JPH09305123A - Method of inspecting display panel substrate and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To decrease a moving distance of a liquid crystal substrate from a substrate set position to an inspection position by inspecting a single TAB system liquid crystal substrate by using a L-shaped probe unit. SOLUTION: When a liquid crystal substrate 49 is set on a chuck top 48 at a position away from a L-shaped probe unit 56 and a start switch is depressed on an operation panel, the liquid crystal substrate 49 is held by attraction onto the chuck top 48, and a Z-axis stage 44 is descended. And then, a X-axis stage 40 and a Y-axis stage 42 move, and the liquid crystal substrate 49 is moved up to an inspection position in an opening 58. When an alignment has been completed by using two CCD cameras 66, the chuck top 48 is ascended up until a probe needle of a probe device 50 is brought into contact with an electrode of the liquid crystal substrate 49, and the liquid crystal substrate 49 displays a test pattern. An operator observes this test pattern for a quality inspection of the substrate 49.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection method and apparatus for visually inspecting a lighting state of a display panel substrate such as a liquid crystal substrate.

[0002]

2. Description of the Related Art FIG. 8 is a side sectional view of a conventional inspection apparatus for inspecting a substrate of a liquid crystal display panel (hereinafter referred to as a liquid crystal substrate), and FIG. 9 is a front view thereof. In FIG. 8, the chuck top 10 and the probe device 12 are both
It is inclined by the same angle with respect to the horizontal plane. In FIG. 9, the backlight 1 is provided in the opening 14 on the right side of the inspection device.
The chuck top 10 with 1 is waiting. The operator places the liquid crystal substrate on the chuck top 10. Guide plates 15 and 16 are provided on the outer periphery of the chuck top 10, and the liquid crystal substrate is positioned by aligning the ends of the liquid crystal substrate with the guide plates 15 and 16. The liquid crystal substrate is a suction groove 1 provided on the outer periphery of the backlight 11.
It is adsorbed and fixed at 8 (negative pressure is being supplied). The chuck top 10 on which the liquid crystal substrate is mounted is conveyed below the probe device 12 by moving the X-axis stage to the left. Next, fine alignment is performed by the alignment camera 20 provided in the probe device 12, and the alignment of the probe needle and the electrode of the liquid crystal substrate is completed.

Then, the Z-axis stage moves up, the chuck top 10 moves up, and the probe needle contacts the electrode of the liquid crystal substrate. The entire surface of the liquid crystal substrate is turned on by a signal from the LCD pattern generator to project a test pattern. The operator observes the test pattern of the liquid crystal substrate with his / her own eyes, and determines a good or defective liquid crystal substrate.
The liquid crystal substrate that has been inspected is conveyed to the opening 14 on the right side, and is removed from the chuck top 10 by the operator, and the next liquid crystal substrate is set.

FIG. 10A is a plan view schematically showing the electrode arrangement of the liquid crystal substrate which is the inspection object of the conventional inspection apparatus of FIG. This liquid crystal substrate has two long sides 22 facing each other,
Data line electrodes 28 are arranged along 24, and gate line electrodes 29 are arranged along one short side 26.
These multiple electrodes 28, 29 are grouped by TAB / IC. And when the inspection is completed,
The TAB / IC 30 is adhered along the three sides 22, 24 and 26, and these TAB / IC 30 and the electrodes 28 and 29 are adhered.
Are electrically connected.

[0005]

SUMMARY OF THE INVENTION The above-described conventional inspection apparatus has a substrate setting portion (a portion exposed in the opening 14 on the right side of the device) for setting the liquid crystal substrate on the chuck top and the liquid crystal substrate is turned on. The lighting inspection section that performs the inspection is lined up on the left and right. Therefore, the operator has to constantly go back and forth between the substrate setting section and the inspection section, and a series of work is a standing work, which causes fatigue, and there is a problem in workability. Further, in this inspection apparatus, since the board setting section and the inspection section are arranged side by side, the width of the probe apparatus is required to be about twice as wide as that of the probe apparatus, and the occupied area of the apparatus becomes large. Furthermore, since there is a distance from the substrate setting unit to the inspection unit, it takes time to convey the substrate from the substrate setting unit to the inspection unit.

The present invention has been made in order to solve the above-mentioned problems, and an object thereof is to improve the workability of an operator, occupy a small area, and shorten the transportation time of a display panel substrate. To provide an inspection method and device.

[0007]

The display panel substrate inspection apparatus of the present invention is for inspecting the lighting state of a rectangular display panel substrate having electrodes only on two adjacent sides of the four sides. In addition, an L-shaped probe unit is provided. This probe unit is attached along the opening of the base plate and has a large number of probe needles. The chuck top that holds the display panel substrate is movable between the substrate setting position and the inspection position, and both the substrate setting position and the inspection position are inside the opening of the base plate. Therefore, the operator does not have to move from place to place when performing a series of operations from the board setting operation to the inspection operation. Also,
There is no need to provide a separate substrate setting section separate from the inspection section.

The inspection target of this inspection apparatus is a display panel substrate for which the operator has to observe the lighting display state to judge the quality. Typically, a flat display such as a liquid crystal display panel or a plasma display panel is used. It is the substrate of the panel.

The L-shaped probe unit has a large number of probe needles that come into contact with the electrodes of the display panel substrate, and preferably has a plurality of probe blocks in which the probe needles are grouped in TAB units. The L-shaped probe unit may be a single L-shaped member or may be a combination of a plurality of members in an L-shape.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION First, a liquid crystal substrate to be inspected by the present invention will be described. FIG. 10B is a plan view schematically showing the liquid crystal substrate to be inspected in the present invention. In the rectangular liquid crystal substrate, the data line electrodes 34 are arranged along one long side 30, and the gate line electrodes 35 are arranged along one short side 32. These multiple electrodes 34, 3
5 are grouped by TAB / IC. Then, when the inspection is completed, T along the two sides 30 and 32
The AB / IC36 is adhered to these TAB / IC36
And the electrodes 34 and 35 are electrically connected.

In this liquid crystal substrate, electrodes are arranged only on two adjacent sides 30, 32 of the four sides, and no electrodes are arranged on the remaining two sides 31, 33. Such an electrode arrangement is called a "single TAB method". Conventionally, many liquid crystal substrates have electrodes arranged on three sides as shown in FIG. 10A, but recently, single TAB type liquid crystal substrates are also increasing. The one-sided TAB type liquid crystal substrate has an advantage that the substrate area can be reduced as compared with a liquid crystal substrate having electrodes arranged on three sides, and also has an advantage that wiring at the time of commercialization is easy.

FIG. 1 is a front view of an embodiment of the inspection apparatus of the present invention, and FIG. 2 is a side sectional view thereof. In FIG. 2, the base 38 of this inspection apparatus is inclined with respect to the horizontal plane, and the X-axis stage 40, Y
Axis stage 42, Z axis stage 44, θ rotation stage 4
6 are mounted in order, and the chuck top 48 is provided thereon. Due to the function of these stages, chuck top 4
8 can move in the XY directions in a plane parallel to the mounting surface. Further, it can rotate θ in a plane parallel to the mounting surface. Further, it can be moved up and down in the Z direction perpendicular to the mounting surface. A liquid crystal substrate 49 can be adsorbed and held on the mounting surface of the chuck top 48. In addition, the inspection device has an inclined probe device 50. Chuck top 48 and probe device 50
Are inclined by the same angle with respect to the horizontal plane.

In FIG. 1, the probe device 50 includes a rectangular frame-shaped base plate 52, and the base plate 52 is fixed to the base 38 via four columns 54 (see FIG. 2). A substantially rectangular opening 58 is formed in the base plate 52. An L-shaped probe unit 56 is attached along the opening 58. The chuck top 48 is visible inside the opening 58. The opening 58 is formed to be sufficiently larger than the outer dimension of a rectangular liquid crystal substrate (which is substantially equal to the outer dimension of the chuck top 48).

Adjacent to the outer peripheral portions of the four sides of the chuck top 48 are suction grooves 60 for sucking and holding the liquid crystal substrate.
Negative pressure is supplied to the suction groove 60. A backlight 62 is arranged in a region inside the suction groove 60.
Guide plates 61 and 63 for positioning the liquid crystal substrate with respect to the chuck top 48 are fixed to the left side and the lower side of the chuck top 48 in the drawing. These guide plates 61 and 63 project above the mounting surface of the chuck top 48, but the amount of projection is smaller than the thickness of the liquid crystal substrate.

A plurality of probe blocks 64 are fixed to the L-shaped probe unit 56. Each probe block 64 is provided with a group of probe needles blocked in TAB units. These probe needles
Electrodes 34 and 3 arranged on two adjacent sides of the liquid crystal substrate
5 (see FIG. 10B) can be simultaneously contacted. The probe needle of each probe block 64 is connected to the LCD pattern generator via a liquid crystal drive circuit by a flexible wiring board. Two CCD cameras 66 for performing alignment are attached to the probe unit 56.

FIGS. 1 and 2 show a state in which a liquid crystal substrate is placed on the chuck top 48. In FIG.
The chuck top 48 is located slightly away from the L-shaped probe unit 56 in the XY directions. Then, as shown in FIG. 2, the chuck top 48 in this state is in a state of protruding and being exposed above the base plate 52 due to the rise of the Z-axis stage 44. The operator can place the liquid crystal substrate 49 on the chuck top 48 in this state.

Next, the operation of this inspection apparatus will be described. In FIG. 1 and FIG. 2, the operator uses the guide plates 61, 63.
The liquid crystal substrate 49 is aligned with, and the liquid crystal substrate 49 is set on the mounting surface of the chuck top 48. When the operator presses the start switch on the operation panel, the liquid crystal substrate 49 is sucked and held by the chuck top 48 due to the negative pressure, and the Z-axis stage 44 descends and the liquid crystal substrate 49 descends to the alignment height as shown in FIG. Then, the X-axis stage 40 and the Y-axis stage 42 move, and the liquid crystal substrate 49 moves to the inspection position as shown in FIG. Then two CCs
While capturing the alignment mark on the liquid crystal substrate 49 with the D camera 66, the X-axis stage 40, the Y-axis stage 42,
Optical fine alignment is completed by moving the chuck top 48 using the θ rotation stage 46. When this alignment is completed, the chuck top 48 is raised by driving the Z-axis stage 44, and the probe needle of the probe device 50 contacts the electrode of the liquid crystal substrate 49. Then, the liquid crystal substrate 49 displays a test pattern in response to a signal from the LCD pattern generator. The operator observes this test pattern and the liquid crystal substrate 4
9. Pass / Fail inspection of 9. When the inspection is completed, the operator pushes the end switch on the operation panel to return the chuck top 48 to the position shown in FIG. Then, the operator can remove the liquid crystal substrate 49 from the chuck top 48, place another liquid crystal substrate on the chuck top 48, and start the next inspection.

As can be seen by comparing FIGS. 1 and 3, the moving distance of the liquid crystal substrate in the X and Y directions from the stage of mounting the liquid crystal substrate on the chuck top (FIG. 1) to the stage of inspection (FIG. 3). Is much smaller than the external dimensions of the liquid crystal substrate. That is, it is sufficient for the liquid crystal substrate to move a short distance within the opening 58. Therefore, the operator can perform a series of operations of the board setting step, the inspection step, and the board removing step at substantially the same work position, and fatigue is reduced. Since the operator does not need to move, it is possible to perform a series of work while sitting on a chair. In this inspection apparatus, since the moving distance of the liquid crystal substrate from the substrate setting position to the inspection position is short, the transportation time is short. Furthermore, since it is not necessary to provide a separate board setting section separately from the inspection section, the area occupied by the entire inspection apparatus is reduced. In addition, the movable distance of the X-axis stage can be made very short as compared with the conventional inspection apparatus of FIG.

FIG. 5 is a front view of a portion of the probe device according to the second embodiment of the present invention. This embodiment is different from the embodiment of FIG. 1 in that it has an L-shaped probe unit 56.
The installation position of a is different. That is, in the embodiment of FIG. 1, the L-shaped probe unit 56 is installed from the left side to the lower side of the probe device, but in the embodiment of FIG. 5, the L-shaped probe unit 56a is installed from the left side of the probe device. It is installed over the top. Further, in the third embodiment of FIG. 6, the L-shaped probe unit 56b is installed from the right side to the upper side of the probe device, and in the fourth embodiment of FIG. 7, the L-shaped probe unit 56c is the probe device. It is installed from the right side to the bottom side. Which of the first to fourth embodiments is used as the arrangement form of the L-shaped probe unit depends on the electrode arrangement of the liquid crystal substrate and the direction in which the liquid crystal substrate is placed on the chuck top.

[0020]

According to the inspection method and apparatus of the present invention, an L-shaped probe unit is used to inspect a display panel substrate having electrodes on only two adjacent sides of the four sides. The movement distance of the display panel substrate from the substrate setting position to the inspection position becomes very small. This eliminates the need for the operator to move and improves workability. Further, the area occupied by the inspection device is reduced, and the movable distance of the X-axis stage can be reduced. Further, the transportation time of the display panel substrate is shortened.

[Brief description of drawings]

FIG. 1 is a front view of an embodiment of an inspection device of the present invention.

FIG. 2 is a side sectional view of the inspection device of FIG.

FIG. 3 is a front view of the inspection device of FIG. 1 in a state where the liquid crystal substrate is in an inspection position.

FIG. 4 is a side sectional view of the inspection device in the state of FIG.

FIG. 5 is a front view of a portion of a probe device according to a second embodiment of the present invention.

FIG. 6 is a front view of a portion of a probe device according to a third embodiment of the present invention.

FIG. 7 is a front view of a portion of a probe device according to a fourth embodiment of the present invention.

FIG. 8 is a side sectional view of a conventional inspection device.

FIG. 9 is a front view of a conventional inspection device.

FIG. 10 is a plan view showing an electrode arrangement of a liquid crystal substrate.

[Explanation of symbols]

 38 Base 40 X-axis stage 42 Y-axis stage 44 Z-axis stage 46 θ rotation stage 48 Chuck top 49 Liquid crystal substrate 50 Probe device 52 Base plate 56 L-shaped probe unit 58 Opening 64 Probe block 66 CCD camera

Claims (4)

[Claims] 1. An inspection apparatus for inspecting a lighting state of a rectangular display panel substrate having electrodes only on two adjacent sides of four sides, the inspection apparatus having the following configuration. (B) A chuck top that can hold the display panel substrate. (B) A stage that enables the chuck top to move in the XY directions in the plane parallel to the mounting surface of the chuck top and to rotate θ, and also to move in the Z direction perpendicular to the mounting surface. . (C) A base plate having an opening through which the chuck top can be exposed. (D) An L-shaped probe unit attached to the base plate along the opening. (E) A large number of probe needles attached to the probe unit and capable of contacting the electrodes of the display panel substrate. 2. The inspection apparatus according to claim 1, wherein a mounting surface of the chuck top can protrude above the base plate. 3. An inspection method for inspecting a lighting state of a rectangular display panel substrate having electrodes on only two adjacent sides among the four sides, the inspection method comprising the following steps. (A) A step of placing the display panel substrate on the chuck top in the opening of the base plate. (B) A step of moving the chuck top in the opening to bring the display panel substrate to the inspection position. (C) A step of performing alignment between the display panel substrate and the probe device. (D) The step of bringing the electrodes of the display panel substrate into contact with the probe needles of the L-shaped probe unit attached along the opening. 4. The inspection method according to claim 3, wherein the display panel substrate is mounted on the mounting surface of the chuck top in a state where the mounting surface of the chuck top is projected above the base plate.