JP2002246451A5 - - Google Patents
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- JP2002246451A5 JP2002246451A5 JP2001134122A JP2001134122A JP2002246451A5 JP 2002246451 A5 JP2002246451 A5 JP 2002246451A5 JP 2001134122 A JP2001134122 A JP 2001134122A JP 2001134122 A JP2001134122 A JP 2001134122A JP 2002246451 A5 JP2002246451 A5 JP 2002246451A5
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Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001134122A JP3602067B2 (ja) | 2000-12-11 | 2001-05-01 | 静電チャック |
| US10/006,657 US6678143B2 (en) | 2000-12-11 | 2001-12-10 | Electrostatic chuck and method of manufacturing the same |
| KR1020010077914A KR20020046214A (ko) | 2000-12-11 | 2001-12-10 | 정전척 및 그 제조방법 |
| EP01310328A EP1220311B1 (en) | 2000-12-11 | 2001-12-11 | Electrostatic chuck and method of manufacturing the same |
| DE60126576T DE60126576T2 (de) | 2000-12-11 | 2001-12-11 | Elektrostatische Spannvorrichtung und Verfahren zur Herstellung derselben |
| TW090130670A TW516155B (en) | 2000-12-11 | 2001-12-11 | Electrostatic chuck and the manufacturing method thereof |
| AT01310328T ATE354177T1 (de) | 2000-12-11 | 2001-12-11 | Elektrostatische haltevorrichtung und methode zur herstellung derselben |
| US10/198,052 US20030107865A1 (en) | 2000-12-11 | 2002-07-19 | Wafer handling apparatus and method of manufacturing the same |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000376599 | 2000-12-11 | ||
| JP2000-376599 | 2000-12-11 | ||
| JP2001134122A JP3602067B2 (ja) | 2000-12-11 | 2001-05-01 | 静電チャック |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002246451A JP2002246451A (ja) | 2002-08-30 |
| JP2002246451A5 true JP2002246451A5 (es) | 2004-09-02 |
| JP3602067B2 JP3602067B2 (ja) | 2004-12-15 |
Family
ID=26605626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001134122A Expired - Fee Related JP3602067B2 (ja) | 2000-12-11 | 2001-05-01 | 静電チャック |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3602067B2 (es) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4654153B2 (ja) | 2006-04-13 | 2011-03-16 | 信越化学工業株式会社 | 加熱素子 |
| JP4654152B2 (ja) * | 2006-04-13 | 2011-03-16 | 信越化学工業株式会社 | 加熱素子 |
| JP4654151B2 (ja) * | 2006-04-13 | 2011-03-16 | 信越化学工業株式会社 | 加熱素子 |
| CN111095522A (zh) * | 2017-10-09 | 2020-05-01 | 应用材料公司 | 用于无损衬底处理的静电吸盘 |
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2001
- 2001-05-01 JP JP2001134122A patent/JP3602067B2/ja not_active Expired - Fee Related