JPH06307967A - Gas leak detector - Google Patents

Abstract

PURPOSE:To provide a gas leak detector which can be installed at low cost while facilitating the maintenance and the fluctuation is suppressed in the sensitivity and accuracy among the detecting points. CONSTITUTION:The gas leak detector comprises a multipoint suction unit 4 for sucking gas sequentially from a plurality of points (a)-(e) for detecting leakage of gas, a gas detector 3 for measuring the concentration of sampling gas fed from the multipoint suction unit 4 to produce an electric signal corresponding to the concentration, and an alarm 1 for receiving the electric signal, displaying the detection point when the electric signal is higher than a predetermined value, and producing an alarm.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for detecting gas leaks at a plurality of points in a silane gas pipe or a fluorine gas pipe in a semiconductor manufacturing factory.

[0002]

2. Description of the Related Art In general, a gas handled by a gas leak detection device may be toxic or, if leaked over an allowable level, may react with air or another gas to ignite or explode. Many. For this reason, gas detectors are installed in places where there is a sealed part due to construction such as double pipes, or where gas retention may occur during gas leakage. Usually, this gas detector sucks a small amount of gas from the accumulation area, detects the presence or absence of leakage, and converts it into an electric signal.

[0003]

In the conventional gas leak detection device, when there are a large number of places where gas may leak and accumulate, it is necessary to install gas detectors at all the places. Therefore, the number of gas detectors in the gas leakage detection device increases, and it is very difficult to keep all of them at the same sensitivity and accuracy, and it is necessary to frequently perform maintenance inspections and operation / function tests. Also, the installation cost was high.

Therefore, an object of the present invention is to provide a gas leakage detection apparatus which has a low installation cost, is easy to maintain, and has little variation in sensitivity and accuracy between detection points.

[0005]

A gas leak detection device of the present invention is provided with a multi-point suction device for sequentially sucking gas from a plurality of detection points where gas leakage should be detected, and a multi-point suction device. A gas detector that measures the concentration of the sampling gas and generates an electric signal according to the concentration, and an alarm device that receives the electric signal and displays the detection point when the magnitude is above a predetermined value and issues an alarm. Prepared for configuration.

[0006]

In the gas leakage detection device of the present invention, one gas detector is provided for a plurality of detection points, so that the installation space and installation cost can be reduced. And it is not necessary to adjust many gas detectors to the same sensitivity and the same accuracy. Moreover, the detection point having an abnormality can be known by the display of the alarm device.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIG.

Reference numerals a to e and f to j are detection points provided on the pipes for which gas leakage should be monitored. Reference numeral 1 is a display / alarm panel for displaying a leak location and issuing an alarm, and 2 is a gas indicator with contacts. A gas detector 3 measures the concentration of the leaked gas. Reference numeral 4 denotes a multi-point suction device that switches the detection points a to e and f to j at predetermined time intervals, and includes a sequencer 5, a suction pump 6 and a plurality of control valves 7.

In the gas leakage detection device thus constructed, the multipoint suction device 4 sequentially opens and closes the control valve 7 by the sequencer 5 to sequentially suck and sample the gases at the detection points a to e and f to j. Detection points a to e, f to
If there is a gas leak at j, the gas detector 3 converts the sampled gas concentration into an electrical signal and sends the signal to the gas indicator 2. When the magnitude of this signal is equal to or larger than a predetermined value, the symbol of the detection point is displayed on the display / alarm board 1 to issue an alarm. Then, a hold signal is sent to the sequencer 5 to hold the switching of the valve 7, the valve is kept open, and the leak gas accumulated at the detection point is discharged by the suction pump 6. Next, after treating the leakage point, reset it to the normal state.

As described above, in the present embodiment, the sampling gas from a plurality of detection points is measured by one gas detector. Therefore, even if there are many detection points where gas leakage should be detected, a small number of gas detections can be made. This reduces installation costs, facilitates maintenance, and reduces variations in sensitivity and accuracy between detection points.

[0011]

As described above, according to the present invention, even when there are many detection points where gas leakage should be detected, only a small number of gas detectors are required, installation cost is reduced, maintenance is facilitated, and sensitivity between detection points is increased. Therefore, the variation in accuracy can be reduced.

[Brief description of drawings]

FIG. 1 is a block diagram of a gas leakage detection device according to an embodiment of the present invention.

[Explanation of symbols]

1 ... Display alarm board 2 ... Gas indicator 3 ... Gas detector 4 ... Multipoint suction device 5 ... Sequencer 6 ... Suction pump 6 ... Suction pump 7 ... Control valves a to j ... Detection points

Claims (2)

[Claims] 1. A multi-point suction device for sequentially sucking gas from a plurality of detection points where gas leakage should be detected, and a concentration of sampling gas supplied from this multi-point suction device, and an electric signal corresponding to the concentration. A gas leak detection device, comprising: a gas detector for generating an electric signal; and an alarm device for receiving an electric signal and displaying a detection point when the magnitude of the electric signal is a predetermined value or more to generate an alarm. 2. The multipoint suction device comprises a plurality of valves connected to a plurality of detection points, a suction pump in which these valves are collectively connected, and a sequencer for sequentially opening and closing the valves at predetermined time intervals. 2. The method according to claim 1, further comprising:
The gas leak detection device described.