JP2002138067A5 - - Google Patents

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Publication number
JP2002138067A5
JP2002138067A5 JP2001241511A JP2001241511A JP2002138067A5 JP 2002138067 A5 JP2002138067 A5 JP 2002138067A5 JP 2001241511 A JP2001241511 A JP 2001241511A JP 2001241511 A JP2001241511 A JP 2001241511A JP 2002138067 A5 JP2002138067 A5 JP 2002138067A5
Authority
JP
Japan
Prior art keywords
tertiary
general formula
monocarboxylic acid
acid
alkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001241511A
Other languages
English (en)
Japanese (ja)
Other versions
JP4166969B2 (ja
JP2002138067A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001241511A priority Critical patent/JP4166969B2/ja
Priority claimed from JP2001241511A external-priority patent/JP4166969B2/ja
Priority to EP01119654A priority patent/EP1182188B1/en
Priority to DE60144170T priority patent/DE60144170D1/de
Priority to US09/934,238 priority patent/US6492542B2/en
Publication of JP2002138067A publication Critical patent/JP2002138067A/ja
Publication of JP2002138067A5 publication Critical patent/JP2002138067A5/ja
Application granted granted Critical
Publication of JP4166969B2 publication Critical patent/JP4166969B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001241511A 2000-08-22 2001-08-09 モノカルボン酸３級−アルキルエステルの製造方法 Expired - Fee Related JP4166969B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001241511A JP4166969B2 (ja) 2000-08-22 2001-08-09 モノカルボン酸３級−アルキルエステルの製造方法
EP01119654A EP1182188B1 (en) 2000-08-22 2001-08-21 Method for producing carboxylic acid tertiary alkyl ester
DE60144170T DE60144170D1 (de) 2000-08-22 2001-08-21 Methode zur Darstellung von Carbonsäuretertiäralkylestern
US09/934,238 US6492542B2 (en) 2000-08-22 2001-08-21 Method for producing carboxylic acid tertiary alkyl ester

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000250642 2000-08-22
JP2000-250642 2000-08-22
JP2001241511A JP4166969B2 (ja) 2000-08-22 2001-08-09 モノカルボン酸３級−アルキルエステルの製造方法

Publications (3)

Publication Number Publication Date
JP2002138067A JP2002138067A (ja) 2002-05-14
JP2002138067A5 true JP2002138067A5 (enExample) 2005-11-04
JP4166969B2 JP4166969B2 (ja) 2008-10-15

Family

ID=26598211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001241511A Expired - Fee Related JP4166969B2 (ja) 2000-08-22 2001-08-09 モノカルボン酸３級−アルキルエステルの製造方法

Country Status (1)

Country Link
JP (1) JP4166969B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4570910B2 (ja) * 2004-06-08 2010-10-27 東京応化工業株式会社 重合体およびポジ型レジスト組成物
TWI291473B (en) 2004-06-08 2007-12-21 Tokyo Ohka Kogyo Co Ltd Polymer, positive resist composition, and method for forming resist pattern
JP4987288B2 (ja) * 2005-12-07 2012-07-25 本州化学工業株式会社 テトラシクロドデセンカルボン酸ｔ−ブチルエステル類の製造方法

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