JP2001198784A - Method of grinding and polishing optical element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical element machining method capable of preventing the sludge of material for optical elements and abrasion grains from sticking onto the machined surface of the optical elements in grinding and polishing systems without a suction mechanism for sucking optical elements such as lenses or the like. SOLUTION: In grinding and polishing a lens 4, an optical element, by making the lens 4 abut on a fixed abrasive grain tool 1 to rotate the fixed abrasive grain tool 1 and pressing the lens 4 against the fixed abrasive grain tool 1 at a specified pressure, the machining heat generated between the lens 4 and the fixed abrasive grain tool 1 is reduced by changing machining conditions such as machining pressure and revolution in at least two stages, that is, machining the lens 4 at a lower machining pressure or at a lower revolution and further weakening the close adhesion strength between them. This can prevent the sludge of lens material and resin and the grain of the fixed abrasive grain tool from sticking onto the machine surface of the lens, improving the optical performance of the lens.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for grinding and polishing optical elements such as lenses using a fixed abrasive tool.
In particular, after processing such as grinding and polishing of an optical element such as a lens, sludge of a main component of the optical element material, resin of a fixed abrasive tool, and sludge such as abrasive grains adhere or adhere to the surface to be processed of the optical element. The present invention relates to a processing method, such as grinding and polishing of an optical element, which can prevent the occurrence of such a phenomenon.

[0002]

2. Description of the Related Art Conventionally, in processing such as grinding and polishing of an optical element such as a lens, abrasive grains such as cerium oxide are mixed with a resin-based bond as a processing tool, and then solidified after stirring to form a processed surface into the shape of the optical element. In some cases, a fixed abrasive tool prepared in correspondence with the tool is used. This type of fixed abrasive tool has a porous (bubble) content of several percent and a very dense composition as compared with a polyurethane sheet, which is a polishing pad generally used, and therefore has a predetermined density. When processing at a processing pressure and a predetermined number of rotations, the degree of adhesion between the processing surface of the fixed abrasive tool and the processing surface of the optical element is extremely high, and
Due to the high speed rotation, considerable processing heat is generated on the processing surface of the optical element. The sludge of the lens material or the sludge of the fixed abrasive tool adheres or adheres to the surface to be processed of the optical element such as the lens which has been subjected to processing such as grinding and polishing in such a state. It is known that inconvenience of deteriorating optical performance occurs.

In processing such as grinding and polishing of an optical element using such a fixed abrasive tool, it is necessary to prevent the above-mentioned deposits from adhering to the surface to be processed of the optical element and obtain good optical performance. As a processing method such as grinding and polishing of an optical element that can be performed, a processing method described in JP-A-6-63856 has been proposed.

In the working method described in the above publication, a vacuum suction mechanism for sucking and holding an optical element on a rotating holder of a holding portion for holding the optical element and detaching the optical element from a processing tool is provided. Without adsorbing the optical element to the rotating holder, the optical element is brought into contact with a processing tool made of fixed abrasive, and normal processing is performed by rotating the processing tool and swinging the upper shaft, and after a predetermined processing time has elapsed During the rotation of the processing tool, the vacuum suction mechanism is activated, the optical element is suctioned to the rotating holder, the processing surface of the optical element is separated from the rotating processing tool, and it is made with fixed abrasive. By removing the optical element such as a lens from the processing tool during the rotation of the processing tool, the processing surface of the optical element does not bury the abrasive grains and the like, and further, the abrasive grains and the like do not adhere. Optical performance It has a good optical element is obtained.

[0005]

However, in the processing method such as grinding and polishing of an optical element described in the above-mentioned publication, the work surface of the optical element is separated from the processing tool during rotation of the fixed abrasive tool. In addition, a vacuum suction mechanism for holding the optical element by suction is required, and a general grinding / polishing processing apparatus that does not have such a vacuum suction mechanism is used during the rotation of the fixed abrasive tool. It is very difficult to separate the fixed abrasive tool from the optical element, and the conventional processing method described above has a problem that it lacks versatility in selecting a processing apparatus and a processing method to be used.

The present invention has been made in view of the above-mentioned unsolved problems of the prior art, and is directed to a processing method such as grinding and polishing which does not have a suction mechanism for sucking an optical element such as a lens. Also, an object of the present invention is to provide a method of grinding and polishing an optical element that can prevent the generation or adhesion of sludge such as sludge or abrasive grains of an optical element material on a surface to be processed of an optical element. is there.

[0007]

Means for Solving the Problems The present inventors grind an optical element such as a lens using a fixed abrasive tool in a processing method such as grinding and polishing that does not have a suction mechanism for sucking an optical element. -When polishing, after extensive processing, to study whether to prevent sludge such as optical element material or abrasive grains from adhering or sticking to the surface to be processed of the optical element,
Deposits that adhere to or adhere to the processing surface of optical elements such as lenses have extremely high adhesion between the fixed abrasive tool and the processing surface of the optical element during processing such as grinding and polishing with a fixed abrasive tool. And, due to the high speed rotation of the fixed abrasive tool, considerable processing heat is generated on the processing surface of the optical element, so that the processing progresses between the processing surface of the fixed abrasive tool and the processing surface of the optical element. The sludge of the remaining optical element material and the resin and the abrasive of the fixed abrasive tool are found to adhere or stick to the surface to be machined at the same time or at the instant when the fixed abrasive tool is stopped, Furthermore, when these deposits were analyzed, the main components of the optical element materials such as lenses were mostly contained, and these deposits could not be removed by washing with a washing machine or the like, but could be removed by digging with a razor. ,And Since there is no dirt or stain left on the work surface after leaving, it is possible to judge that the seizure phenomenon is mild, and from these facts, it is possible to process the fixed abrasive tool and the work surface during processing. By reducing heat and adhesion,
It has been found that adhesion or sticking of sludge such as an optical element material due to the burning phenomenon can be prevented,
The present invention has been completed.

That is, in the method of grinding and polishing an optical element according to the present invention, the surface to be processed of the optical element is brought into contact with a fixed abrasive tool, the fixed abrasive tool is rotated, and the optical element is pressed at a predetermined processing pressure. In the grinding / polishing method for an optical element, in which the optical element is ground and polished by pressing the optical element, the processing conditions of the optical element are changed in at least two stages, and a certain time before the completion of the processing, the processing surface of the optical element It is characterized in that processing is performed by changing to processing conditions that reduce the processing heat and the degree of adhesion generated between the tool and the fixed abrasive tool.

In the method of grinding and polishing an optical element according to the present invention, the surface to be processed of the optical element is brought into contact with a fixed abrasive tool, the fixed abrasive tool is rotated, and the optical element is pressed at a predetermined working pressure. In the grinding / polishing method of an optical element, in which the optical element is ground and polished by pressing, the processing pressure is changed to at least two stages so that the pressure is increased, and the processing is performed at a low processing pressure for a certain time before the completion of the processing. It is characterized by the following.

In the method for grinding and polishing an optical element according to the present invention, a low processing pressure applied for a certain period of time before the completion of the processing is used.
It is preferable to set the weight of the upper shaft component of the processing apparatus to be equal to or less than its own weight.

Further, in the method of grinding and polishing an optical element according to the present invention, the surface to be processed of the optical element is brought into contact with a fixed abrasive tool, the fixed abrasive tool is rotated, and the optical element is pressed at a predetermined processing pressure. In the grinding / polishing method of an optical element for grinding / polishing an optical element by pressing in such a manner that the number of rotations for rotating the fixed abrasive tool is changed in at least two stages and rotated, and a fixed time before the end of the processing. Is processed at a low rotation speed.

Further, in the method of grinding and polishing an optical element according to the present invention, the surface to be processed of the optical element is brought into contact with a fixed abrasive tool, the fixed abrasive tool is rotated, and the optical element is pressed at a predetermined processing pressure. In the grinding / polishing method of an optical element in which the optical element is ground and polished by pressing with water, water or a low-concentration polishing liquid controlled at a low temperature is supplied between the optical element and a fixed abrasive tool, and the The element is ground and polished, and the temperature of the water or the low-concentration polishing liquid is preferably set and controlled at 10 ° C. or less.

[0013]

According to the grinding / polishing method for an optical element of the present invention, in the processing such as grinding / polishing of an optical element such as a lens using a tool made of fixed abrasive grains, a predetermined time before the completion of the processing is obtained. By changing the processing conditions such as lowering the processing pressure or lowering the rotation speed of the fixed abrasive tool,
Alternatively, by lowering the temperature of water or a low-concentration polishing solution, the processing heat generated between the fixed abrasive tool and the optical element can be reduced, and the adhesion between the two can be reduced. This can prevent the sludge of the optical element material and the sludge of the resin and abrasive grains of the fixed abrasive tool from adhering or sticking to the surface to be processed of the optical element, and the grinding of the optical element such as a lens. In the polishing process, an optical element having a predetermined accuracy can be reliably and efficiently manufactured.

[0014]

Embodiments of the present invention will be described with reference to the drawings.

(First Embodiment) FIG. 1 is a schematic configuration diagram of a processing apparatus for performing a processing method such as grinding and polishing of an optical element of the present invention.

In FIG. 1, reference numeral 1 denotes a fixed abrasive tool for grinding and polishing made with fixed abrasive grains. Specifically, abrasive grains such as cerium oxide are mixed with a resin-based bond, and after agitation, a solidified surface is formed. Is a fixed abrasive tool produced in accordance with the shape of an optical element such as a lens. The fixed abrasive tool 1 is attached to a tool shaft 2 of a processing apparatus, is rotationally driven by a spindle rotating motor 3, and normally rotates at a speed of about 2000 rpm. Reference numeral 4 denotes a lens which is an optical element. A lens holder 5 for holding the lens 4 is set on a tip end of a kansetsu 6 held by a kansashi arm 7 so that the lens 4 contacts the processing surface of the fixed abrasive tool 1. Contact Kansashi Arm 7
The lens 4 is swung by a protractor or an eccentric cam (not shown) driven by a motor (not shown) via a swing shaft 8.
Is swung in an arc shape on the fixed abrasive tool 1. In addition, the kansashi arm 7 moves in the vertical direction on the paper by the operation of the air cylinder 9 attached to the kansashi arm 7,
The lens 4 is pressed or pulled (in order to reduce the weight of the upper shaft component of the processing apparatus) in the vertical direction on the paper via the screw 6.

The control means (controller) 10 controls various motors and processing pressure of the processing apparatus. In the present embodiment, the processing pressure is controlled in accordance with the elapse of the processing time for grinding and polishing the lens 4. Is controlled in at least two stages, and the operation of the air cylinder 9 is controlled by switching a solenoid valve (not shown) connected to the air cylinder 9. That is,
The control means 10 performs the primary processing at a high processing pressure so that the maintenance of the radius of curvature of the fixed abrasive tool and the reduction of the processing time can be achieved at the same time, and the degree of adhesion during the processing. A regulator and timer (not shown) for primary processing and a regulator for secondary processing that are controlled so that they can be divided into secondary processing at a low processing pressure that can reduce processing heat And a timer (not shown), so that the electromagnetic valve connected to the air cylinder 9 can be appropriately switched.

The regulator and timer for the primary processing in the control means 10 are for performing grinding / polishing at a normal high processing pressure, and the processing pressure is set to a high processing pressure by the regulator for the primary processing. The timer for the primary processing sets the processing time during which a predetermined lens removal amount can be obtained by setting the high processing pressure. And the control device 10
The processing pressure is set to a low processing pressure (for example, the pressure due to the weight of the upper shaft component of the processing apparatus or a pressure less than the weight) by the secondary processing regulator, thereby reducing the processing time required to reduce the processing heat. Set with the secondary processing timer.

In the processing apparatus configured as described above, when processing the lens 4 using the fixed abrasive tool 1,
The lens holder 5 holding the lens 4 is set on the wrench 6, the lens 4 is brought into contact with the processing surface of the fixed abrasive tool 1, and the lens 4 is fixed to the fixed abrasive tool 1 via the wrench 6 by the air cylinder 9. And press with a predetermined processing pressure. Then, the fixed abrasive tool 1 is rotationally driven at a predetermined number of revolutions by the lower shaft rotating motor 3, and the lens 4 is moved in a circle on the processing surface of the fixed abrasive tool 1 via the swing shaft 8 and the kansashi arm 7. Swing in an arc.

At this time, the lens 4 is pressed against the fixed abrasive tool 1 at a high working pressure via the air cylinder 9 by the primary working regulator and the timer of the control means 10. Is performed at a high processing pressure for a predetermined processing time set in a timer, while maintaining the curvature radius accuracy of. After a predetermined processing time set in the timer for the primary processing has elapsed and before the processing is completed, the solenoid valve (not shown) is switched by a regulator for the secondary processing, so that the processing pressure via the air cylinder 9 is brought into close contact with the processing. The processing is performed for a time set by a timer for secondary processing, with a pressure that can reduce the degree and processing heat, for example, a pressure due to the weight of the upper shaft component of the processing apparatus or a pressure equal to or less than the weight.

As described above, the processing pressure is reduced by the secondary processing regulator for a certain period of time immediately before the end of the processing such as grinding and polishing. By setting the weight of the component to its own weight or a pressure lower than its own weight), the lens is released from being processed at a high processing pressure for a certain period of time before the end of processing, and the surface to be processed is in close contact with the fixed abrasive tool. At the same time the heat of processing is reduced or eliminated. As a result, sludge such as lens material and abrasive particles remaining during the processing between the processing surface of the fixed abrasive tool and the processing surface of the lens becomes solid abrasive particles after the processing is completed. It is possible to prevent sticking or sticking in a seizure phenomenon at the same time or instantly when the tool is stopped.

Next, a specific example of this embodiment will be described with reference to FIG. 2 showing a processing cycle. The material of the glass blank as the workpiece is LaSF016, the effective diameter of the blank is 6.5 mm, and the radius of curvature of the workpiece is 4.
1 mm. The main spindle rotation speed of the fixed abrasive tool in the polishing process is set to 2000 rpm, and the lens holder is driven to rotate in a subordinate manner.

As shown in FIG. 2, the cycle of the polishing process is as follows.
At N, the primary processing time was 120 seconds. Then, after a lapse of 120 seconds from the start of processing, secondary processing is performed,
The working pressure was switched to the secondary working pressure to a low pressure of 2.5 N, and the working time was 20 seconds.

By performing polishing using a fixed abrasive tool as described above, sludge such as lens material and abrasive grains does not adhere or adhere to the surface to be processed of the lens, and has good optical performance. A lens could be made.

FIG. 3 shows an example in which the composition analysis and the processing process of the deposits in the processing such as grinding and polishing using a fixed abrasive tool are processed and the results are examined. FIG. 3 shows the processing pressure (secondary processing pressure) in the polishing process using a fixed abrasive tool and the ratio of the amount of deposits on the surface to be processed of the lens. The rate of occurrence of deposits is remarkably reduced, and the rate of occurrence of deposits in this case was 0% because the secondary processing pressure was 3.
5N or less, and the surface area of the lens is 0.42 at the secondary processing pressure per unit area of the lens.
cm ² , so that it was set to 8.3 × 10 ⁴ Pa or less.

(Second Embodiment) Next, another embodiment of a processing method such as grinding and polishing of an optical element of the present invention will be described. In this embodiment, although the configuration of the control means in the processing apparatus shown in FIG. 1 is different from that of the above-described embodiment, the other configuration is the same as that of the above-described embodiment.
This will be described with reference to FIG.

The control means 10 in the present embodiment controls the lower shaft rotation motor 3 for driving the fixed abrasive tool 1 to rotate.
The number of rotations (rotation speed) of the fixed abrasive tool 1 is configured to be changed in at least two steps. In the primary processing of the grinding / polishing processing, maintenance of the radius of curvature of the fixed abrasive tool and maintenance of the processing time are performed. Set a high rotation speed so that both shortening can be achieved, and set a low rotation speed that can reduce the degree of adhesion and processing heat during polishing in the secondary processing of grinding and polishing. In this way, an inverter for controlling the number of rotations is provided, and a timer for primary processing and a timer for secondary processing for setting the processing times of the primary processing and the secondary processing are provided. It is programmed to switch the rotation speed of the fixed abrasive tool every time.

In the processing apparatus configured as described above, when processing the lens 4 using the fixed abrasive tool 1,
The lens holder 5 holding the lens 4 is set on the wrench 6, the lens 4 is brought into contact with the processing surface of the fixed abrasive tool 1, and the lens 4 is fixed to the fixed abrasive tool 1 via the wrench 6 by the air cylinder 9. And press with a predetermined processing pressure. Then, the fixed abrasive tool 1 is driven and rotated by the lower shaft rotating motor 3 at a predetermined number of rotations, and the lens 4 is moved in a circle on the processing surface of the fixed abrasive tool 1 via the swing shaft 8 and the kansashi arm 7. Swing in an arc.

At this time, the fixed abrasive tool 1 is
0, the lower shaft rotating motor 3 via the inverter
Is controlled to rotate at a high rotational speed as the primary processing, and the lens is processed during the processing time set by the timer for the primary processing. Then, after a lapse of a predetermined machining time at a high rotational speed as the primary machining and before the machining is completed, the rotational speed of the fixed abrasive tool 1 is changed to a low rotational speed as the secondary machining, and The machining is performed for the machining time set by the timer.

As described above, by rotating the fixed abrasive tool 1 at a low rotation speed for a certain time immediately before the end of the processing such as grinding and polishing, the surface to be processed of the lens is rotated at a high speed for a certain time before the end of the processing. Is released, and the contact with the fixed abrasive tool is weakened, and at the same time, the processing heat is reduced. As a result, sludge such as lens material or abrasive particles remaining in the process of processing between the processing surface of the fixed abrasive tool and the processing surface of the optical element such as a lens is formed after the processing is completed. In addition, it is possible to prevent the fixed abrasive tool from sticking or sticking simultaneously or immediately at the instant of the seizure phenomenon.

Next, a specific example of this embodiment will be described with reference to FIG. The material of the glass blank as the workpiece is LaSF016, the effective diameter of the blank is 6.5 mm, and the radius of curvature of the workpiece is 4.
1 mm. The processing pressure in the polishing process is 12N,
The spindle rotation speed of the fixed abrasive tool is, as exemplified in FIG.
The number of revolutions in the primary machining is 2000 rpm, the machining time of the primary machining is 120 seconds, and the number of revolutions in the secondary machining is 200 rpm
m, and the processing time of the secondary processing was 20 seconds. The lens holder is subordinately rotated.

By performing polishing using the fixed abrasive tool as described above, the number of rotations of the fixed abrasive tool is changed in two stages, and the fixed abrasive tool is rotated. By processing at a rotational speed of, sludge such as lens material and abrasive grains did not adhere or adhere to the surface to be processed of the lens, and a lens having good optical performance could be produced.

FIG. 5 shows an example in which processing was performed under various conditions for the composition analysis of a deposit and a processing process in processing such as grinding and polishing using a fixed abrasive tool, and the results were examined. . FIG. 5 shows the tool shaft rotation speed (the rotation speed in the secondary processing) in the polishing process using the fixed abrasive tool and the ratio of the amount of deposits on the surface to be processed of the lens. The rate of occurrence of deposits in the low-speed direction is remarkably reduced, and the rate of occurrence of deposits in this case is 0% because the secondary rotation speed before the end of processing is 200 rpm.
The conditions were set as follows and processing was performed for 20 seconds.

In each of the above-described embodiments, the processing pressure and the number of rotations of the fixed abrasive tool are individually reduced as a measure to reduce or eliminate the processing heat during grinding and polishing and to reduce the degree of adhesion. However, it is also possible to simultaneously reduce both of them appropriately. Further, in each of the above-described embodiments, the processing conditions such as the processing pressure and the number of rotations are changed in two steps. It is also possible to change the above.

(Third Embodiment) Next, still another embodiment of a processing method for grinding and polishing an optical element of the present invention will be described with reference to FIG.

In this embodiment shown in FIG. 6, the same members as those in the above-described embodiment are denoted by the same reference numerals and described.

The fixed abrasive tool 1 is mounted on a tool shaft 2 and is configured to be driven to rotate by a main shaft rotating motor 3. The lens 4 is set on a tip projection of a kanshi 6 held by a kanshi arm 7. Lens holder 5
And is brought into contact with the processing surface of the fixed abrasive tool 1.
The kansashi arm 7 is moved up and down by an air cylinder (not shown) to press the lens 4 against the fixed abrasive tool 1 via the kansashi 6 and further oscillates via an oscillating shaft (not shown). The lens 4 is configured to swing on the fixed abrasive tool 1 in an arc shape.

A nozzle 11 for jetting water or a low-concentration polishing liquid (hereinafter, these are collectively simply referred to as a polishing liquid).
Is disposed in the vicinity of the portion where the fixed abrasive tool 1 and the lens 4 are in contact with each other, and the nozzle 11 is communicated with the polishing liquid supply means 12. In this embodiment, a cooling pump (CH-151A manufactured by Taitec Co., Ltd.) is used as the polishing liquid supply means 12.
Using F), the temperature of the polishing liquid is controlled to be low.

A description will be given of the grinding / polishing processing of the present embodiment using the processing apparatus configured as described above. Lens 4
Is pressed by the fixed abrasive tool 1 via the wrench 6, and the fixed abrasive tool 1 is driven at a high rotational speed so as to maintain the curvature radius accuracy and shorten the processing time.
Further, the lens 4 is ground and polished while swinging the lens 4 in an arc shape on the processing surface of the fixed abrasive tool 1. At the same time, the polishing liquid is jetted from the nozzle 11 toward the fixed abrasive tool 1 and the lens 4. The polishing liquid is controlled to a low temperature by a cooling pump 12 as a polishing liquid supply means, and the liquid temperature of the polishing liquid is preferably 10 ° C. or lower.
As described above, when the lens 4 is ground and polished by the fixed abrasive tool 1, the use of a polishing liquid at a low temperature can reduce or eliminate the processing heat during the grinding and polishing. On the processed surface side of the lens, the processing heat with the fixed abrasive tool is reduced, and the seizure of sludge such as lens material and abrasive grains can be eliminated.

Next, a specific example of this embodiment will be described. The material of the glass blank as the workpiece is LaSF
016, and the effective diameter of the blank material is 6.5 m
m and the radius of curvature of the processing were 4.1 mm. The processing pressure in the polishing step is 12N, and the spindle speed of the fixed abrasive tool is 2
000 rpm, and the processing time is 120 seconds. The liquid temperature of the polishing liquid was controlled to be 10 ° C. ± 2 ° C. In addition,
The lens holder is subordinately rotated. By performing polishing using a fixed abrasive tool using the polishing liquid thus cooled, sludge such as lens material or abrasive grains does not adhere or adhere to the surface to be processed of the lens. A lens with excellent optical performance was produced.

FIG. 7 shows an example in which processing was performed under various conditions with respect to the composition analysis and processing of the deposits in processing such as grinding and polishing using a fixed abrasive tool, and the results were examined. . FIG. 7 shows the rate of occurrence of deposits on the surface to be processed of the lens with respect to a change in the temperature of water or a low-concentration polishing solution. In particular, the rate of occurrence of deposits in this case was 0% because the temperature of the polishing liquid was 1%.
This was the condition when processing was performed at 0 ° C. or less.

[0042]

As described above, according to the present invention,
In processing such as grinding and polishing of optical elements such as lenses using a fixed abrasive tool, processing conditions such as lowering the processing pressure or reducing the rotation speed of the fixed abrasive tool for a certain period of time before the end of processing Or by lowering the temperature of the water or low-concentration polishing liquid to reduce the processing heat generated between the fixed abrasive tool and the optical element, and further weaken the adhesion between the two. This allows
Prevents sludge of optical element material, sludge of resin and abrasive grains of fixed abrasive tool from adhering or sticking to the surface to be processed of optical element, and is required for grinding and polishing of optical elements such as lenses. An optical element with high accuracy can be reliably and efficiently manufactured.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a processing apparatus for performing a processing method such as grinding and polishing of an optical element of the present invention.

FIG. 2 is a view showing a processing cycle as a specific example in one embodiment of a processing method such as grinding and polishing of an optical element of the present invention.

FIG. 3 is a view showing the rate of occurrence of deposits due to a processing pressure difference in secondary processing in one embodiment of a processing method such as grinding and polishing of an optical element of the present invention.

FIG. 4 is a view showing a processing cycle as a specific example in another embodiment of a processing method such as grinding and polishing of an optical element of the present invention.

FIG. 5 is a diagram showing the rate of occurrence of deposits due to a difference in the number of rotations of a tool in secondary processing in another example of a processing method such as grinding and polishing of an optical element of the present invention.

FIG. 6 is a schematic configuration diagram of a processing apparatus for performing still another embodiment of a processing method such as grinding and polishing of an optical element of the present invention.

FIG. 7 is a diagram showing the rate of occurrence of deposits due to a difference in the temperature of a polishing liquid in still another example of a processing method such as grinding and polishing of an optical element of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Fixed abrasive tool 2 Tool axis 3 Spindle rotation motor 4 Lens (optical element) 5 Lens holder 6 Kansashi 7 Kansashi arm 8 Swing axis 9 Air cylinder 10 Control means 11 Nozzle 12 Polishing liquid supply means (cooling pump)

Claims (6)

[Claims] 1. An optical element for grinding and polishing an optical element by bringing a surface to be processed of an optical element into contact with a fixed abrasive tool, rotating the fixed abrasive tool, and pressing the optical element at a predetermined processing pressure. In the grinding / polishing processing method, the processing conditions of the optical element are changed in at least two stages, and a predetermined time before the processing is completed is a processing heat generated between the processing surface of the optical element and the fixed abrasive tool. A method for grinding and polishing an optical element, characterized in that processing is performed by changing the processing conditions so as to reduce the degree of adhesion or the degree of adhesion. 2. An optical element for grinding and polishing an optical element by bringing a surface to be processed of the optical element into contact with a fixed abrasive tool, rotating the fixed abrasive tool, and pressing the optical element at a predetermined processing pressure. Grinding / polishing processing method, wherein the processing pressure is changed to at least two stages and pressurized, and processing is performed at a low processing pressure for a certain period of time before processing is completed. . 3. The grinding / polishing of an optical element according to claim 2, wherein the low working pressure applied for a predetermined time before the completion of the working is set to be equal to or less than the own weight of the upper shaft component of the working apparatus. Processing method. 4. An optical element for grinding and polishing an optical element by bringing a surface to be processed of an optical element into contact with a fixed abrasive tool, rotating the fixed abrasive tool, and pressing the optical element at a predetermined processing pressure. In the grinding / polishing method, the number of rotations for rotating the fixed abrasive tool is changed in at least two stages so that the rotation is performed, and processing is performed at a low speed for a certain period of time before the end of the processing. Grinding of optical elements
Polishing method. 5. An optical element for grinding and polishing an optical element by bringing a surface to be processed of the optical element into contact with a fixed abrasive tool, rotating the fixed abrasive tool, and pressing the optical element at a predetermined processing pressure. Grinding / polishing method, comprising supplying water controlled at a low temperature or a low concentration polishing liquid between an optical element and a fixed abrasive tool to grind / polish the optical element. Grinding / polishing method of the element. 6. The method for grinding and polishing an optical element according to claim 5, wherein the temperature of the water or the low-concentration polishing liquid is set and controlled at 10 ° C. or lower.