JP2002181653A - Gas detection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To overcome the disadvantage of increase in total number of gas detectors and cost-up due to required installation of detectors for gases used for every monitoring point when detecting leakage of a plurality of types of gases. SOLUTION: The system mainly comprises high coherence gas detectors 2 installed in a plurality of monitoring points, sampling gas valves 5 for starting sampling of an environmental gas from the monitoring points when gas is detected and sending through sampling piping 3, one piece of detection piping 4 connected at the confluence of a plurality of sampling piping 3, and a plurality of gas detectors 6 for identification of gas type connected to the detection piping 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas detection system, and more particularly to a gas detection system for detecting gas leaks at a plurality of locations in a place where various kinds of gases are handled, such as a semiconductor device manufacturing factory.

[0002]

2. Description of the Related Art In a facility such as a semiconductor device manufacturing plant that uses various kinds of toxic gases, a gas detector is used as a monitoring point, using a facility using the gas or a place where a leaked gas may be retained. Is installed.

If one kind of gas is used, as described in, for example, Japanese Patent Publication No. 4-79407 and Japanese Patent Laid-Open Publication No. Hei 6-307967, the atmospheric gas is sequentially sucked from a plurality of monitoring points, and Gas leaks can be detected by measuring the concentration of the sampling gas with a detector.

However, when a plurality of types of gases are handled in the same place, it is not practical to sample the gases sequentially and detect a plurality of types of gases as described above because it takes a long time to detect a leaked gas. Therefore, in general, when a plurality of types of gases are handled, as shown in FIG. 2, a plurality of types of gas detectors 6 (6A to 6N) are provided at each monitoring point 1 (1A to 1N).
Z) is installed, the atmosphere at the monitoring point is constantly sampled, and gas leakage is monitored. When gas is detected, measures such as stopping supply of gas to the gas supply system are taken.

[0005]

However, in the above-described conventional gas detection system, when detecting a plurality of types of gas leaks, it is necessary to install a detector for the gas to be used at each monitoring point. , The total number of gas detectors increased,
There is a disadvantage that the cost increases.

[0006] In addition, the number of cases where a plurality of dangerous gases are used in one apparatus increases, and even for gases having similar physical and chemical properties, control concentrations such as safety standard concentration values are different.
A detector for each gas is required.

An object of the present invention is to provide a gas detection system capable of reducing running costs without increasing the total number of gas detectors even when a plurality of types of gases are detected at a plurality of monitoring locations. Is to provide.

[0008]

A gas detection system according to the present invention is provided at a plurality of monitoring locations and is capable of detecting a plurality of types of gases.
A sampling gas valve that receives a signal from the high coherent gas detector when gas is detected, starts sampling atmospheric gas from a monitoring location where the high coherent gas detector is installed, and sends it through a sampling pipe. , One detection pipe connected to a junction of the plurality of sampling pipes, and a plurality of gas detectors respectively connected to the detection pipes for gas type identification. It is.

[0009]

Next, an embodiment of the present invention will be described. FIG. 1 is a configuration diagram of a gas detection system for describing an embodiment of the present invention.

Referring to FIG. 1, the gas detection system of the present invention is installed at a plurality of monitoring points 1 (1A to 1N),
A high coherence gas detector 2 (2A to 2N) for identifying a gas leaking part capable of detecting a plurality of types of gases, and a signal from the high coherence gas detector 2 when a gas is detected, A sampling gas valve 5 which starts sampling of the atmospheric gas from the monitoring point 1 where the coherent gas detector 2 is installed and sends it through a sampling pipe 3 provided with a flow control valve 7, and a plurality of sampling pipes 3 One detection pipe 4 connected to the junction, and this detection pipe 4
And a plurality of gas detectors 6 (6A to 6Z) for gas type identification, each of which is connected to a corresponding one of the gas detectors.

The highly coherent gas detector 2 or the gas detector 6 displays the monitoring location 1 where the gas was detected when the gas was detected, for example, in a centralized monitoring room 8,
It is configured to generate an alarm when necessary.

Further, the high interference gas detector 2 is provided with means for sending a signal for stopping the gas supply to the gas supply system when the gas is detected.

As a gas to be detected, AsH ₃ , SiH ₄ , B ₂ H ₆ , P
_{H 3, NO, H 2,} HCl, there is a plurality of SO _2, HF. These gases can be detected by the same highly coherent gas detector.

[0014] This will be described more specifically below. For example, a wafer processing chamber as a monitoring point 1A, and a gas box provided with a valve, a pressure control unit, and the like for collecting gas by a pipe from a plurality of gas distribution units and sending the gas to the wafer processing chamber as a monitoring point 1B. A system including a pump cabinet provided with a pump for discharging the atmospheric gas in the wafer processing chamber as a monitoring point 1C, and an abatement apparatus for removing the discharged gas as a monitoring point 1D. Then, these monitoring points (1A ~ 1D)
Inside, the highly coherent gas detectors 2A to 2D are installed.

Then, for example, gas leaks in the pump cabinet (monitoring point 1C), and the high interference gas detector 2
When C is activated and gas is detected, the central monitoring room indicates that gas has leaked into the pump cabinet, and an alarm is issued. At the same time, in response to a signal from the high interference gas detector 2C, each gas distribution unit supplying the processing gas to the wafer processing chamber and all valves in the gas box are closed, and the supply of the processing gas is stopped. Further, the sampling valve 5 in the monitoring location 1C is opened, the atmosphere in the pump cabinet is sent to the gas detector 6 (6A to 6Z), and the leak gas is measured. When the gas detector 6 detects a leaked gas, a leak point of the specified gas is found, so that the repairing process can be quickly performed.

As described above, in the embodiment, by installing the highly coherent gas detector at each monitoring point, it is possible to quickly know the gas leakage and to stop the gas supply. The leak can be quickly repaired and safety can be ensured.

Even if a leak is detected continuously, the supply of gas is stopped and the atmosphere at the leak is sequentially measured, so that the repair and safety of the leak can be similarly ensured.

In the above embodiment, the semiconductor device manufacturing equipment has been described, but the present invention is not limited to this.

[0019]

As described above, according to the present invention, even if a gas detector for identifying a gas type is not installed at each monitoring location, the leak location can be specified by the highly coherent gas detector and the gas can be detected. The type of gas leaked by the vessel can be specified, and instantaneous safety measures such as gas stop can be performed. Therefore, there is an effect that the introduction cost can be reduced by reducing the number of gas detectors. In addition, since the number of gas detectors that operate at all times can be reduced, the running cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a gas detection system for describing an embodiment of the present invention.

FIG. 2 is a configuration diagram of a conventional gas detection system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Monitoring point 2 High interference gas detector 3 Sampling pipe 4 Detection pipe 5 Sampling valve 6 Gas detector 7 Flow control valve 8 Centralized monitoring room

Claims (6)

[Claims] 1. A high-interference gas detector set at a plurality of monitoring locations and capable of detecting a plurality of types of gases, for identifying a gas leak location, and detecting a gas from the high-interference gas detector when a gas is detected. A sampling gas valve that receives a signal, starts sampling of the atmospheric gas from a monitoring location where the highly coherent gas detector is installed, and sends it through a sampling pipe,
Gas detection comprising: one detection pipe connected to a junction of a plurality of the sampling pipes; and a plurality of gas detectors respectively connected to the detection pipes for gas type identification. system. 2. The gas detection system according to claim 1, wherein the sampling pipe is provided with a sampling flow rate adjusting valve. 3. The high-interference gas detector according to claim 1, further comprising means for sending a signal for stopping a gas supply to a gas supply system when the gas is detected. 3. The gas detection system according to 2. 4. The gas sensor according to claim 1, wherein said highly coherent gas detector or said gas detector is connected to a display means for displaying a monitoring location where gas is detected when gas is detected. The gas detection system according to any one of the above. 5. The method according to claim 1, wherein the highly coherent gas detector or the gas detector is connected to an alarm generating unit that generates an alarm when a gas is detected. Gas detection system. 6. The gas to be detected is AsH ₃ , SiH ₄ ,
B ₂ H ₆ , PH ₃ , NO, H ₂ , HCl, SO ₂ , HF
The gas detection system according to claim 1, wherein the gas detection system is a plurality of the gas detection systems.