JP2002174644A - Probe block - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate the confirmation for aligning the positions of respective electrodes when establishing contact of a probe block electrode with an electrode of a liquid crystal panel, in a probe block for an inspection probe device for inspecting the electric characteristics of the liquid crystal panel. SOLUTION: The probe block has a transparent block 2 on which the probe block electrode 4 is formed from the top surface to the back surface and which has a projection electrode projecting from both ends of the probe block electrode 4 and coming into contact with the electrode 13 of the liquid crystal panel and the output side terminal of a tape carrier package(TCP) 6, the TCP 6 mounting a driving IC tip and connected to the probe block electrode 4 of the transparent block 2, a flexible cable(FPC) 9 connected to an input side terminal of the TCP 6, a fixing plate 8 for fixing the transparent block 2 and the TCP 6, and a contact block 7 for holding and fixing the fixing plate 8, wherein a lens 3 is formed on one end of the transparent block 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe block of an inspection probe device for inspecting electric characteristics of a liquid crystal panel, and more particularly to a probe block having a plurality of lenses.

[0002]

2. Description of the Related Art At present, S-XGA, which has become mainstream,
Fine pitch with high resolution such as XGA (60-70
μm) color LCD panel probe block is 4 layers 4
A large number of probes with a staggered structure are arranged side by side and assembled. However, even if the positional relationship between the needle-shaped probe and the electrode of the color liquid crystal panel is aligned using the microscope of the inspection device, the front-side probe may be on the back-side probe, and the total number may not be visually confirmed. . Therefore, if the inspection is performed without confirming the alignment between all the electrodes and the probes, the color liquid crystal panel is determined to be defective,
There is a problem that it is difficult to immediately determine whether the defect is determined to be a line defect due to a defect in the color liquid crystal panel or to be regarded as a defect in the color liquid crystal panel due to the probe.

A probe block for making it easy to confirm the alignment between a probe and an electrode is disclosed in Japanese Patent Laid-Open No. 10-13 / 1998.
Japanese Patent Publication No. 2852 discloses a probe substrate.
This probe substrate is made of a transparent plate such as quartz, and provided with conductive protrusions protruding from the wiring pattern at positions corresponding to the electrode pads of the semiconductor chip. Light is transmitted to the substrate, and the electrode pads and the conductive protrusions are aligned while observing the electrode pads and the conductive protrusions of the semiconductor chip.

The present inventor has disclosed in Japanese Patent Application Laid-Open No. 2000-121.
No. 667, a plurality of probe block electrodes respectively corresponding to a plurality of electrodes arranged in one direction in a peripheral portion of a liquid crystal panel are formed on a lower surface of a probe block as a probe block for a color liquid crystal panel. A transparent substrate having a protruding electrode that protrudes from one end of the electrode and abuts on a plurality of electrodes of the liquid crystal panel when the probe head is lowered; a contact block that holds the transparent substrate through a fixing plate that holds down the transparent substrate; There has been proposed a probe block including a liquid crystal panel driving semiconductor device having a plurality of leads connected to respective other ends.

[0005]

However, in the probe substrate disclosed in Japanese Patent Application Laid-Open No. 10-132852,
Even if the above-described transparent substrate is used for a probe block of a liquid crystal panel which is several tens of times larger than a semiconductor chip, there is a problem that the probe substrate becomes large, the device becomes large, and it is difficult to handle. In addition, there are various sizes of liquid crystal panels and positions of electrodes, and accordingly, a large number of transparent substrates must be prepared, which increases equipment costs. Moreover, every time the size of the liquid crystal panel or the position of the electrode is different, the transparent substrate having the probe must be replaced and aligned. Further, even if a wiring having conductive protrusions is formed on one transparent substrate, the length of the wiring becomes long because the transparent substrate itself is large. As a result, there is a problem that a voltage drop or crosstalk occurs, and an accurate inspection cannot be performed.

In the probe block disclosed in Japanese Patent Application Laid-Open No. 2000-121667, the displacement between the electrode of the transparent probe block and the electrode of the color liquid crystal panel is observed with a microscope of an inspection apparatus. 7
In the case of an electrode arrangement of 0 μm), it is necessary to increase the magnification of the microscope in order to grasp the mutual positions. If the magnification is too high, the image is dark and observation is not easy.

An object of the present invention is to form a plurality of lenses on the surface of a transparent block constituting a probe block, thereby enlarging the positions of the protruding electrodes of the transparent block which are in contact with the electrodes of the liquid crystal panel to facilitate mutual mutual contact. An object of the present invention is to provide a probe block capable of observing a positional relationship between electrodes.

Japanese Patent Application Laid-Open No. 9-230325 discloses a liquid crystal display device in which microlenses are formed on the surface of a counter substrate of a liquid crystal display panel so as to correspond to individual pixels. However, the micro lens is provided
The defect is corrected by selectively irradiating the energy beam to the micro lens corresponding to the white defect pixel of the liquid crystal display device, disabling the micro lens and making the defective pixel a black point relative to the normal pixel. To do that.
By easily forming a plurality of lenses on the surface of a probe block used for testing the electrical characteristics of a liquid crystal panel as in the present invention, it is possible to easily confirm mutual alignment between a probe block electrode and a liquid crystal panel electrode. The purpose, the configuration, and the effect are completely different.

[0009]

SUMMARY OF THE INVENTION A probe block according to the present invention has a probe function and has a probe block electrode formed from the front surface to the back surface, and protrudes from both ends of the probe block electrode and an electrode and a tape of a liquid crystal panel. A transparent block having a protruding electrode that comes into contact with a terminal of a carrier package (TCP), and a T having a driving IC chip mounted thereon and connected to a probe block electrode of the transparent block.
CP, a flexible cable (FPC) connected to the input terminal of this TCP, and these transparent blocks and TP
C, and a contact block for holding and fixing the fixing plate, wherein a lens is formed at one end of the transparent block. A plurality of lenses of the transparent block are provided on the surface side facing the protruding electrodes that contact the electrodes of the liquid crystal panel. The output terminal of the TCP on which the driving IC is mounted is connected to one of the protruding electrodes of the probe block electrode of the transparent block, and is fixed to a fixed plate.

Further, the probe block of the present invention has a probe function and has a probe block electrode formed on the back surface and protrudes from both ends of the probe block electrode.
P), a transparent block having a protruding electrode that contacts the terminal, a TCP mounted with a driving IC chip and connected to a probe block electrode of the transparent block, and a flexible cable (FPC) connected to an input terminal of the TCP. )
And a fixing plate for fixing the transparent block and the TCP, and a contact block for holding and fixing the fixing plate. A lens is formed at one end of the transparent block, and an output terminal of the TCP is It is characterized in that it is in contact with one protruding electrode of the probe block electrode and is fixed at one end of the fixing plate. The T
The input side of the CP is not fixed but free end,
A flexible cable is connected to the input terminal.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIGS. 1A and 1B show the first embodiment of the present invention.
It is the top view and AA sectional drawing which show the probe apparatus for demonstrating the probe block in embodiment.
FIGS. 2A, 2B, and 2C are a plan view, a side view, and a front view, respectively, of the transparent block according to the first embodiment. As shown in FIG. 1A, a probe device for a color liquid crystal panel has a rectangular liquid crystal panel 12.
And a plurality of probe blocks 1 arranged side by side along a long side and a short side.

As shown in FIG. 1B, the probe block 1 has a probe function and has a probe block electrode 4 formed from the front surface to the back surface. A transparent block 2 having projecting electrodes 5a and 5b that are in contact with the panel electrodes 13 of the panel 12 and the electrodes of the TCP 6, and a tape carrier package (where an IC chip is mounted and an output terminal is connected to the projecting electrodes 5b of the transparent block 2) TCP) 6, a flexible cable (FPC) 9 connected to an input terminal of the TCP 6, a fixing plate 8 for fixing the transparent block 2 and the TCP 6, and a contact block 7 for holding and fixing the fixing plate 8. It has. The feature of this embodiment is that the output terminal of the TCP 6 is connected to the protruding electrode 5 b of the probe block electrode 4 of the transparent block 2, the TCP 6 is fixed to the fixing plate 8, and the end of the transparent block 2 Multiple lenses 3
Is provided.

Next, a method of manufacturing a transparent block will be described. The width (W) is about 1.2 times the width of each electrode block of the color liquid crystal panel, the length is about 5 times the length of the electrode of the color liquid crystal panel (L), and the thickness (T) is color. A transparent block serving as a base is manufactured with a size about twice as large as the base plate of the liquid crystal panel. A plurality of lenses 3 are formed at one end on the front side of the transparent block by processing and polishing. One end of the width (W) portion of the transparent block is polished into a knife edge shape, and a conductor is deposited on the front and back surfaces of the transparent block to a thickness of about 500 μm, and has the same pitch as the electrodes of the color liquid crystal panel at the same pitch. And a plurality of linear probe block electrodes that are conductive from the front surface to the back surface of the transparent block are formed.

At both ends of the probe block electrode 4,
A protruding electrode 5a for contacting the panel electrode 13 of the liquid crystal panel 12 and a protruding electrode 5b for connecting to an output terminal of the TCP 6 are provided. The lens 3 includes a protruding electrode 5a.
Is provided on the surface of the transparent block 2 opposed to. Since the vicinity of the protruding electrode 5a can be enlarged and viewed by the lens 3, the alignment of the liquid crystal panel 12 with the panel electrode 13 becomes easy. A plurality of lenses are provided, but are preferably provided at both ends as shown in FIG. 1 or FIG. This is because if the probe block electrode and the panel electrode are aligned at both ends, the center portion is automatically aligned.

An FPC 9 that can be connected to an output pad of the printed circuit board 10 is pressed into the input terminal of the TCP 6 by a pressure welding method so that a display signal of the color liquid crystal panel 12 can be input. The transparent block 2 and the TCP 6 are fixed to the fixing plate 8 and attached to the contact block 7 of the probe unit to complete the probe block with the lens. In addition,
In this embodiment, an example is shown in which one end of the transparent block is processed and polished into a knife-edge shape.
The shape may be another shape such as a shape.

Next, the alignment between the protruding electrode 5a of the probe block electrode 4 and the panel electrode 13 of the liquid crystal panel 12 will be described. Contact block 7 in FIG.
Is slightly raised by a probe head holding the XY through an XY adjustment mechanism (not shown). Then, the liquid crystal panel 12 is inserted into a gap between the stage 11 and the transparent block 2.
The inserted liquid crystal panel 12 contacts the stopper and is positioned.

Next, the probe head is lowered to such an extent that the protruding electrode 5a does not contact the panel electrode 13 of the liquid crystal panel 12, and the illumination lamp above the liquid crystal panel 12 is turned on.
Position of the protruding electrode 5a and the panel electrode 13 of the liquid crystal panel 12
While observing through the lens 3 of the transparent block 2,
The protruding electrode 5a is moved by the XY adjustment mechanism so that the protruding electrode 5a and the panel electrode 13 of the liquid crystal panel 12 match. Then, the probe block 1 is fixed by operating the clamp of the XY adjustment mechanism. Such an operation is performed for each probe block to complete the alignment.

The positional deviation between the transparent block 2 and the panel electrode 13 can be enlarged and confirmed by the lens 3 provided on the surface of the transparent block 2, and the alignment can be easily performed. Even if a problem occurs in one of the TCP 6 and the transparent block 2, the structure can be separated as shown in the figure, so that the other member can be used as it is. Here, the transparent block can be made of a transparent material such as glass or quartz. After the positioning of the probe block is completed, the display signal from the printed circuit board 10 is transmitted to the color liquid crystal panel 1 through the FPC 9, the TCP 6, and the transparent block 2.
The display is inspected by inputting to the second panel electrode 13.

As described above, since the probe block of the present invention can be observed with a microscope through the lens of the transparent block of the base, the positional relationship between the probe block electrode and the panel electrode can be easily confirmed. In addition, since the probe block of the present invention can simultaneously fabricate a large number of transparent blocks by a vapor deposition method and an etching method at the same time with an automated facility,
Probe blocks can be manufactured at low cost and with quick delivery.
Furthermore, even if a defect occurs in either the TCP or the transparent block, the transparent block and the TCP are separated and are not fixed integrally, so that one of the parts can be used without wasting by replacing them. There is an advantage that can be.

Next, a second embodiment of the present invention will be described. FIG. 3 is a sectional view of the second embodiment of the present invention. 4 (a), (b) and (c) show the second
It is a top view, a side view, and a front view of a transparent block part of an embodiment. The width (W) is about 1.2 times the width of each electrode block of the color liquid crystal panel, the length is about 10 times the electrode length of the color liquid crystal panel (L), and the thickness (T).
Manufactures a transparent block 21 serving as a base in a size about three times as large as a base plate of a color liquid crystal panel.

The lens 2 is provided on the front side of the transparent block 21.
Processing and polishing to form a plurality of 2s. A conductor is deposited on the back side of the transparent block 21 to a thickness of about 500 μm and etched so as to have the same pitch and the same width as the electrodes of the color liquid crystal panel, and to make the tips of the electrodes at both ends project. A plurality of conductive linear probe block electrodes 23 are formed by etching according to the method. The lens 22 is provided on the surface of the liquid crystal panel 26 opposite to the protruding electrode 24a that contacts the panel electrode 27. In the second embodiment, since the electrodes are formed only on the rear surface side of the transparent block, there is an advantage that it is easier to manufacture than the first embodiment in which the electrodes are formed on both the front and back surfaces.

The output terminal of the TCP 25 is brought into contact with the protruding electrode 24b at one end of the transparent block 21 and fixed at one end of the fixing plate 28. An FPC 29 that can be connected to an output-side pad of the printed circuit board 30 is pressed into the input terminal of the TCP 25 by a pressure welding method so that a display signal of a color liquid crystal panel can be input. The input side of the TCP 25 is a free end. The transparent block 21 and the output-side terminal portion of the TCP 25 are fixed to the fixing plate 28 and attached to the contact block 31 of the probe unit to complete the probe block with the lens. In the second embodiment, since the TCP 25 and the transparent block 21 have a structure that can be easily separated, even if the TCP 25 or the transparent block 21 breaks down, the replacement is easy.

[0023]

As described above in detail, according to the present invention, since the transparent block and the TCP are connected so that they can be separated from each other, even if a failure occurs in one of them, the other is wasted. There is an effect that the transparent block or the TCP can be exchanged and used without any need.

Also, in the present invention, the positional relationship between the electrodes of the probe block and the electrodes of the color liquid crystal panel can be observed by enlarging the contact portion from the surface side of the transparent block by the convex lens portion, so that the alignment is easy. There is an effect that can be done.

[Brief description of the drawings]

FIGS. 1A and 1B are a plan view and an AA sectional view, respectively, showing a probe device for explaining a probe block according to a first embodiment of the present invention.

FIGS. 2A, 2B, and 2C are a plan view, a side view, and a front view, respectively, of a transparent block portion according to the first embodiment.

FIG. 3 is a sectional view showing a second embodiment of the present invention.

FIGS. 4A, 4B, and 4C are a plan view, a side view, and a front view, respectively, of a transparent block portion according to a second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Probe block 2, 21 Transparent block 3, 22 Lens 4, 23 Probe block electrode 5a, 5b, 24a, 24b Projection electrode 6, 25 TCP 7, 31 Contact block 8, 28 Fixing plate 9, 29 FPC 10, 30 Printed circuit board 11 stage 12, 26 liquid crystal panel 13, 27 panel electrode

Claims (8)

[Claims] 1. A probe block electrode having a probe function and formed from the front surface to the rear surface, and a protrusion protruding from both ends of the probe block electrode and contacting an electrode of a liquid crystal panel and a terminal of a tape carrier package (TCP). A transparent block having electrodes, a TCP mounted with a driving IC chip and connected to a probe block electrode of the transparent block, a flexible cable (FPC) connected to an input terminal of the TCP, and a transparent block and a TCP. And a contact block for holding and fixing the fixing plate, wherein a lens is formed at one end of the transparent block. 2. The probe block according to claim 1, wherein a plurality of lenses of the transparent block are provided. 3. The probe block according to claim 1, wherein the lens of the transparent block is provided on a surface side facing a protruding electrode that contacts an electrode of the liquid crystal panel. 4. The TCP on which the driving IC is mounted, the output terminal of which is in contact with one protruding electrode of the probe block electrode of the transparent block and is fixed to a fixing plate. Probe block as described. 5. A probe block electrode having a probe function and formed on a rear surface, and a protruding electrode projecting from both ends of the probe block electrode and contacting an electrode of a liquid crystal panel and a terminal of a tape carrier package (TCP). A transparent block and a TCP mounted with a driving IC chip and connected to a probe block electrode of the transparent block
A flexible cable (FPC) connected to an input terminal of the TCP, a fixing plate for fixing the transparent block and the TCP, and a contact block for holding and fixing the fixing plate. One end of the transparent block A probe block, wherein a lens is formed in the portion, and an output terminal of the TCP contacts one protruding electrode of the probe block electrode and is fixed at one end of the fixing plate. 6. The probe block according to claim 5, wherein a plurality of lenses of said transparent block are provided. 7. The probe block according to claim 5, wherein the lens of the transparent block is provided on a surface side facing a protruding electrode that contacts an electrode of the liquid crystal panel. 8. The probe block according to claim 5, wherein an input side of said TCP is not fixed but is a free end, and said flexible cable is connected to an input side terminal.