JP2002246283A5 - - Google Patents

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Publication number
JP2002246283A5
JP2002246283A5 JP2001036666A JP2001036666A JP2002246283A5 JP 2002246283 A5 JP2002246283 A5 JP 2002246283A5 JP 2001036666 A JP2001036666 A JP 2001036666A JP 2001036666 A JP2001036666 A JP 2001036666A JP 2002246283 A5 JP2002246283 A5 JP 2002246283A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001036666A
Other languages
Japanese (ja)
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JP4585702B2 (ja
JP2002246283A (ja
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Publication date
Application filed filed Critical
Priority to JP2001036666A priority Critical patent/JP4585702B2/ja
Priority claimed from JP2001036666A external-priority patent/JP4585702B2/ja
Publication of JP2002246283A publication Critical patent/JP2002246283A/ja
Publication of JP2002246283A5 publication Critical patent/JP2002246283A5/ja
Application granted granted Critical
Publication of JP4585702B2 publication Critical patent/JP4585702B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001036666A 2001-02-14 2001-02-14 露光装置 Expired - Fee Related JP4585702B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001036666A JP4585702B2 (ja) 2001-02-14 2001-02-14 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001036666A JP4585702B2 (ja) 2001-02-14 2001-02-14 露光装置

Publications (3)

Publication Number Publication Date
JP2002246283A JP2002246283A (ja) 2002-08-30
JP2002246283A5 true JP2002246283A5 (enrdf_load_stackoverflow) 2008-03-27
JP4585702B2 JP4585702B2 (ja) 2010-11-24

Family

ID=18899913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001036666A Expired - Fee Related JP4585702B2 (ja) 2001-02-14 2001-02-14 露光装置

Country Status (1)

Country Link
JP (1) JP4585702B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4295490B2 (ja) * 2002-11-15 2009-07-15 東京エレクトロン株式会社 処理装置並びに処理装置用のチラー制御方法及びチラー制御装置
TWI311691B (en) * 2003-10-30 2009-07-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
DE102017114216A1 (de) 2017-06-27 2018-04-19 Asml Netherlands B.V. Anordnung zur Kontaminationsreduzierung in einem optischen System, insbesondere in einer mikrolithographischen Projektionsbelichtungsanlage

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3174863B2 (ja) * 1991-07-15 2001-06-11 株式会社ニコン 露光方法及びリソグラフィシステム
JP3084332B2 (ja) * 1993-01-19 2000-09-04 キヤノン株式会社 露光装置
JPH10242029A (ja) * 1997-02-27 1998-09-11 Canon Inc 露光装置
JP4181647B2 (ja) * 1997-04-15 2008-11-19 キヤノン株式会社 露光方法
WO1998048452A1 (fr) * 1997-04-18 1998-10-29 Nikon Corporation Procede et dispositif de commande de l'exposition, procede et dispositif d'exposition, et procede de fabrication dudit dispositif
JP3072277B2 (ja) * 1997-09-19 2000-07-31 キヤノン株式会社 露光装置
JPH11283903A (ja) * 1998-03-30 1999-10-15 Nikon Corp 投影光学系検査装置及び同装置を備えた投影露光装置
JPH11219902A (ja) * 1997-11-27 1999-08-10 Nikon Corp 露光装置及びデバイス製造装置
JP2000133583A (ja) * 1998-10-27 2000-05-12 Canon Inc 露光装置およびデバイス製造方法
JP3832984B2 (ja) * 1998-10-27 2006-10-11 キヤノン株式会社 露光装置およびデバイス製造方法
JP3327234B2 (ja) * 1998-12-18 2002-09-24 株式会社ニコン デバイス製造支援装置、デバイス製造システム、及びデバイス製造方法
JP2001015400A (ja) * 1999-06-25 2001-01-19 Nikon Corp 露光方法とこれを用いたデバイスの製造方法、および露光装置とこれを用いたデバイスの製造装置

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