JP2002210396A - Washing device of coating device and washing method - Google Patents

Washing device of coating device and washing method

Info

Publication number
JP2002210396A
JP2002210396A JP2001014414A JP2001014414A JP2002210396A JP 2002210396 A JP2002210396 A JP 2002210396A JP 2001014414 A JP2001014414 A JP 2001014414A JP 2001014414 A JP2001014414 A JP 2001014414A JP 2002210396 A JP2002210396 A JP 2002210396A
Authority
JP
Japan
Prior art keywords
coating
washing
passage
pump
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001014414A
Other languages
Japanese (ja)
Inventor
Kazuyuki Toda
和志 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui House Ltd
Original Assignee
Sekisui House Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui House Ltd filed Critical Sekisui House Ltd
Priority to JP2001014414A priority Critical patent/JP2002210396A/en
Publication of JP2002210396A publication Critical patent/JP2002210396A/en
Pending legal-status Critical Current

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Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Spray Control Apparatus (AREA)
  • Coating Apparatus (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a washing device of a coating device capable of enhancing a workability by effectively using a coating material and shortening a color- change time. SOLUTION: In the coating device, a coating material is fed to a coating gun 3 by a coating pump through a feed passage 2 and coating is carried out. A washing passage 6 communicating with a feed source of the washing water is connected to a middle of the feed passage 2 and a drain passage 11 at a pump side is connected to the feed passage 2 being at an upstream side as compared with the washing passage 6. An air can be fed from an air feed source 10 to the washing passage 6. A first close valve 8 is disposed on the washing passage 6, a second close valve 12 is disposed on the drain passage 11 at a pump side and a third close valve 13 is disposed on the feed passage 2 formed between the washing passage 6 and the drain passage 11 at a pump side. After the air is fed to the feed passage 2 to wash with the air, the washing water is fed to the painting pump 1 side and the coating gun 3 side by another route to wash it. An air is mixed into the washing water.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、塗装装置の洗浄装
置及びその洗浄方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus for a coating apparatus and a method for cleaning the same.

【0002】[0002]

【従来の技術】従来、塗装装置としては、図2に示すよ
うに塗料タンク(図示省略)に貯留した塗料を塗装ポン
プaにより供給路bを通じて各塗装ガンcに供給し、こ
れら塗装ガンcにより被塗装物への塗装を行っている。
2. Description of the Related Art Conventionally, as a coating apparatus, as shown in FIG. 2, a coating material stored in a coating tank (not shown) is supplied to each coating gun c through a supply path b by a coating pump a. We are painting objects to be painted.

【0003】そして、塗料の色替えを行う際には、前の
塗料と後の塗料との混入を避けるために、一旦、塗装ポ
ンプa、供給路b及び塗装ガンcの洗浄作業を行った後
に、新しい塗料を用いるようにしている。
When the color of the paint is changed, the paint pump a, the supply passage b, and the paint gun c are once cleaned to avoid mixing of the paint before and after the paint. , Use new paint.

【0004】この洗浄作業は、塗装ポンプaの吸込側に
水を貯留した水タンクを配置し、この水タンクd内の水
を塗装ポンプaにより供給路bを通じて各塗装ガンc側
に供給し、排水路eを通じて回収することによって行っ
ている。
In this cleaning operation, a water tank storing water is arranged on the suction side of the coating pump a, and the water in the water tank d is supplied to each coating gun c through the supply path b by the coating pump a. This is done by collecting through drainage channel e.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記従
来のように、はじめから水によって塗装ポンプa、供給
路b及び塗装ガンcの洗浄を行うと、供給路bや塗装ガ
ンcに残っている塗料も水と一緒に洗浄されることか
ら、その残っている塗料が無駄になるという問題があっ
た。また、塗装ポンプa、供給路b及び塗装ガンcを一
度に洗浄すると、前の塗料を完全に洗浄するまでに時間
がかかるため、この分、色変え作業に時間がかかり作業
性が悪いという問題があった。
However, if the coating pump a, the supply path b and the coating gun c are washed from the beginning with water as in the prior art described above, the paint remaining in the supply path b and the coating gun c is removed. However, since the remaining paint is washed together with water, there is a problem that the remaining paint is wasted. Further, if the coating pump a, the supply path b, and the coating gun c are washed at once, it takes time to completely wash the previous paint, so that it takes time to change the color and the workability is poor. was there.

【0006】本発明は、上記問題点に鑑みなされたもの
で、その目的とするところは、塗料を有効に使用すると
ともに、色変え時間の短縮を図ることで、作業性を向上
させることにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to improve workability by effectively using paint and shortening the color change time. .

【0007】[0007]

【課題を解決するための手段】請求項1に係る発明の塗
装装置の洗浄装置は、塗料を塗装ポンプにより供給路を
通じて塗装ガンに供給し、塗装を行う塗装装置におい
て、前記供給路の途中部に、洗浄水供給源に連通された
洗浄路が連結されるとともに、洗浄路よりも上流側とな
る供給路にポンプ側排水路が連結され、上記洗浄路には
エア供給源からエアが供給可能に構成される一方、洗浄
路には第1開閉弁が、ポンプ側排水路には第2開閉弁
が、並びに洗浄路とポンプ側排水路との間となる供給路
には第3開閉弁が設けられたものである。
According to a first aspect of the present invention, there is provided a cleaning apparatus for a coating apparatus, wherein the coating is supplied to a coating gun through a supply path by a coating pump by a coating pump, and the coating is performed. The washing passage connected to the washing water supply source is connected to the pump, and the pump-side drain passage is connected to the supply passage upstream of the washing passage, so that air can be supplied from the air supply source to the washing passage. On the other hand, a first opening / closing valve is provided in the washing path, a second opening / closing valve is provided in the pump side drainage path, and a third opening / closing valve is provided in the supply path between the washing path and the pump side drainage path. It is provided.

【0008】請求項2に係る発明の塗装装置の洗浄方法
は、塗料を塗装ポンプにより供給路を通じて塗装ガンに
供給し、塗装を行う塗装装置を洗浄する洗浄方法であっ
て、前記供給路にエアを供給してエア洗浄した後に、塗
装ポンプ側と塗装ガン側とに別経路で洗浄水を供給して
洗浄することを特徴とする。
According to a second aspect of the present invention, there is provided a method of cleaning a coating apparatus, wherein a coating pump supplies paint to a coating gun through a supply path to wash the coating apparatus for performing coating. After the cleaning is performed and the air is cleaned, the cleaning water is supplied to the coating pump side and the coating gun side by different routes to perform the cleaning.

【0009】請求項3に係る発明の塗装装置の洗浄方法
は、前記洗浄水には、エアを混入させることを特徴とす
る。
In a third aspect of the present invention, the method for cleaning a coating apparatus is characterized in that air is mixed into the cleaning water.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施の形態を図面
を参照して説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0011】図1は、本発明の塗装装置の洗浄装置の構
成を示す配管図である。
FIG. 1 is a piping diagram showing a configuration of a cleaning apparatus for a coating apparatus according to the present invention.

【0012】図1において、1は塗装ポンプであり、塗
装ポンプ1の吸込側1aは塗装時には塗料を貯留した図
示しない塗料タンクに連通されている。塗装ポンプ1の
吐出側1bは供給路としての供給管2を通じて各塗装ガ
ン3に連通されている。
In FIG. 1, reference numeral 1 denotes a paint pump, and a suction side 1a of the paint pump 1 is connected to a paint tank (not shown) for storing paint during painting. The discharge side 1b of the coating pump 1 is connected to each coating gun 3 through a supply pipe 2 as a supply path.

【0013】具体的には、供給管2は塗装ガン3側にお
いて当該塗装ガン3の数に対応して分岐されており、こ
れら分岐された分岐管2aが三方弁4を介して各塗装ガ
ン3に連結されている。また、各三方弁4は、ガン側排
水管5にも連通可能になされており、各三方弁4の切り
換えにより供給管2を通じて供給される塗料や洗浄水を
洗浄ガン3もしくはガン側排水管5の一方に、又はその
両方に選択的に導くようにしている。
Specifically, the supply pipes 2 are branched on the coating gun 3 side in accordance with the number of the coating guns 3, and these branched pipes 2 a are connected via the three-way valve 4 to the respective coating guns 3. It is connected to. Each of the three-way valves 4 is also communicable with the gun-side drain pipe 5. The switching of each of the three-way valves 4 causes the paint or cleaning water supplied through the supply pipe 2 to flow through the cleaning gun 3 or the gun-side drain pipe 5. To one or both.

【0014】また、前記供給管2の途中部には、他端が
洗浄水供給源7に連通された洗浄路としての洗浄管6の
一端が連結されている。この洗浄水供給源7により供給
される洗浄水としては例えば水道水であり、水道管の蛇
口に洗浄管6の一端を連結することで、水道水が本来持
つ水圧を利用して供給することができる。
An intermediate portion of the supply pipe 2 is connected to one end of a washing pipe 6 serving as a washing path, the other end of which is connected to a washing water supply source 7. The washing water supplied by the washing water supply source 7 is, for example, tap water. By connecting one end of the washing pipe 6 to a faucet of the tap pipe, the washing water can be supplied by utilizing the original water pressure of the tap water. it can.

【0015】そして、この洗浄管6には、第1開閉弁8
が介装されるとともに、この第1開閉弁8よりも他端側
にエア供給源10に連通されたエア導入管9が連結され
ている。エア供給源10としては、例えばコンプレッサ
が用いられており、コンプレッサによりエアを洗浄管6
内に圧送するようにしている。
A first on-off valve 8 is provided in the washing pipe 6.
An air introduction pipe 9 connected to an air supply source 10 is connected to the other end side of the first opening / closing valve 8. As the air supply source 10, for example, a compressor is used.
To be pumped inside.

【0016】さらに、上記洗浄管6よりも上流側となる
供給管2の途中部には、ポンプ側排水路としてのポンプ
側排水管11の一端が連結されている。ポンプ側排水管
11は、後述する洗浄水による洗浄作業時において、塗
装ポンプ1から供給管2に吐出される洗浄水を外部に排
水するためのものであり、この途中に第2開閉弁12が
介装されている。
Further, one end of a pump-side drain pipe 11 serving as a pump-side drain passage is connected to an intermediate portion of the supply pipe 2 upstream of the washing pipe 6. The pump-side drain pipe 11 is for draining washing water discharged from the coating pump 1 to the supply pipe 2 to the outside during washing work with washing water to be described later. It is interposed.

【0017】このように供給管2にそれぞれ連結された
洗浄管6とポンプ側排水管11との間となる当該供給管
2には第3開閉弁13が介装されている。
A third on-off valve 13 is interposed in the supply pipe 2 between the cleaning pipe 6 connected to the supply pipe 2 and the drain pipe 11 on the pump side.

【0018】次に、このように構成された塗装装置の洗
浄装置により行われる洗浄作業について、本発明の洗浄
方法とともに説明する。
Next, a cleaning operation performed by the cleaning apparatus of the coating apparatus configured as described above will be described together with the cleaning method of the present invention.

【0019】まず、塗装ガン3により塗装を行う際に
は、塗装ポンプ1の吸込側を塗料を貯留した貯留タンク
に連通させるとともに、第3開閉弁13を開放して、第
1開閉弁8及び第2開閉弁12を閉じ、さらに、各三方
弁4を分岐管2aが塗装ガン3にのみ通じるように切り
換える。
First, when the coating is performed by the coating gun 3, the suction side of the coating pump 1 is communicated with the storage tank storing the coating material, and the third opening / closing valve 13 is opened to open the first opening / closing valve 8 and The second on-off valve 12 is closed, and the three-way valves 4 are switched so that the branch pipe 2a communicates only with the coating gun 3.

【0020】この状態で、塗装ポンプ1を作動させるこ
とで、貯留タンクの塗料が供給管2を通じて各塗装ガン
3に供給され、各塗装ガン3から塗料を噴射して被塗装
物の塗装を行う。
In this state, when the coating pump 1 is operated, the paint in the storage tank is supplied to each of the coating guns 3 through the supply pipe 2, and the paint is sprayed from each of the coating guns 3 to coat the object to be coated. .

【0021】次に、塗料の色替えが必要になれば、まず
洗浄作業を行う。この洗浄作業は、塗料タンクと水タン
ク14とを交換して塗料ポンプ1の吐出側を当該水タン
ク14に連通するとともに、第1開閉弁8及び第2開閉
弁12を開放し、第3開閉弁13を閉じる。
Next, if it is necessary to change the color of the paint, a cleaning operation is first performed. In this cleaning operation, the paint tank and the water tank 14 are exchanged, the discharge side of the paint pump 1 is communicated with the water tank 14, the first on-off valve 8 and the second on-off valve 12 are opened, and the third Valve 13 is closed.

【0022】そして、まず、エア供給源10から洗浄管
6内にエアを圧送し、このエアを供給管2を通じて塗装
ガン3に供給する。このエアの供給により洗浄管6より
も下流側の供給管2内に残っている塗料が塗装ガン3か
ら噴射され、この噴射された塗料を塗料タンクに回収す
る。
Then, first, air is pressure-fed from the air supply source 10 into the cleaning pipe 6, and this air is supplied to the coating gun 3 through the supply pipe 2. The supply of the air causes the paint remaining in the supply pipe 2 downstream of the cleaning pipe 6 to be sprayed from the coating gun 3, and the sprayed paint is collected in a paint tank.

【0023】この後、三方弁4を分岐管2aが塗装ガン
3とガン側排水管5の両方に通じるように切り換え、こ
の状態で塗装ポンプ1を作動させるとともに、洗浄水供
給源7から洗浄水を洗浄管6に供給する。
Thereafter, the three-way valve 4 is switched so that the branch pipe 2a communicates with both the coating gun 3 and the gun-side drain pipe 5. In this state, the coating pump 1 is operated and the cleaning water supply source 7 supplies the cleaning water. Is supplied to the washing tube 6.

【0024】これにより、水タンク14内の洗浄水が塗
装ポンプ1から供給管2の上流側に供給されポンプ側排
水管11を通じて外部に排水され、塗装ポンプ1及び供
給管2の上流側の洗浄を行う。そして、この洗浄と同時
に洗浄管6の洗浄水が下流側の供給管2を通じて塗装ガ
ン3から噴射されるとともに、残りがガン側排水管5を
通じて排水され、供給管2の下流側及び塗装ガン3の洗
浄を行う。
As a result, the washing water in the water tank 14 is supplied from the coating pump 1 to the upstream side of the supply pipe 2 and drained to the outside through the pump-side drain pipe 11, and the upstream of the coating pump 1 and the supply pipe 2 is washed. I do. Simultaneously with this washing, the washing water of the washing pipe 6 is jetted from the coating gun 3 through the supply pipe 2 on the downstream side, and the rest is drained through the drain pipe 5 on the gun side. Is washed.

【0025】この際、洗浄管6から供給管2内に供給さ
れる洗浄水内にはエア供給源10からエアが供給されて
いる。従って、洗浄管6から供給される洗浄水にはエア
の気泡が混入されており、この気泡により洗浄力を増強
させている。
At this time, air is supplied from an air supply source 10 into the cleaning water supplied from the cleaning pipe 6 into the supply pipe 2. Therefore, air bubbles are mixed in the cleaning water supplied from the cleaning pipe 6, and the cleaning power is enhanced by the air bubbles.

【0026】このように洗浄作業を塗装ポンプ1側と塗
装ガン3側とで同時に並行して行うとともに、気泡によ
り洗浄力を増強させることで、洗浄作業を大幅に短縮す
ることができ、これにより色替え時間の短縮が図れ作業
性が大幅に向上する。
As described above, the cleaning operation is simultaneously performed on the coating pump 1 side and the coating gun 3 side at the same time, and the cleaning operation can be greatly shortened by increasing the cleaning power by the bubbles. The color change time can be shortened, and workability is greatly improved.

【0027】また、洗浄水による洗浄前に残った塗料を
エアにより回収することで、塗料を無駄なく、有効に使
用することができる。
Further, the paint remaining before washing with the washing water is recovered by air, so that the paint can be used effectively without waste.

【0028】なお、上述した実施の形態は、あくまでも
本発明の好適な具体例を示すものであって、本発明はこ
れに限定されることなく、その範囲内で種々設計変更可
能である。
The above-described embodiment merely shows a preferred specific example of the present invention, and the present invention is not limited to this, and various design changes can be made within the scope.

【0029】例えば、塗装ポンプ1から吐出される洗浄
水は、ポンプ側排水管11から外部に排水しているが、
ポンプ側排水管11の他端を水タンク14に連通させて
この洗浄水を循環させて洗浄することも可能である。
For example, the washing water discharged from the coating pump 1 is drained to the outside from the drain pipe 11 on the pump side.
It is also possible to connect the other end of the pump-side drain pipe 11 to the water tank 14 and circulate the washing water for washing.

【0030】また、塗装ガン3の数も4体に限らず、任
意に設定可能である。
The number of the coating guns 3 is not limited to four and can be set arbitrarily.

【0031】[0031]

【発明の効果】以上述べたように、本発明によれば、洗
浄作業を塗装ポンプ側と塗装ガン側とで同時に並行して
行うことで、洗浄作業を大幅に短縮することができ、こ
れにより色替え時間の短縮が図れ作業性が大幅に向上す
る。また、洗浄水にエアを混入させ、このエアの気泡に
より洗浄力を増強させることで、さらに洗浄作業を短縮
することができ、これにより作業性もさらに向上する。
As described above, according to the present invention, the cleaning operation can be greatly reduced by simultaneously performing the cleaning operation on the coating pump side and the coating gun side in parallel. The color change time can be shortened, and workability is greatly improved. Further, by mixing air into the cleaning water and enhancing the cleaning power by the air bubbles, the cleaning operation can be further shortened, and the workability is further improved.

【0032】また、洗浄水による洗浄前に残った塗料を
エアにより回収することで、塗料を無駄なく、有効に使
用することができる。
Further, the paint remaining before washing with the washing water is recovered by air, so that the paint can be used effectively without waste.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の塗装装置の洗浄装置の構成を示す配管
図である。
FIG. 1 is a piping diagram showing a configuration of a cleaning device of a coating device of the present invention.

【図2】従来の塗装装置の洗浄装置の構成を示す配管図
である。
FIG. 2 is a piping diagram showing a configuration of a conventional cleaning device for a coating device.

【符号の説明】[Explanation of symbols]

1 塗装ポンプ 2 供給管(供給路) 3 塗装ガン 6 洗浄管(洗浄路) 7 洗浄水供給源 8 第1開閉弁 10 エア供給源 11 ポンプ側排水管(ポンプ側排水路) 12 第2開閉弁 13 第3開閉弁 REFERENCE SIGNS LIST 1 coating pump 2 supply pipe (supply path) 3 coating gun 6 cleaning pipe (cleaning path) 7 cleaning water supply source 8 first on-off valve 10 air supply source 11 pump-side drain pipe (pump-side drainage path) 12 second on-off valve 13 Third on-off valve

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) B05D 3/00 B08B 9/06 4F042 Fターム(参考) 3B116 AA47 AB51 BB03 BB77 BB88 3B201 AA47 AB51 BB03 BB77 BB88 BB93 BB98 CB11 4D073 AA01 BB03 CC03 CC07 DC02 DC06 DC25 4D075 AA74 BB57X BB65X 4F035 AA01 AA04 BA05 BA12 BA15 4F042 AA01 CB02 CB08 CB12 CB19 CB24 CC04 CC07 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI theme coat ゛ (reference) B05D 3/00 B08B 9/06 4F042 F term (reference) 3B116 AA47 AB51 BB03 BB77 BB88 3B201 AA47 AB51 BB03 BB77 BB88 BB93 BB98 CB11 4D073 AA01 BB03 CC03 CC07 DC02 DC06 DC25 4D075 AA74 BB57X BB65X 4F035 AA01 AA04 BA05 BA12 BA15 4F042 AA01 CB02 CB08 CB12 CB19 CB24 CC04 CC07

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 塗料を塗装ポンプにより供給路を通じて
塗装ガンに供給し、塗装を行う塗装装置において、 前記供給路の途中部に、洗浄水供給源に連通された洗浄
路が連結されるとともに、洗浄路よりも上流側となる供
給路にポンプ側排水路が連結され、上記洗浄路にはエア
供給源からエアが供給可能に構成される一方、洗浄路に
は第1開閉弁が、ポンプ側排水路には第2開閉弁が、並
びに洗浄路とポンプ側排水路との間となる供給路には第
3開閉弁が設けられたことを特徴とする塗装装置の洗浄
装置。
1. A coating apparatus for supplying paint to a coating gun through a supply path by a coating pump to perform coating, wherein a cleaning path connected to a cleaning water supply source is connected to a middle part of the supply path. A pump-side drainage passage is connected to a supply passage upstream of the washing passage, and the washing passage is configured to be able to supply air from an air supply source. A cleaning device for a coating apparatus, wherein a second opening / closing valve is provided in the drainage passage, and a third opening / closing valve is provided in the supply passage between the washing passage and the pump-side drainage passage.
【請求項2】 塗料を塗装ポンプにより供給路を通じて
塗装ガンに供給し、塗装を行う塗装装置を洗浄する洗浄
方法であって、 前記供給路にエアを供給してエア洗浄した後に、塗装ポ
ンプ側と塗装ガン側とに別経路で洗浄水を供給して洗浄
することを特徴とする塗装装置の洗浄方法。
2. A cleaning method for supplying a coating material to a coating gun through a supply path by a coating pump to wash a coating apparatus for performing coating. A cleaning method for a coating apparatus, characterized in that cleaning water is supplied by supplying cleaning water to the paint gun and a separate path to perform cleaning.
【請求項3】 前記洗浄水には、エアを混入させること
を特徴とする請求項2記載の塗装装置の洗浄方法。
3. The method according to claim 2, wherein air is mixed into the cleaning water.
JP2001014414A 2001-01-23 2001-01-23 Washing device of coating device and washing method Pending JP2002210396A (en)

Priority Applications (1)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004081952A (en) * 2002-08-26 2004-03-18 Ricoh Co Ltd Coating equipment for electrophotographic photoreceptor
WO2008084783A1 (en) * 2007-01-12 2008-07-17 Honda Motor Co., Ltd. Electrostatic painting device
JP2008168232A (en) * 2007-01-12 2008-07-24 Honda Motor Co Ltd Electrostatic coating apparatus
JP2008168233A (en) * 2007-01-12 2008-07-24 Honda Motor Co Ltd Electrostatic coating apparatus
JP2010172786A (en) * 2009-01-27 2010-08-12 Nsi:Kk Apparatus and method for washing piping to be washed
JP2015514577A (en) * 2012-04-16 2015-05-21 フィニッシング ブランズ ホールディングス,インコーポレイティド Multi-component pressure tank assembly for spray coating system
CN105080912A (en) * 2015-06-15 2015-11-25 金东纸业(江苏)股份有限公司 Washing device for paint pipeline of paper machine
US9844793B2 (en) 2010-03-03 2017-12-19 Durr Systems Gmbh Atomizer and method for applying one-and multi-component coating agents
JP2019044672A (en) * 2017-08-31 2019-03-22 株式会社Screenホールディングス Pump device, process liquid supply device, substrate processing device, liquid discharge method, and liquid replacement method

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004081952A (en) * 2002-08-26 2004-03-18 Ricoh Co Ltd Coating equipment for electrophotographic photoreceptor
WO2008084783A1 (en) * 2007-01-12 2008-07-17 Honda Motor Co., Ltd. Electrostatic painting device
JP2008168232A (en) * 2007-01-12 2008-07-24 Honda Motor Co Ltd Electrostatic coating apparatus
JP2008168233A (en) * 2007-01-12 2008-07-24 Honda Motor Co Ltd Electrostatic coating apparatus
GB2458841A (en) * 2007-01-12 2009-10-07 Honda Motor Co Ltd Electrostatic coating device
GB2458841B (en) * 2007-01-12 2011-10-05 Honda Motor Co Ltd Electrostatic coating device
US8322301B2 (en) 2007-01-12 2012-12-04 Honda Motor Co., Ltd. Electrostatic coating device
JP2010172786A (en) * 2009-01-27 2010-08-12 Nsi:Kk Apparatus and method for washing piping to be washed
US9844793B2 (en) 2010-03-03 2017-12-19 Durr Systems Gmbh Atomizer and method for applying one-and multi-component coating agents
JP2015514577A (en) * 2012-04-16 2015-05-21 フィニッシング ブランズ ホールディングス,インコーポレイティド Multi-component pressure tank assembly for spray coating system
CN105080912A (en) * 2015-06-15 2015-11-25 金东纸业(江苏)股份有限公司 Washing device for paint pipeline of paper machine
JP2019044672A (en) * 2017-08-31 2019-03-22 株式会社Screenホールディングス Pump device, process liquid supply device, substrate processing device, liquid discharge method, and liquid replacement method

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