JP2002178249A - Optical component machining method - Google Patents

Optical component machining method

Info

Publication number
JP2002178249A
JP2002178249A JP2000378396A JP2000378396A JP2002178249A JP 2002178249 A JP2002178249 A JP 2002178249A JP 2000378396 A JP2000378396 A JP 2000378396A JP 2000378396 A JP2000378396 A JP 2000378396A JP 2002178249 A JP2002178249 A JP 2002178249A
Authority
JP
Japan
Prior art keywords
lens
tool
optical component
processing
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000378396A
Other languages
Japanese (ja)
Inventor
Tsukasa Nagayasu
司 永安
Atsushi Tomita
淳資 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2000378396A priority Critical patent/JP2002178249A/en
Publication of JP2002178249A publication Critical patent/JP2002178249A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To prevent sludge, etc., from sticking and remaining on an optical component after machining. SOLUTION: In the grinding and polishing works pressurizing a lens 1 onto the surface of a tool 2 such as a fixed abrasive grain polishing tool and swinging the lens 1 while rotating the tool 2 at high speed, the lens sludge, etc., remain on the work surface of the lens 1 by burning in finishing the machining. To prevent the generation of such adhesions, the temperature of water or abrasive liquid L fed from a nozzle 6 is controlled to a low temperature of 10 deg.C or less.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、レンズ等の光学部
品の研削・研磨加工において、加工終了後の光学部品の
被加工面に、光学部品の主成分からなるスラッジや、固
定砥粒工具等の樹脂および砥粒等が付着物として残留す
るのを防ぐことのできる光学部品加工方法に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding and polishing process for an optical component such as a lens, on which a sludge composed mainly of the optical component, a fixed abrasive tool, etc. The present invention relates to an optical component processing method capable of preventing resin, abrasive grains, and the like from remaining as attached matter.

【0002】[0002]

【従来の技術】従来、レンズ等の光学部品の研削・研磨
加工において、加工工具として固定砥粒工具等を用いた
場合に、砥粒等が付着物として被加工面に残留し、光学
部品の品質を低下させるという問題がある。これを防ぐ
ために、例えば、特開平6−63856号公報に開示さ
れた装置が知られている。
2. Description of the Related Art Conventionally, when a fixed abrasive tool or the like is used as a processing tool in the grinding and polishing of an optical component such as a lens, the abrasive or the like remains on the surface to be processed as an adhered substance, and There is a problem of deteriorating quality. In order to prevent this, for example, an apparatus disclosed in Japanese Patent Application Laid-Open No. 6-63856 is known.

【0003】この装置は、図3に示すように、ワークで
あるレンズ101を支持する回転ホルダ102を、通気
孔103から連結管104を経て電磁弁105と連通す
るように取り付けたもので、電磁弁105は、不図示の
真空吸着装置と連通しており、コントローラ107によ
り吸着の切り替えができる。
In this apparatus, as shown in FIG. 3, a rotary holder 102 for supporting a lens 101, which is a work, is attached so as to communicate with a solenoid valve 105 from a ventilation hole 103 via a connecting pipe 104. The valve 105 is in communication with a vacuum suction device (not shown), and the controller 107 can switch the suction.

【0004】レンズ101は回転ホルダ102に吸着保
持され、回転ホルダ102は、エアーシリンダ106に
よって上下動される。
The lens 101 is held by suction on a rotary holder 102, and the rotary holder 102 is moved up and down by an air cylinder 106.

【0005】このようなレンズ研磨装置によって、固定
砥粒で作製した加工工具をレンズ101に当接させ、加
工工具を回転させて研磨加工を行なう。所定時間加工し
たのち、加工工具回転中にコントローラ107により電
磁弁105が開かれ、レンズ101が回転ホルダ102
に吸着される。このように、加工工具の回転中にレンズ
101を加工工具から離脱させる。
With such a lens polishing apparatus, a processing tool made of fixed abrasive grains is brought into contact with the lens 101, and the processing tool is rotated to perform polishing. After machining for a predetermined time, the solenoid valve 105 is opened by the controller 107 while the machining tool is rotating, and the lens 101 is
Is adsorbed. Thus, the lens 101 is detached from the processing tool during the rotation of the processing tool.

【0006】すなわち、固定砥粒を用いて作製した工具
の回転中に、レンズ等の光学部品を離脱させることで、
加工終了後の被加工面に砥粒等の付着物が残留するのを
回避するもので、製品である光学部品の表面には砥粒等
が埋没することなく、良好なレンズ性能が得られる。
That is, during the rotation of a tool manufactured using fixed abrasive grains, an optical component such as a lens is detached,
It is intended to prevent the adhered matter such as abrasive grains from remaining on the surface to be processed after the processing is completed, and good lens performance can be obtained without abrasive grains or the like being buried in the surface of the optical component as a product.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、上記従
来の技術では、前述のように複雑なレンズ吸着機構を必
要とし、このような機構を持たない一般的な加工装置で
は、固定砥粒研磨工具等の回転中に工具とレンズとを離
脱させることは非常に難しい。従って、使用する研磨装
置や加工方式の選定上、汎用性に欠けるという未解決の
課題がある。
However, the above-mentioned prior art requires a complicated lens suction mechanism as described above, and a general processing apparatus without such a mechanism requires a fixed abrasive polishing tool or the like. It is very difficult to separate the tool and the lens during rotation of the lens. Therefore, there is an unsolved problem of lack of versatility in selecting a polishing apparatus and a processing method to be used.

【0008】本発明は、上記従来の技術の有する未解決
の課題に鑑みてなされたものであり、レンズ吸着機構等
を備えていない加工装置においても、光学部品の被加工
面にスラッジや砥粒等の付着物が残留するのを簡単かつ
効率的に回避できる光学部品加工方法を提供することを
目的とするものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned unresolved problems of the prior art, and even in a processing apparatus not provided with a lens suction mechanism or the like, sludge or abrasive grains are formed on a surface to be processed of an optical component. It is an object of the present invention to provide an optical component processing method capable of easily and efficiently avoiding the remaining of such deposits.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するた
め、本発明の光学部品加工方法は、光学部品と加工工具
の間に水または研磨液を供給しながら前記光学部品と前
記加工工具を摺り合わせて加工する光学部品加工方法で
あって、前記水または前記研磨液を所定の低温度に管理
することで、前記光学部品の被加工面の付着物を低減す
ることを特徴とする。
In order to achieve the above object, an optical component processing method of the present invention slides the optical component and the processing tool while supplying water or a polishing liquid between the optical component and the processing tool. An optical component processing method for processing together, wherein the water or the polishing liquid is controlled at a predetermined low temperature to reduce the amount of deposits on a surface to be processed of the optical component.

【0010】水または研磨液を10℃以下の低温度に管
理するとよい。
The water or polishing liquid is preferably controlled at a low temperature of 10 ° C. or less.

【0011】[0011]

【作用】固定砥粒研磨工具等の加工工具によってレンズ
等の光学部品を加工すると、加工終了後の光学部品の被
加工面に、レンズ成分からなるスラッジや、加工工具の
樹脂および砥粒等からなる付着物が残留し、そのままで
は光学部品の光学性能の劣化を招く。そこで、加工中の
光学部品と加工工具の間に、10℃以下の低温度に管理
された水または研磨液を供給し、光学部品の被加工面に
対するスラッジや砥粒等の異物の焼き付きを防ぐ。
[Function] When an optical component such as a lens is processed by a processing tool such as a fixed abrasive polishing tool, a sludge composed of a lens component, a resin and abrasive grains of a processing tool are formed on a surface to be processed of the optical component after the processing. Adhered matter remains, and as it is, deterioration of the optical performance of the optical component is caused. Therefore, water or a polishing liquid controlled at a low temperature of 10 ° C. or less is supplied between the optical component being processed and the processing tool to prevent sticking of foreign substances such as sludge and abrasive grains to the surface to be processed of the optical component. .

【0012】加工終了時に、加工工具を回転させたまま
で光学部品の被加工面から離脱させる等の複雑な工程や
手段を用いることなく、水または研磨液の簡単な温度管
理のみで被加工面の付着物発生を防ぎ、高品質な光学部
品の生産効率を大幅に向上できる。
[0012] At the end of machining, without using a complicated process or means such as detaching the machining tool from the machining surface of the optical component while rotating, the machining surface of the machining surface can be controlled only by simple temperature control of water or a polishing liquid. The generation of deposits can be prevented, and the production efficiency of high-quality optical components can be greatly improved.

【0013】[0013]

【発明の実施の形態】加工工具である固定砥粒研磨工具
は、酸化セリウム等の砥粒を樹脂系のボンドに混ぜ、攪
拌後に固めたものである。研磨加工で一般的に使用され
ている研磨パッドであるポリウレタンシートと比較する
と、ポーラス(気泡)含有率が数%であり非常に緻密な
組成となっている。このため、工具を高速回転させ所定
の加工圧でレンズを押圧し、両者の相対移動によって摺
り合わせて加工した場合、固定砥粒研磨工具の加工面と
レンズの被加工面間の密着度が高く、しかも、高速回転
によりレンズの被加工面には相当の研磨加工熱が発生し
ている。
BEST MODE FOR CARRYING OUT THE INVENTION A fixed abrasive polishing tool, which is a working tool, is one in which abrasive grains such as cerium oxide are mixed with a resin-based bond and solidified after stirring. Compared with a polyurethane sheet, which is a polishing pad generally used in polishing, it has a porous (bubble) content of several percent and a very dense composition. For this reason, when the tool is rotated at a high speed and the lens is pressed with a predetermined processing pressure and the two are rubbed together by relative movement, the degree of adhesion between the processing surface of the fixed abrasive polishing tool and the processing surface of the lens is high. In addition, considerable polishing heat is generated on the surface to be processed of the lens by the high-speed rotation.

【0014】このような加工条件でレンズの加工を行な
うと、固定砥粒研磨工具の加工面とレンズの被加工面間
に研磨進行の過程で発生したレンズの主成分によるスラ
ッジや工具の砥粒が、工具の回転停止と同時にレンズ表
面に瞬時に焼き付き、付着物として残留することにな
る。
When the lens is processed under such processing conditions, the sludge and the abrasive grains of the tool are mainly generated between the processing surface of the fixed abrasive polishing tool and the surface to be processed of the lens due to the main component of the lens generated during the progress of polishing. However, when the rotation of the tool is stopped, it is instantaneously seized on the lens surface and remains as an adhered substance.

【0015】この付着物を分析した結果、レンズの主成
分が大半であったことや、残留した付着物は洗浄機等で
の洗浄では除去できないが、かみそりでけずると除去す
ることができ、しかも、除去後の被加工面には汚れやし
み等が残らないことから、比較的軽度の焼き付き現象と
判断できた。
As a result of analyzing the deposits, it was found that the main components of the lens were mostly contained, and the remaining deposits could not be removed by washing with a washing machine or the like, but could be removed by scraping with a razor. Since no stains or stains were left on the processed surface after the removal, it was determined that the phenomenon was a relatively slight burn-in phenomenon.

【0016】このような軽度の焼き付きは、研磨加工時
の加工熱の低減を図ることで効果的に回避できるため、
焼き付き現象によるレンズスラッジ等異物の付着・残留
物発生を防止するには、固定砥粒研磨工具等による加工
工程で用いる水や、低濃度研磨スラリー等研磨液の温度
を、例えば10℃以下の低温度に管理することが有効で
あることが分かった。
Such a slight burn-in can be effectively avoided by reducing the processing heat during the polishing processing.
In order to prevent the adhesion of foreign substances such as lens sludge and the generation of residues due to the seizure phenomenon, the temperature of water used in a processing step using a fixed abrasive polishing tool or the like or a polishing liquid such as a low-concentration polishing slurry is reduced to, for example, 10 ° C. or lower. It was found that controlling the temperature was effective.

【0017】図1は一実施の形態を説明するもので、光
学部品であるレンズ1の研磨加工において、固定砥粒研
磨工具(加工工具)である工具2は、不図示の研磨機主
軸に取り付けられ回転する。レンズ1は、レンズホルダ
3に保持されカンザシ4の先端突起部にセットされて、
工具2の加工面に当接され、紙面上下方向に不図示のエ
アーシリンダを用いて押圧駆動される。
FIG. 1 illustrates an embodiment. In polishing a lens 1 as an optical component, a tool 2 as a fixed abrasive polishing tool (working tool) is attached to a main shaft of a polishing machine (not shown). And rotate. The lens 1 is held by the lens holder 3 and set on the tip projection of the screwdriver 4,
It is brought into contact with the processing surface of the tool 2 and is pressed and driven in the vertical direction of the paper using an air cylinder (not shown).

【0018】カンザシアーム5は、揺動軸を介して不図
示の偏心カムをモータ駆動してレンズ1を円弧揺動させ
る。
The kansashi arm 5 drives the eccentric cam (not shown) with a motor via a swing shaft to swing the lens 1 in an arc.

【0019】ノズル6はクーリングポンプ7より供給さ
れる水または研磨液Lをレンズ1と工具2に向かって噴
出する。
The nozzle 6 jets water or polishing liquid L supplied from a cooling pump 7 toward the lens 1 and the tool 2.

【0020】次に、研磨加工中の作用を説明する。Next, the operation during the polishing process will be described.

【0021】この研磨装置において、レンズ1は研磨機
主軸に固定された工具2にカンザシ4を介して押圧され
曲率半径精度を維持し、かつ、加工時間の短縮を両立さ
せうる高速回転研磨を行なう。この間、レンズ1と工具
2に向かってノズル6からクーリングポンプ7により供
給される水または研磨液Lを飛散させる。
In this polishing apparatus, the lens 1 is pressed by the tool 2 fixed to the main shaft of the polishing machine through the wrench 4 to perform high-speed rotational polishing that can maintain the curvature radius accuracy and shorten the processing time. . During this time, water or polishing liquid L supplied from the nozzle 6 by the cooling pump 7 toward the lens 1 and the tool 2 is scattered.

【0022】このとき、クーリングポンプとしてタイテ
ック株式会社製のCH−151AF等を使用し、水また
は研磨液Lの液温を低温管理する。
At this time, CH-151AF manufactured by Taitec Corporation or the like is used as a cooling pump, and the temperature of the water or the polishing liquid L is controlled at a low temperature.

【0023】液温の低温管理に関して、固定砥粒研磨工
具を用いる研削・研磨加工においての付着物の組成分析
や加工プロセスについて実験・検討を行なった。
Regarding the control of the liquid temperature at a low temperature, experiments and examinations were conducted on the composition analysis of the deposits and the processing process in grinding and polishing using a fixed abrasive polishing tool.

【0024】図2は、研磨液の液温の変化に対する加工
実験での付着物発生率を表すグラフであり、低温になる
につれて付着物の発生率が大幅に低減することが分か
る。特に、付着物の発生率が0%になったのは、水また
は研磨液の液温を10℃以下にして加工した場合である
ことが判明した。
FIG. 2 is a graph showing the rate of occurrence of deposits in a processing experiment with respect to a change in the temperature of the polishing liquid. It can be seen that the rate of occurrence of deposits decreases significantly as the temperature decreases. In particular, it was found that the rate of occurrence of the deposits was 0% when the processing was carried out by setting the temperature of water or the polishing liquid to 10 ° C. or lower.

【0025】また、研磨加工中の加工熱排除への付加的
な対策として、固定砥粒研磨工具にレンズを押し付ける
加工圧を研磨加工終了前の一定時間低圧にして加工する
方法や、固定砥粒工具軸の回転数を研磨加工終了前の一
定時間において低回転数で加工する方法も、残留物を低
減するうえで効果があると確認された。
Further, as an additional measure against the removal of processing heat during polishing, a method in which the processing pressure for pressing the lens against the fixed abrasive polishing tool is reduced for a certain period of time before the end of the polishing processing, It was also confirmed that a method in which the number of revolutions of the tool shaft was processed at a low number of revolutions for a certain period of time before the end of the polishing process was effective in reducing residues.

【0026】これらの方法を、液温管理と併用すること
で、付着物低減の効果がより一層向上する。
By using these methods in combination with the liquid temperature control, the effect of reducing deposits is further improved.

【0027】本実施の形態は、上述のように、レンズ等
の品質を低下させるスラッジ等の付着・残留の原因が、
研磨加工時の加工熱と密着度による焼き付き現象である
と判断して、この焼き付き現象を防ぐために、加工工程
で用いる水または研磨液を低温管理するものである。
According to the present embodiment, as described above, the cause of adhesion and residual sludge and the like that deteriorate the quality of a lens and the like is as follows.
It is determined that the burn-in phenomenon is caused by the processing heat and the degree of adhesion during the polishing process, and water or the polishing liquid used in the processing step is controlled at a low temperature in order to prevent the burn-in phenomenon.

【0028】これによって、加工後のレンズ等光学部品
の被加工面の残留物が大幅に低減し、良好なレンズ性能
等を有するレンズ等を極めて効率的に生産できる。
As a result, the residue on the processed surface of the optical component such as the processed lens is greatly reduced, and a lens or the like having good lens performance can be produced very efficiently.

【0029】次に実施例を説明する。Next, an embodiment will be described.

【0030】レンズ材料であるガラスブランクの材料は
LaSF016、ガラスブランクの有効直径寸法φは
6.5mm、加工曲率半径Rは4.1mmである。
The material of the glass blank, which is a lens material, is LaSF016, the effective diameter dimension φ of the glass blank is 6.5 mm, and the processing curvature radius R is 4.1 mm.

【0031】研磨工程での加工圧は1.2kgf(1
1.8Pa)で、水または研磨液の液温を10℃±2に
低温管理した。
The processing pressure in the polishing step is 1.2 kgf (1
At 1.8 Pa), the temperature of water or the polishing solution was controlled at a low temperature of 10 ° C. ± 2.

【0032】研磨加工工程での固定砥粒研磨工具の主軸
回転数は、一次回転速度2000rpm、加工時間は1
20秒で、レンズホルダは従属連れ回り回転を行なっ
た。
The main spindle rotation speed of the fixed-abrasive polishing tool in the polishing step is 2000 rpm for the primary rotation speed, and the processing time is 1
At 20 seconds, the lens holder made a subordinate rotation.

【0033】加工後のレンズの表面にはスラッジ等によ
る付着物の発生は0%であった。
On the surface of the processed lens, the generation of deposits due to sludge or the like was 0%.

【0034】[0034]

【発明の効果】本発明は上述のとおり構成されているの
で、以下に記載するような効果を奏する。
Since the present invention is configured as described above, the following effects can be obtained.

【0035】加工終了時に加工工具を回転させたままで
レンズを離脱させるためのレンズ吸着機構等を必要とす
ることなく、極めて簡単かつ効果的に、光学部品の被加
工面の付着物による汚染を回避できる。
At the end of processing, there is no need for a lens suction mechanism or the like for detaching the lens while rotating the processing tool, and extremely easily and effectively avoids contamination of the surface to be processed of the optical component by deposits. it can.

【0036】これによって、高品質なレンズ等の生産効
率を大幅に改善できる。
As a result, the production efficiency of high quality lenses and the like can be greatly improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】一実施の形態による光学部品の加工方法を説明
する図である。
FIG. 1 is a diagram illustrating a method for processing an optical component according to an embodiment.

【図2】液温と付着物発生率の関係を示すグラフであ
る。
FIG. 2 is a graph showing a relationship between a liquid temperature and an attached matter generation rate.

【図3】一従来例による光学部品の加工方法を示す図で
ある。
FIG. 3 is a view showing a method of processing an optical component according to a conventional example.

【符号の説明】[Explanation of symbols]

1 レンズ 2 工具 4 レンズホルダ 6 ノズル 1 lens 2 tool 4 lens holder 6 nozzle

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 3C047 FF09 FF19 3C049 AA02 AA07 AC04 CB01 3C058 AA04 AA11 AA16 AB01 AB04 AB06 AC04 BA02 BA08 BA12 CA01 CA06  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C047 FF09 FF19 3C049 AA02 AA07 AC04 CB01 3C058 AA04 AA11 AA16 AB01 AB04 AB06 AC04 BA02 BA08 BA12 CA01 CA06

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 光学部品と加工工具の間に水または研磨
液を供給しながら前記光学部品と前記加工工具を摺り合
わせて加工する光学部品加工方法であって、前記水また
は前記研磨液を所定の低温度に管理することで、前記光
学部品の被加工面の付着物を低減することを特徴とする
光学部品加工方法。
1. A method for processing an optical component by rubbing the optical component and the processing tool while supplying water or a polishing liquid between the optical component and the processing tool, wherein the water or the polishing liquid is supplied to a predetermined position. An optical component processing method, characterized by reducing the amount of deposits on the surface to be processed of the optical component by controlling the temperature to a low temperature.
【請求項2】 水または研磨液を10℃以下の低温度に
管理することを特徴とする請求項1記載の光学部品加工
方法。
2. The method according to claim 1, wherein the temperature of the water or the polishing liquid is controlled to a low temperature of 10 ° C. or less.
【請求項3】 加工工具が、固定砥粒研磨工具であるこ
とを特徴とする請求項1または2記載の光学部品加工方
法。
3. The optical component processing method according to claim 1, wherein the processing tool is a fixed abrasive polishing tool.
JP2000378396A 2000-12-13 2000-12-13 Optical component machining method Pending JP2002178249A (en)

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Country Link
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012016779A (en) * 2010-07-08 2012-01-26 Disco Corp Machining method of lithium tantalate
JP2012135854A (en) * 2010-12-28 2012-07-19 Disco Corp Method for grinding lithium tantalate
WO2013153880A1 (en) * 2012-04-10 2013-10-17 旭硝子株式会社 Method for polishing glass substrate
CN113319681A (en) * 2021-05-08 2021-08-31 莆田市晟熠光电科技有限公司 Polishing equipment and method for large-rise deep concave spherical lens
CN113560989A (en) * 2021-04-29 2021-10-29 江苏宇迪光学股份有限公司 Production method for processing high-precision lens by novel polishing solution

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012016779A (en) * 2010-07-08 2012-01-26 Disco Corp Machining method of lithium tantalate
JP2012135854A (en) * 2010-12-28 2012-07-19 Disco Corp Method for grinding lithium tantalate
WO2013153880A1 (en) * 2012-04-10 2013-10-17 旭硝子株式会社 Method for polishing glass substrate
CN113560989A (en) * 2021-04-29 2021-10-29 江苏宇迪光学股份有限公司 Production method for processing high-precision lens by novel polishing solution
CN113319681A (en) * 2021-05-08 2021-08-31 莆田市晟熠光电科技有限公司 Polishing equipment and method for large-rise deep concave spherical lens
CN113319681B (en) * 2021-05-08 2022-08-12 莆田市晟熠光电科技有限公司 Polishing equipment and method for large-rise deep concave spherical lens

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