JP2002162595A5 - - Google Patents

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Publication number
JP2002162595A5
JP2002162595A5 JP2000358166A JP2000358166A JP2002162595A5 JP 2002162595 A5 JP2002162595 A5 JP 2002162595A5 JP 2000358166 A JP2000358166 A JP 2000358166A JP 2000358166 A JP2000358166 A JP 2000358166A JP 2002162595 A5 JP2002162595 A5 JP 2002162595A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000358166A
Other languages
Japanese (ja)
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JP2002162595A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000358166A priority Critical patent/JP2002162595A/ja
Priority claimed from JP2000358166A external-priority patent/JP2002162595A/ja
Publication of JP2002162595A publication Critical patent/JP2002162595A/ja
Publication of JP2002162595A5 publication Critical patent/JP2002162595A5/ja
Pending legal-status Critical Current

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JP2000358166A 2000-11-24 2000-11-24 ガルバノミラー Pending JP2002162595A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000358166A JP2002162595A (ja) 2000-11-24 2000-11-24 ガルバノミラー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000358166A JP2002162595A (ja) 2000-11-24 2000-11-24 ガルバノミラー

Publications (2)

Publication Number Publication Date
JP2002162595A JP2002162595A (ja) 2002-06-07
JP2002162595A5 true JP2002162595A5 (enrdf_load_stackoverflow) 2008-01-17

Family

ID=18830117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000358166A Pending JP2002162595A (ja) 2000-11-24 2000-11-24 ガルバノミラー

Country Status (1)

Country Link
JP (1) JP2002162595A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1582906A1 (de) * 2004-04-01 2005-10-05 Siemens Aktiengesellschaft Bestimmung der Auslenkung von Mikrospiegeln in einem Projektionssystem
JP2013191250A (ja) * 2012-03-13 2013-09-26 Toshiba Corp 光記録再生装置
DE112013006119B4 (de) * 2012-12-21 2021-03-18 Mitsubishi Electric Corp. Optische Abtasteinrichtung und Projektor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289413A (ja) * 1987-05-21 1988-11-25 Matsushita Electric Ind Co Ltd 形状測定装置
JPH02154018A (ja) * 1988-11-30 1990-06-13 Toray Ind Inc カバリングヤーン
JPH04289527A (ja) * 1991-03-18 1992-10-14 Sony Corp ミラー位置調整装置
DE19721105C5 (de) * 1997-05-20 2008-07-10 Sick Ag Opto-eletronischer Sensor
JP3563978B2 (ja) * 1997-10-24 2004-09-08 ペンタックス株式会社 光情報記録再生装置における偏向ミラーの回転位置検出装置
JPH11161980A (ja) * 1997-11-28 1999-06-18 Nec Corp 光ヘッド用トラックエラー信号検出装置
JP2000098271A (ja) * 1998-09-18 2000-04-07 Hitachi Constr Mach Co Ltd ガルバノミラー駆動装置

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