JP2002216640A - Gas discharge display device and method of manufacturing the same - Google Patents

Abstract

(57) [Summary] [Problem] A gas discharge that enables a trapezoidal electrode pattern to be formed uniformly and without generating defects, etc. in a process of forming an electrode pattern, thereby enabling high-quality display. A display device and a method for manufacturing the same are provided. SOLUTION: By exposing an electrode layer having photosensitivity from the back side of a glass substrate structure, or using two or more electrode layers, using a first electrode pattern as a light shielding pattern, It can be easily formed by performing self-alignment exposure from the side.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas discharge display device used for a display device or the like and a method of manufacturing the same, particularly to a step of forming an electrode.

[0002]

2. Description of the Related Art In recent years, a typical plasma display panel of a gas discharge display device which has attracted attention as a gas discharge display device suitable for a thin type has, for example, a structure shown in FIG. This plasma display panel includes a front substrate 300 and a rear substrate 301 arranged to face each other. On front substrate 300, display electrodes 302 and 303, light-shielding pattern 311, dielectric layer 304, and M
The gO dielectric protection layer 305 is formed in order. An address electrode 306 and a dielectric layer 307 are formed on the rear substrate 301, and a partition 308 is further formed thereon. Then, a phosphor layer 309 is applied to the side surface of the partition wall 308.

[0003] Actually, the front substrate 300 and the rear substrate 3
01 denotes an address electrode 306 and display electrodes 302 and 303.
The light-shielding pattern 311 is arranged so as to face each other so that the longitudinal directions thereof are orthogonal to each other. In FIG. 7, for convenience, the front substrate is shown rotated by 90 ° with respect to the rear substrate.

A discharge gas 310 (for example, a mixed gas of Ne—Xe) is provided between the front substrate 300 and the rear substrate 301.
From 400 Torr to 600 Torr (53.2 kPa
７９79.8 kPa). By discharging the discharge gas 310 between the display electrodes 302 and 303 to generate ultraviolet rays and irradiating the ultraviolet rays to the phosphor layer 309, image display including color display can be performed.

For example, as shown in FIG. 1, a method for forming the electrodes 302 and 303 on the front substrate 300 is to print a photosensitive paste as a display electrode material over the entire display area of the glass substrate 400 by a screen printing method or the like. After drying, the electrode layer 401 is formed. Next, a photomask 402 is disposed on the side of the glass substrate 400 on which the electrode layer is formed, and is exposed and developed to form a strip-shaped electrode pattern 403.

[0006]

However, the conventional electrode pattern has a problem in the forming process. In particular, when the display electrodes 302 and 303 are formed on the front substrate 300, in the conventional method, as shown in FIG. 4, a difference occurs in the exposure amount between the upper layer portion and the lower layer portion of the electrode layer. As a result, the width of the upper portion is likely to be wider than that of the above. As a result, the end of the electrode jumps up in a curl shape due to shrinkage stress during firing of the electrode, causing the dielectric layer to be destroyed during discharge driving. Furthermore, when forming the dielectric layer after firing the electrode, bubbles are likely to be generated at the bottom edge of the electrode, which also causes the dielectric to be broken during discharge driving as in the previous case.

Further, since the photomask is arranged directly on the surface of the electrode layer at the time of exposure, the electrode layer material adheres or scratches the photomask, thereby causing a defect in the electrode pattern and causing a reduction in yield. Had become.

In the case of an electrode layer composed of two or more layers,
After forming the second electrode layer by photolithography using a photosensitive electrode material or the like, the photomask is adjusted so that the position of the second electrode pattern is located at the position of the first electrode pattern. It is not always at the intermediate position, and there have been cases where it is difficult to achieve uniform in-plane alignment due to misalignment of the mask, shrinkage of the substrate during firing of the first layer electrode, and the like.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and realizes a gas discharge display device capable of forming high-quality display by forming display electrodes uniformly and without generating defects or the like. The purpose is to do.

[0010]

According to the present invention, when an electrode is formed on a glass substrate, light is irradiated from the back side of the glass substrate structure to form a trapezoidal electrode having at least a top width smaller than a bottom width. It is characterized by forming.

In the case where the number of electrode layers is two or more, after forming the first layer electrode pattern, the second and subsequent electrode layers are subjected to a photolithography step including a self-alignment exposure process using at least the first layer electrode pattern for light shielding. The electrode pattern is formed.

Further, the self-alignment exposure processing includes:
Light is emitted from the back side of the substrate structure having the first-layer electrode.

In one embodiment, a pair of substrates includes:
An electrode, a protective layer, a phosphor layer and a partition disposed between the pair of substrates; and a partition, wherein the partition is disposed between the pair of substrates, and the discharge space includes a gas medium. Is enclosed, the ultraviolet light generated by the discharge of the gas medium is converted into visible light upon irradiation of the phosphor layer,
It emits light by this.

After firing the first-layer electrode pattern,
Forming and firing the second and subsequent electrode patterns, or
The first electrode pattern and the second and subsequent electrode patterns are simultaneously fired.

[0015]

FIG. 6 shows an AC according to an embodiment.
FIG. 2 is a partial cross-sectional perspective view showing a main configuration of a surface discharge type PDP. In the drawing, the z direction is the thickness direction of the PDP, and the xy plane is P
This corresponds to a plane parallel to the DP plane. As shown in this figure, the present PDP has a front panel 10 with main surfaces facing each other.
1 and a back plate 201.

Front plate glass 1 serving as a substrate of front plate 101
02, a plurality of pairs of transparent electrodes 103 are arranged on one side thereof with the x direction as a longitudinal direction. Further, the transparent electrode 103
A bus electrode 104, which is sufficiently narrower than the transparent electrode 103 and has excellent conductivity, is laminated on the substrate. This transparent electrode 10
3 and the display electrode 107 that is subjected to surface discharge with the bus electrode 104
Works as Then, a light-shielding pattern 108 is provided between the adjacent bus electrodes 104. This light shielding pattern 108 is provided for the purpose of hiding the non-light emitting whitish phosphor layer 207. The front glass plate 102 on which the display electrodes 107 and the light-shielding patterns 108 are disposed is coated with a dielectric layer 105 over the entire glass surface, and the dielectric layer 105 is coated with a protective layer 106.

Back plate glass 2 serving as a substrate of back plate 201
02, a plurality of address electrodes 203 are arranged on one side thereof in a stripe shape with the y-direction as a longitudinal direction, and a dielectric layer 204 is formed on the back plate glass 20 on which the address electrodes 203 are arranged.
2 is coated over the entire surface. This dielectric layer 204
On the upper side, a partition wall 205 is provided in accordance with the interval between the adjacent address electrodes 203. A phosphor layer 207 corresponding to one of RGB is formed on the surface of the adjacent partition wall 205 and the dielectric layer 204 therebetween.

The front plate 101 and the rear plate 201 having such a configuration are arranged so that the address electrodes 203 and the display electrodes 107 face each other so that the longitudinal directions thereof are orthogonal to each other. The peripheral part is adhered and sealed with sealing glass. And the double-sided boards 101, 201
During this time, a discharge gas (filled gas) composed of a rare gas component such as He, Xe, Ne, etc.
It is sealed at a pressure of about 6.5 to 79.8 kPa). As a result, the space formed between the adjacent partition walls 205 becomes the discharge space 208, and the pair of adjacent display electrodes 1 is formed.
The area where 07 and one address electrode 203 intersect with the discharge space 208 interposed therebetween is a cell for image display.

At the time of driving the PDP, in each cell, the address electrode 203 and the display electrode 107, and the pair of display electrodes 1
07 generate short-wavelength ultraviolet rays (wavelength of about 14).
7 nm), the phosphor layer 207 emits light, and an image is displayed. Here, the main feature of the PDP of the present invention and the method of manufacturing the PDP relates to at least the formation of the partition wall 205 and the dielectric layer 105.

Next, a method of manufacturing the present PDP will be specifically described.

(Method of Manufacturing PDP) (1) Manufacture of Back Plate 201 On a surface of a back plate glass 202 made of soda glass having a thickness of about 2.6 mm, a conductive material containing silver as a main component is screen-printed. Is applied in stripes at regular intervals to form address electrodes 203 having a thickness of about 5 to 10 μm. In order to produce a 40-inch high-definition television as a PDP manufactured here, the interval between two adjacent address electrodes 203 is set to about 0.2 mm or less.

Subsequently, a lead-based glass paste is coated and baked over the entire surface of the rear plate glass 202 on which the address electrodes 203 are formed, thereby forming a dielectric layer 204 having a thickness of about 20 to 30 μm.

Further, a paste-like partition wall material containing lead-based glass as a main component and alumina powder added as an aggregate is applied to the dielectric layer 204 by a coating method using a die coat.
Is formed thereon, and a partition having a predetermined shape is formed by using a sand blast method. After firing, a partition 205 having a height of about 100 to 150 μm is formed. The space between the partition walls manufactured here is set to about 0.36 mm or less.

Subsequently, the red (R), phosphor, green (G) phosphor, and blue (B) phosphor are provided on the wall surface of the partition 205 and the surface of the dielectric layer 204 exposed between the adjacent partitions 205. Apply phosphor ink containing any of the bodies. Thereafter, the phosphor ink is dried and fired to form the phosphor layers 207 of each color.

Here, examples of phosphor materials generally used for PDPs are listed below.

Red phosphor: (Y _x Gd ₁ -x) BO ₃ : Eu Green phosphor: Zn ₂ SiO ₄ : Mn Blue phosphor: BaMgAl ₁₀ O ₁₇ : Eu ³⁺ Each phosphor material has an average particle diameter of about A 3 μm powder was used. There are several methods of applying the phosphor ink. Here, a method of discharging the phosphor ink while forming a meniscus (crosslinking by surface tension) from an extremely fine nozzle, which is called a meniscus method, is used. This method is advantageous for uniformly applying the phosphor ink to a target area.

After applying the phosphor ink, a maximum temperature of about 5
The phosphor layer 207 is formed by baking the profile at 20 ° C. for 2 hours.

Thus, the back plate 201 is completed.

(2) Fabrication of Front Plate 101 On the surface of front plate glass 102 made of soda glass having a thickness of about 2.8 mm, a thickness of about 3000 is formed using a conductive material such as ITO (Indium Tin Oxide) or SnO _2.
Angstrom transparent electrodes 103 are formed in parallel.
Further, a bus electrode 104 is laminated on the transparent electrode 103 using a photosensitive silver paste to form a display electrode 10.
7 is assumed. Known methods such as a screen printing method and a photolithography method can be applied to these electrodes. The step of forming the bus electrode 104 includes the features of the manufacturing method of the present invention.

(Embodiment 1) (a) First step: electrode layer printing / drying formation step, (b) second step: electrode layer exposure step, and (c) third step: development step. It will be described sequentially. FIGS. 2A, 2B, and 2C are panel cross-sectional views showing states of a first step, a second step, and a third step, respectively.

(A) First Step: Electrode Layer Printing / Drying Forming Step Using a mask for screen printing, a photosensitive silver paste containing lead-based frit glass is used to cover the entire surface of the already formed transparent electrode pattern. Print on The printed film thickness at this time is set by correcting the shrinkage so that the film thickness after firing is 2 to 5 μm. After printing, the electrode layer 4 was dried using a predetermined temperature profile in which the peak temperature was set at 130 ° C.
01 is formed.

(B) Second Step: Electrode Layer Exposure Step Next, a photomask 402 having an electrode pattern is arranged on the back side of the front glass substrate 400 on which the electrode layer 401 is formed, and ultraviolet (UV) light is applied to the entire surface. Exposure is performed by irradiation. In this embodiment, the exposure condition is set to 600 mmJ /
It was carried out in cm ^2.

(C) Third Step: Developing Step Next, the electrode layer 401 which has been subjected to the exposure treatment is developed and removed using a 5% aqueous solution of sodium carbonate in an unexposed portion. Then, it is washed with pure water and dried.

In this manner, the trapezoidal electrode 403 having a narrower top width than the bottom width can be formed uniformly and without any defects or the like.

(Embodiment 2) (a) First step: First electrode layer printing / drying forming step,
(B) 2nd step: 1st electrode layer exposure step, (c) 3rd step: development step, (d) 4th step: 2nd electrode layer printing / dry formation step, (e) 5th step: A second electrode layer exposure step,
(F) Sixth step: The developing step will be described sequentially. FIG.
(A), (b), (c), (d), (e), and (f) are a first step, a second step, a third step, a fourth step, and a fifth step, respectively.
It is a panel sectional view showing signs of a process and the 6th process.

(A) First Step: First Electrode Layer Printing / Drying Forming Step A photosensitive paste containing black lead-based frit glass is formed using a mask for screen printing to form a transparent paste. The electrode is printed on the entire surface of the electrode pattern. The printing film thickness at this time is set by correcting the shrinkage so that the film thickness becomes 2 μm after firing. After printing, set the peak temperature to 13
By drying using a predetermined temperature profile set to 0 ° C., a first electrode layer 401 is formed.

(B) Second Step: First Electrode Layer Exposure Step Next, a photomask 402 having an electrode pattern is arranged on the back side of the front glass substrate 400 on which the electrode layer 401 is formed, and ultraviolet (UV) light is applied. Is exposed to the entire surface to perform an exposure process. In this embodiment, the exposure condition is set to 600 mmJ /
It was carried out in cm ^2.

(C) Third Step: Developing Step Next, the electrode layer 401 subjected to the exposure treatment is developed and removed by using a 5% aqueous solution of sodium carbonate in an unexposed portion of the electrode layer. Then, it is washed with pure water and dried.

(D) Fourth Step: Printing / Drying Forming Step of Second Electrode Layer A photosensitive silver paste containing lead-based frit glass is formed by using a screen printing mask to form a silver paste.
Printing is performed on the entire surface of the layer electrode pattern 403. The printed film thickness at this time is set by correcting the shrinkage so that the film thickness after firing is 2 to 5 μm. After printing, set the peak temperature to 130
Dry using a predetermined temperature profile set at ℃,
A second electrode layer 404 is formed.

(E) Fifth Step: Second Electrode Layer Exposure Step Next, the front glass substrate 40 on which the second electrode layer 404 is formed
An exposure process is performed by irradiating the entire surface with ultraviolet rays (UV light) from the back side of the light emitting element. In this embodiment, the exposure condition is set to 600
The measurement was performed at mmJ / cm ² .

(F) Sixth Step: Developing Step Next, the exposed second electrode layer 404 is developed and removed using a 5% aqueous solution of sodium carbonate. Then, it is washed with pure water and dried.

In this manner, the trapezoidal electrode 405 having a narrower top width than the bottom width can be formed uniformly and without any defects. Also,
The first electrode layer and the second electrode layer can be formed on the same pattern without causing positional displacement.

[0043]

As described above, according to the present invention, the formation of an electrode pattern in a plasma display panel, which is a gas discharge display device, is performed by disposing a photomask on the back side of a substrate structure and performing exposure processing. Since the exposure amount of the lower layer portion is larger than that of the upper layer (surface) portion, it is possible to form a trapezoidal electrode whose upper width is narrower than its bottom width.

When the electrode layer is composed of two or more layers, the electrode pattern of the first layer is used as a light-shielding film, and the electrode pattern already formed without using a photomask is used as a light-shielding layer. By performing self-alignment exposure processing from the back side of the pattern, the pattern thickening caused by the displacement of the electrode pattern due to the misalignment of the conventional photomask is eliminated, and furthermore, the trapezoidal electrode having the upper width smaller than the bottom width is formed. Becomes possible.

As a result, curling of the edge of the electrode pattern after firing of the electrode is eliminated, and generation of bubbles at the edge of the electrode bottom when the dielectric layer is formed is also eliminated. There are no defects. In addition, since the photomask is arranged from the back side of the substrate structure, defects of the light shielding pattern due to mask defects and adhesion of dust and the like are eliminated. Further, when the electrode layer is formed of two or more layers, since the photomask is not used for forming the second and subsequent layers as in the related art, mask defects and defects in the light-shielding pattern due to adhesion of dust and the like are eliminated. As described above, since a high-quality electrode pattern can be formed, a gas discharge display device capable of high-quality display can be realized.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating each step of a conventional electrode pattern forming process.

FIG. 2 is a cross-sectional view illustrating each step of an electrode pattern forming process according to an embodiment of the present invention.

FIG. 3 is a cross-sectional view illustrating each step of an electrode pattern forming process according to an embodiment of the present invention.

FIG. 4 is a cross-sectional view illustrating a problem of an electrode pattern according to a conventional method.

FIG. 5 is a sectional view illustrating the shape of an electrode pattern according to the present invention.

FIG. 6 is a diagram schematically showing a configuration of a plasma display panel.

FIG. 7 is a partial cross-sectional perspective view showing a main configuration of an AC surface discharge type plasma display panel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 101 Front plate 102 Front plate glass 103 Transparent electrode 104 Bus electrode 105 Dielectric layer 106 Protective layer 107 Display electrode 108 Light-shielding pattern (black stripe) 201 Back plate 202 Back plate glass 203 Address electrode 204 Dielectric layer 205 Partition 206 Partition top 207 Phosphor Layer 208 Discharge space 300 Front substrate 301 Back substrate 302, 303 Display electrode 304 Dielectric layer 305 Dielectric protection layer 306 Address electrode 307 Dielectric layer 308 Partition wall 309 Phosphor layer 310 Discharge gas 311 Light-shielding pattern (black stripe) 400 Glass substrate 401 electrode layer 402 photomask 403 electrode pattern 404 second electrode layer 405 electrode pattern

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Kazuo Takahashi 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Shinya Fujiwara 1006 Okadoma Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co. 72) Inventor Taku Watanabe 1006 Kazuma Kadoma, Kadoma City, Osaka Prefecture F-term in Matsushita Electric Industrial Co., Ltd. 5C027 AA02 5C040 FA01 GB03 GB14 JA15 MA23 5C058 AA11 AB01 BA32

Claims (20)

[Claims] 1. A gas discharge display device having a strip-shaped electrode extending in a column or row direction of a screen, comprising: an electrode material layer extending over an entire area corresponding to the screen on a substrate; Has a light-transmitting property, and the electrode is formed by patterning the electrode material layer by a photolithography process including an exposure process by irradiating the electrode with light from the back side of the substrate. Gas discharge display. 2. The gas discharge display device according to claim 1, wherein the electrode material layer has a multilayer structure. 3. The gas discharge display device according to claim 1, wherein the electrode material layer is formed on another film that has already been patterned. 4. The gas discharge display device according to claim 1, wherein the sectional shape of the electrode is a trapezoidal shape in which at least a top width is smaller than a bottom width. 5. A gas discharge display device having a strip-shaped electrode extending in a column or row direction of a screen, wherein a first electrode material layer extending over an entire area corresponding to the screen is provided on a substrate, The first electrode material layer has a light-transmitting property, and the electrode material layer is patterned by a photolithography process including an exposure process by irradiating the electrode with light from the back surface side of the substrate and forming a first electrode material layer. After the formation of the first layer, a self-alignment exposure process is further provided in which a second electrode material layer is provided on the substrate to extend over the entire area corresponding to the screen, and the first layer electrodes are used for light shielding. A gas discharge display device, wherein a pattern of the electrode is formed by patterning a second electrode material layer by a photolithography process. 6. The gas discharge display device according to claim 5, wherein the self-alignment exposure process irradiates light from the back side of the substrate structure on which the first layer electrode is formed. 7. The gas discharge display device according to claim 5, wherein the electrode material layer is formed on another film that has already been patterned. 8. The gas discharge display device according to claim 5, wherein a sectional shape of the electrode is a trapezoidal shape in which at least a top width is smaller than a bottom width. 9. The gas discharge display device according to claim 5, wherein the first layer electrode and the second layer electrode are fired simultaneously. 10. The gas discharge display device according to claim 5, wherein a second layer electrode is formed after firing the first layer electrode. 11. A gas discharge display device having a strip-shaped electrode extending in a column or row direction of a screen, wherein an electrode material layer is provided on a substrate, the electrode material layer extending over an entire area corresponding to the screen.
The electrode material layer has a light-transmitting property, and the electrode is formed by patterning the electrode material layer by a photolithography process including an exposure process by irradiating the electrode with light from the back side of the substrate. A method for manufacturing a gas discharge display device, comprising: 12. The method according to claim 11, wherein the electrode material layer has a multilayer structure. 13. The method according to claim 1, wherein the electrode material layer is formed on another film that has already been patterned.
13. The method for manufacturing a gas discharge display device according to 1 or 12. 14. The method of manufacturing a gas discharge display device according to claim 11, wherein the cross-sectional shape of the electrode is a trapezoidal shape in which at least a top width is smaller than a bottom width. . 15. A gas discharge display device having a band-shaped electrode extending in a column or row direction of a screen, wherein a first electrode material layer is provided on a substrate, the first electrode material layer extending over an entire area corresponding to the screen. The first electrode material layer has a light-transmitting property, and the electrode material layer is patterned by a photolithography process including an exposure process by irradiating the electrode with light from the back surface side of the substrate and forming a first electrode material layer. After the formation of the first layer, a self-alignment exposure process is further provided in which a second electrode material layer is provided on the substrate to extend over the entire area corresponding to the screen, and the first layer electrodes are used for light shielding. A method for manufacturing a gas discharge display device, wherein a pattern of the electrode is formed by patterning a second electrode material layer by a photolithography process. 16. The self-alignment exposure process comprises the steps of:
16. The method according to claim 15, wherein light is emitted from the back side of the substrate structure on which the first-layer electrodes are formed. 17. The method according to claim 1, wherein the electrode material layer is formed on another film that has already been patterned.
17. The method for manufacturing a gas discharge display device according to 5 or 16. 18. The method of manufacturing a gas discharge display device according to claim 15, wherein the cross-sectional shape of the electrode is a trapezoidal shape in which at least a top width is smaller than a bottom width. . 19. The method according to claim 15, wherein the first-layer electrode and the second-layer electrode are fired simultaneously.
The method for manufacturing a gas discharge display device according to any one of the above. 20. The method according to claim 15, wherein after firing the first layer electrode, a second layer electrode is formed.
9. The method for manufacturing a gas discharge display device according to any one of 8.