JP2002316015A - Exhaust gas treating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the attaching of a reaction product to the neighborhood of a connection part between a sucking pipe through which exhaust gas is supplied and an inlet scrubber. SOLUTION: A nozzle 9 which comprises a piping 9a for jetting having a ring shape along the inner surface of a sucking pipe 2 on the inner surface of the sucking pipe 2 and jetting ports 9b which are made by opening a plurality of holes along the shape on the piping 9a for jetting are disposed in the neighborhood of the connection part of the inlet scrubber 1 and the sucking pipe 2. The direction of the jetting from the respective jetting ports 9b is directed toward the connection part between the inlet scrubber 1 and the sucking pipe 2 and an air flow or a water flow is permitted to occur all over the inner surface of the sucking pipe 2 from the nozzle 9 to the connection part between the sucking pipe 2 and the inlet scrubber 1. In addition, an air stream adjusting plate 10 which has an inclination which gently stands up from the inner surface of the sucking pipe 2 is disposed on the upper part opposite to the side on which the jetting ports 9b of the nozzle 9 are disposed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an exhaust gas treatment apparatus for removing harmful components from exhaust gas generated in a semiconductor manufacturing apparatus. Specifically, a nozzle having an ejection port facing the connection between the scrubber and the pipe is provided near the connection between the scrubber and the pipe on the inner surface of the pipe through which the exhaust gas connected to the scrubber passes. The present invention relates to an exhaust gas treatment apparatus capable of suppressing adhesion of a reactant near a connection between a pipe for supplying exhaust gas and a scrubber by ejecting one of liquids.

[0002]

2. Description of the Related Art In a manufacturing facility having a semiconductor manufacturing apparatus such as a CVD apparatus, an exhaust gas processing apparatus is used to remove harmful components from exhaust gas generated in the semiconductor manufacturing apparatus. FIG. 4 is a configuration diagram of a conventional exhaust gas treatment apparatus. The inlet scrubber 1 removes dust and water-soluble components in exhaust gas with water. For this reason, the inlet scrubber 1 is connected to an intake pipe 2 which is a pipe for sucking exhaust gas, and a shower nozzle 1a for jetting water is provided inside the inlet scrubber 1.

Here, the entrance scrubber 1 is provided with a window (not shown) for the purpose of inspecting the inside and the like, and thus has a prismatic shape such that the side surface is formed as a plane. In contrast, the intake pipe 2 has a cylindrical shape. The reactor 3 oxidizes and decomposes a gas by heat. For this reason, a heater 4 is provided in the reactor 3 and heats the inside of the reactor 3 to, for example, about 750 ° C.

The outlet scrubber 5 removes dust and cools exhaust gas with water. For this reason, the outlet scrubber 5 is provided therein with a shower nozzle 5a for ejecting water, and an exhaust pipe 6 serving as a pipe for exhausting the treated exhaust gas is connected to an upper portion thereof. ing.

[0005] The inlet scrubber 1 and the reactor 3 are connected at the lower part. The reactor 3 and the outlet scrubber 5 are connected at the lower part. A shower nozzle 1 is provided below the inlet scrubber 1, the reactor 3 and the outlet scrubber 5.
a, a drain tank 7 for storing water spouted from the shower nozzle 5a, removed dust, and the like. In addition,
The water accumulated in the drain tank 7 is discharged to the outside from a discharge port (not shown).

The operation of a conventional exhaust gas treatment device will be described.
From the intake pipe 2, SiH₄, NH ₃, C₂F₆, O
₂Exhaust gas containing the same is supplied. At entrance scrubber 2,
Water is spouted from the shower nozzle 1a and supplied from the intake pipe 2.
The water-soluble components in the supplied exhaust gas are removed. For example,
NH in gas₃(Ammonia) is water soluble
Dissolve in water spouted from shower nozzle 1a by scrubber 1.
And falls into the drain tank 7. Also, dust in exhaust gas
It has also been removed with a jet of water.

The exhaust gas from which dust and water-soluble components have been removed through the inlet scrubber 1 is sent to the reactor 3. In the reactor 3, the exhaust gas 750 is discharged by the heater 4.
Thermal oxidation decomposition is performed by heating to about ° C. For example, SiH ₄ (silane) in exhaust gas is decomposed into SiO ₂ (silica) and water.

The exhaust gas that has passed through the reactor 3 is sent to an outlet scrubber 5. At the outlet scrubber 5, water is spouted from the shower nozzle 5 a to remove water-soluble components remaining in the exhaust gas sent from the reactor 3 and dust generated in the reactor 3, and further heat the reactor 3. The exhaust gas is cooled and discharged from the exhaust pipe 6.

[0009]

FIG. 5 is an explanatory diagram showing a conventional problem. At the inlet scrubber 1, S in the exhaust gas
The iH ₄ reacts with the water jetted from the shower nozzle 1a to generate SiO ₂ . Here, in the inlet scrubber 1, steam generated by jetting water from the shower nozzle 1a rises toward the intake pipe 2. In addition, since the inlet scrubber 1 has a prismatic shape while the intake pipe 2 has a cylindrical shape, the airflow tends to deteriorate near the connection between the inlet pipe 2 and the inlet scrubber 1. Further, since water is used in the inlet scrubber 1, the exhaust gas is cooled and the reactants are easily deposited. Therefore, there is a problem that the reactant 8 is deposited near the connection between the inlet scrubber 1 and the intake pipe 2.

When the reactant 8 accumulates in the vicinity of the connection between the inlet scrubber 1 and the intake pipe 2, the flow of exhaust gas from the intake pipe 2 to the inlet scrubber 1 deteriorates, and the pressure on the intake pipe 2 side becomes high. However, there is a problem that a differential pressure abnormality (interlock) occurs in which the pressure on the inlet scrubber 1 side becomes low.

[0011] When an abnormal pressure difference occurs, the exhaust gas cannot be sufficiently treated. Therefore, it is necessary to stop the operation of the apparatus and remove the reactant 8. In addition, there has been a problem in that the entire facility, which is a source of exhaust gas, must be stopped, and the number of setups for operating the facility increases. The present invention
An object of the present invention is to provide an exhaust gas treatment apparatus capable of suppressing the adhesion of a reactant near a connection between a pipe for supplying exhaust gas and a scrubber.

[0012]

An exhaust gas treatment apparatus according to the present invention is an exhaust gas treatment apparatus for supplying exhaust gas to a scrubber to remove harmful components, wherein the exhaust gas is connected to the scrubber at an inner surface of a pipe through which the exhaust gas passes. A nozzle having an ejection port for ejecting at least one of a gas and a liquid is provided near the connection between the scrubber and the pipe, facing the connection between the scrubber and the pipe.

In the exhaust gas treatment apparatus of the present invention, if N2 is ejected from the ejection port of the nozzle provided in the pipe through which the exhaust gas passes, N2 is ejected toward the connection between the pipe and the scrubber. . Accordingly, an airflow is generated along the inner surface of the pipe near the connection between the pipe and the scrubber to which the reactant is likely to adhere, and thus the adherence of the reactant is suppressed.

[0014]

FIG. 1 is a block diagram showing an embodiment of an exhaust gas treatment apparatus according to the present invention. The inlet scrubber 1 removes dust and water-soluble components in exhaust gas with water. For this reason, the inlet scrubber 1 is connected to an intake pipe 2 which is a pipe for sucking exhaust gas, and a shower nozzle 1a for jetting water is provided inside the inlet scrubber 1.

Here, the entrance scrubber 1 is provided with a window (not shown) for the purpose of inspecting the inside and the like, and thus has a prismatic shape such that the side surface is formed as a plane. In contrast, the intake pipe 2 has a cylindrical shape.

A nozzle 9 is provided inside the intake pipe 2. This nozzle 9 is provided in the vicinity of a connection between the intake pipe 2 and the inlet scrubber 1. FIG. 2 is an explanatory view showing the configuration of the nozzle 9, and FIG. 2A is a perspective view of a main part of the exhaust gas treatment device where the nozzle 9 is provided, as viewed obliquely from above.
FIG. 2B is a perspective view of a main part viewed from a lower oblique direction. In FIG. 2, the intake pipe 2 and the inlet scrubber 1 are shown by two-dot chain lines in order to display the nozzles 9 provided inside the intake pipe 2. FIG. 3 is a sectional view showing the configuration of the nozzle 9.

The nozzle 9 is composed of an ejection pipe 9a and an ejection port 9b. The discharge pipe 9a has a ring shape along the inner surface of the intake pipe 2, and is attached to the inner surface of the intake pipe 2 in a horizontal state in the vicinity of a connection portion between the intake pipe 2 and the inlet scrubber 1. It should be noted that a pipe with a small diameter whose height from the inner surface of the intake pipe 2 is kept low so as not to obstruct the flow of exhaust gas passing through the intake pipe 2 is used as the jetting pipe 9a.

An air flow adjusting plate 10 having a slope that rises gently from the inner surface of the intake pipe 2 is provided on the side of the jet pipe 9a facing upstream in the direction in which the exhaust gas flows, that is, on the upper side. As shown in FIG. 3, the airflow adjusting plate 10 may be formed integrally with the jetting pipe 9a by making the cross-sectional shape of the jetting pipe 9a substantially a water drop shape, or may be formed integrally with the jetting pipe 9a. May be provided separately.

The ejection pipe 9a is provided with an ejection port 9b facing downward. The ejection port 9b has a plurality of holes below the ejection pipe 9a, for example, one hole along the shape of the ejection pipe 9a.
It is formed by lining up and opening. The direction of ejection from each ejection port 9b is directed to the vicinity of the connection between the intake pipe 2 and the inlet scrubber 1. In addition, spout 9
b changes the number or the size of the hole according to, for example, the diameter of the intake pipe 2. In addition, the plurality of ejection ports 9b are
Instead of arranging them in columns, they may be arranged in a plurality of columns. Further, the ejection port 9b may have a slit shape along the shape of the ejection pipe 9a.

Returning to FIG. 1, a supply pipe 11 is connected to the ejection pipe 9a of the nozzle 9. Through the supply pipe 11, N ₂ (nitrogen gas) and H ₂ O (water) are selectively supplied to the ejection pipe 9 a of the nozzle 9.
Spout from b. The nozzle 9 is a jet pipe 9a of the ring-shaped, which is composed of a plurality of ejection ports 9b consisting pierced the jet pipe 9a, the N ₂ or water in the jet pipe 9a Since N ₂ or water is ejected from all the ejection ports 9b by supplying, only one supply pipe 11 needs to be connected to the ejection pipe 9a.

As supply means for selectively supplying N ₂ and water to the supply pipe 11, a pipe 12a connected to a supply source (not shown) for supplying N ₂ and a supply source (not shown) for supplying water are provided. Pipe 12b is connected. A flow meter 13 for adjusting the flow rate of N ₂ is provided in the pipe 12a.
with a is provided, the valve 14a for switching the supply / non-supply of the _{N 2} is provided. The pipe 12b is provided with a flow meter 13b for adjusting the flow rate of water and a valve 14b for switching supply / non-supply of water. These valves 14a and 14b are opened and closed is controlled by the timer 15, to supply / non-supply of _{N 2} and water by the time.

The inlet scrubber 1 is provided with a water outlet 16 at the top to wet the inner surface with water. Reactor 3
Oxidizes and decomposes a gas by heat. For this reason, a heater 4 is provided in the reactor 3 and heats the inside of the reactor 3 to, for example, about 750 ° C. The outlet scrubber 5 removes dust and cools exhaust gas with water. For this reason, the outlet scrubber 5 is provided therein with a shower nozzle 5a for ejecting water, and an exhaust pipe 6 serving as a pipe for exhausting the treated exhaust gas is connected to an upper portion thereof. ing.

The inlet scrubber 1 and the reactor 3 are connected at the lower part. The reactor 3 and the outlet scrubber 5 are connected at the lower part. A shower nozzle 1 is provided below the inlet scrubber 1, the reactor 3 and the outlet scrubber 5.
a, a drain tank 7 for storing water spouted from the shower nozzle 5a, removed dust, and the like. In addition,
Water and the like accumulated in the drain tank 7 are discharged to the outside through a discharge port (not shown).

Next, the operation of the exhaust gas treatment apparatus according to this embodiment will be described with reference to FIGS. First, N ₂ is ejected from the nozzle 9. That is, opening the valve 14a of the side for supplying the N _2, water by closing the valve 14b of the supply side, and supplies a N ₂ to jet pipe 9a of the nozzle 9 via the supply pipe 11. N ₂ supplied to the jet pipe 9a is ejected from the ejection port 9b. Since the ejection direction of the ejection port 9 b is downward, N ₂ is ejected along the inner surface of the intake pipe 2. Further, a plurality of ejection ports 9b because are provided side by side in a row along the jet pipe 9a of the ring-shaped, N ₂ is blown over the entire inner surface of the intake pipe 2 of cylindrical shape. Here, the N ₂ spouted from the spout 9 b extends over the entire inner surface of the intake pipe 2 at P from the position where the nozzle 9 of the intake pipe 2 is provided to the connection between the intake pipe 2 and the inlet scrubber 1. as flow, the flow rate of N ₂ is adjusted by the flow meter 13a.

From the intake pipe 2, SiH ₄ , NH ₃ , C ₂
Exhaust gas containing F ₆ , O _{2 and the} like is supplied. In the inlet scrubber 1, water is spouted from the shower nozzle 1 a to remove water-soluble components in the exhaust gas supplied from the intake pipe 2.
For example, NH ₃ (ammonia) in the exhaust gas is water-soluble, and is dissolved in water spouted from the shower nozzle 1 a at the inlet scrubber 1 and falls into the drain tank 7. Dust in the exhaust gas is also removed by jetting water.

In addition, at the inlet scrubber 1, S in the exhaust gas
iH ₄ (silane) reacts with water spouted from the shower nozzle 1a to generate SiO ₂ (silica). Here, in the inlet scrubber 1, steam generated by jetting water from the shower nozzle 1a rises toward the intake pipe 2. In addition, since the inlet scrubber 1 has a prismatic shape while the intake pipe 2 has a cylindrical shape, the airflow tends to deteriorate near the connection between the inlet pipe 2 and the inlet scrubber 1.

In the present embodiment, since N ₂ flows over the entire inner surface of the intake pipe 2 near the connection between the intake pipe 2 and the inlet scrubber 1, the reactant reacts with the intake pipe 2 and the inlet scrubber 1. Can be prevented from adhering to the connection part. Then, the reactant is dropped into the drain tank 7 by the flow of N ₂ and the water jetted from the shower nozzle 1a. In addition, since the airflow adjusting plate 10 having a slope that rises gently from the inner surface of the intake pipe 2 is provided above the ejection pipe 9 a of the nozzle 9, the nozzle 9 prevents the exhaust pipe 2 from obstructing the flow of exhaust gas. However, it also prevents the deposition of reactants on the nozzle 9.

Dust and water pass through the inlet scrubber 1
The exhaust gas from which the soluble components have been removed is sent to the reactor 3.
Be included. In the reactor 3, the exhaust gas is reduced to 75 by the heater 4.
Thermal oxidative decomposition is performed by heating to about 0 ° C. For example
SiH in exhaust gas₄Is SiO ₂And 2H₂Broken down into O
You.

The exhaust gas passing through the reactor 3 is sent to an outlet scrubber 5. At the outlet scrubber 5, water is spouted from the shower nozzle 5 a to remove water-soluble components remaining in the exhaust gas sent from the reactor 3 and dust generated in the reactor 3, and further heat the reactor 3. The exhaust gas is cooled and discharged from the exhaust pipe 6.

Here, a timer 15 is connected to the supply pipe 11.
Controlled by in e.g. day, 23.5 hours continuously passes the N _2. As a result, N2 is constantly ejected from the nozzle 9 for 23.5 hours, so that adhesion of the reactant to the intake pipe 2 can be suppressed. Further, since the constant N ₂ flows to the nozzle 9 from the supply pipe 11, it is possible to suppress the clogging of the ejection port 9b.

The remaining 0.5 hours are set by the timer 15
Control closed side of the valve 14a for supplying the _{N 2} by the,
By opening the valve 14b on the water supply side, water is supplied to the ejection pipe 9a of the nozzle 9 via the supply pipe 11. The water supplied to the ejection pipe 9a is ejected from the ejection port 9b over the entire inner surface of the cylindrical intake pipe 2.

Here, the water spouted from the spout 9b spreads over the entire inner surface of the intake pipe 2 from the position where the nozzle 9 of the intake pipe 2 is provided to the connection between the intake pipe 2 and the inlet scrubber 1. The flow rate of the water is adjusted by the flow meter 13b so that the water flows over. In this way, by flowing water from the nozzle 9, enabling washing of the reaction product also flowing N ₂ still attached. The time for flowing N ₂ and water can be set arbitrarily by setting the timer 15.

In the exhaust gas treatment apparatus of the present embodiment, the adhesion of the reactant to the vicinity of the connection between the inlet scrubber 1 and the intake pipe 2 is suppressed, so that the occurrence of abnormal pressure difference can be suppressed. Thereby, for example, what conventionally required maintenance once a week can be reduced once a month. Also, by flowing N ₂ and water into the intake pipe 2 near the connection between the intake pipe 2 and the inlet scrubber 1, removal of SiH ₄ and NH ₃ in the exhaust gas can be promoted,
The efficiency of removing these harmful components can be increased.

Further, in the present embodiment, the nozzle 9
A plurality of holes are made in the ring-shaped ejection pipe 9a.
The structure is provided with a jet port 9b, which is attached to the inner surface of the intake pipe 2.
Because it is attached, the simple structure, the entire inner surface of the intake pipe 2
Air flow and water flow, such as N ₂To create the flow of
Exhaust gas treatment equipment that can be produced at low cost and suppresses the adhesion of reactants
Is feasible. In this embodiment, the nozzle 9
To N₂And spout water, but N ₂In place of
The air is blown out to generate airflow on the inner surface of the intake pipe 2.
It may be good.

[0035]

As described above, the present invention is directed to the connection between the scrubber and the pipe near the connection between the scrubber and the pipe on the inner surface of the pipe through which the exhaust gas connected to the scrubber passes. An exhaust gas treatment apparatus provided with a nozzle having an ejection port for ejecting at least one of a gas and a liquid.

In this way, an air flow can be generated along the inner surface of the pipe near the connection between the pipe and the scrubber to which the reactant easily adheres, and the reactant can be generated near the connection between the pipe and the scrubber. Adhesion can be suppressed.

Therefore, occurrence of abnormal pressure difference between the pipe and the scrubber can be suppressed. Since the occurrence of the differential pressure abnormality is suppressed, the failure rate of the exhaust gas treatment device can be reduced and the safety can be improved.

Further, since the occurrence of the differential pressure abnormality is suppressed, the frequency of stopping the operation of the exhaust gas treatment device is reduced, whereby the equipment using the exhaust gas treatment device can be operated stably. Further, since the occurrence of the differential pressure abnormality is suppressed, the frequency of the maintenance is extended, and the request for work is shortened.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of an exhaust gas treatment apparatus of the present invention.

FIG. 2 is an explanatory diagram showing a configuration of a nozzle.

FIG. 3 is a cross-sectional view illustrating a configuration of a nozzle.

FIG. 4 is a configuration diagram of a conventional exhaust gas treatment device.

FIG. 5 is an explanatory diagram showing a conventional problem.

[Explanation of symbols]

1 ... entrance scrubber, 1a ... shower nozzle, 2
... intake pipe, 3 ... reactor, 4 ... heater, 5 ...
..Outlet scrubber, 5a ... shower nozzle, 6 ...
・ Exhaust pipe, 7 ・ ・ ・ Drain tank, 9 ・ ・ ・ Nozzle, 9
a ... ejection pipe, 9b ... ejection port, 10 ... air flow adjustment plate, 11 ... supply pipe, 12a ... pipe,
12b: piping, 13a: flow meter, 13b
... Flow meter, 14a ... Valve, 14b ...
・ Valve, 15 ・ ・ ・ Timer

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B01D 53/77 ZAB

Claims (6)

[Claims] 1. An exhaust gas treatment apparatus for supplying exhaust gas to a scrubber to remove harmful components, wherein an inner surface of a pipe through which exhaust gas is connected is connected to the scrubber.
An exhaust gas treatment apparatus, comprising: a nozzle having an ejection port for ejecting at least one of a gas and a liquid in the vicinity of the connection between the scrubber and the pipe, facing the connection between the scrubber and the pipe. 2. The exhaust gas treatment apparatus according to claim 1, wherein a slope rising from an inner surface of the pipe is provided on a side of the nozzle facing upstream in a direction in which the exhaust gas flows. 3. The nozzle comprises: an ejection pipe having a shape along an inner surface of the pipe; and an ejection port formed by drilling a plurality of holes in the ejection pipe according to the shape. Claim 1 characterized by the following:
An exhaust gas treatment device as described in the above. 4. A supply pipe for supplying nitrogen gas and water to the nozzle, and a supply means for selectively supplying nitrogen gas and water to the supply pipe. 2. The exhaust gas treatment device according to 1. 5. An exhaust gas treatment apparatus according to claim 4, wherein said supply means is provided with a timer for selectively switching the supply of nitrogen gas and water depending on time. 6. An exhaust gas treatment apparatus according to claim 4, wherein said supply means is provided with a flow meter for adjusting a flow rate of nitrogen gas and water.