JP2002296559A - Static electricity evaluation substrate for planar display element manufacturing device and static electricity evaluation method for planar display element manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent defects due to static electricity generated at the time of manufacturing a planar display element, to improve the display quality even for a large-sized, high definition and high image quality planar display element and to reduce costs by improving a manufacture yield. SOLUTION: A static electricity evaluation substrate 10 composed by enclosing a liquid crystal composition 18 in a gap surrounded by a sealing agent 17 between first and second transparent glass plates 11 and 12 composed by oppositely arranging alignment layers 14 and 16 in the almost same size as a liquid crystal display element to be actually manufactured is made to flow along the manufacturing process of a planar display element manufacturing device. The change of light transmissivity on the static electricity evaluation substrate 10 generated by the static electricity generated at the time of making it flow is observed, the generation condition of the static electricity in the manufacturing process is accurately recognized and appropriate measures against the static electricity are taken.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a flat display element such as a liquid crystal display element, and more particularly to a static evaluation board and a flat display element manufacturing apparatus for a flat display element manufacturing apparatus for examining a state of generation of static electricity in a manufacturing process. Regarding the evaluation method.

[0002]

2. Description of the Related Art A flat display element used in an image display device such as a computer terminal and provided with a light modulation layer such as liquid crystal or electroluminescence in a gap between display cells in which a pair of electrode substrates are arranged opposite to each other. In recent years, due to the demand for higher display capacity and display area as well as higher image quality and higher definition due to the improvement of the performance of computers and the like, the processing of wiring layers has been miniaturized in recent years, and the light modulation layer has been made thinner. ing.

On the other hand, in manufacturing a flat display element, in the manufacturing process, when the electrode substrate is separated from the stage, static electricity is easily generated between the flat display element manufacturing apparatus and the flat display element. In particular, when the wiring layer is finely processed, the influence of static electricity is large, and the wiring layer is destroyed due to short-circuit, causing point defects and linear defects, significantly lowering the display quality and consequently lowering the production yield. Cause. In addition, it is difficult to predict where static electricity is generated in the manufacturing process, and since the generation of static electricity varies greatly depending on the state of the manufacturing equipment and the flat display element, it is always necessary to investigate and understand the state of static electricity generation throughout the manufacturing equipment. It is important to:

For this reason, conventionally, a non-contact sensor is arranged at a required position of a flat panel display device manufacturing apparatus, and the state of generation of static electricity in the manufacturing process is monitored. Abnormal charging of the constituent members is monitored, and static elimination equipment is disposed at an abnormal location to take measures against static electricity, thereby improving the production yield.

[0005]

However, according to the conventional monitoring method for monitoring the generation of static electricity by using a non-contact sensor at a necessary location, the state of generation of static electricity in the vicinity of the monitor installation point can be determined. It has not been possible to monitor static electricity generation throughout a wide manufacturing process. Moreover, even at the point where the monitor is installed, it is not possible to grasp the state of generation of static electricity at the center of the flat display element away from the monitor due to the increase in the size of the flat display element,
Since accurate data over the entire surface of the flat panel display element cannot be obtained and effective static electricity countermeasures cannot be taken, the manufacturing yield of the flat panel display element has been reduced, which has hindered a reduction in manufacturing cost.

Accordingly, the present invention has been made to solve the above-mentioned problems, and accurately recognizes the state of generation of static electricity over the entire manufacturing process of a flat display element manufacturing apparatus and over the entire flat display element to take effective countermeasures against static electricity. By applying, to improve the display quality of the flat display element, and eventually to improve the manufacturing yield,
Further, it is intended to provide a static electricity evaluation board for a flat display element manufacturing apparatus and a static electricity evaluation method for a flat display element manufacturing apparatus, which grasp the state of static elimination and realize cost reduction by further improving productivity by more effective measures against static electricity. With the goal.

[0007]

In order to solve the above-mentioned problems, the present invention provides a flat display comprising a light modulation layer sealed in a gap between a pair of electrode substrates which have electrodes on at least one of the electrodes. A pair of transparent plates having substantially the same size as the element, an alignment film formed on the pair of transparent plates and subjected to an alignment treatment, and light sealed in a gap between the pair of transparent plates having the alignment films arranged to face each other. A modulation layer and a polarizing plate formed on the outer surfaces of the pair of transparent plates are provided.

According to another aspect of the present invention, there is provided a flat display device for manufacturing a flat display element in which a light modulating layer is sealed in a gap between a pair of electrode substrates having electrodes on at least one of the electrodes. In the static electricity evaluation method of the display device manufacturing apparatus, the light modulation layer is sealed in a gap between a pair of transparent plates having substantially the same size as the flat display element and having an alignment film formed by performing an alignment process, and A static electricity evaluation substrate having a polarizing plate formed on its outer surface is transported along the flat display element manufacturing process in the flat display element manufacturing apparatus, and a display state of the static electricity evaluation substrate is observed.

With such a configuration, the present invention observes the display state of the static electricity evaluation substrate actually circulated along the manufacturing process of the flat panel display device manufacturing apparatus, and, based on the result, accurately detects static electricity in the manufacturing process. An effective countermeasure against static electricity is recognized by recognizing the state of occurrence and the state of the static elimination equipment, thereby improving the display quality of the flat display element and the production yield thereof.

[0010]

FIG. 1 is a block diagram showing an embodiment of the present invention.
This will be described with reference to FIG. FIG. 1 shows a static electricity evaluation substrate 10, in which a first transparent glass plate 11 and a second transparent glass plate 12, which are transparent plates, are aligned with an alignment film 14, 1 through a spacer 13.
6 are opposed to each other, a liquid crystal composition 18 is sealed in a gap surrounded by a sealant 17, and first and second transparent glass plates 11 and 13 are respectively provided on outer surfaces of the first and second transparent glass plates 11 and 13.
Polarizing plates 20 and 21 are attached.

The static evaluation board 10 has a size of, for example, 400 × 500 mm, which is the same as the size of each liquid crystal display element manufactured by the flat display element manufacturing apparatus. All of the composition 18, the material, the spacer size, etc. are formed in substantially the same manner as the liquid crystal display element.

Next, a method for manufacturing the static evaluation board 10 will be described. On the surface of the first transparent glass plate 11 having a size of 400 × 500 mm, an alignment film 14 made of polyimide or the like similar to that used for a liquid crystal display element (not shown) is formed.
On the other hand, after forming a spacer 13 having the same size as that of the liquid crystal display element on the second transparent glass plate 12 by photolithography, an alignment film 16 is formed. Thereafter, the alignment films 14 and 16 are subjected to an alignment treatment by rubbing in the same manner as in a liquid crystal display element (not shown) for producing each, and a sealant 17 is applied to the peripheral edge of the first transparent glass plate 11, and then the first and second liquid crystal display elements are coated. The two transparent glass plates 11 and 12 are opposed to each other, and are bonded with a sealant 17.

Further, the first and second transparent glass plates 11, 1
After injecting a liquid crystal composition 18 similar to that of a liquid crystal display element (not shown) into a gap surrounded by the second sealant 17, sealing an inlet (not shown) and performing annealing for realignment, The first and second polarizing plates 20 and 21 are attached to the outer surfaces of the first and second transparent glass plates 11 and 12, respectively, to complete a normally white static evaluation board 10, for example.

The static evaluation board 10 thus constructed
Reacts with static electricity, and the liquid crystal molecules (not shown) in the liquid crystal composition 18 rise in the portion where the static electricity is generated. Therefore, in the normally white static evaluation board 10, when light is transmitted, the portion where the static electricity is generated is displayed in black. Therefore, by observing the light transmission status, the static electricity generation status can be grasped. If the static evaluation board is normally black, the portion where static electricity is generated is displayed white when light is transmitted.

Before actually carrying out the manufacturing process of the liquid crystal display element (not shown) in the flat display element manufacturing apparatus (not shown), first, the static electricity evaluation substrate 10 having the same size as the liquid crystal display element is used. Is actually flowed out according to the manufacturing process of the flat panel display device manufacturing apparatus. When the electrostatic evaluation substrate 10 is flown,
For example, at the rubbing positions of the alignment films 14 and 16, the surface of the electrostatic evaluation substrate 10 is rubbed or the like so as to approach the state of generating static electricity in the actual manufacturing process. As described above, when an operation such as rubbing the electrostatic evaluation substrate 10 while peeling the electrostatic evaluation substrate 10 or peeling off the electrostatic evaluation substrate 10 from the stage of the manufacturing apparatus is performed, the first or second transparent glass plate 11 or 12 is formed. Static electricity is generated, and an electric field is formed inside the static evaluation board 10.
Since no electrodes and the like are formed on the electrostatic evaluation board 10, the electric field is not immediately discharged, and the electric field formed inside the electrostatic evaluation board 10 stays at a place where static electricity is generated for a certain period of time. This causes the liquid crystal molecules to rise, thereby changing the light transmittance.

Therefore, while the electrostatic evaluation substrate 10 is being distributed, for example, every time the electrostatic evaluation substrate 10 is rubbed or peeled off from the stage in each manufacturing process, the light transmission state of the electrostatic evaluation substrate 10 is visually observed. Observation, such as accumulation of electric charge on the electrostatic evaluation substrate 10 in the manufacturing process and the state of discharge between the manufacturing apparatus and the electrostatic evaluation substrate 10, the state of generation of static electricity, and the state of static elimination by static elimination equipment such as an ionizer, etc. Figure out. Then, in accordance with the state of generation of static electricity obtained by visually observing the light transmission state of the electrostatic evaluation board 10, readjustment of the static elimination equipment installed in the manufacturing apparatus is performed, and appropriate static electricity measures are taken.

Thereafter, the production of the liquid crystal display element is actually started by the flat panel display element production apparatus. If a predetermined amount of manufacturing steps are performed during the actual manufacture of the liquid crystal display element, the static evaluation substrate 10 is flown again to the manufacturing apparatus, the state of generation of the static electricity is re-observed, and the deterioration of the ionizer or the like is checked. Grasp the necessary points for maintenance, etc. and take countermeasures against static electricity again.
Further, even when a liquid crystal display element having a different size is newly manufactured using the same flat display element manufacturing apparatus,
Before starting the manufacturing process, an electrostatic evaluation substrate having the same size as a liquid crystal display element to be newly manufactured is diverted, and countermeasures against static electricity are performed again.

As described above, the state of generation of static electricity in the flat panel display device manufacturing apparatus is observed using the electrostatic evaluation substrate 10, and appropriate measures are taken against static electricity according to the observation result. Almost no influence on the liquid crystal display element due to static electricity generated in the process was observed, and a good liquid crystal display element free of point defects and linear defects due to the destruction of the wiring layer was obtained. Without installing a sensor, the static evaluation substrate 10 that changes the light transmittance due to the generation of static electricity is flown onto a manufacturing apparatus, and only by observing the light transmission state, the generation of static electricity throughout the manufacturing process You can grasp the situation accurately. Further, regardless of the size of the liquid crystal display element, it is possible to accurately grasp the state of generation of static electricity over the entire surface. As a result, it is possible to take appropriate countermeasures against static electricity, and to prevent the wiring layer from being destroyed by the generation of static electricity at the time of manufacturing even a large, high-definition, high-quality liquid crystal display element. The display quality can be improved, and the production yield can be improved, and the cost can be reduced by improving the productivity.

It should be noted that the present invention is not limited to the above-described embodiment, but can be changed without departing from the spirit of the present invention. For example, the size of the electrostatic evaluation board is not limited. It suffices if the size of the display element is substantially the same.
Further, the light modulation layer sealed in the electrostatic evaluation substrate is not limited to the liquid crystal composition as long as it can change the display state at the place where static electricity is generated. Further, as the spacer of the electrostatic evaluation substrate, a spherical spacer may be sprayed, or the light modulation layer between the transparent plates may be sealed by a dropping method. Furthermore, observation of the electrostatic evaluation substrate is optional while the product is being flown on the manufacturing apparatus, or is taken out of the manufacturing apparatus, and is optional, as long as a reflection plate is attached outside the transparent plate. Alternatively, the reflected light may be observed.

[0020]

As described above, according to the present invention, an electrostatic evaluation substrate, whose display state changes due to the generation of static electricity, is flown along the manufacturing process on a flat display element manufacturing apparatus, and the display state is changed. Only by observing the whole process
Even in the case of a large flat display element, the state of generation of static electricity on the entire surface can be accurately grasped. Accordingly, appropriate static electricity countermeasures can be taken in the manufacturing process, and even a large-sized, high-definition, high-quality flat display element does not cause a failure due to the destruction of the wiring layer due to static electricity, thereby improving display quality. The cost can be reduced by improving the manufacturing yield.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view showing a part of an electrostatic evaluation board according to an embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Static evaluation board 11 ... 1st transparent glass plate 12 ... 2nd transparent glass plate 13 ... Spacer 14, 16 ... Alignment film 17 ... Sealant 18 ... Liquid crystal composition 20 ... 1st polarizing plate 21 ... 2nd Polarizer

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H088 FA11 FA17 FA24 FA30 MA20 2H092 JB79 NA27 NA30

Claims (5)

[Claims] 1. A pair of transparent plates having substantially the same size as a flat display element in which a light modulation layer is sealed in a gap between a pair of electrode substrates having electrodes on at least one of them and opposed to each other. An alignment film formed on a transparent plate and subjected to an alignment treatment; a light modulating layer sealed in a gap between the pair of transparent plates having the alignment film opposed to each other; formed on outer surfaces of the pair of transparent plates A static evaluation board for a flat panel display device manufacturing apparatus, comprising: a polarizing plate. 2. The static evaluation board according to claim 1, wherein the light modulation layer is a liquid crystal composition. 3. A static electricity evaluation method for a flat display element manufacturing apparatus for manufacturing a flat display element in which a light modulation layer is sealed in a gap between a pair of electrode substrates having electrodes on at least one of them and opposed to each other. A static electricity formed by enclosing a light modulation layer in a gap between a pair of transparent plates having an alignment film formed by performing an alignment process and having a polarizing plate formed on the outer surfaces of the pair of transparent plates. An electrostatic evaluation method for a flat display element manufacturing apparatus, comprising: transporting an evaluation substrate along a manufacturing process of the flat display element in the flat display element manufacturing apparatus, and observing a display state of the electrostatic evaluation substrate. 4. The method according to claim 3, wherein the observation of the display state of the static evaluation board is performed by observing the light transmission state of the static evaluation board. . 5. The method according to claim 3, wherein the light modulation layer is a liquid crystal composition.