JP2002296295A5 - - Google Patents
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- Publication number
- JP2002296295A5 JP2002296295A5 JP2001137927A JP2001137927A JP2002296295A5 JP 2002296295 A5 JP2002296295 A5 JP 2002296295A5 JP 2001137927 A JP2001137927 A JP 2001137927A JP 2001137927 A JP2001137927 A JP 2001137927A JP 2002296295 A5 JP2002296295 A5 JP 2002296295A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001137927A JP2002296295A (ja) | 2001-03-29 | 2001-03-29 | 接触子組立体の接触子保持構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001137927A JP2002296295A (ja) | 2001-03-29 | 2001-03-29 | 接触子組立体の接触子保持構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002296295A JP2002296295A (ja) | 2002-10-09 |
| JP2002296295A5 true JP2002296295A5 (ja) | 2008-06-19 |
Family
ID=18984942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001137927A Pending JP2002296295A (ja) | 2001-03-29 | 2001-03-29 | 接触子組立体の接触子保持構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002296295A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5077736B2 (ja) * | 2005-09-19 | 2012-11-21 | 軍生 木本 | 接触子組立体及びこれを用いたｌｓｉチップ検査装置 |
| TWI398640B (zh) | 2005-09-19 | 2013-06-11 | Gunsei Kimoto | Contact assembly and its LSI wafer inspection device |
| JP4974021B2 (ja) * | 2006-02-19 | 2012-07-11 | 軍生 木本 | プローブ組立体 |
| JP4974022B2 (ja) * | 2006-02-22 | 2012-07-11 | 軍生 木本 | 格子状配列プローブ組立体 |
| JP5077735B2 (ja) * | 2006-08-07 | 2012-11-21 | 軍生 木本 | 複数梁合成型接触子組立 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH043263Y2 (ja) * | 1985-08-05 | 1992-02-03 | ||
| JPH0650991A (ja) * | 1992-07-31 | 1994-02-25 | Toho Denshi Kk | プローブ装置 |
| JPH11133060A (ja) * | 1997-10-31 | 1999-05-21 | Tani Denki Kogyo Kk | テスト用端子 |
| EP0915344B1 (de) * | 1997-11-05 | 2004-02-25 | Feinmetall GmbH | Prüfkopf für Mikrostrukturen mit Schnittstelle |
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2001
- 2001-03-29 JP JP2001137927A patent/JP2002296295A/ja active Pending