JP2002240883A5 - - Google Patents
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- Publication number
- JP2002240883A5 JP2002240883A5 JP2001040877A JP2001040877A JP2002240883A5 JP 2002240883 A5 JP2002240883 A5 JP 2002240883A5 JP 2001040877 A JP2001040877 A JP 2001040877A JP 2001040877 A JP2001040877 A JP 2001040877A JP 2002240883 A5 JP2002240883 A5 JP 2002240883A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001040877A JP4562930B2 (ja) | 2001-02-16 | 2001-02-16 | ダイシングウェーハ収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001040877A JP4562930B2 (ja) | 2001-02-16 | 2001-02-16 | ダイシングウェーハ収納容器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002240883A JP2002240883A (ja) | 2002-08-28 |
| JP2002240883A5 true JP2002240883A5 (enExample) | 2007-12-20 |
| JP4562930B2 JP4562930B2 (ja) | 2010-10-13 |
Family
ID=18903393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001040877A Expired - Lifetime JP4562930B2 (ja) | 2001-02-16 | 2001-02-16 | ダイシングウェーハ収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4562930B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006282278A (ja) | 2005-03-10 | 2006-10-19 | Epson Toyocom Corp | ウェハー用梱包体 |
| JP2009076646A (ja) * | 2007-09-20 | 2009-04-09 | Shin Etsu Polymer Co Ltd | 基板保持具 |
| CN103681418A (zh) * | 2012-09-25 | 2014-03-26 | 昆山英博尔电子科技有限公司 | 一种十二寸晶圆框架 |
| US9666468B2 (en) | 2013-02-11 | 2017-05-30 | Achilles Corporation | Tray for a wafer with tape frame |
| CN107004627A (zh) | 2014-11-27 | 2017-08-01 | 阿基里斯株式会社 | 环形间隔件 |
| JP7032086B2 (ja) * | 2017-09-15 | 2022-03-08 | アキレス株式会社 | 板状物搬送容器 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2733674B2 (ja) * | 1988-12-29 | 1998-03-30 | 株式会社ディスコ | ウエーハ塔載フレームのプリアライメント方法 |
| JPH08207986A (ja) * | 1994-12-07 | 1996-08-13 | Nitto Denko Corp | 半導体ウエハの運搬容器 |
| JP3472685B2 (ja) * | 1997-05-28 | 2003-12-02 | アキレス株式会社 | 半導体ウェハ収納容器 |
| JP2001007056A (ja) * | 1999-06-17 | 2001-01-12 | Shin Etsu Polymer Co Ltd | ウェーハフレーム |
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2001
- 2001-02-16 JP JP2001040877A patent/JP4562930B2/ja not_active Expired - Lifetime