JP2002178180A5 - - Google Patents

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Publication number
JP2002178180A5
JP2002178180A5 JP2000374502A JP2000374502A JP2002178180A5 JP 2002178180 A5 JP2002178180 A5 JP 2002178180A5 JP 2000374502 A JP2000374502 A JP 2000374502A JP 2000374502 A JP2000374502 A JP 2000374502A JP 2002178180 A5 JP2002178180 A5 JP 2002178180A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000374502A
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Japanese (ja)
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JP2002178180A (ja
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Publication date
Application filed filed Critical
Priority to JP2000374502A priority Critical patent/JP2002178180A/ja
Priority claimed from JP2000374502A external-priority patent/JP2002178180A/ja
Publication of JP2002178180A publication Critical patent/JP2002178180A/ja
Publication of JP2002178180A5 publication Critical patent/JP2002178180A5/ja
Pending legal-status Critical Current

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JP2000374502A 2000-12-08 2000-12-08 レーザ加工装置及びレーザ加工方法 Pending JP2002178180A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000374502A JP2002178180A (ja) 2000-12-08 2000-12-08 レーザ加工装置及びレーザ加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000374502A JP2002178180A (ja) 2000-12-08 2000-12-08 レーザ加工装置及びレーザ加工方法

Publications (2)

Publication Number Publication Date
JP2002178180A JP2002178180A (ja) 2002-06-25
JP2002178180A5 true JP2002178180A5 (enrdf_load_stackoverflow) 2005-10-27

Family

ID=18843682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000374502A Pending JP2002178180A (ja) 2000-12-08 2000-12-08 レーザ加工装置及びレーザ加工方法

Country Status (1)

Country Link
JP (1) JP2002178180A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4244611B2 (ja) * 2002-10-22 2009-03-25 パナソニック株式会社 セラミックグリーンシートの穴加工方法
JP4091558B2 (ja) * 2003-03-24 2008-05-28 Ｔｄｋ株式会社 セラミック素子の製造方法
JP4854201B2 (ja) * 2005-01-28 2012-01-18 京セラ株式会社 グリーンシートの加工方法
CN100536046C (zh) * 2005-02-25 2009-09-02 京瓷株式会社 复合生片的加工方法
JP4859484B2 (ja) * 2005-02-25 2012-01-25 京セラ株式会社 複合グリーンシートの加工方法
JP5086690B2 (ja) * 2007-05-18 2012-11-28 日本特殊陶業株式会社 セラミック基板の製造方法
JP5258347B2 (ja) * 2008-03-27 2013-08-07 京セラ株式会社 セラミックグリーンシートのレーザー加工方法
CN115156740A (zh) * 2022-07-29 2022-10-11 上海泽丰半导体科技有限公司 一种生瓷片激光打孔方法
CN118543996B (zh) * 2024-05-30 2025-06-24 中南大学 一种基于三明治结构的陶瓷材料高品质激光打孔方法

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