JP2001118515A - Plasma display panel and method for manufacturing therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plasma display panel and manufacturing method therefore, which can control surface roughness of a rigid and tight membrane and also the top portion of a partition with high accuracy in melt-spinning membrane and also allows a low-priced and high quality display. SOLUTION: A plasma display panel is readily formed by coating a thick membrane or a sealing material on the upper portion of a thermal spray membrane formed by thermal spraying method.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel used for a display device or the like and a method of manufacturing the same, particularly to a step of forming a partition.

[0002]

2. Description of the Related Art In recent years, a plasma display panel, which has attracted attention as a thin display device, has, for example, a configuration shown in FIG. The plasma display panel includes a front substrate 300 arranged opposite to each other.
And a back substrate 301. On the front substrate 300, display electrodes 302 and 303, a dielectric layer 304, and an MgO dielectric protection layer 305 are formed in this order.
An address electrode 306 and a dielectric layer 307 are formed on the rear substrate 301, and a partition 308 is further formed thereon. Then, a phosphor layer 309 is applied to a side surface of the partition wall 308.

A discharge gas 310 (for example, a mixed gas of Ne—Xe) is provided between the front substrate 300 and the rear substrate 301.
Are sealed at a pressure of 66000 Pa to 80000 Pa. The discharge gas 310 is supplied to the display electrodes 302 and 30.
By generating an ultraviolet ray by discharging between the three layers and irradiating the ultraviolet ray to the phosphor layer 309, an image display including a color display can be performed.

[0004] The partition 302 has a color (R, G,
B) is a partition for forming a discharge cell by forming a minute discharge space for each cell. The partition wall 308 enables the discharge to be controlled for each cell, thereby preventing erroneous discharge and erroneous display. it can. The size of the partition wall 308 is typically set such that a partition pitch is 1 in a 40-inch NTSC panel.
360 μm per color, width of partition top 50-50 μm
m and the height of the partition walls are 100 to 150 μm.

The front substrate 300 and the rear substrate 301
Are arranged so that the longitudinal directions of the address electrode 306 and the display electrode 302 are orthogonal to each other, but in FIG. 1, the front substrate is rotated by 90 ° for convenience.

As a conventional method of forming a partition, (1) a printing method of forming a partition by using a screen printing technique;
(2) After applying the partition wall material to the front surface of the back substrate, forming a photosensitive film layer on the coated partition wall material, forming a predetermined pattern by a photographic method, and removing unnecessary portions of the partition wall material by sandblasting. A sand blast method in which a photosensitive film layer is peeled off to form a partition, (3) a photo paste method in which unnecessary portions are removed by a photographic method after applying a photosensitive paste to form a partition, or (4) a substrate is exposed to light. A photo-embedding method (or lift-off method) in which a predetermined pattern is formed by a photographic method after forming a conductive film layer, a paste is buried in a groove portion of the pattern, the photosensitive film is peeled off, and then the paste is baked in a firing step. (5) After forming a photosensitive film layer on a substrate, a predetermined pattern is formed by a photographic method, and further, thermal spraying is performed on a groove of the pattern. Plasma spraying peeling the photosensitive film from embed partition material Ri, and the like.

[0007]

However, each of these partition wall forming methods has a problem. However, particularly when the partition wall is formed by using the plasma spraying method, there are the following problems. I have.

When forming the partition wall 308 by using the plasma spraying method, after forming a predetermined pattern on the photosensitive film layer by a photographic method using exposure and development, a sprayed film is formed in the groove as a partition wall material. The sprayed film formed by
Compared to a partition formed using a conventional paste material, the density and strength of the film and the adhesion to the dielectric layer 307 tend to be inferior. Was a factor. Further, since the surface of the thermal sprayed film has a large surface roughness of 10 to 15 μm, there is a problem that a gap is formed between the top of the partition wall 308 and the front substrate 300 when the front substrate 300 is bonded.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to form a thick film or a sealing material on a thermal sprayed film formed by a thermal spraying method so as to achieve high quality. Another object of the present invention is to provide a method of manufacturing a plasma display panel that enables high-quality display by forming high-precision partition walls.

[0010]

The present invention is characterized in that at least a thick film is formed or a sealing material is formed by coating on a sprayed film formed as a partition wall material.

[0011] In one embodiment, the plasma display panel of the present invention further includes a pair of substrates, and an electrode, a protective layer, and a phosphor layer disposed between the pair of substrates. The partition is disposed between the pair of substrates, and the discharge space is filled with a gas medium, and the ultraviolet light generated by the discharge of the gas medium emits ultraviolet light when irradiating the phosphor layer. It is characterized by being converted into visible light and emitting light.

The partition is formed of a single color from the bottom to a predetermined height, or is formed of a partition material of a first color, and from the predetermined height to the top, the partition material or sealing is made of a thick film. A second color can be formed of the partition material of the material.
For example, the first color is white, and the second color is black.

[0013] The partition material of the first color may be a mixture or a melt of a glass material of alumina or spinel, and the partition material of the second color may be a thick film material containing at least a glass material or an inorganic polymer. The sealing material may include:

Further, by applying and firing at least a thick film material on the upper portion of the sprayed film deposited by the spraying method, the glass material in the thick film material is softened and impregnated into the sprayed film, and the denseness of the sprayed film is increased. Thus, the properties and strength can be improved, and the surface roughness after curing can be reduced.

Further, at least a sealing material is applied to the upper portion of the sprayed film deposited by the thermal spraying method, so that the sealing material is impregnated in the sprayed film and cured by heat, thereby improving the denseness of the sprayed film. The strength can be improved, and the surface roughness after curing can be reduced.

According to the method of manufacturing a plasma display panel of the present invention, a partition wall for defining a discharge space is formed on at least a thick film or a sealing material by coating on a sprayed film previously formed by a thermal spraying method. Is included.

In one embodiment, the step of forming a partition wall comprises:
A step of forming a photosensitive coating layer on the substrate, a step of forming a groove in a predetermined pattern in the photosensitive coating layer, and applying the partition wall material by a thermal spraying method to at least the inside of the groove. Volume to the height of, the step of forming the sprayed film, and the step of applying a thick film material on top of the sprayed film,
Drying the thick film, removing the photosensitive coating layer,
A step of obtaining the partition having a predetermined shape; and a step of firing the thick film.

In the step of applying a sealing material on the sprayed film, a step of drying the sealing material and a step of removing the photosensitive coating layer to obtain the partition having a predetermined shape. And curing the sealing material.

According to the present invention having the above-described features, after a groove having a predetermined pattern is formed in the photosensitive coating layer, a partition material is deposited in the groove by a thermal spraying method (for example, a plasma spraying method). The denseness and strength of the deposited film formed by thermal spraying and adhesion to the dielectric layer by coating at least a thick film material on top of the deposited film and baking it, or applying and sealing a sealing material and curing. The surface roughness of the top of the partition wall can be improved to 5 μm or less. As a result, the cost can be reduced by improving the yield by reducing the defects and defects of the partition walls in the post-process. Further, a partition wall which improves the bonding accuracy with the front substrate and enables high-quality display is formed.

Further, when forming the above-mentioned partition walls, the visible light reflectance of the partition walls can be improved by forming the sprayed film and the thick film material or the sprayed film and the sealing material each of a white material from the bottom of the partition to a predetermined height. As a result, the efficiency of use of visible light by the discharge from the phosphor applied to the side wall of the partition is improved, and as a result, the brightness of the plasma display panel is improved.

Further, when the partition from the predetermined height to the top is formed of a black thick film material or a sealing material, reflection of external light is suppressed, and as a result, a high contrast of the plasma display panel is realized. You.

Further, after forming a groove of a predetermined pattern in the photosensitive coating layer formed on the substrate, a partition wall material is deposited on the groove by a thermal spraying method (for example, a plasma spraying method) or a screen printing method. When the partition is formed, the shape of the partition is limited to the shape of the pattern formed on the photosensitive coating layer, so that the partition can be formed with high precision.

The cross-sectional shape of the opening formed in the photosensitive coating layer is a trapezoid whose bottom is wider than the top, and the bottom angle of the trapezoidal groove is 60 degrees or more and 90 degrees or more.
If it is less than the degree, the partition wall material fills and deposits in the groove portion of the pattern, and it becomes possible to make the shape accuracy of the partition wall and the adhesion to the substrate uniform, while removing the photosensitive coating layer. This facilitates the removal of the partition walls when the photosensitive coating layer is peeled off.

[0024]

(First Embodiment) FIG. 2 is a partial sectional perspective view showing a main structure of an AC surface discharge type PDP according to an embodiment. In the drawing, the z direction corresponds to the thickness direction of the PDP, and the xy plane corresponds to a plane parallel to the PDP surface. As shown in the figure, the present PDP includes a front plate 101 and a rear plate 201 arranged with their main surfaces facing each other.

Front plate glass 1 serving as substrate of front plate 101
02, a plurality of pairs of transparent electrodes 103 are arranged on one side thereof with the x direction as a longitudinal direction. Further, the transparent electrode 103
A bus electrode 104, which is sufficiently narrower than the transparent electrode 103 and has excellent conductivity, is laminated thereon. This transparent electrode 10
3 and the bus electrode 104 are subjected to surface discharge and the display electrode 107
Works as The front glass plate 102 on which the display electrodes 107 are disposed has a dielectric layer 1 over the entire glass surface.
The protective layer 106 is coated on the dielectric layer 105.

Back plate glass 2 serving as substrate of back plate 201
02, a plurality of address electrodes 203 are arranged on one side thereof in a stripe shape with the y-direction as a longitudinal direction, and a dielectric layer 204 is formed on the back plate glass 20 on which the address electrodes 203 are arranged.
2 is coated over the entire surface. This dielectric layer 204
On the upper side, a partition wall 205 is provided in accordance with the interval between the adjacent address electrodes 203. A phosphor layer 207 corresponding to one of RGB is formed on the surface of the adjacent partition wall 205 and the dielectric layer 204 therebetween.

The front plate 101 and the rear plate 201 having such a configuration are arranged so that the address electrodes 203 and the display electrodes 107 face each other so that the longitudinal directions thereof are orthogonal to each other. The peripheral part is adhered and sealed with sealing glass. A discharge gas (filled gas) composed of a rare gas component such as He, Xe, or Ne is filled between the double-sided plates 101 and 201 at a pressure of about 66,000 to 80000 Pa. Thereby, the adjacent partition 2
The discharge space 208 is formed between the display electrodes 107 and one address electrode 203.
The area where the lines intersect with each other across the discharge space 208 is a cell for image display.

At the time of driving the PDP, in each cell, the address electrode 203 and the display electrode 107, and the pair of display electrodes 1
07 generate short-wavelength ultraviolet rays (wavelength of about 14).
7 nm), the phosphor layer 207 emits light, and an image is displayed.

The main features of the PDP of the present invention and the method of manufacturing the same are that the top 206 of the partition wall and the protective film 106
Is about bonding.

Next, a method of manufacturing the present PDP will be specifically described.

(Preparation of front plate 101) Thickness of about 2.6 mm
A transparent electrode 103 having a thickness of about 3000 Å is formed in parallel with a conductive material such as ITO (Indium Tin Oxide) or SnO ₂ on the surface of a front plate glass 102 made of soda glass. Further, a bus electrode 104 composed of three layers of silver or chromium-copper-chromium is laminated on the transparent electrode 103 to form a display electrode 107. Known methods such as a screen printing method and a photolithography method can be applied to these electrodes.

Next, a lead-based glass paste is coated over the entire surface of the front plate glass 102 on which the display electrodes 107 have been formed, and baked to form a dielectric layer 1 of about 20 to 30 μm.
05 is formed. Then, a protective film 106 made of magnesium oxide (MgO) having a thickness of about 1 μm is formed on the surface of the dielectric layer 105 by a vapor deposition method or a CVD method.

Thus, the front plate 101 is completed.

(Preparation of back plate 201) Thickness of about 2.6 mm
A conductive material containing silver as a main component is applied in a stripe pattern at regular intervals on the surface of a back plate glass 202 made of soda glass by a screen printing method.
An address electrode 203 of 0 μm is formed. In order to make the PDP manufactured here a 40-inch class high-definition television, the interval between two adjacent address electrodes 203 is set to about 0.2 mm or less.

Subsequently, a lead-based glass paste is coated and baked over the entire surface of the rear plate glass 202 on which the address electrodes 203 are formed, thereby forming a dielectric layer 204 having a thickness of about 10 to 20 μm.

The following steps include the features of the manufacturing method of the present invention. The partition forming process according to the present invention will be described with reference to FIGS. FIG.
3A to 3E are cross-sectional views illustrating each step of the above process.

First, as shown in FIG. 3A, a photosensitive coating layer 405 is formed on the formed substrate 403. In the present embodiment, a photosensitive dry film resist (hereinafter, referred to as DFR) is used as the photosensitive coating layer 404, and two DFRs each having a thickness of 60 μm are laminated and formed to a thickness of 120 μm.

Next, as shown in FIG. 3B, exposure is performed by irradiating with ultraviolet light (UV light) using a photomask 405 having a predetermined width and pitch. The exposure amount is optimized according to the pattern width and the pitch of the photomask 405.

In the step of FIG. 3C, development is performed using a developing solution of a 1% aqueous solution of sodium carbonate, and washing is performed immediately after the development. After exposure and development, a groove (groove) 407 having a predetermined pattern in a stripe shape is formed in the DFR 404. The size of the groove 406 typically has an upper opening width of 80 μm and a pitch of 360 μm.

Next, as shown in FIG. 3D, after forming the pattern of the groove 406, plasma spraying is performed from above the substrate 403, and a sprayed film (partition material) 410 is deposited in the groove 406 of the DFR 404. Specifically, a cooling gas port 408 is provided in the plasma spraying torch 407, and sprays a cooling gas onto the substrate 403 simultaneously with the spraying of the plasma jet 409.

As the cooling gas, nitrogen is used. By the action of the cooling gas, damage to the DFR 404 due to heat at the time of thermal spraying can be reduced, and a highly accurate partition wall can be formed. In this thermal spraying process, the thermal spray film 410 is mainly deposited inside the groove 406 of the DFR 404, and is deposited about 15 μm below the surface of the DFR 404. However, the thermal spray film hardly deposits (adheres) on the surrounding DFR 404.

Next, as shown in FIG. 3E, using a screen mask 411 having an opening substantially the same size as the top width of the partition wall, for example, a PbO—B ₂ O ₃ —SiO ₂ —CaO-based glass material and a solvent A thick-film paste material 413 mainly composed of terpineol as the main component and ethylcellulose as the polymer resin is printed and applied only to the top of the partition wall by the squeegee 412. After the application, leveling is performed, followed by drying at 80 ° C. for 20 minutes and then curing at 150 ° C. for 30 minutes.

Next, as shown in FIG.
Is immersed in a stripping solution, for example, a 5% aqueous sodium hydroxide solution, to strip the DFR 404. Thereby, a partition 415 having a predetermined shape is formed.

After the peeling and removal of the photosensitive skin film 404 is completed, the partition wall 415 is fired by using a firing furnace having a profile formed so that the peak temperature becomes about 550 ° C.

Next, as shown in FIG.
A phosphor containing any one of red (R), phosphor, green (G) phosphor, and blue (B) phosphor is provided on the surface of the dielectric layer 402 exposed between the wall surface and the adjacent partition wall 415. Apply ink. Thereafter, the phosphor ink is dried and fired to form phosphor layers 406 of each color.

Here, examples of phosphor materials generally used in PDPs are listed below.

Red phosphor (Y _X Gd ₁ -x) BO ₃ : Eu Green phosphor Zn ₂ SiO ₄ : Mn Blue phosphor BaMgAl ₁₀ O ₁₇ : Eu ³⁺ Each phosphor material has an average particle diameter of about 3 μm. It was used. There are several methods of applying the phosphor ink. Here, a method of discharging the phosphor ink while forming a meniscus (crosslinking by surface tension) from an extremely fine nozzle, which is called a meniscus method, is used. This method is advantageous for uniformly applying the phosphor ink to a target area. An example of the meniscus method will be described below.

The phosphor ink used is a mixture of a phosphor material, a binder (ethyl cellulose) and an organic solvent (α-terpineol) at a weight ratio of 45: 2: 53. This phosphor ink is put in a tank (not shown), and a nozzle connected to the tank (tip diameter: 80 μm)
To the sense of partition 415. The nozzle is moved at a speed of 50 mm / s along the longitudinal direction of the partition 415 while maintaining a distance of about 100 μm from the dielectric layer 402.
By discharging the phosphor ink at a pressure of 4800 Pa while scanning with, the phosphor ink is applied while forming a meniscus of the phosphor ink between the nozzle and the partition 415 or between the nozzle and the surface of the dielectric layer 402.

After the phosphor ink is applied in this manner, the phosphor layer 416 is formed by baking the profile at a maximum temperature of about 520 ° C. for 2 hours.

As described above, by forming a thick film or a sealing material on the sprayed film formed by the spraying method, high quality and high precision formation can be realized.

[0051]

As described above, according to the present invention, in forming a partition wall in a plasma display panel, a thick film or a sealing material is applied and formed on the sprayed film formed by the spraying method, whereby the plasma display panel becomes strong. Since a dense film can be obtained and the surface roughness of the top of the partition wall can be controlled with high precision, it is possible to realize a plasma display panel that enables high-quality display at low cost. .

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a configuration of a plasma display panel.

FIG. 2 is a partial cross-sectional perspective view showing a main configuration of an AC surface discharge type plasma display panel.

FIGS. 3A to 3G are cross-sectional views illustrating each step of a partition wall forming process in an embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 101 front plate 102 front plate glass 103 transparent electrode 104 bus electrode 106 protective layer 107 display electrode 201 back plate 202 back plate glass 203 address electrode 204 dielectric layer 205 partition 206 partition top 207 phosphor layer 300 front substrate 301 rear substrate 302, 303 display Electrode 304 Dielectric layer 305 Dielectric protection layer 306 Address electrode 307 Dielectric layer 308 Partition wall 309 Phosphor layer 310 Discharge gas 400 Glass substrate 401 Address electrode 402 Dielectric layer 403 Substrate 404 Photosensitive coating layer (DFR) 405 Photomask 406 Groove 407 Plasma spray torch 408 Cooling gas port 409 Plasma jet 410 Thermal spray film (partition material) 411 Screen mask 412 Squeegee 413 Thick film paste 414 Thick film material 41 5 partition 416 phosphor layer

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hideki Ashida 1006 Kazuma Kadoma, Osaka Pref. Matsushita Electric Industrial Co., Ltd. (72) Inventor Shigeo Suzuki 1006 Kazuma Kadoma Kadoma, Osaka Pref. 72) Inventor Kazuo Otani 1006 Kazuma Kadoma, Kazuma City, Osaka Prefecture F-term in Matsushita Electric Industrial Co., Ltd. CA19 DA13 FB02 FB05 FB20 GB01 5G435 AA17 BB06 HH01 HH20 KK05

Claims (34)

[Claims] 1. A plasma display panel, wherein a partition defining a discharge space is formed of a sprayed film formed by spraying a partition material, and a thicker film is formed thereon. 2. The plasma display panel according to claim 1, wherein the partition wall is formed of a sprayed film formed by spraying a partition wall material, and a sealing material is further formed on the sprayed film. 3. The semiconductor device further comprises a pair of substrates, and an electrode, a dielectric layer, and a phosphor layer disposed between the pair of substrates, wherein the partition wall is provided between the pair of substrates. Are located in
2. A gas medium is sealed in the discharge space, and ultraviolet light generated by the discharge of the gas medium is converted into visible light when the phosphor layer is irradiated, thereby emitting light.
Or the plasma display panel according to 2. 4. The partition according to claim 1, wherein the partition is of a single color.
The plasma display panel according to item 1. 5. The partition wall is formed in a first color which is a partition material by thermal spraying at a predetermined height from a bottom thereof, and is formed in a second color which is a partition material by a thick film from a predetermined height to a top portion. The plasma display panel according to claim 1, wherein the plasma display panel is formed. 6. The partition wall is formed of a first color that is a partition wall material formed by thermal spraying at a predetermined height from a bottom thereof, and a second color is a partition wall material formed of a sealing material from a predetermined height to a top portion.
3. The plasma display panel according to claim 2, wherein the plasma display panel is formed in the following colors. 7. The plasma display panel according to claim 5, wherein said first color is substantially white, and said second color is substantially black. 8. The method of claim 1, wherein the first color is substantially white and the second color is
7. The plasma display panel according to claim 5, wherein the color is substantially transparent. 9. The method according to claim 1, wherein said thermal spraying is plasma spraying.
Or the plasma display panel according to 2. 10. The plasma display panel according to claim 1, wherein a material of the partition walls for the thermal spraying includes alumina or spinel. 11. The plasma display panel according to claim 1, wherein the material of the partition walls for thermal spraying includes glass. 12. The plasma display panel according to claim 1, wherein the thick film material formed on the upper portion includes a glass material. 13. The plasma display panel according to claim 2, wherein the sealing material formed on the upper part contains particles of at least 10 μm or less. 14. The plasma display panel according to claim 2, wherein the sealing material formed on the upper portion contains at least an inorganic polymer, and is cured by heat. 15. A method for manufacturing a plasma display panel, wherein a partition wall defining a discharge space is constituted by a sprayed film formed by spraying a partition wall material, and a thicker film is formed on an upper portion thereof. A method for manufacturing a plasma display panel including a forming step. 16. A partition defining a discharge space is formed of a sprayed film formed by spraying a partition material,
What is claimed is: 1. A method for manufacturing a plasma display panel, wherein a sealing material is further applied and formed on an upper part thereof, the method including a step of forming a partition wall. 17. The step of forming a partition, the step of forming a photosensitive coating layer on a substrate, the step of forming an opening having a predetermined pattern in the photosensitive coating layer, Depositing the partition wall material to a predetermined height by a thermal spraying method to form the thermal sprayed film, applying a thick film material on the thermal sprayed film, and drying the thick film material; The method of manufacturing a plasma display panel according to claim 15, further comprising: removing the photosensitive coating layer to obtain the partition having a predetermined shape; and baking the thick film material. 18. The step of forming a partition, the step of forming a photosensitive coating layer on a substrate, the step of forming an opening having a predetermined pattern in the photosensitive coating layer, and at least the inside of the opening. A step of depositing the partition wall material to a predetermined height by a thermal spraying method to form the thermal sprayed film, a step of applying a sealing material on top of the thermal sprayed film, and a step of drying the sealing material. 17. The method of manufacturing a plasma display panel according to claim 16, further comprising: removing the photosensitive coating layer to obtain the partition having a predetermined shape; and curing the sealing material. 19. The method according to claim 15, wherein the opening of the predetermined pattern formed in the photosensitive coating layer has a trapezoidal cross section whose bottom is wider than the top. A method for manufacturing a plasma display panel. 20. The method according to claim 15, wherein the partition is of a single color. 21. The partition wall is formed of a first color which is a partition wall material formed by thermal spraying at a predetermined height from a bottom of the partition wall.
From the predetermined height to the top, a second partition wall made of a thick film is used.
The method for manufacturing a plasma display panel according to claim 15, wherein the color is formed in the following colors. 22. The partition wall is formed of a first color, which is a partition wall material formed by thermal spraying at a predetermined height from a bottom of the partition wall,
17. The method of manufacturing a plasma display panel according to claim 16, wherein a portion from a predetermined height to a top portion is formed of a second color which is a partition material made of a sealing material. 23. The method according to claim 15, wherein the first color is substantially white, and the second color is substantially black. 24. The method according to claim 15, wherein the first color is substantially white, and the second color is substantially transparent. 25. The method according to claim 15, wherein the thermal spraying is plasma thermal spraying. 26. The thermal spraying barrier rib material comprises alumina or spinel.
3. The method for manufacturing a plasma display panel according to 1. 27. The method of manufacturing a plasma display panel according to claim 15, wherein the material for the partition walls for thermal spraying includes glass. 28. The method according to claim 15, wherein the thick film material formed on the upper portion includes a glass material. 29. The method according to claim 16, wherein the sealing material formed on the upper part contains particles having a size of at most 10 μm or less. 30. The sealing material according to claim 16, wherein the sealing material formed on the upper portion contains at least an inorganic polymer.
3. The method for manufacturing a plasma display panel according to 1. 31. The plasma display panel according to claim 15, wherein the step of forming the sprayed film includes a step of heating the substrate from a back surface to maintain a temperature distribution in the substrate within a predetermined range. Manufacturing method. 32. The plasma display panel according to claim 15, wherein the step of forming the sprayed film includes a step of cooling a surface of the substrate to maintain a temperature distribution in the substrate within a predetermined range. Manufacturing method. 33. The method according to claim 15, wherein the step of forming the thermal sprayed film includes a step of heating the substrate from the back side and cooling the surface of the substrate to maintain a temperature distribution in the substrate within a predetermined range. 17. The method for manufacturing a plasma display panel according to item 16. 34. The method according to claim 15, further comprising a step of forming a phosphor layer after removing the photosensitive coating film.