JP2002246361A5 - - Google Patents

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Publication number
JP2002246361A5
JP2002246361A5 JP2001378543A JP2001378543A JP2002246361A5 JP 2002246361 A5 JP2002246361 A5 JP 2002246361A5 JP 2001378543 A JP2001378543 A JP 2001378543A JP 2001378543 A JP2001378543 A JP 2001378543A JP 2002246361 A5 JP2002246361 A5 JP 2002246361A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001378543A
Other languages
Japanese (ja)
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JP3992488B2 (ja
JP2002246361A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001378543A priority Critical patent/JP3992488B2/ja
Priority claimed from JP2001378543A external-priority patent/JP3992488B2/ja
Publication of JP2002246361A publication Critical patent/JP2002246361A/ja
Publication of JP2002246361A5 publication Critical patent/JP2002246361A5/ja
Application granted granted Critical
Publication of JP3992488B2 publication Critical patent/JP3992488B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001378543A 2000-12-15 2001-12-12 液処理装置および液処理方法 Expired - Fee Related JP3992488B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001378543A JP3992488B2 (ja) 2000-12-15 2001-12-12 液処理装置および液処理方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000381716 2000-12-15
JP2000-381716 2000-12-15
JP2001378543A JP3992488B2 (ja) 2000-12-15 2001-12-12 液処理装置および液処理方法

Publications (3)

Publication Number Publication Date
JP2002246361A JP2002246361A (ja) 2002-08-30
JP2002246361A5 true JP2002246361A5 (cg-RX-API-DMAC10.html) 2005-06-23
JP3992488B2 JP3992488B2 (ja) 2007-10-17

Family

ID=26605892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001378543A Expired - Fee Related JP3992488B2 (ja) 2000-12-15 2001-12-12 液処理装置および液処理方法

Country Status (1)

Country Link
JP (1) JP3992488B2 (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4907310B2 (ja) 2006-11-24 2012-03-28 東京エレクトロン株式会社 処理装置、処理方法及び記録媒体
JP5440441B2 (ja) * 2010-08-12 2014-03-12 東京エレクトロン株式会社 液処理装置
JP5800705B2 (ja) * 2011-12-22 2015-10-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及び基板処理方法
JP6876417B2 (ja) * 2016-12-02 2021-05-26 東京エレクトロン株式会社 基板処理装置の洗浄方法および基板処理装置の洗浄システム
JP7277137B2 (ja) * 2018-12-28 2023-05-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、および搬送モジュール

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