JP2002240883A5 - - Google Patents

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Publication number
JP2002240883A5
JP2002240883A5 JP2001040877A JP2001040877A JP2002240883A5 JP 2002240883 A5 JP2002240883 A5 JP 2002240883A5 JP 2001040877 A JP2001040877 A JP 2001040877A JP 2001040877 A JP2001040877 A JP 2001040877A JP 2002240883 A5 JP2002240883 A5 JP 2002240883A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001040877A
Other languages
Japanese (ja)
Other versions
JP2002240883A (ja
JP4562930B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001040877A priority Critical patent/JP4562930B2/ja
Priority claimed from JP2001040877A external-priority patent/JP4562930B2/ja
Publication of JP2002240883A publication Critical patent/JP2002240883A/ja
Publication of JP2002240883A5 publication Critical patent/JP2002240883A5/ja
Application granted granted Critical
Publication of JP4562930B2 publication Critical patent/JP4562930B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2001040877A 2001-02-16 2001-02-16 ダイシングウェーハ収納容器 Expired - Lifetime JP4562930B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001040877A JP4562930B2 (ja) 2001-02-16 2001-02-16 ダイシングウェーハ収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001040877A JP4562930B2 (ja) 2001-02-16 2001-02-16 ダイシングウェーハ収納容器

Publications (3)

Publication Number Publication Date
JP2002240883A JP2002240883A (ja) 2002-08-28
JP2002240883A5 true JP2002240883A5 (cg-RX-API-DMAC10.html) 2007-12-20
JP4562930B2 JP4562930B2 (ja) 2010-10-13

Family

ID=18903393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001040877A Expired - Lifetime JP4562930B2 (ja) 2001-02-16 2001-02-16 ダイシングウェーハ収納容器

Country Status (1)

Country Link
JP (1) JP4562930B2 (cg-RX-API-DMAC10.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006282278A (ja) 2005-03-10 2006-10-19 Epson Toyocom Corp ウェハー用梱包体
JP2009076646A (ja) * 2007-09-20 2009-04-09 Shin Etsu Polymer Co Ltd 基板保持具
CN103681418A (zh) * 2012-09-25 2014-03-26 昆山英博尔电子科技有限公司 一种十二寸晶圆框架
SG11201505757VA (en) 2013-02-11 2015-09-29 Achilles Corp A tray for a wafer with tape frame
JP6401293B2 (ja) 2014-11-27 2018-10-10 アキレス株式会社 リングスペーサー
JP7032086B2 (ja) * 2017-09-15 2022-03-08 アキレス株式会社 板状物搬送容器
US12159799B2 (en) * 2022-03-30 2024-12-03 Achilles Corporation Container for transporting semiconductor wafer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2733674B2 (ja) * 1988-12-29 1998-03-30 株式会社ディスコ ウエーハ塔載フレームのプリアライメント方法
JPH08207986A (ja) * 1994-12-07 1996-08-13 Nitto Denko Corp 半導体ウエハの運搬容器
JP3472685B2 (ja) * 1997-05-28 2003-12-02 アキレス株式会社 半導体ウェハ収納容器
JP2001007056A (ja) * 1999-06-17 2001-01-12 Shin Etsu Polymer Co Ltd ウェーハフレーム

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