JP2002323669A5 - - Google Patents

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Publication number
JP2002323669A5
JP2002323669A5 JP2001278957A JP2001278957A JP2002323669A5 JP 2002323669 A5 JP2002323669 A5 JP 2002323669A5 JP 2001278957 A JP2001278957 A JP 2001278957A JP 2001278957 A JP2001278957 A JP 2001278957A JP 2002323669 A5 JP2002323669 A5 JP 2002323669A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001278957A
Other versions
JP2002323669A (ja
JP4144840B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001278957A priority Critical patent/JP4144840B2/ja
Priority claimed from JP2001278957A external-priority patent/JP4144840B2/ja
Priority to US10/073,311 priority patent/US6803843B2/en
Priority to EP02003896A priority patent/EP1237028A1/en
Priority to KR10-2002-0009279A priority patent/KR100479183B1/ko
Publication of JP2002323669A publication Critical patent/JP2002323669A/ja
Publication of JP2002323669A5 publication Critical patent/JP2002323669A5/ja
Application granted granted Critical
Publication of JP4144840B2 publication Critical patent/JP4144840B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001278957A 2001-02-22 2001-09-14 揺動体装置、光偏向器、及び光偏向器を用いた光学機器 Expired - Fee Related JP4144840B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001278957A JP4144840B2 (ja) 2001-02-22 2001-09-14 揺動体装置、光偏向器、及び光偏向器を用いた光学機器
US10/073,311 US6803843B2 (en) 2001-02-22 2002-02-13 Movable-body apparatus, optical deflector, and method of fabricating the same
EP02003896A EP1237028A1 (en) 2001-02-22 2002-02-21 Optical deflector, and method of fabricating the same
KR10-2002-0009279A KR100479183B1 (ko) 2001-02-22 2002-02-21 요동체장치, 광편향기 및 그 제조방법

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2001-47297 2001-02-22
JP2001047295 2001-02-22
JP2001-47300 2001-02-22
JP2001-47296 2001-02-22
JP2001047300 2001-02-22
JP2001047296 2001-02-22
JP2001-47295 2001-02-22
JP2001047297 2001-02-22
JP2001278957A JP4144840B2 (ja) 2001-02-22 2001-09-14 揺動体装置、光偏向器、及び光偏向器を用いた光学機器

Publications (3)

Publication Number Publication Date
JP2002323669A JP2002323669A (ja) 2002-11-08
JP2002323669A5 true JP2002323669A5 (ja) 2007-06-07
JP4144840B2 JP4144840B2 (ja) 2008-09-03

Family

ID=27531812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001278957A Expired - Fee Related JP4144840B2 (ja) 2001-02-22 2001-09-14 揺動体装置、光偏向器、及び光偏向器を用いた光学機器

Country Status (1)

Country Link
JP (1) JP4144840B2 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3970066B2 (ja) * 2002-03-18 2007-09-05 オリンパス株式会社 光偏向器及び電磁型アクチュエータ
JP2005221749A (ja) * 2004-02-05 2005-08-18 Seiko Epson Corp 光走査装置および画像形成装置
WO2005119309A1 (ja) 2004-06-04 2005-12-15 Brother Kogyo Kabushiki Kaisha 反射ミラー製作方法および反射ミラー
JP4645067B2 (ja) * 2004-06-04 2011-03-09 ブラザー工業株式会社 反射ミラー製作方法
DE102013104410A1 (de) * 2013-04-30 2014-10-30 Scansonic Mi Gmbh Scannervorrichtung
CN104354916B (zh) * 2014-10-17 2016-08-24 昆山宝莱特机械有限公司 一种双叠片机构
JP6694355B2 (ja) * 2016-09-01 2020-05-13 浜松ホトニクス株式会社 可動回折格子及びその製造方法、並びに外部共振器型レーザモジュール
CN107884897A (zh) * 2016-09-30 2018-04-06 扬明光学股份有限公司 光路调整机构
WO2018179041A1 (ja) * 2017-03-27 2018-10-04 オリンパス株式会社 光偏向器
WO2019172307A1 (ja) * 2018-03-09 2019-09-12 パイオニア株式会社 アクチュエータ付き反射板、光走査装置、及びミラーアクチュエータ
JP2021009220A (ja) * 2019-07-01 2021-01-28 パイオニア株式会社 駆動装置

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