that the diffusion rate varied depending on the crystal orientation of the whole film was verified. In other words, it was demonstrated that the cutting temperature can be significantly reduced by selecting a metal component in which the metal component easily diffuses to the coating surface and a metal component that diffuses to the coating surface to impart lubricity. The hard coating is desirably coated by a physical vapor deposition method.

【0008】[0008]

【作用】はじめに該硬質層に関して、その作用について
詳しく述べる。本発明者らは各種金属成分を鋭意検証し
た結果、皮膜内の金属成分が切削熱より皮膜表面に内部
拡散し、拡散成分そのものが潤滑性を付与する場合と、
皮膜表面で酸化し、酸化物そのものが潤滑性を付与する
場合と、形成された酸化物が極めて低融点を有し低融点
の酸化物が液化することにより潤滑性を付与する場合が
あることが確認された。
Function First, the function of the hard layer will be described in detail. The present inventors have intensively examined various metal components, and as a result, the metal component in the coating is internally diffused from the cutting heat to the coating surface, and the diffusion component itself imparts lubricity,
Oxidation on the film surface, the oxide itself provides lubrication, and the formed oxide has an extremely low melting point and may provide lubrication by liquefying the low melting oxide. confirmed.

【0009】拡散した成分そのものが、潤滑を付与する
成分として機能するものはS、B、が挙げられる。酸化
物を形成し、酸化物そのものが潤滑を付与する成分とし
て機能するものはSiが挙げられる。形成された酸化物
が極めて低融点を有し低融点の酸化物が液化することに
より潤滑性を付与する成分としてはV、Li等が挙げら
れる。本発明者らの検討結果においてはS添加の場合が
表面に拡散したSの効果とSが添加された(TiAl
S)Nそのものの潤滑性の相乗効果により、最も潤滑性
が高いことが確認された。さらに拡散成分そのものが潤
滑性を付与するBとの併用においてより一層切削温度が
低減できることが確認された。
[0009] S and B are examples of the components that function as lubricating components by themselves. Si that forms an oxide, and the oxide itself functions as a component that imparts lubrication is Si. V, Li, and the like are examples of a component that imparts lubricity when the formed oxide has an extremely low melting point and the low-melting oxide liquefies. According to the study results of the present inventors, in the case of adding S, the effect of S diffused to the surface and the addition of S (TiAl
S) It was confirmed that the synergistic effect of the lubricity of N itself has the highest lubricity. Furthermore, it was confirmed that the cutting temperature can be further reduced when the diffusion component itself is used in combination with B, which imparts lubricity.

【0010】ここで皮膜の結晶配向が金属成分の拡散速
度を決定する極めて重要な要素であることも重要な知見
である。細密充填面である(111)面に最高の回折強
度を有する場合、つまり細密充填面である(111)面
が工具表面と平行に存在する確率が高い場合は、金属成
分の表面への拡散、つまり工具表面と垂直方向への拡散
がし難くなる。これは細密充填面が拡散に対し、何らか
の障壁として作用するものであることを示唆するもので
ある。従って結晶配向は(111)面よりも(200)
面もしくは(220)面に最高の回折強度を有する場合
のほうが金属成分は拡散し易い結果となる。(220)
面に最高の回折強度を持たせるためには被覆条件に制約
をうけ、結果皮膜の密着性が劣化することがあり、(2
00)面に最高の回折強度を持たせることが最も好まし
い結果となる。
It is also an important finding that the crystal orientation of the film is a very important factor in determining the diffusion rate of the metal component. If the (111) plane, which is a close-packed surface, has the highest diffraction intensity, that is, if the (111) plane, which is a close-packed surface, has a high probability of being parallel to the tool surface, the diffusion of the metal component to the surface, That is, diffusion in the direction perpendicular to the tool surface becomes difficult. This suggests that the densely packed surface acts as a barrier to diffusion. Therefore, the crystal orientation is (200) more than the (111) plane.
If the plane or the (220) plane has the highest diffraction intensity, the metal component is more easily diffused. (220)
In order to impart the highest diffraction intensity to the surface, the coating conditions are restricted, and as a result, the adhesion of the film may be deteriorated.
The most preferable result is to give the (00) plane the highest diffraction intensity.

【0011】本発明の硬質皮膜を構成する硬質層のS金
属元素の組成は、0.5原子%以上、20原子%以下で
あることがより好ましい。0.5原子%未満の場合潤滑
性は付与するものの効果は少なく、20原子%を越える
と被覆条件によっては皮膜の硬度が低下する場合がある
からである。またS含有量が多くなるにつれ皮膜の密着
性は劣化する傾向があり、母材側はS含有量は少なく、
表面に向かうに伴い潤滑性を付与するS含有量を高めた
いわゆるSの傾斜組成を採用するのが最も好ましい。
The composition of the S metal element in the hard layer constituting the hard coating of the present invention is more preferably 0.5 atomic% or more and 20 atomic% or less. When the content is less than 0.5 atomic%, lubricity is imparted but the effect is small. When the content is more than 20 atomic%, the hardness of the film may be reduced depending on the coating conditions. Also, as the S content increases, the adhesion of the film tends to deteriorate, and the S content on the base material side is low,
It is most preferable to employ a so-called gradient composition of S in which the S content for imparting lubricity is increased toward the surface.

【0012】また、Bの置換量は皮膜全体に対し0.5
原子%未満では効果が認められず、10原子%を越える
と残留圧縮応力を増大せしめ、皮膜の密着性が劣化する
ため、この成分の置換量は皮膜全体に対し0.5原子%
以上10原子%以下に制約される。
Further, the substitution amount of B is 0.5% with respect to the whole film.
If the content is less than 10 atomic%, the effect is not recognized. If the content is more than 10 atomic%, the residual compressive stress is increased, and the adhesion of the film is deteriorated.
It is restricted to not less than 10 atomic%.

【0013】該硬質層は、静的及び動的条件下において
優れた密着性、低摩擦、高耐酸化性を有すものの、HR
Cが60を越えるような高硬度鋼の乾式高速切削加工に
は、単一皮膜では密着性が十分でなく剥離が発生する場
合がある。そこで、優れた耐密着性並びに耐摩耗性を有
した(TiAl)N硬質層等と下地層として用いた積層
にすることが、このような高硬度鋼切削ではより好まし
い結果となる場合もある。
The hard layer has excellent adhesion, low friction and high oxidation resistance under static and dynamic conditions,
In dry high-speed cutting of high-hardness steel in which C exceeds 60, a single coating may not have sufficient adhesion and peeling may occur. Therefore, it is sometimes preferable to form a laminate using a (TiAl) N hard layer or the like having excellent adhesion resistance and abrasion resistance and an underlayer as such an underlayer, in such a high hardness steel cutting.

【0014】ここで用いられる(TiAl)N層は場合
によっては第3の金属成分を添加されたものでも同様の
作用が期待されることは、言うまでもないことである。
It goes without saying that the (TiAl) N layer used here may have the same effect even if the third metal component is added in some cases.

【0015】本発明の硬質皮膜被覆工具は、その被覆方
法については、特に限定されるものではないが、被覆母
材への熱影響、工具の疲労強度、皮膜の密着性等を考慮
した場合、比較的低温で被覆でき、被覆した皮膜に圧縮
応力が残留するアーク放電方式イオンプレーティング、
もしくはスパッタリング等の被覆基体側にバイアス電圧
を印加する物理蒸着法であることが望ましい。
The method for coating the hard film-coated tool of the present invention is not particularly limited, but in consideration of the thermal effect on the coated base material, the fatigue strength of the tool, the adhesion of the film, etc. Arc discharge ion plating that can be coated at a relatively low temperature and compressive stress remains in the coated film,
Alternatively, a physical vapor deposition method of applying a bias voltage to the coated substrate side such as sputtering is preferable.

【0016】[0016]

【実施例】以下本発明を実施例に基づいて説明する。ア
ーク蒸発源を2個、マグネトロンスパッタリング蒸発源
を1個有するアークイオンプレーティング装置を用い、
金属成分の蒸発源である各種合金製ターゲット、ならび
に反応ガスであるNガスから目的の皮膜が得られるも
のを選択し、被覆基体温度500℃、反応ガス圧力0.
8Paの条件下にて、被覆基体である外径10mmの超
硬合金製2枚刃エンドミル、及び超硬合金製インサート
に−100Vの電位を印加し、全皮膜総厚みが3μmと
なるように成膜した。B添加量はTiAl金属アークタ
ーゲットに含有する量を調整することにより調整した。
Sの添加はMoSターゲットを用いマグネトロンスパ
ッタリングによりSを添加した。この場合アークイオン
プレーティング法と併用し(TiAl)N皮膜内にSを
添加した。S添加量の調整はアーク、及びマグネトロン
スパッタリングにおける放電電流値を調整することによ
り調整した。他層との多層化においてはS含有層と他層
との膜厚比率は1:1とした。S添加の場合必然的にM
oも添加されるがMoは特に性能を左右するものではな
い。同様にTiSターゲットを使用した場合には必然的
にTiが添加される。実施例の組成比はMo量はのぞい
たTi+Al+Sを100%とした場合の比率を示す。
また→で示す組成変化は皮膜内部組成と最表面部組成を
示し、S添加量は放電電流値を調整することにより、S
含有量を傾斜化させた。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on embodiments. Using an arc ion plating apparatus having two arc evaporation sources and one magnetron sputtering evaporation source,
A target made of various alloys, which is an evaporation source of metal components, and a target which can obtain a target film from N 2 gas, which is a reaction gas, are selected.
Under a condition of 8 Pa, a potential of -100 V is applied to a coated cemented carbide 2-flute end mill having an outer diameter of 10 mm and a cemented carbide insert, and the total coating thickness is 3 μm. Filmed. The amount of B added was adjusted by adjusting the amount contained in the TiAl metal arc target.
S was added by magnetron sputtering using a MoS 2 target. In this case, S was added to the (TiAl) N film in combination with the arc ion plating method. The amount of S added was adjusted by adjusting the discharge current value in arc and magnetron sputtering. In multi-layering with another layer, the thickness ratio of the S-containing layer to the other layer was 1: 1. When S is added, M
Although o is also added, Mo does not particularly affect the performance. Similarly, when a TiS target is used, Ti is inevitably added. The composition ratios of the examples show the ratios when Ti + Al + S excluding Mo content is 100%.
The composition change indicated by → indicates the composition inside the film and the composition at the outermost surface. The amount of S added is determined by adjusting the discharge current value.
The content was graded.

【0017】[0017]

【表1】 [Table 1]

【0018】得られた硬質皮膜被覆エンドミル及び硬質
皮膜被覆インサートを用い切削試験を行った。工具寿命
は刃先の欠けないしは摩耗等により工具が切削不能とな
った時の切削長とした。得られた結果を表1に併記す
る。
A cutting test was performed using the obtained hard film-coated end mill and hard film-coated insert. The tool life was defined as the cutting length when the tool could not be cut due to chipping or wear of the cutting edge. Table 1 also shows the obtained results.

【0019】2枚刃超硬エンドミルの切削条件は、側面
切削ダウンカット、被削材S50C(硬さHB22
0)、切り込みAd10mm×Rd1mm、切削速度1
50m/min、送り0.06mm/tooth、エア
ーブロー使用、とした。
The cutting conditions of the two-blade carbide end mill are side cutting down cut, work material S50C (hardness HB22
0), incision Ad10mm × Rd1mm, cutting speed 1
50 m / min, feed 0.06 mm / tooth, and use of air blow.

【0020】インサート切削条件は、工具形状SEE4
2TN、巾100mm×長さ250mmの面取り加工、
被削材SKD61(硬さHRC45)、切り込み2.0
mm、切削速度120m/min、送り0.15mm/
rev、乾式切削とした。表1に試験結果を併記する。
The insert cutting conditions are as follows: Tool shape SEE4
2TN, 100mm width x 250mm length chamfering,
Work material SKD61 (hardness HRC45), depth of cut 2.0
mm, cutting speed 120m / min, feed 0.15mm /
rev, dry cutting. Table 1 also shows the test results.

【0021】切削温度は旋盤加工で測定した。測定の方
法は熱起電力法を用い切削時に被加工物と被覆インサー
トの間に発生する熱起電力を測定することにより測定し
た。用いた被削材はS53Cで切削条件は切削速度30
0m/min送り0.25mm/rev切りこみ2mm
で乾式である。測定時間は10秒で最終の切削温度を採
用した。その結果を表2に示す。またS53C球を用い
ボールオンディスクにより650℃条件下で被覆工具と
球間の摩擦係数を測定した。その結果も表2に併記す
る。
The cutting temperature was measured by lathing. The measurement was performed by measuring the thermoelectromotive force generated between the workpiece and the coated insert during cutting using the thermoelectromotive force method. The work material used was S53C and the cutting condition was a cutting speed of 30.
0m / min feed 0.25mm / rev cut 2mm
It is dry type. The measurement time was 10 seconds and the final cutting temperature was used. Table 2 shows the results. Further, the friction coefficient between the coated tool and the ball was measured at 650 ° C. using a ball-on-disk using an S53C ball. The results are also shown in Table 2.

【0022】[0022]

【表2】 [Table 2]

【0023】比較例19、20はBの量が多すぎる場合
の比較例であり、静的評価数値は満足するものの密着性
が十分ではなく工具寿命が短い結果である。また比較例
21、22は同じ(TiAlS)N系皮膜であるが、被
覆条件により(111)面に最強回折強度を有する(1
11)配向としたものでSの表面拡散が十分ではなく切
削温度も低下しないことが明らかである。比較例15、
16、17、18は、TiAlN系皮膜に第3成分を添
加した事例であり、耐酸化性は改善はされるものの、切
削温度低下の観点からは、本発明例と比べ改善効果が少
ない。
Comparative Examples 19 and 20 are comparative examples in which the amount of B is too large. Although the static evaluation values are satisfied, the adhesion is not sufficient and the tool life is short. Comparative Examples 21 and 22 are the same (TiAlS) N-based film, but have the highest diffraction intensity on the (111) plane depending on the coating conditions (1).
11) It is apparent that the surface diffusion of S is not sufficient and the cutting temperature does not decrease due to the orientation. Comparative Example 15,
Examples 16, 17, and 18 are examples in which the third component is added to the TiAlN-based coating, and although the oxidation resistance is improved, the improvement effect is less than that of the present invention from the viewpoint of lowering the cutting temperature.

【0024】これらに対し本発明例は、静的評価特性に
優れる、切削温度も低く、同時に、密着性にも優れ、溶
着現象に起因した異常摩耗や皮膜の酸化摩耗、皮膜剥離
が進行することもなく、総合して工具寿命が著しく向上
する。従って、本発明は高硬度鋼の乾式高速切削加工に
十分対応するものである。
On the other hand, the examples of the present invention are excellent in static evaluation characteristics, low in cutting temperature, excellent in adhesion, and at the same time, cause abnormal wear, oxidized wear of the film and peeling of the film due to the welding phenomenon. None, and the overall tool life is significantly improved. Therefore, the present invention is sufficient for dry high-speed cutting of high hardness steel.

【0025】[0025]

【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた特に切削温度の低減に
効果的であり、かつ高密着性、高耐酸化性を同時に有す
ことから、乾式高速切削加工において格段に長い工具寿
命が得られ、切削加工における生産性の向上に極めて有
効であるものである。
As described above, the hard-coated tool of the present invention is superior to the conventional coated tool, particularly effective in reducing the cutting temperature, and has both high adhesion and high oxidation resistance. Therefore, a significantly longer tool life can be obtained in dry high-speed cutting, which is extremely effective for improving productivity in cutting.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】基体表面にX線回折において最強回折強度
を(200)面に有するTiとAlを主成分とする窒化
物、炭窒化物、窒酸化物、窒硼化物を1層以上被覆した
被覆工具において、前記少なくとも1層の硬質皮膜のT
iの一部をSで置き換えたことを特徴とする耐摩耗皮膜
被覆工具。
1. A substrate surface coated with at least one layer of a nitride, carbonitride, nitride oxide, or boride having Ti and Al as main components having the strongest diffraction intensity in the (200) plane in X-ray diffraction. In a coated tool, the at least one hard coating has a T
A tool with a wear-resistant coating, wherein i is partially replaced by S.
【請求項2】請求項1記載の耐摩耗皮膜被覆工具におい
て、該S量が0.5原子%以上、20原子%以下である
ことを特徴とする耐摩耗皮膜被覆工具。
2. The tool as claimed in claim 1, wherein said S content is at least 0.5 atomic% and at most 20 atomic%.
【請求項3】請求項1乃至2記載の耐摩耗皮膜被覆工具
において、該Sの含有量が皮膜内で皮膜表面部ほど富む
ことを特徴とする耐摩耗皮膜被覆工具。
3. A tool with a wear-resistant coating according to claim 1, wherein the content of S is higher in the surface of the coating in the coating.
【請求項4】請求項1乃至3記載の耐摩耗皮膜被覆工具
において、該Sの一部を皮膜全体に対し0.5原子%以
上、10原子%以下の範囲においてBで置換したことを
特徴とする耐摩耗皮膜被覆工具。
4. The tool according to claim 1, wherein a part of said S is substituted with B in a range of 0.5 atomic% to 10 atomic% with respect to the whole coating. Wear-resistant film-coated tools.
JP2001140901A 2001-05-11 2001-05-11 Abrasion resistant coating film-covered tool Pending JP2002331406A (en)

Priority Applications (1)

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Publications (1)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006118051A (en) * 2003-12-18 2006-05-11 Hitachi Tool Engineering Ltd Method for producing hard film
JP2007314853A (en) * 2006-05-29 2007-12-06 Hitachi Tool Engineering Ltd Hard film-coated member
CN102031435A (en) * 2010-11-02 2011-04-27 中南大学 Preparation technology of hard alloy with gradiently-changed cobalt content at surface layer
JP2020032455A (en) * 2018-08-31 2020-03-05 アイシン・エィ・ダブリュ株式会社 Manufacturing method of metal component
CN111424249A (en) * 2020-05-19 2020-07-17 中国科学院兰州化学物理研究所 Preparation method of ultra-smooth nano sulfur composite hydrogen-containing carbon membrane

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426756A (en) * 1990-05-17 1992-01-29 Kobe Steel Ltd Wear resistant coating film
JPH10176289A (en) * 1996-12-10 1998-06-30 Balzers Ag Coated hard alloy
WO1999014391A1 (en) * 1997-09-12 1999-03-25 Balzers Aktiengesellschaft Tool with protective layer system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426756A (en) * 1990-05-17 1992-01-29 Kobe Steel Ltd Wear resistant coating film
JPH10176289A (en) * 1996-12-10 1998-06-30 Balzers Ag Coated hard alloy
WO1999014391A1 (en) * 1997-09-12 1999-03-25 Balzers Aktiengesellschaft Tool with protective layer system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006118051A (en) * 2003-12-18 2006-05-11 Hitachi Tool Engineering Ltd Method for producing hard film
JP2007314853A (en) * 2006-05-29 2007-12-06 Hitachi Tool Engineering Ltd Hard film-coated member
JP4566158B2 (en) * 2006-05-29 2010-10-20 日立ツール株式会社 Hard coating coated member
CN102031435A (en) * 2010-11-02 2011-04-27 中南大学 Preparation technology of hard alloy with gradiently-changed cobalt content at surface layer
CN102031435B (en) * 2010-11-02 2012-07-25 中南大学 Preparation technology of hard alloy with gradiently-changed cobalt content at surface layer
JP2020032455A (en) * 2018-08-31 2020-03-05 アイシン・エィ・ダブリュ株式会社 Manufacturing method of metal component
JP7053411B2 (en) 2018-08-31 2022-04-12 株式会社アイシン Manufacturing method of metal parts
CN111424249A (en) * 2020-05-19 2020-07-17 中国科学院兰州化学物理研究所 Preparation method of ultra-smooth nano sulfur composite hydrogen-containing carbon membrane

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